• Journal of the Korean Vacuum Society
• /
• v.18 no.3
• /
• pp.186-196
• /
• 2009

Since it is difficult to extract a high flux ion beam directly at an energy of hyperthermal range ($1{\sim}100\;eV$), especially, lower than 50 eV, the ions should be neutralized into neutral particles and extracted as a neutral beam. A plasma source required to generate and efficiently transport high flux hyperthermal neutral beams should be easily scaled up and produce a high ion density (${\ge}10^{11}\;cm^{-3}$) even at a low working pressure (${\le}$ 0.3 mTorr). It is suggested that the required plasma source can be realized by Electron Cyclotron Resonance (ECR) plasmas with diverse magnetic field configurations of permanent magnets such as a planar ECR plasma source with magnetron field configuration and cylindrical one with axial magnetic fields produced by permanent magnet arrays around chamber wall. In both case of the ECR sources, the electron confinement is based on the simple mirror field structure and efficiently enhanced by electron drifts for producing the high density plasma even at the low pressure.

• Journal of the Korean Institute of Telematics and Electronics D
• /
• v.35D no.9
• /
• pp.42-47
• /
• 1998

We have fabricated electron-optical lens for micro E-beam system that can overcome the limitation of current E-beam lithography. Our electron-optical lens consists of multiple silicon electrodes which were fabricated by micromachining technology and assembled by anodic bonding. The assembled system was installed in UHV chamber to observe the emission characteristics of focused electrons by the electro-optical lens. We used STM(Scanning Tunneling Microscope) tip for electron source. By performing lithography with the focused electrons with PMMA(poly-methylmethacrylate) as E-beam resist. We could draw 0.13${\mu}{\textrm}{m}$ nano-scale lines.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.13 no.3
• /
• pp.40-47
• /
• 1999

We have established a pulsed low-energy large-aIXTture electron beam(LELAEB) generation system with an energy of 2OO[keV], current of 1[A], pulse repetition rate of 200[Hz], and several tens of ${\mu}s$ pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Electron beam does not need to be scanned over target objects because of large beam aIXTture of $300[\textrm{cm}^2]$. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, We report about the design and manufacture of LELAEB generation system based on the theoretical analysis in order to study lXlssibility of increasing the efficiency of IELAEB accelerator. We also report on the possibility of large aperture beam current generation and the current density uniformity based on the experiIrental results.esults.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.42 no.3 s.333
• /
• pp.1-8
• /
• 2005

In this paper, we analyzed the DC and RF characteristics of $0.1\;{\mu}m$ metamorphic high electron mobility transistor (MHEMT) using the ISE-TCAD simulation tool. we also analyzed the effects or the scaling on vertical and lateral dimensions such as a gate length, source-drain spacing, and channel thickness. We discussed the degradation of extrinsic transconductance $g_{m,max}$ in the MHEMTs adopting the gate length $(L_g)$ of $sub-0.1\;{\mu}m$. We suggested the model describing the effects on the vertical and lateral parameter scaling.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.257-257
• /
• 2011

The amorphous indium-gallium-zinc-oxide (a-IGZO) materials for use in high performance display research fields are strongly investigated due to its good performance, such as high mobility and better transparency. However, the stability of a-IGZO materials is increasingly becoming one of critical issues due to the sub-gap electron trap sites induced by rough interfaces during deposition processing. It is well-known that the threshold voltage shift is related to interface roughness and oxygen vacancy formed by breaking weak chemical bonds. Here, we report the better properties of transparent oxide transistors by reducing the threshold voltage shift with an external rf plasma supported magnetron sputtering system. Mainly, our sputtering method causes the surface of sample to be sleek, so that it prevents the formation of various defects, such as shallow electron trap sites in the interface. External rf power was applied from 0 to 50W during RF sputtering process to enhance the stability of our oxide transistor without having a large voltage shift. To observe the effects of external rf-plasma source on the properties of our devices, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM) are carried out to observe surface roughness and morphology of sputtered thin film. In addition, typical electrical properties, such as I-V characteristics are analyzed.

• Bulletin of the Korean Chemical Society
• /
• v.34 no.10
• /
• pp.3046-3054
• /
• 2013

Synthesis of Carbon Nanotube bundles has been achieved by simple and economical solvothermal procedure at very low temperature of $180^{\circ}C$. The product yield obtained was about 70-75%. The optimization of reaction conditions for an efficient synthesis of CNTs has been presented. The CNTs are obtained by reduction of hexachlorobenzene in the presence of Na/Ni in cyclohexane. The X-ray diffraction, Fourier transform infrared and Raman spectral studies have inferred us the graphene structure of the products. The CNTs formed as the bundles were viewed on scanning electron microscope, transmission electron microscope and high-resolution transmission electron microscope. These are the multiwalled CNTs with outer diameter of 5-10 nm, the inner diameter 2-4 nm and cross sectional diameter up to 5 nm. Brunauer-Emmett-Teller (BET) based $N_2$ gas adsorption studies have been made to obtain BET surface area and $H_2$ storage capacity. Effect of the experimental variables such as reaction temperature, amount of catalyst and the amount of carbon source were investigated. It is found that they affect significantly on the product nature and yield.

• Radiation Oncology Journal
• /
• v.7 no.2
• /
• pp.293-297
• /
• 1989

Electron contamination due to the interaction between radiation beam and material was analyzed for the factors such as source-skin distance (SSD), field size, tray characteristics and position of filter, which can affect the surface dose in Cobalt teletherapy. Surface dose in open beam was more influenced by SSD with increasing field size. Relative surface charge (RSC) increased with the use of tray (solid, circular hole, slotted), compared with open beam, which is thought to be due to increased electron contamination of the tray. To reduce the surface dose, 0.4mm thick Lipowitz metal filter was used. Compared with open beam, RSC decreased by 8.8%, 11.3%, 13.3%, 16.6%, 19.3% and 21.7% for the field size of $5{\times}5$, $10{\times}10$, $15{\times}15$, $20{\times}20$, $25{\times}25$ and $30{\times}30cm^2$, respectively. On the contrary, use of Lipowitz metal filter increased RSC at 60cm or less SSD. Surface dose was effectively reduced with Lpowitz metal filter placed right below solid tray in Cobalt teletherapy.

• Nuclear Engineering and Technology
• /
• v.55 no.11
• /
• pp.4246-4251
• /
• 2023

The optimized design of a Neutron Activation Analysis (NAA) system, including Delayed Gamma NAA (DGNAA) and Prompt Gamma NAA (PGNAA), has been proposed in this research based on Mevex Linac with 5 MeV electron energy and 50 kW power as a neutron source. Based on the MCNPX 2.6 simulation, the optimized configuration contains; tungsten as an electron-photon converter, BeO as a photoneutron target, BeD₂ and plexiglass as moderators, and graphite as a reflector and collimator, as well as lead as a gamma shield. The obtained thermal neutron flux at the beam port is equal to 2.06 × 10⁹ (# /cm².s). In addition, using the optimized neutron beam, the detection limit has been calculated for some elements such as H-1, B-10, Na-23, Al-27, and Ti-48. The HPGe Coaxial detector has been used to measure gamma rays emitted by nuclides in the sample. By the results, the proposed system can be an appropriate solution to measure the concentration and toxicity of elements in different samples such as food, soil, and plant samples.

• Nuclear Engineering and Technology
• /
• v.55 no.11
• /
• pp.4167-4172
• /
• 2023

Miniaturized tissue equivalent proportional counters (mini-TEPCs) are proper for radiation dosimetry in medical application because the small size of the dosimeter could prevent pile-up effect under the high intensity of therapeutic beam. However, traditional methods of calibrating mini-TEPCs using internal alpha sources are not feasible due to their small size. In this study, we investigated the use of electron and proton edges on Monte Carlo-generated lineal energy spectra as markers for calibrating a 0.9 mm diameter and length mini-TEPC. Three possible markers for each spectrum were calculated and compared using different simulation tools. Our simulations showed that the electron edge markers were more consistent across different simulation tools than the proton edge markers, which showed greater variation due to differences in the microdosimetric spectra. In most cases, the second marker, y_δδ, had the smallest uncertainty. Our findings suggest that the lineal energy spectra from mini-TEPCs can be calibrated using Monte Carlo simulations that closely resemble real-world detector and source geometries.

• Proceedings of the IEEK Conference
• /
• 2000.06b
• /
• pp.282-285
• /
• 2000

Four helical resonators are distributed in a 2 ${\times}$ 2 array by modifying upper part of the conventional reactive ion etching(RIE) type LCD etcher in order to prepare a large area plasma source. Since the resonance condition of the RF signal to the helical antenna, one RF power supply is used for delivering the power efficiently to all four helical resonators without an impedance matching network Previous work of 2 ${\times}$ 2array inductively coupled plasma(ICP)requires one matching circuit to each ICP antenna for more efficient power deliverly Distributions of ion density and electron temperature are measured in terms of chamber pressure, gas flow rate and RF power . By adjusting the power distribution among the four helical resonator units, argon plasma density of higher than 10$\^$17/㎥ with the uniformity of better than 7％ can be obtained in the 620 ${\times}$ 620$\textrm{mm}^2$ chamber.