• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• Korean Journal of Materials Research
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• v.7 no.1
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• pp.33-39
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• 1997

Single phase pero~~skite lead lanthanum titanate thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrates at the temperature of $480^{\circ}C$ by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVD) using metal organic sources $Pb(DPM)_2$ pre-flowing treatment in ECIi oxygen plasma before fabricating PLT films 11romote the perovskite nucleation due to stable supplying of the $Pb(DPM)_2$ and providing the F'h-rich atmosphere in the early stage of deposition. $Pb(DPM)_2$ pie-flonring treatment enhanced the properties of PLT films. The charactcristics of the PLT filrris were investigated as a tunction of the flow rate of Ti-source. The PL'i' films were grown in a perovskite structure tvith (100) preferred orientation. The high X-ray diffraction intensity and dielectric constant were obtained from the stoichiometric perovskite $(Pb,La)TiO_3$.

• Journal of The Korean Society of Grassland and Forage Science
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• v.22 no.1
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• pp.51-58
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• 2002

PSI-H is an intrinsic membrane protein known to be essential for efficient electron flow in PSI complex. We isolated a cDNA clone encoding a PSI-H subunit homolog from Chinese cabbage (Brassica campestris L.). The cDNA, designated bpsaH, had an insert of 435 bp and a full open reading frame that would encode a protein of 145 amino acids. The amino acid sequence deduced from the cDNA sequence is 79.3% identical to that of spinach, suggesting the cDNA most likely encodes Chinese cabbage PSI-H subunit. The bpasH was expressed at high level in leaf tissue and low level in flower bud, whereas it was undetectable in root tissue.

• Journal of Sensor Science and Technology
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• v.23 no.2
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• pp.114-121
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• 2014

We report a polysilicon active area membrane field effect transistor (PSAFET) pressure sensor for low stress deflection of membrane. The PSAFET was produced in conventional FET semiconductor fabrication and backside wet etching. The PSAFET located at the front side measured pressure change using 300 nm thin-nitride membrane when a membrane was slightly strained by the small deflection of membrane shape from backside with any physical force. The PSAFET showed high sensitivity around threshold voltage, because threshold voltage variation was composed of fractional function form in sensitivity equation of current variation. When gate voltage was biased close to threshold voltage, a fractional function form had infinite value at $V_{tn}$, which increased the current variation of sensitivity. Threshold voltage effect was dominant right after the PSAFET was turned on. Narrow transistor channel established by small current flow was choked because electron could barely cross drain-source electrodes. When gate voltage was far from threshold voltage, threshold voltage effect converged to zero in fractional form of threshold voltage variations and drain current change was mostly determined by mobility changes. As the PSAFET fabrication was compatible with a polysilicon FET in CMOS fabrication, it could be adapted in low pressure sensor and bio molecular sensor.

• Korean Journal of Food Science and Technology
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• v.20 no.4
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• pp.470-475
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• 1988

The extrusion-cooking method was used to make gelatinized rice extrudate from rice grits of the Chuchung and the Samgang varieties. The water contents of raw rice grits varied from 15% to 25%, and the physicochemical properties of extrudates were evaluated. Low moisture content showed high expansion ratio in rice extrudate and resulted in some decrease in gelatinization, bulk density and break strength. Increasing the water content to 25% resulted in increase in water absoption index but decrease in water solubility index. With regards to Brabender Amylograph values and rheological patterns, higher moisture content in raw materials revealed stronger pseudoplastic flow behavior with lower viscogram property. Hunter's color values of rice flours extruded at low water content were low in b values. Scanning electron microscopy demonstrated the break-down of starch granules during extrusion.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1217-1223
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is dimethyl methyl phosphonate(C$_3$ $H_{9}$ $O_3$P, DMMP) that is simulant gas of nerve gas. Sensing materials were Sn $O_2$ added a-Al$_2$ $O_3$ with 0∼20wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor device was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Total size of device was 7${\times}$10${\times}$0.6㎣. Crystallite size & phase identification and morphology of fabricated Sn $O_2$ powders were analyzed by X-ray diffraction and by a scanning electron microscope, respectively. Fabricated sensor was measured as flow type and resistance change of sensing material was monitored as real time using LabVIEW program. The best sensitivity was 75% at adding 4wt.% $\alpha$-Al$_2$ $O_3$, operating temperature 30$0^{\circ}C$ to DMMP 0.5ppm. Response and recovery time were about 1 and 3min., respectively. Repetition measurement was very good with $\pm$3％ in full scale.TEX>$\pm$3％ in full scale.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.1
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• pp.108-115
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• 2018

In bone tissue engineering, polycaprolactone (PCL) is one of the most widely used biomaterials to manufacture scaffolds as a synthetic polymer with biodegradability and biocompatibility. The polymer deposition system (PDS) with four axis heads, which can dispense bio-polymers, has been used in scaffold fabrication for tissue engineering applications. A dual-head deposition technology of PDS is an effective technique to fabricate 3D scaffolds. The electrospinning technology has been widely used to fabricate porous and highly interconnected polymer fibers. Thus, PDS can fabricate nanofiber-combined hybrid scaffolds using fused deposition modeling (FDM) and electrospinning methods. This study aims to fabricate nanofiber-combined scaffolds with uniform nanofibers using PDS. The PCL nanofibers were fabricated and evaluated according to the fabrication process parameters. PCL nanofibers were successfully fabricated when the applied voltage, tip-to-collector distance, flow rate, and solution concentration were 5 kV, 1 cm, 0.1 ml/h, and 8 wt%, respectively. The cell proliferation was evaluated according to the electrospinning time. Scanning electron microscopy was used to acquire images of the cross-sectioned hybrid scaffolds. The cell proliferation test of the PCL and nanofiber-combined hybrid scaffolds was performed using a CCK-8 assay according to the electrospinning time. The result of in-vitro cell proliferation using osteosarcoma MG-63 cells shows that the hybrid scaffold has good potential for bone regeneration.

• Journal of Korean Society of Water and Wastewater
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• v.17 no.4
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• pp.534-541
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• 2003

Membrane processes are now frequently considered for application in drinking water treatment. The biggest impediment for applying membrane processes is fouling that comes from mass flux (such as particle and organic matter) to the membrane surface and its pores due to convection flow through the membrane. Natural organic matter (NOM) has been reported as the most detrimental foulant. Some research also indicated that particles were often the dominant cause of fouling. Therefore, both NOM and particle fouling need to be examined to better understand fouling in ultrafiltration. Two waters from natural sources, Lake Austin water and Missouri River water, were selected. Both waters are relatively hard waters but has significantly different particle concentrations, which will elucidate effects of particles on membrane fouling. Precipitative softening is traditionally designed to remove hardness ions in hard waters but it can also remove particles and organic matter. Therefore, the integrated water treatment with softening and ultrafiltration is proposed as a promising option for hard waters. The three levels of softening were used to represent different degrees of pretreatment to ultrafiltration in terms of organic matter (i.e., NOM fouling) and precipitates (i.e., particle fouling by further precipitation). Results showed that natural particles in Missouri River water was detrimental foulants of ultrafiltration. As the levels of softening were increased, NOM and particle removal was increased, and thus fouling was decreased. Direct images of the surface of the membranes by scanning electron microscopy allowed observation of the different properties of particles caught in fibril networks of natural organic matter.

• Membrane Journal
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• v.27 no.1
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• pp.77-83
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• 2017

Transient behavior of fouling resistance was observed with a laboratory-scaled, submerged microfiltration membrane system treating high-turbidity source water consisting of inorganic silica particles and humic acid. Fouling mitigation efficiency with inorganic silica particles caused by aeration was reduced significantly as both humic acid and calcium ion existed together. Scanning electron microscopic observations showed that humic acid was adsorbed onto the surface of inorganic silica particles in the presence of calcium. Turbidity removal was achieved almost completely by submerged MF system regardless of feed compositions. However, the $UV_{254}$ removal of humic acid was improved in the presence of both calcium and inorganic silica particles. Additionally, increasing air-flow rate tended to increase $UV_{254}$ removal efficiency higher than 80%. This may be caused by back-transport of humic acid enhanced by inorganic silica particles providing surface for organic adsorption in the presence of calcium.

• Journal of the Korea Institute of Military Science and Technology
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• v.6 no.3
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• pp.54-61
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• 2003

$SnO_2$ gas sensor for the detection DMMP, simulant of nerve gas was fabricated and its characteristics were examined. Sensing materials were $SnO_2$ added by TEX>$\alpha$-$Al_{2}O_{3}$ with 0∼20wt.% and $In_{2}O_{3}$ with 0∼3wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Its dimension was 7$\times$10$\times$0.6$\textrm{mm}^2$. Crystallite size 8t phase identification, specific surface area and morphology of fabricated $SnO_2$ powders were analyzed by X-ray diffraction(XRD), surface area analyzer(BET) and by a scanning electron microscope(SEM), respectively. Sensor was measured as flow type and sensor resistance change was monitored as real time using LabVIEW program. The best sensitivities were 75% at adding 4wt.% TEX>$\alpha$-$Al_{2}O_{3}$, operating temperature $300^{\circ}C$ and 87% at adding 2wt.% $In_{2}O_{3}$, operating temperature $350^{\circ}C$ to DMMP 0.5ppm. Response and recovery times were about 1 and 3 min., respectively. Repetition measurement was very good with $\pm$3% in full scale. As a result, operating temperature was lower TEX>$\alpha$-$Al_{2}O_{3}$ than $In_{2}O_{3}$, but sensitivity was higher $In_{2}O_{3}$ than $\alpha$-$Al_{2}O_{3}$.