• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.288-295
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• 2009

We report the etch characteristics of GaAs and AlGaAs in the diffusion pump-based capacitively coupled $BCl_3$ plasma. Process variables were chamber pressure ($50{\sim}180$ mTorr), CCP power ($50{\sim}200\;W$) and $BCl_3$ gas flow rate ($2.5{\sim}10$ sccm). Surface profilometry was used for etch rate and surface roughness measurement after etching. Scanning electron microscopy was used to analyze the etched sidewall and surface morphology. Optical emission spectroscopy was used in order to characterize the emission peaks of the $BCl_3$ plasma during etching. We have achieved $0.25{\mu}m$/min of GaAs etch rate with only 5 sccm $BCl_3$ flow rate when the chamber pressure was in the range of 50{\sim}130 mTorr. The etch rates of AlGaAs were a little lower than those of GaAs at the conditions. However, the etch rates of GaAs and AlGaAs decreased significantly when the chamber pressure increased to 180 mTorr. GaAs and AlGaAs were not etched with 50 W CCP power. With $100{\sim}200\;W$ CCP power, etch rates of the materials increased over $0.3{\mu}m$/min. It was found that the etch rates of GaAs and AlGaAs were not always proportional to the increase of CCP power. We also found the interesting result that AlGaAs did not etched at 2.5 sccm $BCl_3$ flow rate at 75 mTorr and 100 W CCP power even though it was etched fast like GaAs with more $BCl_3$ gas flow rates. By contrast, GaAs was etched at ${{\sim}}0.3{\mu}m$/min at the 2.5 sccm $BCl_3$ flow rate condition. A broad molecular peak was noticed in the range of $500{\sim}700\;mm$ wavelength during the $BCl_3$ plasma etching. SEM photos showed that 10 sccm $BCl_3$ plama produced more undercutting on GaAs sidewall than 5 sccm $BCl_3$ plasma.

• Korean Journal of Materials Research
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• v.17 no.12
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• pp.642-647
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• 2007

We investigated dry etching of acrylic (PMMA) in $O_2/N_2$ plasmas using a multi-layers electrode reactive ion etching (RIE) system. The multi-layers electrode RIE system had an electrode (or a chuck) consisted of 4 individual layers in a series. The diameter of the electrodes was 150 mm. The etch process parameters we studied were both applied RIE chuck power on the electrodes and % $O_2$ composition in the $N_2/O_2$ plasma mixtures. In details, the RIE chuck power was changed from 75 to 200 W.% $O_2$ in the plasmas was varied from 0 to 100% at the fixed total gas flow rates of 20 sccm. The etch results of acrylic in the multilayers electrode RIE system were characterized in terms of negatively induced dc bias on the electrode, etch rates and RMS surface roughness. Etch rate of acrylic was increased more than twice from about $0.2{\mu}m/min$ to over $0.4{\mu}m/min$ when RIE chuck power was changed from 75 to 200 W. 1 sigma uniformity of etch rate variation of acrylic on the 4 layers electrode was slightly increased from 2.3 to 3.2% when RIE chuck power was changed from 75 to 200 W at the fixed etch condition of 16 sccm $O_2/4\;sccm\;N_2$ gas flow and 100 mTorr chamber pressure. Surface morphology was also investigated using both a surface profilometry and scanning electron microscopy (SEM). The RMS roughness of etched acrylic surface was strongly affected by % $O_2$ composition in the $O_2/N_2$ plasmas. However, RIE chuck power changes hardly affected the roughness results in the range of 75-200 W. During etching experiment, Optical Emission Spectroscopy (OES) data was taken and we found both $N_2$ peak (354.27 nm) and $O_2$ peak (777.54 nm). The preliminarily overall results showed that the multi-layers electrode concept could be successfully utilized for high volume reactive ion etching of acrylic in the future.

• Journal of Korean Neurosurgical Society
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• v.29 no.7
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• pp.853-860
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• 2000

Objective : The purpose of our experimental study was to analysis the advantages and disadvantages in the reversible and irreversible cerebral ischemic models with rats by staining with Neutral Red(NR) solusion, 2% 2,3,5-triphenyltetrazolium chloride(TTC) and Hematoxylin & Eosin(H & E). Methods : We have measured the range of cerebral infarction in the rat to get a suitable ischemic model along the object of study with and without craniectomy. With craniectomy, 9 rats were sacrificed for irreversible cerebral ischemic model by means of ligation at proximal(group I) and distal(group II), and coagulation at proximal(group III) middle cerebral artery. Also, 6 rats were sacrificed for irreversible(group IV) and reversible(group V) cerebral ischemic model using nylon thread without craniectomy. The sizes of infarction were measured by staining the coronal sections of the brain with NR solusion, TTC and H & E. Results : There are no difference of physiological parameters comparing the each group. Cerebral infarction was not observed in group II, but it's volume was largest in group IV. Disadvantages of craniectomy group(I, II, III) are the long duration of operation and cortical damage by procedure. It's advantage is confirmation of the middle cerebral artery occlusion and cessation of blood flow through the operative microscope. In case of ischemic models using nylon thread (group IV, V), it is hard to identify the interruption or recirculation of blood flow through the middle cerebral artery, but the advantage is the simplicity of operative technique which reduces the operation time and minimizes the cerebral damage due to craniectomy. Therefore, it seems important to set up the reversible and irreversible ischemic models by carefully considering advantages and disadvantages listed above. Conclusion : TTC staining seems to be effective since it reflects the histological damage sufficiently and quickly. It is hoped that researches focused on ischemic penumbra, which became popular recently, will be further carried on with use of NR staining, optical microscope and electron microscope.

• Journal of the Korean Ceramic Society
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• v.42 no.3 s.274
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• pp.165-170
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• 2005

Sol-gel methods offer many advantages over conventional slip-casting, including the ability to produce ceramic membranes. They are purer, more homogeneous, more reactive and contain a wider variety of compositions. We produced ormosil sol using sol-gel process under various molecular weight of polymer species[polyethylene glycol(PEG)] in total system [Tetraethyl ortho silicate(TEOS)-polyethylene glycol(PEG)]. The properties of as-prepared ormosil sol such as viscosity and gelation time are characterized. Also, the ceramic membrane was prepared by dip-coating with synthetic sol and its microstructure was observed by scanning electron microscopy. The permeability and rejection efficiency of membrane for oil/water emulsion were evaluated as cross­flow apparatus. The ormosil sol coated membrane was easily formed by steric effect of polymer and it improved flux efficiency because infiltration into porous support decreased. Its flux efficiency was elevated about $200\;l/m^2h$ compared with colloidal sol coated membrane at point of five minutes from starting test.

• Journal of Soil and Groundwater Environment
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• v.14 no.6
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• pp.53-64
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• 2009

Wetlands can remove organic contaminants, metals and radionuclides from wastewater through various biogeochemical mechanisms. In this study, a mathematical model was developed for simulating the fate and transport of chemical species in marsh wetland sediments. The proposed model is a one-dimensional vertical saturated model which is incorporated advection, hydrodynamic dispersion, biodegradation, oxidative/reductive chemical reactions and the effects from external environments such as the growth of plants and the fluctuation of water level due to periodic tides. The tidal effects causes periodic changes of porewater flow in the sediments and the evapotranspiration and oxygen supply by plant roots affect the porewater flow and redox condition on in the rhizosphere along with seasonal variation. A series of numerical experiments under hypothetical conditions were performed for simulating the temporal and spatial distribution of chemical species of interests using the proposed model. The fate and transport of a trace metal pollutant, chromium, in marsh sediments were also simulated. Results of numerical simulations show that plant roots and tides significantly affect the chemical profiles of different electron acceptors, their reduced species and trace metals in marsh sediments.

• Journal of the korean academy of Pediatric Dentistry
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• v.40 no.3
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• pp.168-176
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• 2013

The aim of this study was to evaluate the acid neutralizing capacity and to observe surface changes of giomer in comparison with composite resin, when it comes in contact with an acidic solution. A packable giomer(Beautifil II) and a flowable giomer(Beautifil Flow F02) were used as experimental groups, while a packable composite resin($Filtek^{TM}$ Z-250) was used as control group. pH values were measured after mixing the specimens of the disc and powder types with a pH 2.0 hydrochloric acid solution, respectively. Also, in the case of powder type giomers used in the earlier experiment, their pH values were measured again after mixing them with a fresh acid solution. Moreover, surface structure changes of disc type specimens were observed by using a scanning electron microscopy(SEM). In the disc type test, the pH values of packable giomer were significantly increased after 24 hours(p < 0.05). In contrast, in the powder type test, the pH values of packable and flowable giomers were dramatically increased within 30 minutes. The pH value of packable giomer, in particular, was higer than that of flowable giomer(p < 0.05). In the repeated neutralizing test, the degree of pH variation was lower than that of the previous neutralizing test(p < 0.05). Erosive changes on the surface of packable giomer were observed to be more than those on composite resin and flowable giomer as well. In conclusion, giomer has a acid neutralizing capacity, when it comes in contact with an acidic solution. Especially, packable giomer with high filler content has a greater acid neutralizing capacity than flowable giomer.

• Journal of Chest Surgery
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• v.33 no.8
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• pp.605-612
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• 2000

Background: Ischemic preconditioning enhances the tolerance of myocardium against ischemia/reperfusion injury, with the enhancement of the recovery of post-ischemic myocardial function. This study was disigned to assess whether the protective effect of ischemic preconditioning could provide one additional hour of myocardial preservation in four hour myocardial ischemia in a rate heart. Material and method: Fourty four Spargue-Dawley rats, weighing 300~450gm, were divided into four groups. Group 1(n=7) and group 3(n=12) were subjected to 30 minutes of aerobic Langendorff perfusion without ischemic preconditioning and then preserved in saline solution at 2~4$^{\circ}C$ for 4 hours and 5 respectively. Group 2(n=7) and group 4(n=18) were perfused in the same way for 20 minutes, followed by 3 minutes of global mormothermic ischemia and 10 minutes of perfusion and then preserved in the same cold saline solution for 4 hours and 5 hours respectively. Heart rate, left ventricular developed pressure(LVDP), and coronary flow were measured at 15 minutes during perfusion as baseline. Spontaneous defibrillation time was measured after reperfusion. Heart rate, LVDP, and coronary flow were also recorded at 15 minutes, 30 minutes, and 45 minutes during reperfusion. Samples of the apical left ventricular wall were studied using a transmission electron microscope. Result: Time of spontaneous defibrillation(TSD) was significantly longer in group 4 than in group 1(p<0.001), and TSD in group 1 was significantly longer in comparision to that of group 2(p<0.05). Heart rate at 45 minutes was significantly higher in group 1 than in group 4(p<0.05). Heart rate at 15 min was significantly higher in group 2 than in group 1(p<0.001) and in group 4 than in group 3(p<0.05). Left ventricular developed pressure(LVDP) at 30 minutes and 45 minutes was higher in group 1 than in group 4(p<0.01), LVDP at 45 minutes was higher in group 4 than in group 3(p<0.05). Rate-pressure product(RPP) at 30 minutes and 45 minutes was higher in group 1 than in group 4(p<0.05). RPP at 15 minutes was higher in group 2 than in group 1(p<0.01). RPP at 30 minutes and 45 minutes was higher in group 4 than in group 3(p<0.05). Group 2 showed relatively less sarcoplasmic edema and less nuclear chromatin clearance than group 1. Group 4 showed less myocardial cell damage than group 3, group 4 showed less myocardial cell damage than group 3, group 4 showed more myocardial cell edema than group 1. Conclusion: Ischemic preconditioning enhanced the recovery of postischemic myocardial function after 4 hours and 5 hours preservation. However, it was not demonstrated that ischemic preconditioning could definitely provide one additional hour of myocardial preservation in four hour myocardial ischemia in a rat heart.

• Journal of the Korean GEO-environmental Society
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• v.17 no.12
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• pp.17-26
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• 2016

The experimental investigation aims at developing controlled low strength materials (CLSM) using a self-cementitious fly ash (FA) as a binder and a bottom ash (BA) as a aggregate. The fly ash and bottom ash used in this study were obtained from a circulating fluidized bed combustion boiler (CFBC) which produces relatively high CaO containing fly ash. To find the optimum mixing condition satisfying flow consistency and unconfined compression strength (UCS), the CLSM specimens were prepared under various mixing conditions, including two types of aggregate and different weight fractions between fly ash and aggregate. Additionally, the prepared specimens were evaluated using a scanning electron microscope (SEM) and X-ray diffraction (XRD). The results of this study demonstrate that the water content satisfying flow consistency ranges from 42% to 85% and the flowability is improved with increasing the fraction of aggregate in whole mixture. The USC ranges from 0.3 MPa to 1.9 MPa. The results of UCS increases with increasing the fraction of aggregate in FA-sand mixtures, but decreases with increasing the fraction of aggregate in FA-BA mixtures. SEM images and XRD patterns reveal that the occurrence of both geopolymerization and hydration. The results of this study demonstrate that CFBC fly ash could be used as an alternative binder of CLSM mixtures.

• Membrane Journal
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• v.22 no.3
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• pp.224-233
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• 2012

To improve permeation performance of gas separation membrane, polysulfone hollow fiber membrane was prepared by wet-dry phase inversion method using Triton X-100 as non-ionic additive. And variation of gas permeation behavior by additive was investigated. Various spinning conditions such as air gap, concentration of polymer, dope tank temperature were controlled and these effects were studied. The morphology and gas permeation property of hollow fiber membranes were investigated using scanning electron microscope (SEM) and bubble flow meter respectively. We confirmed that the membranes added with Triton X-100 had a smooth external skin at various air gap length conditions. The macrovoids of these hollow fiber membranes were more developed with increase of air-gap from 4 to 90 cm and that induced higher permeance. The permeance of polysulfone membranes has the higher value at comparatively lower concentration polymer (30 wt% polysulfone) and lower concentration of additive (15 wt% Triton X-100). When temperature in dope tank was controlled, the membranes prepared at $100^{\circ}C$ showed low permeance because of volatilization of additive and solvent.

• Polymer(Korea)
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• v.36 no.2
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• pp.124-130
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• 2012

The uniform nanofibers of poly(L-lactide-$co$-${\varepsilon}$-caprolactone) (PLCL) with different contents of marine collagen (MC) were successfully prepared by electrospinning method. The effects of the major parameters in electrospinning process such as tip to target distance (TTD), voltage, nozzle size and flow rate on the average diameter of the electrospun nanofiber were investigated in generating composite nanofiber. The diameter and morphology of the nanofibers were confirmed by a scanning electron microscopy (SEM). Also, we measured a water contact angle to determine the surface wettability of the nanofibers. The average diameter of the nanofibers decreased as the value of TTD, MC contents, and voltages increased in comparison with that of pristine PLCL nanofiber. In contrast, the diameter of the nanofibers increased as the flow rate and inner diameter of nozzle increased in comparison with that of pristine PLCL. In addition, the hydrophilicity of the nanofiber and attachment of MG-63 cells on the sheets increased as incorporated collagen contents increased. Therefore, the marine collagen would be a potential material to enhance cellular interactivity of synthetic materials by mimicking the natural tissue.