• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.201-204
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• 2002

A large area inductively coupled plasma which is applicable to LCD processing is built with a modified single loop RF antenna. Combination of parallel and series paths of RF current through the antenna induces local enhancement of plasma density, which in turn provides uniform plasma density near the substrate. The plasma density distribution is measured and compared with that of the conventional single loop antenna. Aisotropic etching of photoresist is performed, and it is found that etch uniformity is improved by 3％ from 15% of the conventional etcher over 350$\times$300mm glass substrates. Photoresist etching rate and uniformity can be further improved by applying a periodic weak axial magnetic fieid.

• 한국정보통신학회논문지
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• 제13권7호
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• pp.1393-1398
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• 2009

본 연구는 LCD용 비정질 실리콘박막트랜지스터의 제조공정중 가장 중요한 식각 공정에서 각 박막의 특성에 맞는 습식 및 건식식각공정을 개발하여 소자의 특성을 안정시키고자 한다. 본 연구의 수소화 된 비정질 실리콘 박막 트랜지스터는 Inverted Staggered 형태로 게이트 전극이 하부에 있다. 실험 방법은 게이트전극, 절연층, 전도층, 에치스토퍼 및 포토레지스터층을 연속 증착한다. 스토퍼층을 게이트 전극의 패턴으로 남기고, 그 위에 n+a-Si:H 층 및 NPR(Negative Photo Resister)을 형성시킨다. 상부 게이트 전극과 반대의 패턴으로 NPR층을 패터닝하여 그것을 마스크로 상부 n+a-Si:H 층을 식각하고, 남아있는 NPR층을 제거 한다. 그 위 에 Cr층을 증착한 후 패터닝 하여 소오스-드레인 전극을 위한 Cr층을 형성시켜 박막 트랜지스터를 제조한다. 여기서 각 박막의 패터닝은 식각 공정으로 각단위 박막의 특성에 맞는 건식 및 습식식각 공정이 필요하다. 제조한 박막 트랜지스터에서 가장 흔히 발생되는 문제는 주로 식각 공정시 over 및 under etching 이며, 정확한 식각을 위하여 각 박막에 맞는 식각공정을 개발하여 소자의 최적 특성을 제공하고자한다. 이와 같이 공정에 보다 엄격한 기준의 건식 및 습식식각 공정 그리고 세척 등의 처리공정을 정밀하게 실시하여 소자의 특성을 확실히 개선 할 수 있었다.

• 마이크로전자및패키징학회지
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• 제25권2호
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• pp.35-39
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• 2018

광결합 효율(Fiber coupling efficiency)을 개선하기 위해서는 Laser diode에서 넓은 각도로 방출된 빛을 광섬유의 중심(Core) 부분으로 모아주는 집광렌즈(Collimating lens)가 필수적이다. 현재 사용되는 집광렌즈는 형틀(Mold)을 이용한 글래스 몰드(Glass mold) 공법이 널리 사용되고 있다. 이 방식은 생산단가가 저렴하지만, 정교한 성형이 어렵고 구면수차와 같은 품질문제가 있다. 본 연구는 기존의 글래스 몰드 공법을 반도체 공정으로 대체함으로써 표면 가공의 정밀도를 높이고, 렌즈의 재질 또한 반도체 공정에 적합한 실리콘으로 변경하였다. 반도체공정은 PR을 이용한 포토리소그래피(Photolithography) 공정과 플라즈마를 이용한 건식 식각(Dry etching) 공정으로 구성된다. 광결합 효율은 실리콘 렌즈의 광학적 특성을 평가하기 위해 초정밀 정렬 시스템을 사용하여 측정되었다. 그 결과, 렌즈 직경 $220{\mu}m$ 일 때의 최대 광결합 효율은 50%로 측정되었고, 렌즈 직경 $210-240{\mu}m$ 범위에서는 최고 광결합 효율 대비 5% 이하의 광결합 특성저하를 보여줌을 확인하였다.

• Restorative Dentistry and Endodontics
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• 제23권1호
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• pp.183-196
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• 1998

The purpose of this study was to determine the effect of bleaching technique on the shear bond strength of esthetic restorative materials to bovine enamel. The bleaching agent was used 35% $H_2O_2$(Hi-Lite, Shofu, U.S.A.). Experimental groups were divided into two divisions as group A and B. Experimental A groups for the effect of number of bleaching were as follows ; Group Al : no bleaching Group A2 : bleaching 1 time ( for 5 minutes ) Group A3 : bleaching 3 times ( each for 5 minutes ) Group A4 : bleaching 6 times ( each for 5 minutes ) Group A5 : bleaching 9 times ( each for 5 minutes ) Experimental B groups for the effect of storage period in artificial saliva were as follows ; Group B1 : not stored in artificial saliva after bleaching Group B2 : stored in artificial saliva for 1 day after bleaching Group B3 : stored in artificial saliva for 1 week after bleaching Group B4 : stored in artificial saliva for 2 weeks after bleaching Group B5 : stored in artificial saliva for 4 weeks after bleaching Composite resin and glass ionomer cement were bonded to all specimens, and the shear bond strength between enamel and r~storative material were measured in Instron Universal Testing Machine(Instron, 4467, U.S.A,), Additionally, the bleached enamel specimens were examed after etching with 37.4% $H_3PO_4$ for 1 min under SEM(S-2300, Hitachi Co., Japan) to observe the effect of bleaching procedure on enamel surface morphology. The result were as follows ; 1. In SEM findings, bleached bovine enamel was found to be superficially rough. 2. In bleached bovine enamel, the effect of acid etching was reduced with the increase of number of bleaching. 3. The mean shear bond strength of composite resin and glass ionomer cement to bleached enamel surface tended to be lower than those to non-bleached enamel surface. 4. With the increase of number of bleaching, the shear bond strength of composite resin and glass ionomer cement to bleached enamel were progressively decreased. 5. Increasing the, storage period in artificial saliva after bleaching, the shear bond strength of composite resin and glass ionomer cement to bleached enamel were progressively increased. 6. The mean shear bond strength of glass ionomer cement to bleached bovine enamel tended to be clearly lower than that of composite resin.

• 대한치과보철학회지
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• 제37권5호
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• pp.658-671
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• 1999

The major influencing factors on the strength of all-ceramic crowns are types of dental ceramics, fabrication techniques, methods of abutment preparation and cementation modes of all-ceramic restorations. Zinc phosphate cement and glass-ionomer cement were used as an early lot-ing media for all-ceramic crowns. Recently many studies have reported that resin cements have more advantages in increasing the fracture strength of restorations comparing with zincphosphate cement and glass-ionomer cement. The purpose of this study is to investigate the effect of etching, silane treatment, sandblasting and dentin bonding agents on fracture strengths of dental ceramics. 40 flat dentin specimens and 40 ceramic discs of 1.5mm thickness and 8mm diameter were fabricated, and divided into 4 groups according to surface treatments. Surface treatments before cementation were as follows Group I : (ceramic) : HF etching - silane treatment - application of bonding resin (dentin) : application of dentin bonding agent Group II : (ceramic) : sandblasting - application of bonding resin (dentin) : application of dentin bonding agent Group III : (ceramic) : application of bonding resin (dentin) : application of dentin bonding agent Group IV : (ceramic) : HF etching - silane treatment - application of bonding resin (dentin) : no dentin bonding procedure Dentin specimens and ceramic discs were cemented with dual cure resin cement, and went through thermocycling. Compressive stress es were loaded on the centers of ceramic discs with Instron test-ing machine, and fracture strengths resistance for catastrophic fracture were measured The results were as follows. 1. The group I showed the highest fracture resistance. The next was group II And group III, IV followed. 2. There was a significant difference in the mean value of fracture strengths between group I and group III (p<0.05), but no significant differences between group I and group II, and group II and group III (p>0.05). 3. There was a significant difference in the mean value of fracture strengths between group I and group IV (p<0.05).

• 청정기술
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• 제18권3호
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• pp.280-286
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• 2012

초임계 이산화탄소를 이용하여 희생 $SiO_2$층에 대한 건식 식각 실험을 진행하였다. HF/pyridine (HF/py) 식각액과 알콜 첨가제를 사용하여 이중 챔버 시스템 방식으로 boron phosphor silica glass (BPSG), tetraethyl orthosilicate (TEOS), thermal $SiO_2$와 Si-nitride (SiN)의 박막 층에 대한 식각 성능을 조사하였다. 메탄올의 첨가에 의하여 실리카 희생막에 대한 HF/py의 식각률이 높아지는 것을 확인할 수 있었다. BPSG를 제외하고는 메탄올이 가장 높은 식각률을 보여줬지만, BPSG의 SiN에 대한 식각 선택비는 이소프로판올이 가장 높았다. HF/py/MeOH 계의 건식 식각반응에서 반응 온도에 따라서 박막별 식각률이 증가하였다. 특히 반응 온도 증가에 따라 BPSG의 식각 속도의 증가폭이 매우 높게 나타났다. HF/py에 알콜 공용매를 첨가하여도 식각 부산물 감소에는 크게 효과가 없었다. HF/$H_2O$의 식각률이 HF/py/alcohol 보다 높게 나타났지만 HF/$H_2O$에 알콜 공용매를 첨가하였을 때는 오히려 식각률이 감소되었다. 캔틸레버 빔 구조를 초임계 이산화탄소 건식 식각으로 제조하여 높은 종횡비의 패턴구조물을 손상 없이 성공적으로 식각할 수 있었다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.349-354
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• 2001

In this study, we investigated the effect of the impacting ang1e of particles, the scanning times and the stand-off distance on the surface roughness and the weight-loss rate of samples with no mask, and the wall profile and overetching of samples with different mask pattern in powder blasting of soda-lime glass. The varying parameters were the different impact angles between 50$^{\circ}$ and 90$^{\circ}$, scanning times of nozz1e up to 40 and the stand-off distances 70mm and 100mm. The widths of mask pattern were 0.2mm, 0.5mm and 1mm. The powder was alumina sharp particles, WA#600. The mass flow rate of powder during the erosion test was fixed constant at 175g/min and the blasting pressure of powder at 0.2MPa

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제29회 추계학술대회논문집
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• pp.225-228
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• 2007

마이크로 고체 추진제 추력기는 현재의 MEMS 기술로 가장 실현 가능성이 높은 마이크로 추력기이다. 마이크로 고체 추진제 추력기의 기본 요소로는 마이크로 노즐, 마이크로 점화기, 연소 챔버 그리고 고체 추진제이다. 마이크로 노즐과 연소 챔버는 감광유리의 이방성 식각을 통해 제작이 되었다. 마이크로 점화기는 마이크로 유리 박막 백금 히터를 사용하였다. 요소들의 제작 공정을 확립 후, 요소들을 통합하여 추력기를 개발하였다. 추력기의 연소 실험을 수행하여 성공적으로 연소가 일어남을 확인하였다.

• Biotechnology and Bioprocess Engineering:BBE
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• 제8권4호
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• pp.240-245
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• 2003

The use of microfabricated microfluidic devices offers significant advantages over current technologies including fast analysis time and small reagent requirements. In the context of proteomic research, the possibility of using affinity-based separations for prefractionation of samples using microfluidic devices has significant potential. We demonstrate the use of microscale devices to achieve affinity separations of proteins using a device fabricated from borosilicate glass wafers. Photolithography and wet etching are used to pattern individual glass wafers and the wafers are fusion bonded at 650$^{\circ}C$ to obtain enclosed channels. A polymer has been successfully polymerized in situ and used either as a frit for packing beads or, when derivatized with Cibacron Blue 3GA, as a separation matrix. Both of these technologies are based on in situ UV photopolymerization of glycidyl methacrylate (GMA) and trimethylolpropane trimethacrylate (TRIM) in channels.

• 치위생과학회지
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• 제18권1호
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• pp.42-49
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• 2018

The computer-aided design/computer-aided manufacturing (CAD/CAM) system was introduced to shorten the production time of all-ceramic restorations and the number of patient visits. Among these types of ceramic for dental CAD/CAM, they have been processed into inlay, onlay, and crown shapes using leucite-reinforced glass-ceramics to improve strength. The purpose of this study was to observe the mechanical properties and microstructure of leucite-reinforced glass-ceramics for dental CAD/CAM. Two types of leucite-reinforced glass-ceramic blocks (IPS Empress CAD, Rosetta BM) were prepared with diameter of 13 mm and thickness of 1 mm. Biaxial flexural testing was conducted using a piston-on-three-ball method at a crosshead speed of 0.5 mm/min. Weibull statistics were used for the analysis of biaxial flexural strength. Fracture toughness was obtained using an indentation fracture method. Specimens were observed by field emission scanning electron microscopy to examine the microstructure of the leucite crystalline phase after acid etching with 0.5% hydrofluoric acid aqueous solution for 1 minute. The results of strength testing showed that IPS Empress CAD had a mean value of $158.1{\pm}8.6MPa$ and Rosetta BM of $172.3{\pm}8.3MPa$. The fracture toughness results showed that IPS Empress CAD had a mean value of $1.28{\pm}0.19MPa{\cdot}m^{1/2}$ and Rosetta BM of $1.38{\pm}0.12MPa{\cdot}m^{1/2}$. The Rosetta BM sample exhibited higher strength and fracture toughness. Moreover, the crystalline phase size and ratio were increased in the Rosetta BM sample. The above results are expected to elucidate the basic mechanical properties and crystal structure characteristics of IPS Empress CAD and Rosetta BM. Additionally, they will help develop leucite-reinforced glass-ceramic materials for CAD/CAM.