• 제목/요약/키워드: Electrostatic spray deposition (ESD) technique

검색결과 4건 처리시간 0.052초

정전기 분무 증착법에 대한 최근 연구 동향 고찰 (Research Issues of Electrostatic Spray Deposition (ESD) Technique)

  • 류성욱;이상용
    • 한국분무공학회지
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    • 제11권1호
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    • pp.7-16
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    • 2006
  • Performance of thin films fabricated with the electrostatic spray deposition (ESD) technique is strongly governed by surface morphology, which depends on deposition parameters such as deposition time and temperature, solution properties, and surface characteristics of substrates. In this article, the state of the art on the relationships between the surface morphology and the deposition parameters is presented. Also studies on the electro-hydrodynamic atomization process and the motion of drops relevant to the ESD technique are briefly reviewed, and the future research works are suggested.

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Synthesis of Li2PtO3 Thin Film Electrode by an Electrostatic Spray Deposition Technique

  • Oh, Heung-Min;Kim, Ji-Young;Lee, Kyung-Keun;Chung, Kyung-Yoon;Kim, Kwang-Bum
    • Journal of Electrochemical Science and Technology
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    • 제1권1호
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    • pp.45-49
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    • 2010
  • $Li_2PtO_3$ thin film electrodes, which might be possible candidate for the cathode materials for implantable batteries, were synthesized using an electrostatic spray deposition (ESD) technique onto a platinum foil substrate. Single phase $Li_2PtO_3$with a structure similar to layered $LiCoO_2$ structure were synthesized by spraying a precursor solution of $CH_3CO_2Li2H_2O$ in ethanol onto a Pt substrate at temperatures ranging from 200 to $400^{\circ}C$ followed by annealing at above $600^{\circ}C$. Lithium carbonate was the only major phase at temperatures up to $500^{\circ}C$. The X-ray diffraction (XRD) peaks of the Pt foil substrate and lithium carbonate disappeared at temperatures >$600^{\circ}C$. The volumetric capacity of the $Li_2PtO_3$ thin film synthesized using the ESD technique was approximately 817 mAh/$cm^3$, which exceeded that of $LiCoO_2$ (711 mAh/$cm^3$).

Electrostatic Spray Deposition Technique for Thin Film Fabrication

  • 최경현
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.2.1-2.1
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    • 2011
  • Electrospray deposition (ESD) technique is fast finding its applicability in the field of thin film device manufacturing processes and the ease and cost efficiency attached to ESD process with possible integration with batch manufacturing technologies is the potential future of thin film device manufacturing. As the name suggests, the deposition phenomenon should solely be a spray achieved through electrostatic forces. In fact it is an imbalance between the surface forces arising because of the surface tension of the liquid to be sprayed and Maxwell stresses which are induced because of the electric field, that pull the liquid downwards from the capillary into a stable jet which further disintegrates into smaller droplets because of coulomb forces and hence a cloud of charged, mono-dispersed and extremely diminutive (sometimes up to femtolitres) droplets is achieved. The present talk is going to be exclusively about the electrospray process concepts, generation and possible applications.

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정전분무증착법에 의한 중온형 고체산화물 연료전지를 위한 Sm0.5Sr0.5CoO3 양극막의 제조 (Fabrication of Sm0.5Sr0.5CoO3 cathode films for intermediate temperature SOFCs by electrostatic spray deposition)

  • 박인유;임종모;정영글;신동욱
    • 한국결정성장학회지
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    • 제20권2호
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    • pp.69-73
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    • 2010
  • 정전분무증착 기술에 의해 증착된 고체산화물 연료전지(SOFC) 양극재료인 SSC 양극막의 미세구조적 변화에 대해 연구하였다. Samarium chloride hexahydrate$(SmCl_3{\cdot}6H_2O)$, strontium chloride hexahydrate$(Co(No_3)_2{\cdot}6H_2O)$, cobalt nitrate hexahydrate$(Co(No_3)_2{\cdot}6H_2O)$의 출발 물질과 용매로써 메탄올이 전구체 용액을 제조하는데 사용되었다. SOFC의 양극을 위해 적합한 다공성의 SSC 막을 제조하였으며, 그 미세구조가 증착시간, 기판온도, 인가전압 등과 같은 공정변수들에 의존한다는 것을 관찰하였다. 주사전자현미경과 X-ray 회절 패턴이 미세구조와 결정성 분석을 위해 사용되었다. 본 연구를 통해, ESD 기술이 요구하는 상의 합성과 다공성의 미세구조를 갖는 SOFC의 양극막을 제조하는데 효과적인 방법임을 입증하였다.