• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 춘계학술대회논문집
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• pp.840-845
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• 2005

This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure. For the mathematical convenience, the MEMS resonator is first modeled as a multi pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

• 한국소음진동공학회논문집
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• 제15권8호
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• pp.931-938
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• 2005

This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure For the mathematical convenience, the MEMS resonator is first modeled as a multi-pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

• 대한기계학회논문집A
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• 제32권10호
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• pp.823-830
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• 2008

We present a high-accuracy digital-to-analog (DA) actuator using a load spring, specially designed to compensate the output displacement errors caused by fabrication errors. The compensated linear DA actuator is capable to change the slope of input-output modulation line in order to compensate fabrication errors. We design, fabricate, and characterize three different prototypes: one uncompensated design and two compensated designs respectively for a specific value and for a given range of fabrication error. The compensated linear DA actuators show the output displacement errors of $-0.20{\pm}0.23{\mu}m\;and\;-0.13{\pm}0.18{\mu}m$, respectively, reduced by 64.3% and 76.8% of the output displacement error, $0.56{\pm}0.20{\mu}m$, produced by the conventional uncompensated linear DA actuator. We experimentally verify the fabrication error compensation capability of the present compensated linear DA actuators, thus demonstrating high-accuracy actuation performance immune to fabrication errors.

• 한국초전도ㆍ저온공학회논문지
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• 제18권3호
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• pp.21-24
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• 2016

Recently, production technique and property of the High-Temperature Superconductor (HTS) tape have been improved. Thus, the study on applying an HTS magnet to the high magnetic field application is rapidly increased. A Nuclear Magnetic Resonance (NMR) spectrometer requires high magnitude and homogeneous of central magnetic field. However, the HTS magnet has fabrication errors because shape of HTS is tape and HTS magnet is manufactured by winding HTS tape to the bobbin. The fabrication errors are winding error, bobbin diameter error, spacer thickness error and so on. The winding error occurs when HTS tape is departed from the arranged position on the bobbin. The bobbin diameter and spacer thickness error occur since the diameter of bobbin and spacer are inaccurate. These errors lead magnitude and homogeneity of central magnetic field to be different from its ideal design. The purpose of this paper is to investigate the effect of winding error, bobbin diameter error and spacer thickness error on the central field and field homogeneity of HTS magnet using the virtual NMR signals in MATLAB simulation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.603-604
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• 2008

• 대한전자공학회논문지
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• 제23권6호
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• pp.840-845
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• 1986

In this Part II of the paper, we evaluated the fabrication error and dividing characteristics for the opticalfilters proposed in the Part I. Furthermore, we propose an integrated optical filter with a new function that can eliminate the fabdrication error. The fabrication method and filtering characteristics have been tested by experiments, thereby confirming the validity of the design theory.

• 한국정밀공학회지
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• 제26권6호
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• Journal of Astronomy and Space Sciences
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• 제31권4호
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• pp.341-346
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• 2014

A prototype of the GMT FSM has been developed to acquire and to enhance the key technology - mirror fabrication and tip-tilt actuation. The ellipsoidal off-axis mirror has been designed, analyzed, and fabricated from light-weighting to grinding, polishing, and figuring of the mirror surface. The mirror was tested by using an interferometer together with CGHs, which revealed the surface error of 13.7 nm rms in the diameter of 1030 mm. The SCOTS test was employed to independently validate the test results. It measured the surface error to be 17.4 nm rms in the diameter of 1010 mm. Both tests show the optical surface of the FSMP mirror within the required value of 20 nm rms surface error.

• Current Optics and Photonics
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• 제1권5호
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• pp.538-543
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• 2017

Progressive addition lenses (PAL) have very wide application in the modern glasses market. The unique progressive surface can make a lens have progressive refractive power, which can meet the human eye's different needs for distance-vision and near-vision. According to the national glasses fabrication standard, the difference between actual optical power after fabrication and nominal design value should be less than 0.1D over the lens effective area. The optical power distribution of PAL is determined directly by the surface. Consequently, the surface processing accuracy requirement is proposed. Beginning from the surface expressions of progressive addition lenses, the relationship equations between the surface sag and optical power distribution are derived. They are demonstrated through tolerance analysis and test of an example progressive addition lens with addition of 2.09D (5.46D-7.55D). The example addition surface is fabricated under given accuracy by a single-point diamond ultra-precision machine. The optical power of the PAL example is tested with a focal-meter after fabrication. The optical power addition difference between test result and design nominal value is 0.09D, which is less than 0.1D. The derived relationship between the surface error and optical power is verified from the PAL example simulation and test result. It can provide theoretical tolerance analysis proof for the PAL surface fabricating process.

• 한국정밀공학회지
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• 제21권3호
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.