• Title/Summary/Keyword: Electron Heating

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Silicon On Insulator with Buried Alumina Layer (알루미나를 매몰절연막으로 사용한 Silicon On Insulator)

  • Bae, Young-Ho;Kwon, Jae-Woo;Kong, Dae-Young;Kwon, Kyung-Wook;Lee, Jong-Hyun;Cristoloveanu, S.;Oshima, K.;Kang, Min-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.130-132
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    • 2003
  • ALD(Atomic Layer Deposition) 법으로 박막 알루미나를 형성한 후 웨이퍼 접합과 박막화 공정으로 알루미나를 매몰절연막으로 하는 SOI 구조를 제조하고 그 특성을 조사하였다. 알루미나 박막의 유전 특성과 실리콘과의 계면 특성은 C-V 측정으로, 단면 분석은 SEM(Scanning Electron Microscope) 촬영으로 조사하였다. 알루미나와 실리콘을 접합하기 위하여 1100C에서 열처리를 행한 후 알루미나와 실리콘의 계면 상태 밀도는 $2.5{\times}10^{11}/cm^2-eV$였다. 그리고 SEM의 단연 분석과 AES(Auger Electron Spectroscope)의 깊이 방향 분석을 통해서 매몰 알루미나층의 존재를 확인하였다. 알루미나는 실리콘 산화막보다 높은 열전도성을 가지므로 이를 매몰절연막으로 하여 SOI 구조를 제조하면 기존의 실리콘산화막을 매몰절연막으로 하는 SOI를 기판으로 하여 제조되는 소자보다 selg heating 효과가 감소된 우수한 특성의 소자를 제조할 수 있다.

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The Method of Thermograph using Thermoelectric Sensor Device in the Carbon fiber Thick Films (Carbon fiber 후막형 열전센서 소자를 이용한 적외선 체열진단)

  • Song, M.J.;Kim, M.H.;Ryu, S.M.;Lee, H.S.;Lee, W.J.;Park, C.B.;Choi, W.S.;Kim, T.W.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.04b
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    • pp.1-2
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    • 2008
  • Thick films of Carbon fiber were prepared by a heating element of plan shape made in Darin co.. We have investigated surface morphology of the specimen depending on second heat-treatment temperatures. X-ray diffraction patterns of Carbon fiber thick films show that the specimen heat treated below $600^{\circ}C$ was an amorphous phase and the one heat treated above $1100^{\circ}C$ forms a poly-crystallization. Scanning electron microscope(SEM) image of Carbon fiber thick films of the specimen heat treated in between 900 and $1100^{\circ}C$ shows a grain growth. At $1100^{\circ}C$, the specimen stops grain-growing and becomes a poly-crystallization.

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In-situ Observation of Hydride Stability of Vanadium Alloys in Electron Microscope

  • Ohnuki, S.;Takase, K.;Yashiki, K.;Hamada, K.;Suda, T.;Watanabe, S.
    • Applied Microscopy
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    • v.36 no.spc1
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    • pp.57-61
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    • 2006
  • High-resolution microscopy was applied for surveying hydride stability in Vanadium alloys, which are candidate for hydrogen storage materials of advanced hydrogen energy systems. $V_2H$ hydride in V alloys was stable at room temperature under the vacuum condition, but it was decomposed during heating up to $100^{\circ}C$. It was confirmed from HRTEM image and FFT that $V_2H$ has a BCT structure, where hydrogen atoms locate at octahedral sites. Crystal orientation was <110> beta// <110> mat., and lattice strain is about 10%. After the decomposition of the hydride, relatively large lattice expansion was observed in the matrix, which suggests that hydrogen atoms should be trapped by lattice defects and included in the matrix. Intensive electron beam also enhanced the decomposition.

Fabrication and Characterization of Highly Reactive Al/CuO Nano-composite using Graphene Oxide (산화그래핀을 적용한 고반응성 Al/CuO 나노복합재 제조 및 분석)

  • Lim, YeSeul
    • Journal of Powder Materials
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    • v.26 no.3
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    • pp.220-224
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    • 2019
  • The aluminum (Al)/copper oxide (CuO) complex is known as the most promising material for thermite reactions, releasing a high heat and pressure through ignition or thermal heating. To improve the reaction rate and wettability for handling safety, nanosized primary particles are applied on Al/CuO composite for energetic materials in explosives or propellants. Herein, graphene oxide (GO) is adopted for the Al/CuO composites as the functional supporting materials, preventing a phase-separation between solvent and composites, leading to a significantly enhanced reactivity. The characterizations of Al/CuO decorated on GO(Al/CuO/GO) are performed through scanning electron microscopy, transmission electron microscopy, and energy dispersive X-ray spectroscopy mapping analysis. Moreover, the functional bridging between Al/CuO and GO is suggested by identifying the chemical bonding with GO in X-ray photoelectron spectroscopy analysis. The reactivity of Al/CuO/GO composites is evaluated by comparing the maximum pressure and rate of the pressure increase of Al/CuO and Al/CuO/GO. The composites with a specific concentration of GO (10 wt%) demonstrate a well-dispersed mixture in hexane solution without phase separation.

In-situ formation of co particles encapsulated by graphene layers

  • Minjeong Lee;Gyutae Kim;Gyu Hyun Jeong;Aram Yoon;Zonghoon Lee;Gyeong Hee Ryu
    • Applied Microscopy
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    • v.52
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    • pp.7.1-7.6
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    • 2022
  • The process of encapsulating cobalt nanoparticles using a graphene layer is mainly direct pyrolysis. The encapsulation structure of hybrids prepared in this way improves the catalyst stability, which greatly reduces the leaching of non-metals and prevents metal nanoparticles from growing beyond a certain size. In this study, cobalt particles surrounded by graphene layers were formed by increasing the temperature in a transmission electron microscope, and they were analyzed using scanning transmission electron microscopy (STEM). Synthesized cobalt hydroxide nanosheets were used to obtain cobalt particles using an in-situ heating holder inside a TEM column. The cobalt nanoparticles are surrounded by layers of graphene, and the number of layers increases as the temperature increases. The interlayer spacing of the graphene layers was also investigated using atomic imaging. The success achieved in the encapsulation of metallic nanoparticles in graphene layers paves the way for the design of highly active and reusable heterogeneous catalysts for more challenging molecules.

Fabrication of Solid Oxide Fuel Cells with Electron Beam Physical Vapor Deposition: I. Preparation of Thin Electrolyte Film of YSZ (전자빔 물리증착을 이용한 고체 산화물 연료전지의 제조 : I. YSZ 박막 전해질의 제조)

  • Kim, Hyoungchul;Koo, Myeong-Seo;Park, Jong-Ku;Jung, Hwa-Young;Kim, Joosun;Lee, Hae-Weon;Lee, Jong-Ho
    • Journal of the Korean Ceramic Society
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    • v.43 no.2 s.285
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    • pp.85-91
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    • 2006
  • Electron Beam Physical Vapor Deposition (EB-PVD) was applied to fabricate a thin film YSZ electrolyte with large area on the porous NiO-YSZ anode substrate. Microstructural and thermal stability of the as-deposited electrolyte film was investigated via SEM and XRD analysis. In order to obtain an optimized YSZ film with high stability, both temperature and surface roughness of substrate were varied. A structurally homogeneous YSZ film with large area of $12\times12\;cm^2$ and high thermal stability up to $900^{\circ}C$ was fabricated at the substrate temperature of $T_s/T_m$ higher than 0.4. The smoother surface was proved to give the better film quality. Precise control of heating and cooling rate of the anode substrate was necessary to obtain a very dense YSZ electrolyte with high thermal stability, which affords to survive after post heat treatment for fabrication a cathode layer on it as well as after long time operation of solid oxide fuel cell at high temperature.

A Numerical Study on Phonon Spectral Contributions to Thermal Conduction in Silicon-on-Insulator Transistor Using Electron-Phonon Interaction Model (전자-포논 상호작용 모델을 이용한 실리콘 박막 소자의 포논 평균자유행로 스펙트럼 열전도 기여도 수치적 연구)

  • Kang, Hyung-sun;Koh, Young Ha;Jin, Jae Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.41 no.6
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    • pp.409-414
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    • 2017
  • The aim of this study is to understand the phonon transfer characteristics of a silicon thin film transistor. For this purpose, the Joule heating mechanism was considered through the electron-phonon interaction model whose validation has been done. The phonon transport characteristics were investigated in terms of phonon mean free path for the variations in the device power and silicon layer thickness from 41 nm to 177 nm. The results may be used for developing the thermal design strategy for achieving reliability and efficiency of the silicon-on-insulator (SOI) transistor, further, they will increase the understanding of heat conduction in SOI systems, which are very important in the semiconductor industry and the nano-fabrication technology.

TOWARD NEXT GENERATION SOLAR CORONAGRAPH: DEVELOPMENT OF COMPACT DIAGNOSTIC CORONAGRAPH ON ISS

  • Cho, Kyungsuk;Bong, Suchan;Choi, Seonghwan;Yang, Heesu;Kim, Jihun;Baek, Jihye;Park, Jongyeob;Lim, Eun-Kyung;Kim, Rok-Soon;Kim, Sujin;Kim, Yeon-Han;Park, Young-Deuk;Clarke, S.W.;Davila, J.M.;Gopalswamy, N.;Nakariakov, V.M.;Li, B.;Pinto, R.F.
    • The Bulletin of The Korean Astronomical Society
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    • v.42 no.2
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    • pp.66.2-66.2
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    • 2017
  • The Korea Astronomy and Space Science Institute plans to develop a coronagraph in collaboration with National Aeronautics and Space Administrative (NASA) and install it on the International Space Station (ISS). The coronagraph is an externally occulted one stage coronagraph with a field of view from 2.5 to 15 solar radii. The observation wavelength is approximately 400 nm where strong Fraunhofer absorption lines from the photosphere are scattered by coronal electrons. Photometric filter observation around this band enables the estimation of 2D electron temperature and electron velocity distribution in the corona. Together with the high time cadence (< 12 min) of corona images to determine the geometric and kinematic parameters of coronal mass ejections, the coronagraph will yield the spatial distribution of electron density by measuring the polarized brightness. For the purpose of technical demonstration, we intend to observe the total solar eclipse in 2017 August for the filter system and to perform a stratospheric balloon experiment in 2019 for the engineering model of the coronagraph. The coronagraph is planned to be installed on the ISS in 2021 for addressing a number of questions (e.g. coronal heating and solar wind acceleration) that are both fundamental and practically important in the physics of the solar corona and of the heliosphere.

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A Study on the Stability of the Accelerating Voltages in Scanning Electron Microscopy (주사전자현미경에서 가속전압의 안정성 연구)

  • Bae, Moon-Seob;Oh, Sang-Ho;Cho, Yang-Koo;Lee, Hwack-Joo
    • Applied Microscopy
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    • v.34 no.1
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    • pp.51-59
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    • 2004
  • The high acceleration voltage system used in scanning electron microscope were designed and manufactured to test its stability. The Cockcroft-Walton circuits are used both in the cathode voltage up to -30 kV and in the Wehnelt cylinder of -2 kV. The operating voltage of 6 V was applied to the heating of the filament. The wave forms which are formed in the second leg of the high voltage transformer were observed in the oscilloscope with 2 V of DC input. When the high voltages were in the range between 5 kV and 12 kV, the highest value of the stabilities of the generated voltages was obtained as 0.002%.

TOWARD A NEXT GENERATION SOLAR CORONAGRAPH: DEVELOPMENT OF A COMPACT DIAGNOSTIC CORONAGRAPH FOR THE ISS

  • Cho, K.S.;Bong, S.C.;Choi, S.;Yang, H.;Kim, J.;Baek, J.H.;Park, J.;Lim, E.K.;Kim, R.S.;Kim, S.;Kim, Y.H.;Park, Y.D.;Clarke, S.W.;Davila, J.M.;Gopalswamy, N.;Nakariakov, V.M.;Li, B.;Pinto, R.F.
    • Journal of The Korean Astronomical Society
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    • v.50 no.5
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    • pp.139-149
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    • 2017
  • The Korea Astronomy and Space Science Institute plans to develop a coronagraph in collaboration with National Aeronautics and Space Administration (NASA) and to install it on the International Space Station (ISS). The coronagraph is an externally occulted one-stage coronagraph with a field of view from 3 to 15 solar radii. The observation wavelength is approximately 400 nm, where strong Fraunhofer absorption lines from the photosphere experience thermal broadening and Doppler shift through scattering by coronal electrons. Photometric filter observations around this band enable the estimation of 2D electron temperature and electron velocity distribution in the corona. Together with a high time cadence (<12 min) of corona images used to determine the geometric and kinematic parameters of coronal mass ejections, the coronagraph will yield the spatial distribution of electron density by measuring the polarized brightness. For the purpose of technical demonstration, we intend to observe the total solar eclipse in August 2017 with the filter system and to perform a stratospheric balloon experiment in 2019 with the engineering model of the coronagraph. The coronagraph is planned to be installed on the ISS in 2021 for addressing a number of questions (e.g., coronal heating and solar wind acceleration) that are both fundamental and practically important in the physics of the solar corona and of the heliosphere.