• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.659-660
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• 2013

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.94-94
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• 2011

본 논문은 "차세대 반도체용 진공공정의 실시간 측정/진단/제어 기술개발"과제의 제 3 세부과제 "스마트형 진공 배기 진단 제어 시스템 개발"의 주요 연구 실적을 소개한다. 본 세부과제는 (1)진공펌프 및 배기 시스템의 다중 상태변수 측정 장치 개발, (2)공정별 펌프 상태 및 공정 조건 data base 구축 및 진단 알고리즘 개발(e-Diagnostics Level 2 FDC 수준), (3)공정별 펌프 상태 변수 측정을 통한 자기 진단 기술 개발(e-Diagnostics Level 2 FDC 수준), 그리고 (4)측정/통신 PMS (Pump Monitoring System) 개발(통신속도 56k bps 이상, e-Diagnostics Level 0~1)을 최종 목표로 추진되어 왔다. 첫 번째 주요실적은 진공배기시스템의 다중 상태변수 측정 및 평가 장치를 성공적으로 개발하였다. 본 장치는 현장에서 진공펌프의 배기속도를 3% 이내로 정밀하게 측정할 수 있는 소닉 노즐을 이용한 배기속도 측정 장치 및 기술을 성공적으로 개발 완료하였다. 그리고 측정 가능한 상태변수는 20종에 달하며 이들을 이용하여 진공펌프의 성능인자 15종과 특성치 9종을 종합적으로 평가할 수 있는 능력을 갖추었다. 두 번째 주요실적은 공정별 진공배기시스템의 자기진단 및 예지보수 기수 개발이다. 연구에서 개발된 적응형 인자모델을 이용한 상태진단 기술은 이미 학회 논문으로 소개되었으며 본 기법은 기존의 시계열 상태변수를 이용한 기존의 상태진단 기법보다 메모리 소요량을 100배로 줄였으며 그리고 연산양은 10% 이하로 줄인 획기적인 기법이라 할 수 있다. 세 번째 주요실적은 상태변수 측정, 통신, 제어 및 공정적응 기능 통합형(smart) PMS(pumper monitoring system) 개발이다. 본 장치는 CAN통신 기법을 새로이 채택하였으며 한 대의 PC로 64대의 단위 진공펌프들의 운전 상태변수를 실시간으로 수집할 수 있도록 하였다. 그리고 운전 중인 개별 진공펌프들의 운전 상태진단은 적응형 인자모델을 이용한 상태진단 기술을 응적용함으로써 매우 정확한 상태진단을 매 batch마다 수행할 수 있는 기능을 제공한다.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.4
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• pp.67-71
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• 2012

The purpose of this study is to investigate cutting characteristics and wear behavior in FCD500 ductile cast iron turning with different cutting tools, tungsten-carbide and CBN. Mechanical property, cutting characteristics and the application to the real industrial area is the final purpose. FDC500 ductile cast iron is now widely used in the various commercial vehicle parts for increased machine abilities which accrue more tensile strength with lower hardness. Several studies have been fulfilled for the material and heat-treatment area, but few with the cutting characteristics and wear behavior in the turning area.

• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.1
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• pp.1-5
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• 2011

To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

• Proceedings of the Botanical Society of Korea Conference
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• 1985.08b
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• pp.23-33
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• 1985

Plant cell culture is emerging to express bioactive foreign proteins because it has several advantages in that it is safe, economical, genetically stable and eukaryotic expression system comparing with other expression systems. However several limitations such as slow growth rate, low expression level and lack of well established down stream process need to be answered. As a preliminary approach to produce the immunologically interested molecules through the plant cell culture, we tested if granulocyte-macrophage colony stimulating factors (GM-CSFs) from both murine (mGM-CSF) and human (hGM-CSF) are produced as a biologically active form through plant cell culture. The murine and human GM-CSF genes were cloned into the plant expression vector, pBI121, and Ti-plasmid mediated transformation of tobacco leaves was conducted using Agrobacterium tumefaciens harboring both recombinant GM-CSF (rGM-CSF) genes. Cell suspension culture was established from the leaf-derived calli of transgenic tobacco plant. Northern blot analysis indicated the expression of the introduced mGM-CSF gene in both transgenic plant and cell suspension cultures. In addition, the biological activities of both murine and human GM-CSF from plant cell culture were confirmed by measuring the proliferation of the GM-CSF dependent FDC-PI and TF-1 cells, respectively.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.121-125
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• 2020

With miniaturization of semiconductor, the manufacturing process become more complex, and undetected small changes in the state of the equipment have unexpectedly changed the process results. Fault detection classification (FDC) system that conducts more active data analysis is feasible to achieve more precise manufacturing process control with advanced machine learning method. However, applying machine learning, especially in supervised learning criteria, requires an arduous data labeling process for the construction of machine learning data. In this paper, we propose a semi-supervised learning to minimize the data labeling work for the data preprocessing. We employed equipment status variable identification (SVID) data and optical emission spectroscopy data (OES) in silicon etch with SF6/O2/Ar gas mixture, and the result shows as high as 95.2% of labeling accuracy with the suggested semi-supervised learning algorithm.

• Journal of The Korean Society of Agricultural Engineers
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• v.58 no.4
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• pp.67-74
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• 2016

Load Duration Curve (LDC) can be used as a method for load management of point and non-point pollution source because the LDC easily assesses the water quality corresponding to hydrological changes in a watershed. Recently, the application of LDC to total pollution load management is a growing interest in Korea. In this regard, A desktop-based LDC assessment system was developed in this study to provide convenience to users in water quality evaluation. The developed system can simply produce the LDC by using streamflow and water quality data involved in its database. Also, The system can quantitatively inform the success or failure of the achievement for a target water quality at monthly scale. Furthermore, seasonal water quality and point/non-point pollution load in a watershed can be estimated by this system. We expect that the developed system will contribute to establish local and national policies regarding water management and total pollution load management because of its advantages such as the pollution tracking investigation and the analysis of water quality and pollution loading amount in an ungauged watershed.

• Journal of Environmental Impact Assessment
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• v.28 no.1
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• pp.35-48
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• 2019

Long term flow measurement and water quality analysis data need to determine the target and allowable load for each basin in Total Water Pollution Load Management System (TWPLMS). The Load Duration Curve (LDC) is analyzed the relationship between flow data and water quality, and evaluates the pollutant load characterization by flow conditions. LDC of Kyeongancheon is created by the Flow Duration Curve (FDC) that was analyzed 8-day interval measured flow data from 2006 to 2015 and numeric water quality target in Kyeongancheon. As a result of this study, it is necessary to manage the point source pollutant because the numeric water quality target is not satisfied in the low flows. Also the numeric water quality target has been exceed for four months from March to June of the year and continuous and systematic watershed management is required to satisfy the numeric water quality target.

• Proceedings of the Botanical Society of Korea Conference
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• 1999.07a
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• pp.45-49
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• 1999

Plant cell culture is emerging to express bioactive foreign proteins because it has several advantages in that it is safe, economical, genetically stable and eukaryotic expression system comparing with other expression systems. However several limitations such as slow growth rate, low expression level and lack of well established down stream process need to be answered. As a preliminary approach to produce the immunologically interested molecules through the plant cell culture, we tested if granulocyte-macrophage colony stimulating factors (GM-CSFs) from both murine (mGM-CSF) and human (hGM-CSF) are produced as a biologically active form through plant cell culture. The murine and human GM-CSF genes were cloned into the plant expression vector, pBI121, and Ti-plasmid mediated transformation of tobacco leaves was conducted using Agrobacterium tumefaciens harboring both recombinant GM-CSF (rGM-CSF) genes. Cell suspension culture was established from the leaf-derived calli of transgenic tobacco plant. Northern blot analysis indicated the expression of the introduced mGM-CSF gene in both transgenic plant and cell suspension cultures. In addition, the biological activities of both murine and human GM-CSF from plant cell culture were confirmed by measuring the proliferation of the GM-CSF dependent FDC-PI and TF-1 cells, respectively.