• 제목/요약/키워드: Energy spectrometer

검색결과 500건 처리시간 0.031초

Control of Copper Thin Film Characteristics by using Pulsed DC Power Magnetron Sputter System (Pulsed DC Power Magnetron Sputter System을 사용한 Copper 박막 특성 조절)

  • Kim, Do-Han;Lee, Su-Jeong;Kim, Tae-Hyeong;Lee, Won-O;Yeom, Won-Gyun;Kim, Gyeong-Nam;Yeom, Geun-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.107-107
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    • 2017
  • 전자제품의 성능이 향상됨에 따라서 전자제품에 사용되는 부품의 고집적화가 필연적으로 요구되고 있으며, 고집적화 된 전자제품의 방열(heat dissipation)에 관한 문제점이 대두되고 있다. 방열은 전자기기의 성능과 수명을 유지하는데 있어서 중요한 문제 중 하나로서 방열 효과를 높이기 위해 다양한 연구 개발이 진행 중이다. 방열에 사용되는 소재로는 Cu가 있으며, 저렴한 가격과 상대적으로 높은 방열 효율을 가지는 장점이 있다. Cu는 전기 도금 증착 방법을 사용하여왔으나, 전기도금 방식으로 증착된 Cu 방열판은 제품에 열이 축적될 경우 Cu와 substrate 사이의 residual stress로 인해 박리나 뒤틀림 현상 등이 발생하여 high power를 사용하는 device의 방열 소재로 사용하기에는 개선해야 할 문제점이 있다. 이러한 문제점을 극복하기 위한 방법으로 magnetron sputter 증착 방법이 있으며, magnetron sputter은 대면적화가 용이하고, 다양한 물질의 증착이 가능한 장점으로 인해 hard coating 또는 thin film 증착과 같은 공정에 사용되고 있다. 특히 증착된 film의 특성을 조절하기 위해서 magnetron sputter에 pulse 또는 ICP (inductively coupled plasma) assisted 등을 적용하여 plasma 특성을 조절하는 방법 등에 관한 연구가 보고되고 있다. 본 연구에서는 pulsed magnetron sputtering 방식을 이용하여 증착된 Cu film 특성 변화를 확인하였다. 다양한 pulsing frequency와 pulsing duty ratio 조건에서, Si substrate 위에 증착된 Cu film과의 residual stress 변화를 측정하였다. Pulse duty ratio가 90% 에서 60%로 감소함에 따라서 Cu film의 residual stress가 감소하였고, pulsing frequency가 증가함에 따라 Cu film의 residual stress가 감소하는 것을 확인하였다. 증착 조건에 따른 plasma의 특성 분석을 위하여 oscilloscope를 이용하여 voltage와 current를 측정하였고, Plasma Sampling Mass spectrometer 를 이용하여 ion energy의 변화를 측정하였다. 이를 통해 plasma 특성 변화가 증착된 Cu film에 미치는 영향과 residual stress의 변화에 대한 연관성에 대하여 확인할 수 있었다.

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Annealing Effect of Phosphorus-Doped ZnO Nanorods Synthesized by Hydrothermal Method (Phosphorus-Doped ZnO 나노로드의 열처리 효과)

  • Hwang, Sung-Hwan;Moon, Kyeong-Ju;Lee, Tae Il;Myoung, Jae Min
    • Korean Journal of Materials Research
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    • 제23권5호
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    • pp.255-259
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    • 2013
  • An effect of thermal annealing on activating phosphorus (P) atoms in ZnO nanorods (NR) grown using a hydrothermal process was investigated. $NH_4H_2PO_4$ used as a dopant source reacted with $Zn^{2+}$ ions and $Zn_3(PO_4)_2$ sediment was produced in the solution. The fact that most of the input P elements are concentrated in the $Zn_3(PO_4)_2$ sediment was confirmed using an energy dispersive spectrometer (EDS). After the hydrothermal process, ZnO NRs were synthesized and their PL peaks were exhibited at 405 and 500 nm because P atoms diffused to the ZnO crystal from the $Zn_3(PO_4)_2$ particles. The solubility of the $Zn_3(PO_4)_2$ initially formed sediment varied with the concentration of $NH_4OH$. Before annealing, both the structural and the optical properties of the P-doped ZnO NR were changed by the variation of P doping concentration, which affected the ZnO lattice parameters. At low doping concentration of phosphorus in ZnO crystal, it was determined that a phosphorus atom substituted for a Zn site and interacted with two $V_{Zn}$, resulting in a $P_{Zn}-2V_{Zn}$ complex, which is responsible for p-type conduction. After annealing, a shift of the PL peak was found to have occurred due to the unstable P doping state at high concentration of P, whereas at low concentration there was little shift of PL peak due to the stable P doping state.

방전플라즈마 소결법으로 제조한 Mo-Cu 합금 소결체의 물성 및 전기적 특성에 관한 연구

  • Lee, Han-Chan;Mun, Gyeong-Il;Lee, Bung-Ju;Sin, Baek-Gyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.277-277
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    • 2011
  • Mo-Cu 합금은 고강도이고 우수한 열전도성 및 전기전도성를 가지는 특성이 있어 현재 방열소재, 반도체 부품, 자동차 부품 등 여러 응용분야에서 연구가 활발히 진행되고 있다. 본 연구에서는 서로 고용성이 없는 Mo-Cu 합금을 제조하기 위해서 Mo, Cu 분말을 PBM (Planetary Ball Milling) 방법을 이용하여 제조 하였으며, 제조된 분말은 SPS (Spark Plasma Sintering) 공정을 이용하여 소결체를 제조하였다. Mo-Cu의 조성 변화는 Cu의 함유량을 각각 5at%Cu, 10at%Cu, 20at%Cu로 조절하여 수행하였으며, PBM 의 공정 변수로 회전수(RPM), 볼과 분말의 비율, 분산제의 양, 볼밀 시간, 분위기 변화를 주어 최적조건을 얻기 위한 실험을 진행하였다. PBM 방법을 이용하여 제조한 분말은 PSA (Particle Size Analysis)에 의해 분말의 크기를 측정하고 EDS(Energy Disperse X-ray Spectrometer) 분석에 의해 조성을 확인하였으며, XRD (X-Ray Diffraction) 분석에 의해 Cu peak이 사라지는 조건을 PBM의 최적조건으로 잡고 실험을 진행하였다. 소결체를 고밀도화하기 위해 소결공정을 SPS 방식으로 하였으며 소결체의 경도, 내마모성, 마찰계수 일함수 등을 분석하기 위해 소결체의 크기를 직경 30 mm 및 두께 5 mm로 설계하였고, 소결 공정 변수로 소결온도를 각각 $900^{\circ}C$, $1000^{\circ}C$, $1100^{\circ}C$, 소결압력을 50MPa, 60MPa, 70MPa, 유지시간을 0분, 10분, 20분으로 차이를 주어, 소결체의 밀도차이와 물성차이를 분석하였다. 그 결과 PBM의 최적조건으로는 5at%Cu 에서는 10h, 10at%Cu, 20at%Cu 에서는 20h의 최적의 밀링 시간을 확인하였고, 다른 공정 변수의 최적조건으로는 회전수 300RPM, 10:1의 볼과 분말 비, 분산제 4wt%, Ar 분위기라는 조건을 얻을 수 있었다. 각각의 공정변수 변화에 따른 소결체 최적밀도 달성조건, 소결체 물성 및 전기적 특성 등의 상관관계에 관하여 보고한다.

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Measurement of EUV Emission and its Plasma Parameters Generated from the Coaxial Plasma Focus of Mather and Hypocycloidal Pinched Electrodes

  • Lee, Sung-Hee;Lee, Kyung-Ae;Hong, Young-June;Uhm, Han-Sup;Choi, Eun-Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.332-332
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    • 2011
  • The extreme ultraviolet (EUV) radiation, whose wavelength is from 120 nm down to 10 nm, and the energy from 10 eV up to 124 eV, is widely utilized such as in photoelectron spectroscopy, solar imaging, especially in lithography and soft x-ray microscopy. In this study, we have investigated the plasma diagnostics as well as the debris characteristics between the two types of dense plasma focusing devices with coaxial electrodes of Mather and hypocycloidal pinch (HCP), respectively. The EUV emission intensity, electron temperature and plasma density have been investigated in these cylindrical focused plasma along with the debris characteristics. An input voltage of 5 kV has been applied to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas at pressure ranged from 1 mTorr and 180 mTorr. The inner surface of the cathode was covered by polyacetal insulator. The central anode electrode has been made of tin. The wavelength of the EUV emission has been measured to be in the range of 6~16 nm by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission has also been measured by the spectrometer with the wavelength range of 200~1,100 nm. The electron temperature and plasma density have been measured by the Boltzmann plot and Stark broadening methods, respectively, under the assumption of local thermodynamic equilibrium (LTE).

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Surface Characterization According to the Bias Voltage of the TiAgN Coating Film Layer Formed by the AIP Process (AIP법으로 형성된 TiAgN 코팅필름의 바이어스전압에 따른 표면 특성 분석)

  • Baek, Min-Sook;Yoon, Dong-Joo;Kang, Byeong-Mo;Jeong, Woon-Jo;Kim, Byung-Il
    • Korean Journal of Materials Research
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    • 제25권5호
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    • pp.253-257
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    • 2015
  • The implanting of metal products is performed with numerous surface treatments because of toxicity and adhesion. Recently, the surface modification of metal products has been actively studied by coating the surface of the TiC or TiN film. We prepared a Ti(10%)Ag Target which may be used in dental oral material by, using the AIP(arc ion plating) system TiAgN coating layer that was deposited on Ti g.23. The purpose of this study was to establish the optimal bias voltage conditions of the coated TiAgN layer formed by the AIP process. The TiAgN coatings were prepared with different bias voltage parameters (0V to -500V) to investigate the effect of bias voltage on their mechanical and chemical properties. The SEM(scanning electron microscope), EDS(energy dispersive X-ray spectrometer), XRD(X-ray diffraction), micro-hardness, and potentiodynamic polarization were measured and the surface characteristics of the TiAgN coating layers were evaluated. The TiAgN coating layer had different mechanical characteristics based on the bias voltage, which also showed differences in thickness and composition.

Formation of Bioactive Surface by PEO-treatment after 2nd ATO Technique of Ti-6Al-4V Alloy (Ti-6Al-4V 합금에 2nd ATO 처리 후 플라즈마 전해 산화법에 의한 생체활성표면형성)

  • Lim, Sang-Gyu;Cho, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.74-74
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    • 2018
  • Ti-6Al-4V alloys have been widely used as orthopedic materials because of their excellent corrosion resistance and mechanical properties. However, it does not bind directly to the bone, so it requires a surface modification. This problem can be solved by nanotube and micropore formation. Plasma electrolytic oxidation (PEO) treatment for micropore, which combines high-voltage spark and electrochemical oxidation, is a new way of forming a ceramic coating on light metals such as titanium and its alloys. This method has excellent reproducibility and can easily control the shape and size of the Ti alloy. In this study, formation of bioactive surface by PEO-treatment after $2^{nd}$ ATO technique of Ti-6Al-4V alloy was invesgated by various instrument. Nanotube oxide surface structure was formed on the surface by anodic oxidation treatment in 0.8 wt.% NaF and 1M $H_3PO_4$ electrolytes. After nanotube formation, nanotube layer was removed by ultrasonic cleaning. PEO-treatment was carried out at 280V for 3 minutes in the electrolytic solution containing the bioactive substance (Mg, Zn, Mn, Sr, and Si). The surface of Ti-6Al-4V alloy was observed by field emission scanning electron microscopy (FE-SEM, S-4800 Hitachi, Japan). An energy dispersive X-ray spectrometer (EDS, Inca program, Oxford, UK) was used to analyze the spectra of physiologically active Si, Mn, Mg, Zn, and Sr ions. The PEO film formed on the Ti-6Al-4V alloy surface was characterized using an X-ray diffractometer (TF-XRD, X'pert Philips, Netherlands). It is confirmed that bioactive ions play an essential role in the normal bone growth and metabolism of the human skeletal tissues.

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A comparative analysis of basic characteristics of several deproteinized bovine bone substitutes (수종의 탈단백 우골 이식재의 특성 비교 분석)

  • Yeo, Shin-Il;Park, Sung-Hwan;Noh, Woo-Chang;Park, Jin-Woo;Lee, Jae-Mok;Suh, Jo-Young
    • Journal of Periodontal and Implant Science
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    • 제39권2호
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    • pp.149-156
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    • 2009
  • Purpose: Deproteinized bovine bone substitutes are commonly used in dental regenerative surgery for treatment of alveolar defects. In this study, three different bovine bone minerals - OCS-B (NIBEC, Seoul, Korea), Bio-Oss (Geistlich - Pharma, Switzerland), Osteograft/N - 300 (OGN, Dentsply Friadent Ceramed. TN, USA) - were investigated to analyze the basic characteristics of commercially available bone substitutes. Methods: Their physicochemical properties were evaluated by scanning electron microscopy, energy dispersive X-ray spectrometer (EDS), surface area analysis, and Kjeldahl protein analysis. Cell proliferation and alkaline phosphatase (ALP) activity of human osteosarcoma cells on different bovine bone minerals were evaluated. Results: Three kinds of bone substitutes displayed different surface properties. Ca/P ratio of OCS - B shown to be lower than other two bovine bone minerals in EDS analysis. Bio-Oss had wider surface area and lower amount of residual protein than OCS - B and OGN. In addition Bio - Oss was proved to have lower cell proliferation and ALP activity due to lots of residual micro particles, compared with OCS - B and OGN. Conclusions: Based on the results of this study, three bovine bone minerals that produced by similar methods appear to have different property and characteristics. It is suggested that detailed studies and quality management is needed in operations for dental use and its biological effects on new bone formation.

Synthesis and Characterization of Waterborne Polyurethanes Based on Isophorone Diisocyanate and Mixed Polyols of Poly(tetramethylene glycol)/Polydimethylsiloxane Diol (이소포론 디이소시아네이트와 폴리(테트라메틸렌 글리콜)/폴리디메틸실록산 디올 혼합 폴리올을 사용한 수분산성 폴리우레탄의 합성과 특성 분석)

  • Lee, Ji Hye;Hong, Seongdon;Kim, Young Ho
    • Polymer(Korea)
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    • 제37권2호
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    • pp.167-176
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    • 2013
  • Linear and cross-linked waterborne polyurethanes (WPUs) based on isophorone diisocyanate and mixed diols of poly(tetramethylene glycol)/hydroxyethyl-terminated polydimethylsiloxane (PDMS-OH) were synthesized with dimethylol propionic acid as an anionic component, trimethylolpropane as a cross-linking agent, and butanediol as a chain extender and characterized. The hydrophobicity, $T_g$, stress-strain behaviors of the linear or cross-linked siloxane-containing WPU (WPU-Si) films with different PDMS content were analyzed by using water contact shape analyzer, energy dispersive spectrometer, dynamic mechanical analyzer, and universal testing machine. The results reveal that as the PDMS content increased, the hydrophobicity of WPU-Si films increased, $T_g$ moved to higher temperature, the breaking stress increased, and the breaking strain decreased.

Physiochemical analysis, toxicity test and anti-bacterial effect of practically detoxified sulfur (법제유황의 실용적 제조에 따른 물리 화학적 분석 및 독성, 항균 작용에 관한 연구)

  • In, Dong-Chul;Yu, Do-Hyeon;Park, Chul;Park, Jin-Ho
    • Korean Journal of Veterinary Service
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    • 제35권3호
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    • pp.197-205
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    • 2012
  • Despite of a long history of the sulfur on the disease healing effect, there were limited ways of applying sulfur to animal and human. We have developed the detoxified sulfur (non toxic sulfur) method to make it practical and mass production possible through laboring for many years. This study practiced scanning electron microscope (SEM), Energy dispersive X-ray spectrometer (EDS) and secondary ion mass spectrometry (SIMS) analysis to investigate the physicochemical aspect of detoxified sulfur. We also performed the oral toxicity experiment to mice, and anti-bacterial test of the detoxified sulfur. Based on the SEM, EDS and SIMS results, the united particles in the mass form with the similar component intensity with the raw sulfur were observed, and hydrogen sulfide ion (HS-) component which is regarded as a toxic matter, was decreased after detoxification. Indeed, toxicity test on the mice (10 males, 10 females) showed no clinical, histopathological changes with the 5 times amount (2,500 mg/kg) of the actual doses. However, the male-mice showed decreased in body weight by 23.6%, 24.3% in the 7th, 14th day, respectively, after detoxified sulfur. Moreover, the female-mice administered the detoxified sulfur showed decreased in body weight by 28.7% (P<0.05) than that in the control group on the 14th day. The result of antibacterial test on the detoxified sulfur showed antibacterial effect (27%) to inhibit the growth of Staphylococcus aureus. It is shown that detoxified sulfur can be used as feed additive and has an affect on the farm perfomance.

Quantitative Proteogenomics and the Reconstruction of the Metabolic Pathway in Lactobacillus mucosae LM1

  • Pajarillo, Edward Alain B.;Kim, Sang Hoon;Lee, Ji-Yoon;Valeriano, Valerie Diane V.;Kang, Dae-Kyung
    • Food Science of Animal Resources
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    • 제35권5호
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    • pp.692-702
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    • 2015
  • Lactobacillus mucosae is a natural resident of the gastrointestinal tract of humans and animals and a potential probiotic bacterium. To understand the global protein expression profile and metabolic features of L. mucosae LM1 in the early stationary phase, the QExactiveTM Hybrid Quadrupole-Orbitrap Mass Spectrometer was used. Characterization of the intracellular proteome identified 842 proteins, accounting for approximately 35% of the 2,404 protein-coding sequences in the complete genome of L. mucosae LM1. Proteome quantification using QExactiveTM Orbitrap MS detected 19 highly abundant proteins (> 1.0% of the intracellular proteome), including CysK (cysteine synthase, 5.41%) and EF-Tu (elongation factor Tu, 4.91%), which are involved in cell survival against environmental stresses. Metabolic pathway annotation of LM1 proteome using the Kyoto Encyclopedia of Genes and Genomes (KEGG) database showed that half of the proteins expressed are important for basic metabolic and biosynthetic processes, and the other half might be structurally important or involved in basic cellular processes. In addition, glycogen biosynthesis was activated in the early stationary phase, which is important for energy storage and maintenance. The proteogenomic data presented in this study provide a suitable reference to understand the protein expression pattern of lactobacilli in standard conditions