• 제목/요약/키워드: Electron probe micro-analyzer

검색결과 69건 처리시간 0.031초

Kinetic Spray 공정으로 제조된 Nb 코팅 소재의 미세조직 및 물성에 미치는 열간 등압 성형(HIP)의 영향 (Effect of Hot Isostatic Pressing on the Microstructure and Properties of Kinetic Sprayed Nb Coating Material)

  • 이지혜;양상선;이기안
    • 한국분말재료학회지
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    • 제23권1호
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    • pp.15-20
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    • 2016
  • Niobium is one of the most important and rarest metals, and is used in the electronic and energy industries. However, it's extremely high melting point and oxygen affinity limits the manufacture of Nb coating materials. Here, a Nb coating material is manufactured using a kinetic spray process followed by hot isotactic pressing to improve its properties. OM (optical microscope), XRD (X-ray diffraction), SEM (scanning electron microscopy), and Vickers hardness and EPMA (electron probe micro analyzer) tests are employed to investigate the macroscopic properties of the manufactured Nb materials. The powder used to manufacture the material has angular-shaped particles with an average particle size of $23.8{\mu}m$. The porosity and hardness of the manufactured Nb material are 0.18% and 221 Hv, respectively. Additional HIP is applied to the manufactured Nb material for 4 h under an Ar atmosphere after which the porosity decreases to 0.08% and the hardness increases to 253 Hv. Phase analysis after the HIP shows the presence of only pure Nb. The study also discusses the possibility of using the manufactured Nb material as a sputtering target.

건식식각에 의한 PZT 박막의 플라즈마 손상 및 회복특성 (Characteristics of Plasma Damage and Recover in PZT Films by Dry Etching)

  • 강명구;김경태;김동표;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.375-378
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    • 2002
  • We investigated the reduction of etching damage by additive O$_2$ in etching gas and recovery of etching damage by O$_2$ annealing. The PZT thin films were etched using additive Ar or O$_2$ into Cl$_2$/CF$_4$ gas mixing ratio of 8/2. In order to recover ferroelectric properties of PZT thin films after etching, the etched PZT thin films were annealed at 600 C in O$_2$ atmosphere for 10 min. The remanent polarization is decreased seriously and fatigue is accelerated in the PZT sample etched in Ar/(C1$_2$+CF$_4$) plasma, whereas these characteristics are improved in O$_2$/(Cl$_2$/CF$_4$). From x-ray photoelectron spectroscopy (XPS) analysis, the intensities of Pb-O, Zr-O and Ti-O peaks are changed and the etch byproducts such as metal chloride and metal fluoride are reduced by O$_2$ annealing. From electron probe micro analyzer (EPMA) and auger electron spectroscopy(AES), O$_2$ vacancy is observed after etching. In x-ray diffraction (XRD), the structure damage in the additive O$_2$ into C1$_2$/CF$_4$ is reduced and the improvement of ferroelectric behavioral annealed sample is consistent with the increase of the (100) and (200) PZT peaks.

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Nb이 첨가된 금속소부도재관용 Ni-Cr 합금 표면의 EPMA 관찰 (A Study on EPMA on Ni-Cr Alloy by Nb content for Porcelain Fused to Metal Crown)

  • 김치영;최성민;조현설
    • 대한치과기공학회지
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    • 제28권1호
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    • pp.19-26
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    • 2006
  • The effect of Nb on interfacial bonding characteristics of Ni-Cr alloy for porcelain fused to metal crown (PFM) has been studied in order to investigate oxide layer. A specimens of Ni-Cr alloy, which is 0.8mm in thickness, within the porcelain furnace of 1,000$^{\circ}C$ with four tests such as air, vacuum, air for 5 minutes and vacuum for 5 minutes in order to examine an oxide behavior of alloy surface generated by the adding of Nb to be controlled at a rate of 0, 1, 3 and 5. Oxide film was observed form of the fired specimens with scanning electron microscope (SEM), and at the same time it measured Electron Probe Micro Analyzer (EPMA). The result of this study were as follows: 1. Cr oxide film and Nb oxide film were observed from the surface of specimen to be controlled at a rate of Nb 1%. 2. Nb oxide film was observed from the interface of specimens to be controlled at a rate of Nb 1% and 3%. 3. The stability of oxide films that treated in air were more stable than treated under vacuum.

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가평지역에서 발견된 철운석에 대한 암석학적, 광물학적 기재 및 예비분류

  • 안인수;김태경;최변각
    • 한국지구과학회:학술대회논문집
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    • 한국지구과학회 2006년도 춘계학술발표회 논문집
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    • pp.111-115
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    • 2006
  • 최근 경기도 가평지역에서 새로운 철운석이 발견되었으며, 이는 한반도에 낙하(fall) 또는 발견(find)된 운석 중 다섯 번째 기록이다. 가평운석(가칭)은 북위 $37^{\circ}52'08'$, 동경$127^{\circ}27'54'$, 고도 147m 지점에서 발견되었으며, 운석의 분류상 철운석에 속한다. 가평운석의 표면은 지표상에서 풍화를 받은 흔적이 나타나나, 내부는 비드만스태튼 무늬(Widmanstatten pattern)와 같은 철운석의 특징이 잘 보존되어 있다. 가평운석의 암석학적, 광물학적 기재와 분류를 위해 주사전자현미경(Scanning Electron Microscope) 및 전자 현미분석기(electron probe micro-analyzer)를 이용했다. 풍화의 산물인 철산화물이 나타나는 최외각부를 제외하면 가평 운석은 거의 순수한 철-니켈 금속광물(Fe-Ni metal)로 이루어져 있다. 이 중 니켈 함량이 적은 카마사이트(kamacite)가 대부분이며 소량의 태나이트(taenite)가 산출되어 비드만스태튼 무늬를 구성한다. 비드만스태튼 무늬의 특징에 의한 분류에 따르면 가평운석은 중립질 또는 조립질 옥타헤드라이트(octahedrite)에 속한다. 철운석은 화학적으로 열 개 이상의 하부그룹으로 세분되며, 가평운석의 정확한 하부그룹으로의 분류는 친철원소에 대한 미량분석이 추가적으로 필요하다. 가평운석의 냉각률은 $^{\sim}1^{\circ}C/Ma$이하로 나타나며, 이는 가평운석이 천천히 냉각된 비교적 규모가 큰 소행성의 핵에서 유래했음을 지시한다.

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Ti기 (TiC+TiB) 하이브리드 복합재료 반응생성합성 및 정밀주조 (In-situ Synthesis and Investment Casting of Titanium Matrix (TiC+TiB) Hybrid Composites)

  • 성시영;박근창;이상화;김영직
    • 한국주조공학회지
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    • 제24권3호
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    • pp.159-164
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    • 2004
  • The aim of the present work is to investigate the possibility of in-situ synthesis and net-shape forming of the titanium matrix (TiC+TiB) hybrid composites using a casting route. From the scanning electron microscopy, electron probe micro-analyzer, X-ray diffraction and thermodynamic calculations, the spherical TiC and needle like TiB reinforced hybrid titanium matrix composites could be obtained in-situ by the conventional melting and casting route between titanium and $B_4C$. No melt-mold reaction occurred between the titanium matrix (TiC+TiB) hybrid composites and the SKK mold, since the mold is consisted with interstitial and substitutional metal-mold reaction products. Not only the sound in-situ synthesis but also the economic net-shape forming of the titanium matrix (TiC+TiB) hybrid composites could be possible by the conventional casting route.

Photoactive Layer Formation with Oven Annealing for a Carbon Electrode Perovskite Solar Cell

  • Kim, Kwangbae;Song, Ohsung
    • 한국재료학회지
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    • 제30권11호
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    • pp.595-600
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    • 2020
  • The photovoltaic properties of perovskite solar cells (PSCs) with a carbon electrode fabricated using different annealing processes are investigated. Perovskite formation (50 ℃, 60 min) using a hot-plate and an oven is carried out on cells with a glass/fluorine doped TiO2/TiO2/ZrO2/carbon structure, and the photovoltaic properties of the PSCs are analyzed using a solar simulator. The microstructures of the PSCs are characterized using an optical microscope, a field emission scanning electron microscope, and an electron probe micro-analyzer (EPMA). Photovoltaic analysis shows that the energy conversion efficiency of the samples fabricated using the hot-plate and the oven processes are 2.08% and 6.90%, respectively. Based on the microstructure of the samples and the results of the EPMA, perovskite is formed locally on the carbon electrode surface as the γ-butyrolactone (GBL) solvent evaporates and moves to the top of the carbon electrode due to heat from the bottom of the sample during the hot plate process. When the oven process is used, perovskite forms evenly inside the carbon electrode, as the GBL solvent evaporates extremely slowly because heat is supplied from all directions. The importance of the even formation of perovskite inside the carbon electrode is emphasized, and the feasibility of oven annealing is confirmed for PSCs with carbon electrodes.

집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝 (Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam)

  • 이홍규;이경철;안민영;이천
    • 한국전기전자재료학회논문지
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    • 제13권11호
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    • pp.969-975
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    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

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열처리에 의한 14K, 18K yellow gold alloy의 경도 향상 및 표면 결함 완화 (Enhancement of Hardness and Moderation of Surface Defects of 14K, 18K Yellow Gold Alloy by Heat Treatment)

  • 안지현;서진교;안용길;박종완
    • 한국표면공학회지
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    • 제43권2호
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    • pp.86-90
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    • 2010
  • In this study, we conducted heat treatment on 14K, 18K yellow gold alloy at various temperature conditions for improving their hardness and moderating their surface defects. Also after the heat treatment we used EPMA (Electron Probe Micro Analyzer), XRF (x-ray Fluorescence spectroscopy) for qualitative analysis and OM (optical microscope), SEM (scanning electron microscope) to investigate the changes of surface grain boundary. We used Vickers hardness tester to verify the changes of hardness. After the heat treatment, 14K, 18K gold alloys showed improved hardness and moderated surface defects at specific temperatures and duration.

급속 응고 된 Bi2Te3-PbTe계 열전소재의 미세구조와 열전 특성 (Microstructures and Thermal Properties of Water Quenched Thermoelectric Material in Bi2Te3-PbTe System)

  • 임주혁;정규호;유현우;김광천;김진상
    • 한국전기전자재료학회논문지
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    • 제23권6호
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    • pp.502-507
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    • 2010
  • In order to design nano structured materials with enhanced thermoelectric properties, the alloys in the pseudo-binary $Bi_2Te_3$-PbTe system are investigated for their micro structure properties. For this synthesis, the liquid alloys are cooled by the water quenching method. Micro structure images are obtained by using an electron probe micro analyzer(EPMA). Dendritic and lamellar structures are clearly observed with the variation in the composition ratio between $Bi_2Te_3$ and PbTe. The increase in the $Bi_2Te_3$ composition ratio causes to change of the structure from dendritic to lamellar. The Seebeck coefficient of sample 5, in which the mixture rate of $Bi_2Te_3$ is 83%, is measured as the highest value. In contrast, the others decrease with the increase of the $Bi_2Te_3$ composition ratio. Meanwhile, p-type characteristics are observed in sample 6, at 91%-$Bi_2Te_3$ mixture rate. The power factors of the all samples are calculated with the Seebeck coefficient and resistivity.

고 Mn강의 용접 열영향부에서의 기계적 특성평가

  • 유재홍;김상훈;박영환;이창희
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2010년도 춘계학술발표대회 초록집
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    • pp.25-25
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    • 2010
  • 8 wt.% 망간 (Mn) 이 함유된 마르텐사이트계 고 Mn강은 고강도용 강재로 산업현장에 적용될 수 있는 유용한 재료이다. 그러나, 다량의 망간의 함유로 인한 용접성 저하로 상용화를 위해서는 용접성 평가가 필요하다. 본 연구에서는 gleeble simulator 를 통해 열영향부를 재현한 후 local brittle zones(LBZs) 을 규명하였다. 모재는 Electron Probe Micro Analyzer (EPMA) 및 X-Ray Diffractometer(XRD) 로 분석결과 다량의 Mn 함유로 인해 lath마르텐사이트 미세조직과 소량의 잔류 오스테나이트로 구성되어 있었다. 용접부에서 모재까지 Vickers 경도계로 경도 분포를 측정한 결과 coarse-grained heat affected zone (CGHAZ) 에서 fine-grained heat affected zone (FGHAZ) 까지 경도 증가 후 subcritical heat affected zone (SCHAZ) 까지 급격한 경도 감소 거동을 보였다. 열영향부의 미세조직은 투과전자현미경 (TEM)으로 분석하였다. 연성취성천이온도 (DBTT) 측정을 위해 온도 구간을 상온, $0^{\circ}C$, $-20^{\circ}C$, $-40^{\circ}C$, $-60^{\circ}C$, $-80^{\circ}C$으로 설정하여 charpy impact test를 시행하였다. 그 결과 coarse-grained heat affected zone(CGHAZ) 에서 조대한 결정립으로 인해 낮은 충격값을 보였다.

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