Effect of Alumina Addition tn the Silica Slurry on the Chemical Mechanical Polishing of Laugasite (실리카 슬러리에 첨가된 알루미나가 Langasite의 기계.화학적 연마에 미치는 영향)
-
- Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
- /
- 1999.11a
- /
- pp.263-268
- /
- 1999