Real-time Fault Detection and Classification of Reactive Ion Etching Using Neural Networks (Neural Networks을 이용한 Reactive Ion Etching 공정의 실시간 오류분류 및 검출에 관한 연구)
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- Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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- v.9 no.2
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- pp.389-392
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- 2005