• 한국표면공학회지
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• 제42권1호
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• pp.1-7
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• 2009

Resistive heating sources are widely used to prepare thin films by vapor deposition because they are cheap, and easy to install and handle in vacuum system. Graphite is one of materials used to make the resistive heating source, but until now only limited applications have been possible as it reacts easily with evaporating materials at high temperature. In this study, evaporation characteristics of aluminum have been investigated by using graphite boat thermally treated with BN powder. The employed graphite boat has been prepared by spray-coating BN power onto the cavity surface of the boat and thermal treatment with aluminum in vacuum at the temperature of more than $1400^{\circ}C$. The voltage-current characteristics as well as resistivity changes of the graphite boat have been investigated during aluminum evaporation according to the applied voltage and time. The evaporation aspect has been picturized during flash evaporation for 40 seconds based on the characterization results. The evaporation rate of the graphite boat has been compared with that of BN boat. The graphite boat showed some different characteristics compared with BN boat, in that the evaporation occurred at the last stage of flash evaporation. The film appearance according to the applied voltage has been compared, and also the reflectance of the resulting film has been investigated according to the film thickness. It has been found that the graphite boat thermally treated with BN powder can be used for aluminum evaporation without problem.

• Transactions on Electrical and Electronic Materials
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• 제9권3호
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• pp.105-109
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• 2008

Electrical characteristics of organic light-emitting diodes were investigated by varying a hole-size in evaporation boat in the device structure of ITO/tris(8-hydroxyquinoline) aluminum$(Alq_3)$/Al. The device was manufactured using a thermal evaporation under a base pressure of $5{\times}10^{-6}$ Torr. The $Alq_3$ emitting organics were evaporated to be a thickness of 100 nm at a deposition rate of $1.5{\AA}/s$. A cylindrical-shaped evaporation boat was made out of stainless steel with a small size of hole on top of the boat. Several evaporation boats were made having a different hole size on top; 0.8 mm, 1.0 mm, 1.5 mm, and 3.0 mm. We found that when the hole size on top of the evaporation boat is 1.0 mm, the average roughness is rather smoother compared to the other ones. Also, luminance and external quantum efficiency are superior to the others. Compared to the ones from the devices made with the hole-size of 0.8 mm boat. The luminance and external quantum efficiency of the device made with the hole-size of 1.0 mm boat were improved by a factor of seventy and thirty three, respectively. Also operating voltage is reduced to 2 V.

• E2M - 전기 전자와 첨단 소재
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• 제8권4호
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• pp.400-405
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• 1995

ZnO films have been grown easily with the conventional thermal evaporation method on SiO$\_$2/ coated Si wafers. Anhydrous zinc acetate has been used as evaporation source. Zinc-acetate was directly heated in the laboratory-made brass boat. Zinc-acetate was sublimed at the boat temperature of about 220.deg. C. The substrates were heated to 600.deg. C with home made tantalium heater. Oxygen has been flowed into the deposition chamber to change the partial pressure of oxygen. X-ray diffraction patterns showed all the films to be amorphous. The films deposited at high oxygen pressure exhibit higher resistivity than films at low pressure. Energy dispersive spectroscopy(EDS) and rutherford backscattering spectrometry(RBS) were conducted on the films to reveal the composition of the ZnO films.

• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.569-574
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• 2008

In the device structure of ITO/tris(8-hydroxyquinoline) aluminum ($Alq_3$)/Al device, we investigated the efficiency improvement of organic light-emitting diodes (OLEDs) depending on the hole-size of crucible boat. The device was manufactured using a thermal evaporation under the base pressure of $5{\times}10^{-6}\;Torr$. The $Alq_3$ organics were evaporated to be 100 nm thick at a deposition rate of $1.5\AA/s$, and in order to investigate the optimal surface roughness of $Alq_3$, the $Alq_3$ was thermally evaporated to be 0.8 mm, 1.0 mm, and 1.5 mm as a hole-size of the boat, respectively. We found that luminance and external quantum efficiency are superior when the hole-size of the boat is 1.0 mm. The external quantum efficiency of the device made with the hole-size of 1.0 mm boat were improved by a factor of ten compared to the devices made with the hole-size of non boat.

• 한국세라믹학회지
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• 제33권5호
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• pp.524-530
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• 1996

TiB2-BN-AlN composite was fabricated with the addition of 0~12 wt% WC by HP-sintering. Their sinterability. microstructure mechanical and electrical properties were studied as a function of the WC content. The addition of WC up to 12 wt% increased the flexural strength and decreased electrical resistivity as compared with those of the TiB2-BN-AlN composites. The electrical resistivity of TiB2-BN-AlN composite with 4.3 wt% WC was 640$\mu$$\Omega$-cm. It was found that the TiB2-BN-AlN composites with WC addition more than 4wt% was suitable for the application to the Al evaporation boat.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.29-30
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• 2007

In a device structure of ITO/tris(8-hydroxyquinoline) aluminum $(Alq_3)$/Al device, We investigated an the electrical characteristics of Organic Light-Emitting Diodes (OLEDs) depending on the hole-size of boat. The device was manufactured using a thermal evaporation under a base pressure of $5{\times}10^{-6}$ [Torr]. The $Alq_3$ organics were evaporated to be 100 [nm] thick at a deposition rate of $1.5[{\AA}/s]$, and in order to investigate the optimal surface roughness of $Alq_3$, the $Alq_3$ was thermally evaporated to be 0.8 [mm], 1.0 [mm], 1.5 [mm], and 3.0 [mm] as a hole-size of the boat respectively. We found that when the hole-size of the boat is 1.0 [mm], luminance and external quantum efficiency are superior.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.34-35
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• 2009

We have studied the electrical and optical of organic light-emitting diodes depending on hole size of crucible boat using BCP materials. The thickness of TPD, $Alq_3$ and BCP was manufactured 40 nm, 60 nm and 5 nm under a base pressure of $5\times10^{-6}$ Torr using at thermal evaporation, respectively. In order to investigate the optimal surface roughness of BCP, the BCP was thermally evaporated to be 0.8 nun, 1.0 mm, 1.2 mm and 1.5 mm as a hole size of crucible boat, respectively. As the experimental results, we found that the luminous efficiency and the external quantum efficiency of the device is superior to others when hole size of crucible boat using BCP is 1.2 mm. Also, compared to the ones from the devices having the hole size of crucible boat is 1.0 mm and 1.5mm layer, the external quantum efficiency were improved by 2.5 and 2.4 times.

• 한국표면공학회지
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• 제24권1호
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• pp.25-30
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• 1991

The evaporation characteristics of Ag, Al, Au, Cr. Cu, In, Mg, Mn, Pb, Pd, Si, SiO, Sn, Ti and Zn with the various resistive heating sources have been studied. The employed sources are refractory metal (Mo, Ta and W) boats, W-wire, ceramic (usually Al2O3)-coated and -barriered refractory metal boats, and special boats such as baffled boats and intermetallic boats (nitride compound and graphite). We investigated the melting mode, evaporation rate at a specific power, and lifetime of the sources. A special boat holder is also discussed which is needed to cool the sources at a large heat capacity.

• 대한기계학회논문집B
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• 제27권12호
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• pp.1734-1743
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• 2003

Aerosol generator using an electrically heated tube furnace is a stable apparatus to supply nanometer sized aerosols by using the evaporation and condensation processes. Using this method, we can generate highly concentrated polydisperse aerosols with relatively narrow size distribution. In this work, characteristics of particle size distribution, generated from a tube furnace, were experimentally investigated. We evaluated effects of several operation parameters on particle generation: temperature in the tube furnace, air flow rates through the tube, size of boat containing solid sodium chloride(NaCl). As the temperature increased, the geometric mean diameter increased and the total number concentration also increased. Dilution with air affected the size distribution of the particles due to coagulation. A smaller sized boat, which has small surface area to contact with air, brings smaller particles of narrow size distribution in comparison of that of a larger boat. Finally, we changed the electrical mobility diameter of aggregate sodium chloride particles by varying relative humidity of dilution air, and obtained non-aggregate sodium chloride particles, which are easy to generate exact monodisperse particles.

• 한국전기전자재료학회논문지
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• 제22권1호
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• pp.74-80
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• 2009

In the structure of ITO/N,N'-diphenyl-N,N' bis (3-methylphenyl)-1,1'-biphenyl-4,4'-diamine(TPD)/tris (8-hydroxyquinoline)aluminum($Alq_3$)/Al device, we studied the efficiency improvement of organic light-emitting diodes due to variation of deposition rate of hole transport layer (TPD) materials using hole-size of crucible boat. The thickness of TPD and $Alq_3$ was manufactured 40 nm, 60 nm, respectively under a base pressure of $5{\times}10^{-6}$ Torr using a thermal evaporation. The $Alq_3$ used for an electron-transport and emissive layer were evaporated to be at a deposition rate of $2.5\;{\AA}/s$. When the deposition rate of TPD increased from 1.5 to $3.0\;{\AA}/s$, we studied the efficiency improvement of TPD using the hole-size of crucible is 1.0 mm. When the deposition rate of TPD is $2.5\;{\AA}/s$, we found that the average roughness is rather smoother, the luminous efficiency the external quantum efficiency is superior to the others. Compared to the two from the devices made with the deposition rate of TPD is $2.0\;{\AA}/s$ and $3.0\;{\AA}/s$, the external quantum efficiency was improved by four-times and two-times, respectively.