Multi-layer-metallization technology by using new pillar formation method and SOG etchback planarization (새로운 Pillar 제조 기법과 SOG etchback 평탄화 기법을 이용한 다층 배선기술)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1995.11a
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- pp.45-46
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- 1995