• 제목/요약/키워드: Enhanced layer

검색결과 1,444건 처리시간 0.029초

Investigation of TaNx diffusion barrier properties using Plasma-Enhanced ALD for copper interconnection

  • 한동석;문대용;권태석;김웅선;황창묵;박종완
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.178-178
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    • 2010
  • With the scaling down of ULSI(Ultra Large Scale Integration) circuit of CMOS(Complementary Metal Oxide Semiconductor)based electronic devices, the electronic devices become more faster and smaller size that are promising field of semiconductor market. However, very narrow line width has some disadvantages. For example, because of narrow line width, deposition of conformal and thin barrier is difficult. Besides, proportion of barrier width is large, thus resistance is high. Conventional PVD(Physical Vapor Deposition) thin films are not able to gain a good quality and conformal layer. Hence, in order to get over these side effects, deposition of thin layer used of ALD(Atomic Layer Deposition) is important factor. Furthermore, it is essential that copper atomic diffusion into dielectric layer such as silicon oxide and hafnium oxide. If copper line is not surrounded by diffusion barrier, it cause the leakage current and devices degradation. There are some possible methods for improving the these secondary effects. In this study, TaNx, is used of Tertiarybutylimido tris (ethylamethlamino) tantalum (TBITEMAT), was deposited on the 24nm sized trench silicon oxide/silicon bi-layer substrate with good step coverage and high quality film using plasma enhanced atomic layer deposition (PEALD). And then copper was deposited on TaNx barrier using same deposition method. The thickness of TaNx was 4~5 nm. TaNx film was deposited the condition of under $300^{\circ}C$ and copper deposition temperature was under $120^{\circ}C$, and feeding time of TaNx and copper were 5 seconds and 5 seconds, relatively. Purge time of TaNx and copper films were 10 seconds and 6 seconds, relatively. XRD, TEM, AFM, I-V measurement(for testing leakage current and stability) were used to analyze this work. With this work, thin barrier layer(4~5nm) with deposited PEALD has good step coverage and good thermal stability. So the barrier properties of PEALD TaNx film are desirable for copper interconnection.

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Enhanced Electrical Properties of Light-emitting Electrochemical Cells Based on PEDOT:PSS incorporated Ruthenium(II) Complex as a Light-emitting layer

  • 강용수;박성희;이혜현;조영란;황종원;최영선
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.139-139
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    • 2010
  • Ionic Transition Metal Complex based (iTMC) Light-emitting electrochemical cells (LEECs) have been drawn attention for cheap and easy-to-fabricate light-emitting device. LEEC is one of the promising candidate for next generation display and solid-state lighting applications which can cover the defects of current commercial OLEDs like complicated fabrication process and strong work-function dependent sturucture. We have investigated the performance characteristics of LEECs based on poly (3, 4-ethylenedioxythiophene):poly (styrene sulfonate) (PEDOT:PSS)-incorporated transition metal complex, which is tris(2, 2'-bipyridyl)ruthenium(II) hexafluorophosphate in this study. There are advantages using conductive polymer-incorporated luminous layer to prevent light disturbance and absorbance while light-emitting process between light-emitting layer and transparent electrode like ITO. The devices were fabricated as sandwiched structure and light-emitting layer was deposited approximately 40nm thickness by spin coating and aluminum electrode was deposited using thermal evaporation process under the vacuum condition (10-3Pa). Current density and light intensity were measured using optical spectrometer, and surface morphology changes of the luminous layer were observed using XRD and AFM varying contents of PEDOT:PSS in the Ruthenium(II) complex solution. To observe enhanced ionic conductivity of PEDOT:PSS and luminous layer, space-charge-limited-currents model was introduced and it showed that the performances and stability of LEECs were improved. Main discussions are the followings. First, relationship between film thickness and performance characteristics of device was considered. Secondly, light-emitting behavior when PEDOT:PSS layer on the ITO, as a buffer, was introduced to iTMC LEECs. Finally, electrical properties including carrier mobility, current density-voltage, light intensity-voltage, response time and turn-on voltages were investigated.

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LSC/GDC (50 : 50 vol%) 활성층이 LSCF/GDC (20 : 80 vol%) 복합 분리막의 산소투과 거동에 미치는 영향 (The Effect of LSC/GDC (50 : 50 vol%) Active Layers on Oxygen Transport Properties of LSCF/GDC (20 : 80 vol%) Dual-phase Membrane)

  • 차다솜;유충열;주종훈;유지행;한문희;조철희
    • 멤브레인
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    • 제24권5호
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    • pp.367-374
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    • 2014
  • 본 연구에서는 LSCF/GDC (20 : 80 vol%) 복합 분리막 표면에 LSC/GDC (50 : 50 vol%) 활성층을 코팅한 후 활성층의 열처리 온도, 두께, 침투법을 이용한 STF 도입이 산소투과 특성에 미치는 영향을 고찰하였다. 활성층 도입은 복합 분리막의 산소 투과 유속을 급격히 증진시켰으며 이는 활성층 성분인 LSC/GDC (50 : 50 vol%)가 전자 전도성 및 표면 산소 분해 반응을 증진시켰기 때문이었다. 활성층의 열처리 온도가 $900^{\circ}C$에서 $1000^{\circ}C$로 증가한 경우, 산소 투과 유속은 증가하였고 이는 분리막과 활성층 사이 그리고 활성층의 결정입간 접촉이 증진하여 산소이온과 전자 흐름을 증진시켰기 때문으로 설명되었다. 코팅층의 두께가 약 $10{\mu}m$에서 약 $20{\mu}m$로 증가한 경우, 산소 투과 유속은 오히려 감소하였는데 이는 코팅층의 두께가 증가할수록 기공을 통한 공기 중의 산소 유입이 어려워지기 때문으로 설명되었다. 또한, 코팅층에 침투법을 이용하여 STF를 도입한 경우가 STF를 도입하지 않은 경우 보다 높은 산소 투과 유속을 보였는데 이는 도입된 STF가 산소 분해하는 표면 반응 속도를 촉진시키기 때문이다. 본 연구로부터 LSC/GDC (50 : 50 vol%) 활성층 코팅 및 특성 제어는 LSCF/GDC (20 : 80 vol%) 복합 분리막의 산소투과 증진에 매우 중요함을 확인하였다.

Application of Fuzzy Theory and Analytic Hierarchy Process to Evaluate Marketing Strategies

  • Yu, C.S.;Tzeng, G.H.;Li, H. L.
    • 한국지능시스템학회:학술대회논문집
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    • 한국퍼지및지능시스템학회 1998년도 The Third Asian Fuzzy Systems Symposium
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    • pp.352-357
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    • 1998
  • Conventional marketing research generally focuses on a single layer's benefit. A notable example is the consumer layer providing managers with partial market information to evaluate relevant strategies. As generally known, marketing management encounters complex supply and demand behaviors, thereby necessitation that a successful marketing strategy adopt multi-layer considerations, such as the consumer layer, channel-retailer layer, and marketing planner layer. In light of above situation, this study applies fuzzy theory and the analytic hierarchy process(AHP) technique to analyze the performances of marketing strategies under multi-layer benefits, In addition, conventional marketing research has difficulty in efficiently allocating the limited budget so that each desired criterion can be significantly enhanced by a group of events. Therefore, a weighting structure among the goal, layers, criteria, and strategies(i.e. a group of events) is also developed herein to trace the influential process and assist marketing managers in efficiently allocating resources(i.e.budget).

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Transmission Line Analysis of Accumulation Layer in IEGT

  • Moon, Jin-Woo;Chung, Sang-Koo
    • Journal of Electrical Engineering and Technology
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    • 제6권6호
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    • pp.824-828
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    • 2011
  • Transmission line analysis of the surface a cumulation layer in injection-enhanced gate transistor (IEGT) is presented for the first time, based on per-unit-length resistance and conductance of the surface layer beneath the gate of IEGT. Lateral electric field on the accumulation layer surface, as well as the electron current injected into the accumulation layer, is governed by the well-known wave equation, and decreases as an exponential function of the lateral distance from the cathode. Unit-length resistance and conductance of the layer are expressed in terms of the device parameters and the applied gate voltage. Results obtained from the experiments are consistent with the numerical simulations.

e-AG를 위한 시공간적 계위를 이용한 3차원 비디오 압축 (3D video coding for e-AG using spatio-temporal scalability)

  • 오세찬;이영호;우운택
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2003년도 신호처리소사이어티 추계학술대회 논문집
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    • pp.199-202
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    • 2003
  • In this paper, we propose a new 3D coding method for heterogeneous systems over enhanced Access Grid (e-AG) with 3D display using spatio-temporal scalability. The proposed encoder produces four bit-streams: one base layer and enhancement layer l, 2 and 3. The base layer represents a video sequence for left eye with lower spatial resolution. An enhancement layer l provides additional bit-stream needed for reproduction of frames produced in base layer with full resolution. Similarly, the enhancement layer 2 represents a video sequence for right eye with lower spatial resolution and an enhancement layer 3 provides additional bit-stream needed for reproduction of its reference pictures with full resolution. In this system, temporal resolution reduction is obtained by dropping B-frames in the receiver according to network condition. The receiver system can select the spatial and temporal resolution of video sequence with its display condition by properly combining bit-streams.

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HAMILTONIAN PROPERTIES OF ENHANCED HONEYCOMB NETWORKS

  • M. SOMASUNDARI;A. RAJKUMAR;F. SIMON RAJ;A. GEORGE
    • Journal of applied mathematics & informatics
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    • 제42권4호
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    • pp.761-775
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    • 2024
  • A cycle in a graph G that contains all of its vertices is said to be the Hamiltonian cycle of that graph. A Hamiltonian graph is one that has a Hamiltonian cycle. This article discusses how to create a new network from an existing one, such as the Enhanced Honeycomb Network EHC(n), which is created by adding six new edges to each layer of the Honeycomb Network HC(n). Enhanced honeycomb networks have 9n2 + 3n - 6 edges and 6n2 vertices. For every perfect sub-Honeycombe topology, this new network features six edge disjoint Hamiltonian cycles, which is an advantage over Honeycomb. Its diameter is (2n + 1), which is nearly 50% lesser than that of the Honeycomb network. Using 3-bit grey code, we demonstrated that the Enhanced Honeycomb Network EHC(n) is Hamiltonian.

Light-emitting devices with polymer-organic heterostructure

  • Do, Lee-Mi;Hwang, Do-Hoon;Choi, Kang-Hoon;Lee, Hyang-Mok;Jung, Sang-Don;Zyung, Taehyoung
    • Journal of the Optical Society of Korea
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    • 제1권2호
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    • pp.116-119
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    • 1997
  • Highly quantum efficient and multi-color emissible polymer light emitting devices have been realized utilizing poly (1-dodecyloxy-4-methyl-1, 3-phenylene)(2, 5"-terthienylene)(hereafter, mPTTh polymer) as an emitting layer and tris(8-hydroxyquinoline) aluminum (Alq3) as an electron transport layer. A single layer EL device of mPTTh polymer emits orange-colored light. EL efficiency increases as the thickness of Alq3 layer increases, but the emission color becomes visually broad when the Alq3 layer thickness is greater than 30nm since the relative peak intensity of green EL from Alq3 layer grows. EL color is changed from orange to greenish orange as the thickness of Alq3 layer grows. EL color is changed from orange to greenish orange as the thickness of Alq3 layer increases. EL efficiency of the double layer device was greatly enhanced by 3000 times compared with that of a single layer device. Alq3 layer in device acts as a hole blocking electron transporting layer and an emitting layer as a function of the thickness of Alq3 layer.ayer.

이종 접합 구조를 갖는 TiO2/WO3 이중 박막의 광유기 친수 특성 (Photoinduced Hydrophilicity of Heterogeneous TiO2/WO3 Double Layer Films)

  • 오지용;이병로;김화민;이창현
    • 한국전기전자재료학회논문지
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    • 제28권11호
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    • pp.715-720
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    • 2015
  • The photoinduced hydrophilicity of $TiO_2/WO_3$ double layer films was fabricated by using a conventional rf-magnetron sputtering method. The photoinduced hydrophilic reaction of the $TiO_2$ surface was enhanced by the presence of $WO_3$ under the $TiO_2$ layer by irradiation of a 10 W cylindrical fluorescent light bulb. However, when the $TiO_2$ and $WO_3$ layers were separated by an insulating layer, the surface did not appeared high hydrophilic, under the same light bulb. The enhanced photoinduced hydrophilic reaction can be explained by the charge transfer between $TiO_2$ and $WO_3$ layers. It was also demonstrated that visible light passing through the $TiO_2$ layer could excite $WO_3$. Thus, visible light can be used for the hydrophilic reaction in the present $TiO_2/WO_3$ system.

AKA-PLA: Enhanced AKA Based on Physical Layer Authentication

  • Yang, Jing;Ji, Xinsheng;Huang, Kaizhi;Yi, Ming;Chen, Yajun
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • 제11권7호
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    • pp.3747-3765
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    • 2017
  • Existing authentication mechanisms in cellular mobile communication networks are realized in the upper layer by employing cryptographic techniques. Authentication data are broadcasted over the air in plaintext, enabling attackers to completely eavesdrop on the authentication and get some information about the shared secret key between legitimate nodes. Therefore, reusing the same secret key to authenticate several times results in the secret key's information leakage and high attacking rate. In this paper, we consider the most representative authentication mechanism, Authentication and Key Agreement (AKA), in cellular communication networks and propose an enhanced AKA scheme based on Physical Layer Authentication (AKA-PLA). Authentication responses generated by AKA are no longer transmitted in plaintext but masked by wireless channel characteristics, which are not available to adversaries, to generate physical layer authentication responses by a fault-tolerant hash method. The authenticator sets the threshold according to the authentication requirement and channel condition, further verifies the identity of the requester based on the matching result of the physical layer authentication responses. The performance analyses show that the proposed scheme can achieve lower false alarm rate and missing rate, which are a pair of contradictions, than traditional AKA. Besides, it is well compatible with AKA.