• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.233-233
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• 2010

Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

• 한국재료학회지
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• 제17권10호
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• pp.526-531
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• 2007

The sintering behavior and electrical property of $Ce_{0.8}Gd_{0.2}O_{1.9}$ ceramics were investigated with the iron oxide concentration ranging from 0 to 5 mol%. Both the sintered density and grain size were found to increase up to 2 mol% $Fe_2O_3$, and then to decrease with further additions. At a higher $Fe_2O_3$ content above 3 mol%, grain size decreased by a pinning effect induced by different shape grains. The electrical conductivity was also increased with increasing $Fe_2O_3$ content up to 2 mol%. Total conductivity of 2 mol% $Fe_2O_3-added$ specimen showed the maximum conductivity of $2{\times}10^{-2}{\Omega}{\cdot}cm^{-1}$ at $500^{\circ}C$. The addition of $Fe_2O_3$ was found to promote the sintering properties and electrical conductivities of $Gd_2O_3-dope\;CeO_2$.

• 한국진공학회지
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• 제6권4호
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• pp.337-342
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• 1997

GaAs내의 철(Fe)의 상태에 관한 연구를 위하여, 액상에피탁시 방법으로 Fe를 도프 한 GaAs를 성장하고 성장된 에피층의 특성을 연구하였다. 도판트 물질인 Fe는 동위원소 $^{57}Fe$를 사용하였고, Fe이온의 GaAs내에서의 전하상태를 Mossbauer분광실험으로 분석하였 다. Mossbauer 스펙트럼으로부터 isomer shift 값을 계산한 결과 Fe 이온은 GaAs내에서 +3 가 이온 상태로 존재함을 알 수 있었다. X-ray 분석 및 photoluminescence(PL) 분광실험으 로부터 결정성이 우수한 에피층이 성장되었음을 알 수 있었으며, Fe가 도프된 GaAs의 저온 PL에서 0.99eV 및 1.15eV에서 피크를 갖는 반치폭이 매우 큰 발광대를 관찰 할 수 있었다. 이들 피크는 GaAs내 Fe 억셉터와 관련된 2개의 복사성 깊은 준위를 반영하는 발광현상으 로 해석된다.

• 한국전기전자재료학회논문지
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• 제23권6호
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• pp.444-448
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• 2010

Based on first-principles calculations, we study the magnetic properties of Co, Ni, Fe, V, and Mn impurities in ZnO. The stabilities of the ferromagnetic state and the magnetic moment of each impurity largely depend on the amount of doped electron or hole. For lightly doped n-type ZnO, it is found that the doping of Ni ions is the most effective for inducing ferromagnetism, while Fe ions show the most stable ferromagnetic couplings for heavily doped n-type samples. The characteristics of the magnetic interactions of Co ions are similar with those of Fe ions, but Co ions require much larger amount of doped electron than Fe ions to show the ferromagnetic couplings. The ferromagnetic coupling between Mn and V ions is unstable in n-type conditions.

• 한국세라믹학회지
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• 제48권2호
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• pp.117-120
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• 2011

In this study, the redox state of iron in sodium silicate glasses was varied by changing the melting conditions, such as the melting temperature and particle size of iron oxide. The oxidation states of the iron ion were determined by wet chemical analysis and UV-Vis spectroscopy methods. Iron commonly exists as an equilibrium mixture of ferrous ions, $Fe^{2+}$, and ferric ions $Fe^{3+}$. In this study, sodium silicate glasses containing nanoparticles of iron oxide (0.5% mol) were prepared at various temperatures. Increase of temperature led to the transformation of ferric ions to ferrous ions, and the intensity of the ferrous peak in 1050 nm increased. Nanoparticle iron oxide caused fewer ferrous ions to be formed and the $\frac{Fe^{2+}}{Fe^{3+}}$ equilibrium ratio compared to that with micro-oxide iron powder was lower.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2005년도 총회 및 춘계학술발표회
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• pp.151-154
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• 2005

Laboratory column experiments for simultaneous removal of Cd and Cr(VI) are conducted using newly developed material, referred to as Fe-loaded zeolite, which has both reduction ability of iron and ion exchange ability of zeolite. Breakthrough curves were obtained from each column experiment, and described with advection-dispersion equation. Apparent parameters including $K_{app}\;and\;D_{app}$ were newly introduced for effectively describing the Cr(VI) breakthrough curve. $K_{app}$ decreased with increasing initial contaminant concentration and with decreasing flow rates. Whereas, $D_{app}$ were not significantly affected by initial contaminant concentration or flow rate.

• Bulletin of the Korean Chemical Society
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• 제6권3호
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• pp.138-140
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• 1985

Hydroxylation of anisole with $H_2O_2$ was investigated by employing Fe(III) ion and N-dodecyl-3,4-dihydroxybenzamide (DDHB) as a catalyst. The study was aimed at obtaining an insoluble catalyst with a long catalytic life, in view of the inactivation of the catechol portion of the catalyst during the reaction. The rate of decomposition of $H_2O_2$ under various conditions indicated that the reaction proceeds through the catalytic participation of $Fe(III){\cdot}DDHB$. Yield of the hydroxylation products under various conditions revealed that $Fe(III){\cdot}DDHB$ is not inactivated during the reaction.

• Bulletin of the Korean Chemical Society
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• 제20권8호
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• pp.939-942
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• 1999

The tie lines delineating ion-exchange equilibria between NiFe2O4-NiCr2O4 spinel solid solution and Fe2O3-Cr2O3 corundum solid solution were determined at 900, 1000, and 1200 ℃ by electron microprobe and energy dispersive X-ray analysis of oxide phases, using the flux growth technique. Activities of the spinel components were calculated from the tie lines, assuming Temkin's ideal mixing in the corundum solid solution. The spinel phase could be expressed by a regular solution with negative deviations from ideality. The Gibbs free energies of mixing for spinel solid solution were discussed in terms of the cation distribution model, based on site preference energies and assuming random mixing on both tetrahedral and octahedral sites.

• Journal of Magnetics
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• 제21권4호
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• pp.496-502
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• 2016

Doped and undoped barium hexaferrite powders ($BaFe_{12}O_{19}$, $Ba_{0.7}Ti_{0.3}Fe_{12}O_{19}$ and $Ba_{0.7}La_{0.3}Fe_{12}O_{19}$) were produced by the sol-gel method. The effects of substituting elements were studied in terms of the magnetic properties of barium hexaferrite powders. The magnetic properties were remarkably changed by the substitution of $La^{3+}$ and $Ti^{4+}$ ions for the $Ba^{2+}$ ion and were accompanied by oxygen deficiency in the $BaFe_{12}O_{19}$. Coercivities ($H_C$) from 4200 to 5100 Oe, remanences ($M_R$) from 22 to 49 emu/g and saturation magnetizations ($M_S$) from 41 to 73 emu/g were obtained for different samples. The obtained results were discussed in detail.

• 약학회지
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• 제16권4호
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• pp.180-185
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• 1972

A new spectrophotometric method was established for the determination of undecylenic acid. The method is based on the solvent extraction into nitrobenzene of the ion pair formed between tris(1,10-phenanthroline)Fe(II) chelate and the anion of undecylenic acid. The maximum absorbance of the extract in the organic phase was at 518nm. A maximum extraction was obtained at pH 9-11, when excess of at least 50-fold(molar) of the phenanthroline-Fe(II) chelate to undecylenic acid was present. The color intensity of the extracted species remained constant at room temperature for the several hours after separation of the organic layer. A linear relationship was obtained over the tested range of 5-20${\gamma}$/ml of undecylenic acid. The effect of several other fungicids on this method was investigated. The method was applied to the determination of undecylenic acid in preparations and the results were in good agreement with those added amounts.