• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.4
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• pp.423-428
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• 2010

Electrostatic precipitators (ESPs) used currently in industries for removing fine particles from semiconductors have to be made of expensive anticorrosive metallic materials in order to maintain their particle-removal performance. To satisfy the economical demands of industries, a novel ESP was developed; in this ESP, the charger is made of carbon fibers and collection plates consist of PET films among which an aluminum sheet is inserted. The ESP was evaluated by changing the voltages applied to the chargers and collection plates, flow rates, and number of charging channels. KCl particles with mean diameters of 100 nm were used, and a scanning mobility particle sizer was used to measure the changes in particle number concentrations upstream and downstream of the ESP. The experimental results showed that more than 90% of the particles were removed by using the ESP containing ionizers with nine channels and 65-mm collection plates at $500\;m^3/hr$ when voltages of 7 kV and 10 kV were applied to the ionizers and collection plates, respectively.

• Resources Recycling
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• v.30 no.3
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• pp.70-81
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• 2021

This study evaluated the recyclability of waste plastics in used coffee capsules disposed of as municipal waste. For recycling, a new material separation process was developed to remove the coffee grounds through primary crushing, washing, sieving, and secondary crushing, followed by corona discharge electrostatic separation. Furthermore, for the under 10 mm size fraction samples, the aluminum removal and the plastic recovery were 95.4% and 98.3%, respectively, under optimal conditions. In addition, for the 15 mm fraction samples, the aluminum removal and the plastic recovery were 91.3% and 97.2%, respectively. To evaluate the recyclability of the separated waste plastics, the samples were pelleted, and their material properties were analyzed. No hazardous substances were detected, and the results were similar to those for homo-PP. Therefore, it was confirmed tha t sufficient functiona lity existed a s recycled PP. However, owing to the da rk color of the pellets, limited applications to black or dark products are expected.

• Clean Technology
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• v.26 no.1
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• pp.13-21
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• 2020

Air pollutants in a subway are complexly caused by outdoor factors such as ventilating opening and indoor factors such as the movement of passengers on the subway. According to recent research results, most of the air pollutants generated in subway tunnels and stations are caused by indoor variables such as train movement. To control air pollutants such as particulate matter (PM), a prevention facility such as the electrostatic precipitator (EP) or bag filter collector was required in a subway station. In particular, the PM removed by the EP must be kept clean continuously to manage PM effectively. Therefore, a nano-bubbling washing system was developed in this study to clean a contaminated collecting plate in an EP at the main subway tunnel in Seoul. Removal efficiency compared with normal water and nano-bubbling water was likewise studied. As a result, the washing efficiency of collective PM increased in accordance with the increasing of injection pressure, with nano bubbling washing being 130.8% higher than tap water. According to increase in washing times, the maximum washing efficiency was 143.1% higher than tap water, but suitable washing times were less than 3 times. According to the results of the washing efficiency by variation of residence time, it was confirmed that the maximum residence time of nano-bubble water was maintained within 5 minutes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.546-546
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• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.1
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• pp.13-20
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• 2010

Airborne particulate matters have two modes of size distributions of coarse mode and fine mode. The coarse mode which is formed by break down mechanism of large particles has a peak around the $100\;{\mu}m$, and the fine mode formed by condensation and build up mechanism of evaporated vapors has a peak at several ${\mu}m$. The coarse mode particles can be removed easily by conventional collecting equipments such as a cyclone, an electrostatic precipitator, and a filter, however the fine mode particles can not be collected easily. Usually the fine mode particles are generated in the high temperature conditions especially through boilers and incinerators, so the high efficient and temperature filter is essential for the filtration. In this study, a nano ceramic filter for the removal of fine particles in the high temperature is developed and tested for several characteristics. The nano ceramic filter has double layer of micro and nano structure and the pressure drop and the filtration efficiency for $0.31\;{\mu}m$ at 3 cm/s are 15.45 mmAq, and 96.75%, respectively. The thermal conductivity is $0.038\;W/m{\cdot}K$, and the coefficient of water vapor permeability is $3.63\;g/m^2{\cdot}h{\cdot}mmHg$. It is considered that the sensible heat exchange rate is very poor because the low thermal conductivity but it has high potential to exchange latent heat.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.12
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• pp.2135-2139
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• 2000

The coagulation of anionic colloidal particles by the cyanoguanidine(CG)-formaldehyde resin has been reported to be caused by an electrostatic interaction of the diaminomethylene urea (DU) cation with an anionic surface charge of particles. In this research, 100~500 nm sized cationic cyanoguanidine-formaldehyde resin was synthesized to coagulate anionic dye wastewater, and the results showed that the less pH of aqueous cyanoguanidine-formaldehyde resin solution was, the higher Zeta potential of that was. In case of coagulating 0.4 g/L reactive dye by cyanoguanidine-formaldehyde resin at pH 3, 5, 7, 9, and 11, COD removal and the percent decolorization of synthetic dye wastewater at pH 3 are higher than those of other pH conditions. The COD removal and the percent decolorization of synthetic dye wastewater were 74% and 90% at 400 ppm, pH 3.

• Journal of Environmental Science International
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• v.14 no.8
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• pp.723-737
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• 2005

The effects of pH (5, 7 and 9) and ionic strength of different salts on the flocculation characteristics of humic acid by inorganic (alum, polyaluminum chloride (PAC) with degree of neutralization, r=(OH/Al) of 1.7) and organic (cationic polyelectrolyte) coagulants, have been examined using a simple continuous optical technique, coupled with measurements of zeta potential. The results are compared mainly by the mechanisms of its destabilization and subsequent removal. The destabilization and subsequent removal of humic acid by PAC and cationic polyelectrolyte occur by a simple charge neutralization, regardless of pH of the solution. However, the mechanism of those by alum is greatly dependent on pH and coagulant dosage, i.e., both mechanisms of charge neutralization at lower dosages and sweep flocculation at higher dosages at pH 5, by sweep flocculation mechanism at pH 7, and little flocculation because of electrostatic repulsion between negatively charged humic acid and aluminum species at pH 9. The ionic strength also affects those greatly, mainly based on the charge of salts, and so is more evident for the salts of highly charged cationic species, such as $CaCl_2$ and $MgCI_2.$ However, it is found that the salts have no effect on those at the optimum dosage for alum acting by the mechanism of sweep flocculation at pH 7, regardless of their charge.

• Applied Chemistry for Engineering
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• v.32 no.3
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• pp.237-242
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• 2021

Simultaneous removal technologies of multi-pollutants such as particulate matters (PMs), NOx, SOx, VOCs and ammonia have received consistent attention due to the enhancement of pollutant abatement efficiency in addition to the stringent environmental regulation and emission standard. Pretreatment of insoluble NO by an ozone oxidation can be considered to be more effective route for saving space occupation as well as operation cost in comparison with that of traditional selective catalytic reduction (SCR) process. Moreover the primary advantage of ozone oxidation process is that the simultaneous removal with acidic gas including SOx is also available. Herein, we highlight recent studies of multi-pollutant abatement via ozone oxidation process and the promising research topics for better application in industrial sectors.

• 한국연소학회:학술대회논문집
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• 1997.06a
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• pp.69-76
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• 1997

Industrial-scale pulse corona process to remove $SO_2$ and $NO_x$ simultaneously from combustion flue gas has been studied. The pilot plant built in the present study treats 2,000 $Nm^3$/hr of flue gas from a boiler. The geometry of the pulse corona reactor is similar to that of an electrostatic precipitator commonly used in industry, A thyratron switch and magnetic pulse compressors, which can generate up to 130 kV of peak pulse voltage and up to 30 kW of average pulse power, have been used to produce pulsed corona. The removal efficiencies of $S0_2$ and $NO_x$ with the present process are maximum of 95 % and 85 %, respectively. Electrical power consumption to produce the pulsed corona, which has been one of the major difficulties to apply this process to industry, has been evaluated in the present study. The results showed that the power consumption can be reduced significantly by simultaneous addition of hydrocarbon injection and heterogeneous phase reactions to the process.

• Journal of Soil and Groundwater Environment
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• v.22 no.5
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• pp.128-134
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• 2017

This work presents the adsorption capability of green tea and ginseng leaves to adsorb heavy metals such as Cd(II), Cu(II), and Pb(II) in aqueous solution. FT-IR analysis indicates the presence of oxygen containing functional groups (carboxyl groups) in two kinds of leaves. High pH condition was favorable to the adsorption of heavy metal ions due to the enhanced electrostatic attraction and the precipitation reaction of metal ions. The adsorption of Cd(II), Cu(II), and Pb(II) reached equilibrium within 10 min, achieving high removal efficiencies of 80.3-97.5%. The adsorption kinetics data of heavy metal ions were fitted well with the pseudo-second-order kinetic model. The maximum adsorption amounts of Cd(II), Cu(II), and Pb(II) ions were 8, 3.5, and 15 mg/g, respectively, in the initial concentration range from 0.15 to 0.75 mM. Based on the fitting data obtained from isotherm models, heavy metal adsorption by green tea and ginseng leaves could occur via multi-layer sorption.