• Title/Summary/Keyword: Electron-beam deposition

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The Effect of Annealing on Corrosion Behavior of CoCrTa/CrNi Magnetic Recording Media (CoCrTa/CrNi 자기기록매체의 열처리에 따른 부식거동 변화)

  • 우준형;남인탁
    • Journal of the Korean Magnetics Society
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    • v.9 no.4
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    • pp.210-216
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    • 1999
  • The objective of this paper is to investigate corrosion behaviors of CoCrTa/CrNi thin film and post heat-treatment effect. An electron beam evaporator was used for films deposition. After evaporation, post heat-treatment was carried out under $5.0{\times}10^3$ Torr vacuum condition. Annealing temperature and time were 400 $^{\circ}C$ and 30 min, respectively. To understand the effect of annealing on corrosion behavior of CoCrTa/CrNi, potentiodynamic polarization technique and accelerated corrosion chamber test were undertaken. Corrosion potential is higher for the annealed samples (CoCrTa 400$\AA$/CrNi 1000$\AA$) than for as-deposited one. This is attributed to an enrichment of Cr in the surface layer of the thinfilm resulting in a more corrosion resistant material.

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A study of deterioration of reinforced concrete beams under various forms of simulated acid rain attack in the laboratory

  • Fan, Yingfang;Hu, Zhiqiang;Luan, Haiyang;Wang, Dawei;Chen, An
    • Structural Engineering and Mechanics
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    • v.52 no.1
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    • pp.35-49
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    • 2014
  • This paper studies the behaviour of deteriorated reinforced concrete (RC) beams attacked by various forms of simulated acid rain. An artificial rainfall simulator was firstly designed and evaluated. Eleven RC beams ($120mm{\times}200mm{\times}1800mm$) were then constructed in the laboratory. Among them, one was acting as a reference beam and the others were subjected to three accelerated corrosion methods, including immersion, wetting-drying, and artificial rainfall methods, to simulate the attack of real acid rain. Acid solutions with pH levels of 1.5 and 2.5 were considered. Next, ultrasonic, scanning electron microscopy (SEM), dynamic, and three-point bending tests were performed to investigate the mechanical properties of concrete and flexural behaviour of the RC beams. It can be concluded that the designed artificial simulator can be effectively used to simulate the real acid rainfall. Both the immersion and wetting-drying methods magnify the effects of the real acid rainfall on the RC beams.

Effects of Fe layer on Li insertion/extraction Reactions of Fe/Si Multilayer thin Film Anodes for Lithium Rechargeable Batteries

  • Kim, Tae-Yeon;Kim, Jae-Bum;Ahn, Hyo-Jun;Lee, Sung-Man
    • Journal of Electrochemical Science and Technology
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    • v.2 no.4
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    • pp.193-197
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    • 2011
  • The influences of the thickness and microstructure of Fe layer on the electrochemical performances of Fe/Si multilayer thin film anodes were investigated. The Fe/Si multilayer films were prepared by electron beam evaporation, in which Fe layer was deposited with/without simultaneous bombardment of Ar ion. The kinetics of Li insertion/extraction reactions in the early stage are slowed down with increasing the thickness of Fe layer, but such a slowdown seems to be negligible for thin Fe layers less than about $500{\AA}$. When the Fe layer was deposited with ion bombardment, even the $300{\AA}$ thick Fe layer significantly suppress Li diffusion through the Fe layer. This is attributed to the dense microstructure of Fe layer, induced by ion beam assisted deposition (IBAD). It appears that the Fe/Si multilayer films prepared with IBAD show good cyclability compared to the film deposited without IBAD.

Epitaxial growth of silicon thin films on insulating ($CeO_2$/Si) substrates (절연체 ($CeO_2$/Si)위에 성장된 실리콘 박막의 특성 연구)

  • 양지훈;문병식;김관표;김종걸;정동근;노용한;박종윤
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.322-326
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    • 1999
  • We have investigated the growing process of a silicon film on the $CeO_2/Si$ surface. The silicon was deposited by using electron beam deposition method. The $CeO_2$(111) film was grown on a (111)-oriented silicon substrate at $700^{\circ}C$ at oxygen [partial pressure of $5\times10^{-5}$ Torr. To investigate the condition of epitaxial growth of si films on the $CeO_2/Si$ substrate, we deposited Si at various temperature니 The overlayer silicon was characterized by using x-ray diffraction(XRD). double crystal x-ray diffraction (DCXRD), and transmission electron microscopy (TEM). At temperature higher than $690^{\circ}C$, $CeO_2$ layer was observed at the $CeO_2/Si$ interface, which was formed by chemical reaction with silicon and oxygen dissociated from $CeO_2$. When silicon was deposited on the $CeO_2/Si$ at $620^{\circ}C$, silicon grew epitaxially along the (111)-direction.

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The Effect of Surface Plasmon on Internal Photoemission Measured on Ag/$TiO_2$ Nanodiodes

  • Lee, Hyosun;Lee, Young Keun;Park, Jeong Young
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.662-662
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    • 2013
  • Over the last several decades, innovative light-harvesting devices have evolved to achieve high efficiency in solar energy transfer. Research on the mechanisms for plasmon resonance is very desirable to overcome the conventional efficiency limits of photovoltaics. The influence of localized surface plasmon resonance on hot electron flow at a metal-semiconductor interface was observed with a Schottky diode composed of a thin silver layer on $TiO_2$. The photocurrent is generated by absorption of photons when electrons have enough energy to travel over the Schottky barrier and into the titanium oxide conduction band. The correlation between the hot electrons and the surface plasmon is confirmed by matching the range of peaks between the incident photons to current conversion efficiency (IPCE, flux of collected electrons per flux of incident photons) and UV-Vis spectra. The photocurrent measured on Ag/$TiO_2$ exhibited surface plasmon peaks; whereas, in contrast to the Au/$TiO_2$, a continuous Au thin film doesn't exhibit surface plasmon peaks. We modified the thickness and morphology of a continuous Ag layer by electron beam evaporation deposition and heating under gas conditions and found that the morphological change and thickness of the Ag film are key factors in controlling the peak position of light absorption.

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The Surface Characteristics of Ti/TiN Film Coated Sintered Stainless Steels by EB-PVD Method (EB-PVD법에 의한 Ti/TiN film 코팅된 스테인리스강 소결체의 표면특성)

  • 최한철
    • Journal of the Korean institute of surface engineering
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    • v.34 no.3
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    • pp.195-205
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    • 2001
  • The surface characteristics of Ti/TiN films coated on sintered stainless steels (SSS) by electron beam physical vapour deposition (EB-PVD) were investigated. Stainless steel compacts containing 2, 4, and 10wt%Cu were prepared by the electroless Cu-plating method, which results in increased homogenization in the alloying powder. The specimens were coated with Ti and TiN with a 1.0$\mu\textrm{m}$ thickness respectively by EB-PVD. The microstructures were investigated using scanning electron microscopy (SEM). The corrosion behaviors were investigated using a potentiosat in 0.1 M $H_2$$SO_4$, and 0.1M HCl solutions and the corrosion surface was observed using SEM and XPS. The Ti coated specimens showed rough surface compared to Ti/TiN coated specimens. Ti and Ti/TiN coated SSS revealed a higher corrosion and pitting potential from anodic polarization curves than that of Ti and Ti/TiN uncoated SSS. In addition, Ti/TiN coated SSS containing 10wt% Cu exhibited good resistance to pitting corrosion due to the formation of a dense film on the surface and the decrease in interconnected porosity by electroless coated Cu.

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The ethanol sensors made from α-Fe2O3 decorated with multiwall carbon nanotubes

  • Aroutiounian, Vladimir M.;Arakelyan, Valeri M.;Shahnazaryan, Gohar E.;Aleksanyan, Mikayel S.;Hernadi, Klara;Nemeth, Zoltan;Berki, Peter;Papa, Zsuzsanna;Toth, Zsolt;Forro, Laszlo
    • Advances in nano research
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    • v.3 no.1
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    • pp.1-11
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    • 2015
  • Thin film ethanol sensors made from ${\alpha}-Fe_2O_3$ decorated with multiwall carbon nanotubes(MWCNTs) were manufactured by the electron beam deposition method. The morphology of the decorated ${\alpha}-Fe_2O_3$/MWCNTs (25:1 weight ratios) nanocomposite powder was investigated using the scanning electron microscopy and X-ray diffraction techniques. The thickness of thin films has been determined from ellipsometric measurements. The response of manufactured sensors was investigated at different temperatures of the sensor work body and concentration of gas vapors. Good response of prepared sensors to ethanol vapors already at work body temperature of $150^{\circ}C$ was shown.

Fabrication of Anodic Aluminum Oxide on Si and Sapphire Substrate (실리콘 및 사파이어 기판을 이용한 알루미늄의 양극산화 공정에 관한 연구)

  • Kim Munja;Lee Jin-Seung;Yoo Ji-Beom
    • Korean Journal of Materials Research
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    • v.14 no.2
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    • pp.133-140
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    • 2004
  • We carried out anodic aluminum oxide (AAO) on a Si and a sapphire substrate. For anodic oxidation of Al two types of specimens prepared were Al(0.5 $\mu\textrm{m}$)!Si and Al(0.5 $\mu\textrm{m}$)/Ti(0.1 $\mu\textrm{m}$)$SiO_2$(0.1 $\mu\textrm{m}$)/GaN(2 $\mu\textrm{m}$)/Sapphire. Surface morphology of Al film was analyzed depending on the deposition methods such as sputtering, thermal evaporation, and electron beam evaporation. Without conventional electron lithography, we obtained ordered nano-pattern of porous alumina by in- situ process. Electropolishing of Al layer was carried out to improve the surface morphology and evaluated. Two step anodizing was adopted for ordered regular array of AAO formation. The applied electric voltage was 40 V and oxalic acid was used as an electrolyte. The reference electrode was graphite. Through the optimization of process parameters such as electrolyte concentration, temperature, and process time, a regular array of AAO was formed on Si and sapphire substrate. In case of Si substrate the diameter of pore and distance between pores was 50 and 100 nm, respectively. In case of sapphire substrate, the diameter of pore and distance between pores was 40 and 80 nm, respectively

A Study on the Properties of MgF2 Antireflection Film for Solar Cells

  • Yang, Hyeon-Hun;Park, Gye-Choon
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.1
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    • pp.33-36
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    • 2010
  • $MgF_2$ is a current material used for optical applications in the ultraviolet and deep ultraviolet range. Process variables for manufacturing $MgF_2$ thin film were established in order to clarify the optimum conditions for the growth of the thin film, dependant upon the process conditions, and then by changing a number of the vapor deposition conditions, substrate temperatures, and heat treatment conditions, the structural and optical characteristics were measured. Then, optimum process variables were thus derived. Nevertheless, modern applications still require improvement in the optical and structural quality of the deposited layers. In the present work, in order to understand the composition and microstructure of $MgF_2$, single layers grown on a slide glass substrate using an Electron beam Evaporator (KV-660), were analyzed and compared. The surface substrate temperature, having an effect on the quality of the thin film, was changed from $200^{\circ}C$ to $350^{\circ}C$ at intervals of $50^{\circ}C$. The heat treatment temperature, which also has an effect on the thin film, was changed from $200^{\circ}C$ to $400^{\circ}C$ at intervals of $50^{\circ}C$. The physical properties of the thin film were investigated at various fabrication conditions, such as the substrate temperature, the heat treatment temperature, and the heat treatment time, by X-ray diffraction, and field emission-scanning electron microscopy.

Development of a multi-functional nano-fabrication system for fabrication and measurement (가공 및 측정이 가능한 복합나노가공시스템의 개발)

  • 장동영;박만진;김진현;한동철
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.466-471
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    • 2004
  • In focused-ion-beam (FIB) application of micromachining and device transplantation, four kinds of FIB processes, namely FIB sputtering, FIB-induced etching, redeposition, and FIB-induced deposition, are well utilized. As with FIB systems, scanning electron microscopes(SEMs) were extensively used in the semiconductor industry. They are the tools of choice for defect review and providing the image resolution needed for process monitoring. The enhanced capabilities of a dual-column on one chamber system are quickly becoming realized by the nano industry for performing a wide range of application.

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