• Title/Summary/Keyword: Errors within ${\pm}5%$

Search Result 75, Processing Time 0.031 seconds

Self-compensation of the phase change upon reflection in two-wavelength white light interferometry for step height measurement (두 파장 백색광 간섭계를 이용한 금속물질의 단차 측정)

  • 김승우
    • Korean Journal of Optics and Photonics
    • /
    • v.11 no.5
    • /
    • pp.317-322
    • /
    • 2000
  • We present a compensation method of the phase change upon reflection in the scannll1g whIte light interferometry. which pracl1cally allows precIse 3-D profIle mappmg for compo~Ite target surfaces comprising of multipledissinular matenals. The compensation method estimates the vanatlon 01 pbase change with the spectral distribution of the light source through first-order approximation, and then diIectly compensates the measurement errors by perIormmg two-wavelength white light intetferomctric measurements. Experimental results prove that the proposed self-compensatIOn mcthod is capable of reducing the measmement error in step height gauging within $\pm2nm$..

  • PDF

Highly Productive Process Technologies of Cantilever-type Microprobe Arrays for Wafer Level Chip Testing

  • Lim, Jae-Hwan;Ryu, Jee-Youl;Choi, Woo-Chang
    • Transactions on Electrical and Electronic Materials
    • /
    • v.14 no.2
    • /
    • pp.63-66
    • /
    • 2013
  • This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

Remote Measurements of the Geological Structures, Using Photogrammetric Method (입체사진을 이용한 원거리 면구조 측정)

  • Hwang Sang-Gi
    • The Journal of Engineering Geology
    • /
    • v.15 no.2 s.42
    • /
    • pp.201-212
    • /
    • 2005
  • A photogrammetric camera system and a software have been built for capturing planned stereo images. To evaluate the system,25 planar data from a constructed rock slope were measured using both geological compass and photo system. Comparison of the data groups from both system showed matching relationship that falls within the error range of $5.25\pm4.53$ in strike and $3.18\pm3.17$ in dip angles, when the 2 standard deviation error distributions were considered. To evaluate the errors of the Photo matching and non planarity of the surface, orientations of the same plane were repeatedly measured 20times. These measurements showed error ranges of $8.2\pm3.4$in strike and $6.6\pm3.4$ in dip angle, considering the same error distributions. Measured strikes and dips were compared with the corresponding compass measurements in 5 constructed. slopes to test the system. Stereonet plots showed that the photo system measured data coincided well with the compass measurements. With these evaluations, the photo system can measure the planar structure in inaccessible locations with reliable accuracy at the same time reducing the data gathering period therefore resulting to an efficient geological survey.

Evaluation of repeated measurement stability of dentition type of maxillary anterior tooth: an in vitro study (상악 전치의 치열 형태에 따른 스캔 반복 측정 안정성 평가: in vitro 연구)

  • Park, Dong-In;Son, Ho-Jung;Kim, Woong-Chul;Kim, Ji-Hwan
    • Journal of Technologic Dentistry
    • /
    • v.41 no.3
    • /
    • pp.211-217
    • /
    • 2019
  • Purpose: The purpose of this study is to evaluate the repeated measurement stability of scans related to dentition type. Methods: A normal model and the crowding and diastema models are also duplicated using duplicating silicon. After that, a plaster model is made using a plaster-type plaster on the duplicate mold, and each model is scanned 5 times by using an extraoral scanner. The gingival part and molar part were deleted from the 3D STL file data obtained through scanning. Using the 3D stl file obtained in this way, data is nested between model groups. Thereafter, RMS values obtained were compared and evaluated. The normality test of the data was performed for the statistical application of repeated measurements with dentition type, and the normality was satisfied. Therefore, the one-way ANOVA test, which is a parametric statistical method, was applied, and post-tests were processed by the Scheffe method. Results: The average size of each RMS in the Normal, Diastema, and Crowding groups was Normal> Crowding> Diastema. However, the standard deviation was in the order of Crowding> Normal> Diastema. The average value of each data is as follows. Diastema model was the smallest ($5.51{\pm}0.55{\mu}m$), followed by the crowding model ($12.30{\pm}2.50{\mu}m$). The normal model showed the maximum error ($13.23{\pm}1.06{\mu}m$). Conclusion: There was a statistically significant difference in the repeatability of the scanning measurements according to the dentition type. Therefore, you should be more careful when scanning the normal intense or crowded dentition than scanning the interdental lining. However, this error value was within the range of applicable errors for all clinical cases.

Accuracy in target localization in stereotactic radiosurgery using diagnostic machines (정위적 방사선수술시 진단장비를 이용한 종양위치결정의 정확도 평가)

  • 최동락
    • Progress in Medical Physics
    • /
    • v.7 no.1
    • /
    • pp.3-7
    • /
    • 1996
  • The accuracy in target localization of CT, MR, and digital angiography were investigated for stereotactic radiosurgery. The images using CT and MR were obtained out of geometrical phantom which was designed to produce exact coordinates of several points within a 0.lmm error range. The slice interval was 3mm and FOV was 35cm for CT and 28cm for MR. These images were transferred to treatment planning computer using TCP/IP in forms of GE format. Measured 3-D coordinates of these images from planning computer were compared to known values by geometrical phantom. Anterior-posterior and lateral films were taken by digital angiography for measurement of spatial accuracy. Target localization errors were 1.2${\pm}$0.5mm with CT images, 1.7${\pm}$0.4mm with MR-coronal images, and 2.1${\pm}$0.7mm with MR-sagittal images. But, in case of MR-axial images, the target localization error was 4.7${\pm}$0.9mm. Finally, the target localization error of digital angiography was 0.9${\pm}$0.4mm. The accuracy of diagnostic machines such as CT, MR, and angiography depended on their resolutions and distortions. The target localization error mainly depended on the resolution due to slice interval with CT and the image distortion as well as the resolution with MR However, in case of digital angiography, the target localization error was closely related to the distortion of fiducial markers. The results of our study should be considered when PTV (Planning Target Volume) was determined.

  • PDF

A Study on Large Scale Digital Mapping Using High Resolution Satellite Stereo Images (고해상도 위성영상을 이용한 대축척 수치지도 제작에 관한 연구)

  • Sung Chun Kyoung;Yun Hong Sic;Cho Jae Myoung;Cho Jung Ho
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
    • /
    • v.22 no.3
    • /
    • pp.277-284
    • /
    • 2004
  • The subject of this study is to apply experimentally In resolution stereo imagery of IKONOS to producing 1:50,000 scale maps for Munsan area in Paju, being near the Military Demarcation Line, is inaccessible for aerial photography. Ground control points were acquired from GPS surveying to perform geometric corrections on images. Digital maps were produced from IKONOS stereo imagery on the digital photographic workstation. From field investigation, RMS errors of the plane and vertical positions are estimated respectively at $\pm$1.706m and $\pm$1.231m, respectively. These plane and vertical accuracies are within the tolerance limits of those provided in the NGIS Digital Topographic Map Production Rules. Therefore this suggested method is recommended for producing the large scale digital maps of 'No flight' zone near the M.D.L.

Mid-Term Performance of Clinical LINAC in Volumetric Modulated Arc Therapy

  • Rahman, Mohammad Mahfujur;Kim, Chan Hyeong;Kim, Seonghoon
    • Journal of Radiation Protection and Research
    • /
    • v.44 no.1
    • /
    • pp.43-52
    • /
    • 2019
  • Background: The mid-term performance of clinical linear accelerator (LINAC) during volumetric modulated arc therapy (VMAT) treatment period is not performed in clinical practice and usually replaced with one-time plan quality assurance (QA). In this research we aim to monitor daily reproducibility of VMAT delivery from tracking individual leaf movement error and dosimetric error to evaluate the mid-term quality of the machine used. Materials and Methods: First, multileaf collimator (MLC) information was imported into MATLAB program to determine which of the MLC leaves in the leaf bank had the maximum RMS position error (maxRMS). We estimated where the maximum positional errors (maxPE) of the chosen leaf occur along its path length and tracked its daily variations over the entire treatment period. Secondly, picture information of dosimetric error from portal dosimetry was imported into MATLAB where representative high gamma index region (HGR) was determined as HGR with length of > 1 cm and their centers were daily tracked. Results and Discussion: The maxPEs in the brain and tongue cases were distributed broader than in other cases, but all data were found located within ${\pm}0.5mm$. From first day to last day all of five cases show the similar visual pattern of HGRs and Centers of the longest HGRs remained within ${\pm}1mm$ of that in first day. These findings prove excellent mid-term performance of the LINAC used in VMAT treatments over a full course of treatment. Conclusion: Tracking the daily location changes of leaf movement and dosimetric error can be a good indicator of predicting the daily quality like stability and reproducibility of beam delivering in VMAT treatment.

Broadband 90° Schiffman Phase Shifter Using Slot-Coupled Lines (슬롯-결합 선로를 이용한 광대역 90° 쉬프만 위상천이기)

  • Rhee, Seung-Yeop
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.23 no.10
    • /
    • pp.1145-1150
    • /
    • 2012
  • In this paper, an improved Schiffman phase shifter is proposed using slot-coupled lines. It consists of the typical coupled lines and a simple rectangular slot which is placed in the ground plane underneath the coupled lines. Phase responses of the slot-coupled Schiffman phase shifter are analyzed in consideration of the phase velocity of two independent transmission modes and the characteristic impedance of slot-coupled line. The $905^{\circ}$ Schiffman phase shifters with high impedance ratio is realized at 2.4 GHz, which cannot be implemented with the conventional coupled lines. The measured results show that the bandwidth is around 74.2 % within the phase errors ${\pm}5^{\circ}$. The measured return loss is found to be better than 15.0 dB and insertion loss is less than 1.5 dB over the operating frequency band.

Broadband 90° Schiffman Phase Shifter with Vertically Installed Coupled Lines (수직 장착된 결합선로를 이용한 광대역 90° 쉬프만 위상천이기)

  • Rhee, Seung-Yeop
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.25 no.7
    • /
    • pp.721-727
    • /
    • 2014
  • In this paper, an broadband Schiffman phase shifter is proposed using vertically installed coupled lines. It consists of the typical coupled lines and a extra coupled lines which is installed vertically on the original coupled lines plane. Phase responses of Schiffman phase shifter with vetically installed coupled lines are analyzed in consideration of the phase velocity of two independent transmission modes and the characteristic impedances. The $90^{\circ}$ Schiffman phase shifters with high impedance ratio is realized at 2.4 GHz, which cannot be implemented with the conventional coupled lines. The measured results show that the bandwidth is 1.5~3.2 GHz(70.8 %) within the phase errors ${\pm}5^{\circ}$. The measured return loss is found to be better than 12.4 dB and insertion loss is less than 1.2 dB over the operating frequency band.

Comparison of Film Measurements, Convolution$^{}$erposition Model and Monte Carlo Simulations for Small fields in Heterogeneous Phantoms (비균질 팬텀에서 소조사면에 대한 필름측정, 회선/중첩 모델과 몬테 카를로 모사의 비교 연구)

  • 김상노;제이슨손;서태석
    • Journal of Biomedical Engineering Research
    • /
    • v.25 no.2
    • /
    • pp.89-95
    • /
    • 2004
  • Intensity-modulated radiation therapy (IMRT) often uses small beam segments. The heterogeneity effect is well known for relatively large field sizes used in the conventional radiation treatments. However, this effect is not known in small fields such as the beamlets used in IMRT. There are many factors that can cause errors in the small field i.e. electronic disequilibrium and multiple electron scattering. This study prepared geometrically regular heterogeneous phantoms, and compared the measurements with the calculations using the Convolution/Superposition algorithm and Monte Carlo method for small beams. This study used the BEAM00/EGS4 code to simulate the head of a Varian 2300C/D. The commissioning of a 6MV photon beam were performed from two points of view, the beam profiles and depth doses. The calculated voxel size was 1${\times}$1${\times}$2$\textrm{cm}^2$ with field sizes of 1${\times}$1$\textrm{cm}^2$, 2${\times}$2$\textrm{cm}^2$, and 5${\times}$5$\textrm{cm}^2$. The XiOTM TPS (Treatment Planning System) was used for the calculation using the Convolution/Superposition algorithm. The 6MV photon beam was irradiated to homogeneous (water equivalent) and heterogeneous phantoms (water equivalent + air cavity, water equivalent + bone equivalent). The beam profiles were well matched within :t1 mm and the depth doses were within ${\pm}$2%. In conclusion, the dose calculations of the Convolution/Superposition and Monte Carlo simulations showed good agreement with the film measurements in the small field.