Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)

Korean Tribology Society (한국트라이볼로지학회)
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Effect of Alumina Addition tn the Silica Slurry on the Chemical Mechanical Polishing of Laugasite

실리카 슬러리에 첨가된 알루미나가 Langasite의 기계.화학적 연마에 미치는 영향

  • 장영일 (고려대학교 재료공학과) ;
  • 윤인호 (고려대학교 재료공학과) ;
  • 임대순 (고려대학교 재료공학과)
  • Published : 1999.11.01
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Abstract

Langasite, a new piezoelectric material was polished by CMP(chemical mechanical polishing). To enhance the polishing rate, alumina abrasives were added to commercial ILD1300 slurry which contains silica abrasive. The effect of added alumina 0 the silica slurry on the polishing rate and damage of langasite was investigated, Experimental results show that the polishing rate and roughness increases with increasing added alumina particle size, Crystallinity of the langasite is also lowered by alumina addition.

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