• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2001년도 춘계종합학술대회
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• pp.349-352
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• 2001

본 논문은 기가 SRAM급 이상의 초고집적을- 위한 0.1$\mu\textrm{m}$의 설계치수를 갖는 MOSFET의 게이트 영역에서 활성 부분의 면저항을 감소시키기 위해 n영역으로 비소를 이온 주입하였다. 어닐링은 급속 열처리 공정 방법과 엑시머 레이져 어닐링 방법을 이용하였으며, 극히 얕은 접합의 형성이 가능하였다. 얕은 접합 형성 깊이는 10~20nm이며, 비소의 주입량은 2$\times$$10^{14}$ $\textrm{cm}^2$이고, 레이져는 엑시머이며 소스는 KrF로 파장은 248mm로 어닐링 하였다. 극히 얕은 P/N$^{+}$ 접합 깊이가 15nm이며, 이때 1k$\Omega$/$\square$의 낮은 면저항 특성을 갖는 결과가 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.54-55
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• 2010

Vacancy defects in graphene can be created by electron or ion irradiation and those induce ripples which can change the electronic properties of graphene. Recently, the formation of defect structures such as vacancy defects and non-hexagonal rings has been reported in the high resolution transmission electron microscope (HR-TEM) of reduced graphene oxide [1]. In those HR-TEM images, it is noticed that the dislocations with pentagon-heptagon (5-7) pairs are formed and diffuses. Interestingly, it is also observed that two 5-7 pairs are separated and diffuse far away from each other. The separation of 5-7 pairs has been known to be due to their self-diffusion. However, from our tight-binding molecular dynamics simulation, it is found that the separation of 5-7 pairs is due to the diffusion of single vacancy defects and coalescence with 5-7 pairs. The diffusion and coalescence of single vacancy defects is too fast to be observed even in HR-TEM. We also implemented Van der Waals interaction in our tight-binding carbon model to describe correctly bi-layer and multi-layer graphene. The compressibility of graphite along c-axis in our tight-binding calculation is found to be in excellent agreement with experiment. We also discuss the difference between single layer and bi-layer graphene about vacancy diffusion and reconstruction.

• 한국표면공학회지
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• 제41권4호
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• pp.134-141
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• 2008

We have developed a numerical model for a remote ICP(inductively coupled plasma) system in 2D and 3D with gas distribution configurations and confirmed it by plasma diagnostics. The ICP source has a Cu tube antenna wound along a quartz tube driven by a variable frequency rf power source($1.9{\sim}3.2$ MHz) for fast tuning without resort to motor driven variable capacitors. We investigated what conditions should be met to make the plasma remotely localized within the quartz tube region without charged particles' diffusing down to a substrate which is 300 mm below the source, using the numerical model. OES(optical emission spectroscopy), Langmuir probe measurements, and thermocouple measurement were used to verify it. To maintain ion current density at the substrate less than 0.1 $mA/cm^2$, two requirements were found to be necessary; higher gas pressure than 100 mTorr and smaller rf power than 1 kW for Ar.

• Journal of Astronomy and Space Sciences
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• 제20권1호
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• pp.1-10
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• 2003

A precise kinematic orbit determination (P-KOD) procedure for Low Earth Orbiter(LEO) using the GPS ion-free triple differenced carrier phases is presented. Because the triple differenced observables provide only relative information, the first epoch's positions of the orbit should be held fixed. Then, both forward and backward filtering was executed to mitigate the effect of biases of the first epoch's position. p-KOD utilizes the precise GPS orbits and ground stations data from International GPS Service (IGS) so that the only unknown parameters to be solved are positions of the satellite at each epoch. Currently, the 3-D accuracy off-KOD applied to CHAMP (CHAllenging Min-isatellite Payload) shows better than 35 cm compared to the published rapid scientific orbit (RSO) solution from GFZ (GeoForschungsZentrum Potsdam). The data screening for cycle slips is a particularly challenging procedure for LEO, which moves very fast in the middle of the ionospheric layer. It was found that data screening using SNR (signal to noise ratio) generates best results based on the residual analysis using RSO. It is expected that much better accuracy are achievable with refined prescreening procedure and optimized geometry of the satellites and ground stations.

• Mass Spectrometry Letters
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• 제5권4호
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• pp.115-119
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• 2014

The Brazil nut (Bertholletia excelsa - Lecythidaceae) is considered a product with high economic value, being a food widely appreciated for its nutritional qualities. Although previous studies have reported the biochemical composition of Brazil nut oil, the knowledge regarding the phospholipid composition exhibits a disagreement: the composition of fatty acids present in the structures of phospholipids is reported as being different from the composition of the free fatty acids present in the oil. In this work, solid phase extraction (SPE) was employed to provide a fast extraction of the phospholipids from Brazil nuts, in order to compare the phospholipid profile of the in nature nuts and their fatty acids precursor present in the oil. The major phospholipids were characterized by mass spectrometry approach. Their fragmentation pattern through direct infusion electrospray ionization ion-trap tandem mass spectrometry ($ESI-IT-MS^2$) proved to be useful to unequivocal characterization of these substances. High resolution (HR) experiments through ESI using a quadruple time of flight mass spectrometry (QTOF) system were performed to reinforce the identifications.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.597-597
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• 2012

A simple solution-based method is developed to deposit crystalline ultrathin (2 nm) nickel hydroxide on vertically grown ZnO nanowires to achieve high specific capacitance and long-term life for flexible and wearable energy storage devices. Ultrathin crystalline $Ni(OH)_2$ enables fast and reversible redox reaction to improve the specific capacitance by utilizing maximum number of active sites for the redox reaction while vertically grown ZnO nanowires on wearable textile fiber effectively transport electrolytes and shorten the ion diffusion path. Under the highly flexible state $Ni(OH)_2$ coated ZnO nanowires electrode shows a high specific capacitance of 2150 F/g (based on pristine $Ni(OH)_2$ in 1 M LiOH aqueous solution with negligible decrease in specific capacitance after 1000 cycles. The synthesized energy-storage electrodes are easy-to-assemble which can provide unprecedented design ingenuity for a variety of wearable and flexible electronic devices.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• Applied Microscopy
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• 제29권4호
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• pp.493-498
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• 1999

기억저장매체로서 광디스크의 개발이 활발히 진행되고 있으며 최근의 레이저 기술의 발전, 제조기술의 발전에 따른 기억밀도의 증가로서 기존의 자기기록매체와 경쟁을 하고 있다. 기록밀도의 증대와 신뢰성의 향상을 위하여 다층박막 구조를 가지는 광디스크의 미세구조는 더욱 복잡하며 소형화되고 있다. 이종의 물질로 구성된 다층박막형 광디스크의 미세구조 관찰 및 분석을 위해서는 투과전자현미경과 같은 미소영역 분석법이 필수적이며 비교적 간단하고 신뢰성 높은 시편준비법의 확립이 선행되어야 한다. 본 연구에서는 투과전자현미경 분석을 위한 광디스크의 평면 및 단면시료 제작법을 제시하고 제조된 시편으로부터 얻어진 광디스크의 미세구조 분석결과를 보고한다.

• 동굴
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• 제61호
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• pp.65-82
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• 2000

The remarkable development of information technology today is significantly increasing the desire for related services as it allows one to process and transmit information fast and accurately as well as in an efficient way. Particularly, the spread of the Internet even changes our life pattern, not to mention allowing us to provide or share information. One of the most typical example is electronic commerce. The e-commerce industry, which is build upon informations super high way, is growing rapidly, backed on the development of communications technology and the combination of various media. Companies are active In embracing and utilizing the cutting-edge information technology, whereas the tourism industry in general is still at a rudimentary stage. Therefore, it is expected that the industry will harness e-commerce in many aspects. Tourism, in its characteristic, has a variety of sectors, and cross-sector cooperation is essential. Therefore, the industry can provide better services by connecting or integrating network systems and taking advantage of e-commerce, while it is of no less importance to have informal ion system for promoting products. This thesis will look into and the basic concept and role of e-commerce as well as the existing tourism information system. It will also study ways to make good use of e-commerce by adopting it into the tourism information system.

• 한국표면공학회지
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• 제48권6호
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• pp.283-291
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• 2015

The purpose of this study was to investigate effects of TiN coating on the fatigue fracture of dental implant system with various cyclic loads. TiN coated abutment screw, the fixture, and abutment of internal hex type were prepared for fatigue test. The fatigue test was carried out according to ISO 14801:2003(E) using tensile and compression tester with repeated load from 30% to 80% of static fracture force. Morphology and fractured surface was observed by field emission scanning electron microscope(FE-SEM) and energy dispersive X-ray spectroscope(EDS). The fracture cycle drastically decreased as repeated load increased. Especially, in the case of TiN-coated abutment screw, fracture cycle increased compared to non-coated abutment screw. The fatigue crack was propagated fast as repeated load increased. The plastic deformation region decreased, whereas, cleavage fracture region increased as repeated load increased.