• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• Journal of Surface Science and Engineering
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• v.29 no.5
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• pp.424-429
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• 1996

Thin films of Ti-Ni alloy were formed by sputtering under various Ar gas pressures and r. f. powers to investigate the optimum sputtering conditions and to demonstrate their shape memory effect. The composition and structure of the films were examined by electron micro-probe analysis and scanning electron microscope. These films were annealed in order to crystallize them. The mechanical property of the annealed films was evaluated by a conventional bending test. The transformation tmeperatures were determined by differential scanning calorimetry. The shape memory behaviour was examined quantiatatively by changing in sample temperature under various constant loads. It was found that the Ar gas pressure had a critical effect on the mechanical property of the thin film,s although the r.f. power also affected it. The films formed at a high Ar gas pressure were too brittle to be bent successfully. However, the films formed at a low Ar gas pressur could be bent and their shape memory behavior was found to be comparable with that of bulk Ti-Ni alloys.

• Journal of the Korean Chemical Society
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• v.39 no.5
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• pp.414-420
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• 1995

$\alpha$-Bromo-$\omega$-fluoroalkanes are synthesized in 19∼55% yields from the reactions of dibromoalkanes with AgF and TBABr in acetonitrile at $82^{\circ}C$ for 20 minutes. The reaction is monitored with gas-chromatography. 1^H$ NMR and $19^F$ NMR-Spectrometer are used for identification of $\alpha$-Bromo-$\omega$-fluoroalkanes, difluoroalkane, fluoroalken and bromoalkene.

• 한국연소학회:학술대회논문집
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• 2002.11a
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• pp.223-229
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• 2002

Spark plug ionization signal could be useful in an internal combustion engine as a feedback signal for combustion diagnostics such as misfire detection, knocking detection and lambda control, but the signal has high level of cyclic fluctuation in an internal combustion engine due to residual gas, pressure, temperature, mixture composition in the spark gap. Because of this reason it is very difficult to apply ion signal to commercial engine control. In this Study, a correlation between A/F and spark plug ionization signal was studied in a constant volume chamber. Constant volume chamber with gas phase fuel(Propane) has homogeneous fuel composition , no mixture flow, same pressure and temperature on each test. The results show that mean chemi-ion signal has the highest correlation with A/F and intial pressure change has on effect on the thermal-ion signal and not on chemi-ion signal.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2553-2555
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• 1998

A single crystal Mn-Zn ferrite was directly etched by focused $Ar^+$ laser beam in $CCl_2F_2$ gas atmosphere. AES has been performed for locally investigating the surface composition of an etched layer. MnCl, ZnCl being created after the substrate and $CCl_2F_2$ chemically reacting was remained in the vicinity of laser irradiation area because of their low vapor pressure. Various patterns using computer were formed on the substrate. The etched grooves and patterned shapes were observed by SEM measurement.

• Journal of Korean Society on Water Environment
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• v.22 no.6
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• pp.1119-1122
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• 2006

Aeration by using diffusers usually requires approximately 50~90% of the total electricity needed to operate WWTP (WasteWater Treatment Plant)s. Accurate evaluation of the oxygen transfer efficiency for an aeration system, and recommendation of a better alternative may help saving WWTP operational costs. Appropriate techniques and methods to achieve this purpose have not been introduced in Korea. In this study, in-process analysis was performed for a coarse bubble aeration system by the off-gas method to evaluate its applicability in Korea. To accomplish this analysis, an off-gas test, unsteady-state clean water test and steady-state off-gas column test was conducted and comparisons to other aeration systems were made. The ${\alpha}$ and the F estimated from the results of the unsteady-state clean water test and the steady-state off-gas column test were 0.61 and 0.90 respectively in a coarse bubble aeration system. The comparison of P.E tube diffusers laid out single spiral roll and ceramic dome diffusers laid out full floor coverage showed that the oxygen transfer efficiency of the coarse bubble aeration system was less than or similar to other aeration systems. But, airflow rates per unit area were 4~5 times greater than other aeration systems. In regards to the oxygen transfer efficiency for airflow rates per unit area, a retrofit to higher efficiency diffusers was urgently needed. This study showed proved that off-gas methods can apply to evaluate diffuser performances to estimate operating factors and to compare other aeration systems in Korea.

• Korean Journal of Optics and Photonics
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• v.6 no.3
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• pp.214-221
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• 1995

When the broad pressure region (0.5-3.5 atm) of laser media is pumped by 70 ns [FWHM] electronbeam accelerator (800 kV, 21 kA), the correlation between free-runnuing XeF$(C\rightarrowA$ excimer laser output and Xe concentration are studied. The resonator consisted of dichroic output coupler, and the laser output is optimized with laser media $(Xe/F_2/Ar)$ as functions of total pressure and gas mixing ratio. Under the condition of F2 0.46% fixed, the laser intrinsic efficiencies of 0.38%, 1.03%, and 0.29% are obtained at 1. 2, and 3 atm, respectively. So then the peaks of laser intrinsic efficiency occured to the higher Xe concentration with decreasing total gas pressure. By analyzing the kinetics for the $XeF^*(C)$ formation efficiency and XeF$(C\rightarrowA$ laser extraction efficiency the dependence of Xe concentration on their correlation is explained. As the results we propose efficient operation of an atmosphericpressure XeF$(C\rightarrowA$ laser. laser.

• Proceedings of the Korean Nuclear Society Conference
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• 1996.11a
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• pp.301-306
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• 1996

To predict the average liquid level under the condition of the countercurrent stratified two-phase flow in a pipe, an analytical model has been suggested. This is made by introducing the interfacial level gradient into the liquid-phase and the gas-phase momentum equations. The analytical method for the gas-phase pressure drop calculation with f$_i$ $\neq$ f$_G$ has also been described using the liquid level prediction model developed in the present study.

• Analytical Science and Technology
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• v.23 no.5
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• pp.465-476
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• 2010

In this study, a number of volatile organic compounds (VOCs) including benzene, toluene, p-xylene, styrene, and methyl ethyl ketone were analyzed from samples collected in ambient air and under the field conditions. These samples were analyzed independently by two different set-ups for VOC analyses, i.e., between [1] gas chromatography/flame ionization detector with tube sampling - (F-T system) and [2] gas chromatography/mass spectrometer with bag sampling (M-B system). The analytical results derived by both systems showed fairly similar patterns in relative sense but with moderately large differences in absolute sense. The results of M-B system were high relative to F-T system with the F-T/M-B ratio below 1. If the relative biases of the two measurement techniques are derived in terms of percent difference (PD) in concentration values, the results were generally above 35% on average. A student t-test was applied to investigate the statistical significance of those differences between the systems. The results of both analytical systems were different at 95% confidence level for toluene, p-xylene, styrene, and methyl ethyl ketone (P < 0.043). However, F-T and M-B systems showed strong correlations for toluene and p-xylene. The observed bias is explained in large part by such factors as the differences in standard phases used for each system and the chemical loss inside the bag sampler.

• Proceedings of the Materials Research Society of Korea Conference
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• 2005.05a
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• pp.229-229
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• 2005