• Journal of Korean Society of Industrial and Systems Engineering
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• v.34 no.3
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• pp.1-7
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• 2011

The stocker system is another name of automated storage and retrieval system (AS/RS) and being popularly used as main material handling tools in Liquid Crystal Display (LCD) and semiconductor fabrication facilities. Recently the use of the stocker system has been extended to transportation from conventional storage and retrieval in LCD fabrication facilities. Toolsets are connected in the ground level of the stocker system and 4~6 stories of the shelves are placed in the upper or lower ground level. As a consequence of the more sophisticated design, move requests imposed on the system greatly increased. For solving this problem, the industry adopted the dual-robot stocker system that two robots are moving along the same guide line in the stocker system. This research develops a closed-form solution to estimate a delivery rate of the dual robot stocker system under given design and operation parameters. Using this stochastic model, industry practitioners could analyze performance levels under given various design parameters, and ultimately the model helps optimizing the design parameters.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.7
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• pp.602-609
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• 2008

This paper presents experimental optimization of process parameters for a newly developed SFF(Solid Freeform Fabrication) system. Two critical process parameters, layering thickness and curing period, which have a large effect on the quality of the product, are optimized through experiments. Specimens are produced using layering thicknesses of 60, 80, 100, 120, 140, and $160\;{\mu}m$ and curing periods of 0, 10, 20, and 30 minutes under the same processing conditions, i.e., build-room temperature, feed-room temperature, roller speed, laser power, scan speed, and scan spacing. The specimens are tested to compare and analyze performance indices such as thickness accuracy, flatness, stress-strain characteristics, and porosity. The experimental result indicates that layering thickness of $80{\sim}100\;{\mu}m$ and curing period of $20{\sim}30$ minutes are recommended for the developed industrial SFF system.

• IE interfaces
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• v.16 no.3
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• pp.344-351
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• 2003

Critical dimension is one of the most important characteristics of up-to-date integrated circuit devices. Hence, critical dimension control in a semiconductor wafer fabrication process is inevitable in order to achieve optimum device yield as well as electrically specified functions. Currently, in complex semiconductor wafer fabrication processes, statistical methodologies such as Shewhart-type control charts become crucial tools for practitioners. Meanwhile, given a critical dimension sampling plan, the analysis of variance technique can be more effective to investigating critical dimension variation, especially for on-chip and on-wafer variation. In this paper, relating to a typical sampling plan, linear statistical models are presented for the analysis of critical dimension variation. A case study is illustrated regarding a semiconductor wafer fabrication process.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.10
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.205-208
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• 2005

Fabrication of large scaled mirror for the telescope application is the most challenging technology in recent year. Sophisticate technologies and know-how in fabrication and measurement are required to overcome the technological obstacles. KRISS(Korea Research Institute for Standards and Science) is now developing a large scaled mirror fabrication facility and KARI(Korea Aerospace Research Institute) is supporting the development. High precision interferometric test is required during the grinding and polishing of mirror to identify the surface profile precisely. The required fabrication accuracy of the mirror surface profile is $\lambda$/50 ms($\sim$10 nm for visible wave length). Thus the measurement accuracy should be far less than 10 m. To get this requirement, it is necessary to provide vibration free environment for the interferometer system and mirror under test. Thus the vibration responses on the mirror supporting table due to external vibration should be minimized by using a special isolation system. And the responses on the top of the tower, which hold the interferometer during test, should be minimized simultaneously. In this paper, we propose the concept design of vibration suppression system for the KRISS mirror fabrication facility.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.1
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• pp.33-40
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• 2012

The scaffold serves as 3D substrate for the cells adhesion and mechanical support for the newly grown tissue by maintaining the 3D structure for the regeneration of tissue and organ. In this paper, we proposed integrated scaffold fabrication system using multi-axis rapid prototyping (RP) technology. It can fabricate various types of scaffolds: arbitrary sculptured shape, primitive shape, and tube shape scaffolds by layered dispensing biocompatible/ biodegradable polymer strands in designated patterns. In order to fabricate the 3D scaffold, we need to generate the plotting path way for the scaffold fabrication system. We design a data processing program - scaffold plotting software, which can convert the 3D STL file, primitive and tube model images into the NC code for the system. Finally, we fabricated the customized 3D scaffolds with high accuracy using the plotting software and the fabrication system.

• Proceedings of the KAIS Fall Conference
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• 2002.11a
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• pp.246-248
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• 2002

This paper presents computer simulations of the stacking and transfer system for the fast freeform fabrication system. The stacking and transfer system is essential for the fast freeform fabrication system and its stable motion is very important fer the consistent stacking of the cut slices. The stacking and transfer system cane be modeled as a pneumatic system. The system consists of air compressor, the control valve, and the cylinder. The governing parameters have been changed and the simulation results are shown to predict the time response of the system. The results shows some parameters should be correctly tuned to obtain stable system response.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.122-129
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• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.851-856
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• 2005

The precision fabrication of aspherical lenses is increasingly required for the latest applications of compact and high resolution video-recording or camera systems. Micro-optical components, including micro-spherical or aspherical lenses and reflecting mirrors, are generally required to be manufactured with high shape accuracy, extremely low surface roughness and no surface damage. To meet the needs of the precision fabrication system, a bed which supports the micro aspherical lens fabrication machines stably and safely is required. In this study, the thickness of the ribs of the bed is optimized using the CAD integrated optimal design system, a virtual DS program.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.26 no.3
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• pp.67-73
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• 2003

Manufacturing technologies of compound semiconductor are similar to the process of memory device, but management technology of manufacturing process for compound semiconductor is not enough developed. Semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication t hat has monitoring of process, reduction of lead-time, obedience of due-dates and so on. This study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.