• Title/Summary/Keyword: Electroless copper plating

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Electroless Copper Plating For Metallization of Electronic Devices

  • Lee Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.75-80
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    • 2004
  • In copper metallization, resistivity of copper seed layer is very important. Conventionally MOCVD has been used for this purpose however electroless copper plating is simple process and the resistivity of copper deposit is less than that of copper prepared by MOCVD. In this study electroless copper plating was conducted on different substrate to find optimum conditions of electroless copper plating for electronic applications. To find optimum conditions, the effects and selectivity of activation method on several substrates were investigated. The effects of copper bath composition on morphology were investigated. The effects of pH and stabilizer on deposition rate were also investigated. The optimum pH of the bath was 12 with addition of stabilizer. The resistivity of copper was decreased with addition of stabilizer and alter heat treatment.

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Recent Progress in Electroless Plating of Copper

  • Sharma, Ashutosh;Cheon, Chu-Seon;Jung, Jae Pil
    • Journal of the Microelectronics and Packaging Society
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    • v.23 no.4
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    • pp.1-6
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    • 2016
  • In this article, the recent developments in electroless plating of copper, electroless bath formulation and effect of plating parameters have been reviewed. Cyanide free electroless baths are now being developed and studied due to the various environmental concerns. Various organic chemicals such as complexing agents, reducing agents, and additives such as poly-alcohols and aromatic ring compounds have been added to copper plating baths for promising results. The effects of various reducing and complexing agents, bath conditions like additives, bath pH, and composition have been summarized. Finally the applications of the electroless plating of copper and latest developments have been overviewed for further guidance in this field.

Fabrication of Sn-Cu Bump using Electroless Plating Method (무전해 도금법을 이용한 Sn-Cu 범프 형성에 관한 연구)

  • Moon, Yun-Sung;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.2
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    • pp.17-21
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    • 2008
  • The electroless plating of copper and tin were investigated for the fabrication of Sn-Cu bump. Copper and tin were electroless plated in series on $20{\mu}m$ diameter copper via to form approximately $10{\mu}m$ height bump. In electroless copper plating, acid cleaning and stabilizer addition promoted the selectivity of bath on the copper via. In electroless tin plating, the coating thickness of tin was less uniform relative to that of electroless copper, however the size of Sn-Cu bump were uniform after reflow process.

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Study on Improvement of Thermal Stability of Dendrite-shape Copper Particles by Electroless Silver Plating (Dendrite 형상 구리 입자의 무전해 은 도금에 의한 열적 안정성 향상에 관한 연구)

  • Hwang, In-Seong;Nam, Kwang Hyun;Chung, Dae-won
    • Applied Chemistry for Engineering
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    • v.33 no.6
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    • pp.574-580
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    • 2022
  • While in the process of electroless plating of dendrite-shape copper with silver, various silver-coated copper (Ag@Cu) particles were prepared by using both displacement plating and reducing electroless plating. The physicochemical properties of Ag@Cu particles were analyzed by scanning electron microscope- energy-dispersive X-ray spectroscopy (SEM-EDS), thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Brunauer-Emmett-Teller analysis (BET), and it was confirmed that the silver coated by the reducing electroless plating was formed as nano-particles on the copper surface. Ag@Cu particles were compounded with an epoxy resin to prepare a conductive film, and its thermal stability was evaluated. We investigated the effect of the difference between the displacement plating and reducing electroless plating on the initial resistance and thermal stability of conductive films.

Effects of Surfactant and Preplate Process on Electroless Copper Plating on Carbon Nano-fiber (탄소나노섬유 표면 구리 무전해 도금에 미치는 분산제와 도금 전처리의 영향)

  • Han, Jun-Hyun;Seok, Hyun-Kwang;Lee, Sang-Soo;Jee, Kwang-Koo
    • Journal of Powder Materials
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    • v.16 no.2
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    • pp.131-137
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    • 2009
  • This paper deals with the effects of the surfactant and preplate process (sensitization and activation) on electroless copper plating on carbon nano-fiber (CNF). Ultrasonic irradiation was applied both during dispersion of CNF and during electroless plating containing preplate process. The dispersion of CNF and flatness of the plated copper film were discussed based on the changes in surfactant concentration and preplate process time. It was clearly shown that high concentration of surfactant and long time of preplate process could promote the agglomeration of CNF and uneven copper plating on CNF.

Electroless Copper Plating on 304L Stainless Steel Powders and Corrosion Resistance of the Sintered Compacts of Composite Powders (304L 스테인리스강 분말의 내식성 개선을 위한 무전해 구리 도금과 분말 소결체의 내식성 조사 연구)

  • Ahn, Jae-Woo;Lee, Jae-Hoon
    • Korean Journal of Metals and Materials
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    • v.47 no.2
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    • pp.79-90
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    • 2009
  • A study has been made about the effects of powder content, reaction temperature, reaction time, and stirring speed on the preparation of the stainless steel(STS) 304L powders plating with copper by an electroless plating method. The behavior of corrosion resistance of the sintered STS-Cu composite powders was also investigated by the salt spraying test The electroless plating technique was an effective method to manufactur the copper-uniform plating composite powders, the corrosion resistance of this sintered specimen was improved bysuppressing Cr precipitates on grain boundaries in the sintered compacts of composite powders.

Ultrasound Assisted Sn-Ag-Pd Activation Process for Electroless Copper Plating (무전해 동 도금을 위한 초음파 적용 주석-은-팔라듐 활성화 공정에 대한 연구)

  • Lee, Chang-Myeon;Hur, Jin-Young;Lee, Hong-Kee
    • Journal of the Korean institute of surface engineering
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    • v.47 no.6
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    • pp.275-281
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    • 2014
  • An ultrasound-assisted Sn-Ag-Pd activation method for electroless copper plating was presented in this study. With this activation process, it was shown that the fine catalyst particles were homogeneously distributed with high density on the entire specimen. In addition, it was observed that incubation period occurred during the electroless plating step was decreased owing to the absorption of Ag which holds high catalytic activity. Resulting from the refinement and high densification of catalyst, the defect-free gap-fill was achieved within the 20x nm trench.

Effect of Plating Conditions on Electroless Copper Plating on SiC Fabric (직조된 SiC 섬유에 무전해 구리도금 시 도금 조건의 영향)

  • Lee, Kee Hwan;Sohn, Youhan;Han, Taeyang;Lee, Kyung Jin;Kim, Hye Hung;Han, Jun Hyun
    • Journal of the Korean institute of surface engineering
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    • v.50 no.4
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    • pp.244-250
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    • 2017
  • Effects of plating conditions (dispersant concentration, plating time, and ultrasonication) on electroless Cu plating on SiC fabric woven by crossing of SiC continuous fibers vertically were studied. The ultrasonic dispersion treatment not only did not improve the dispersion of the SiC fibers, but also did not change the plating thickness. The ultrasonication in the pretreatment step of electroless plating did not improve the dispersion of the fibers, while the ultrasonication in the plating step enhanced the dispersion of the fibers and decreased the thickness of the Cu films. It was possible to control the thickness of the Cu coating layer as well as the dispersion of the fibers in the fabric by changing the plating conditions such as dispersant concentration, plating time, and ultrasonication, but it was very difficult to coat copper on the intersection of vertical fibers in the fabric.

Effect of Added Supercritical CO2 on the Characteristics of Copper Electroless Plating on PET Film Substrate (PET 필름기재의 구리 무전해도금에 있어서 초임계 CO2 유체가 도금 특성에 미치는 영향)

  • Lee, Hee-Dai;Kim, Moon-Sun;Kim, Chul kyung
    • Korean Chemical Engineering Research
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    • v.45 no.4
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    • pp.384-390
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    • 2007
  • In this study, electroless plating of copper was performed on PET film by using the blend of supercritical $CO_2$ and plating solution. The optimum volumetric ratio of supercritical fluid and plating solution was found to be 1:9 and dispersion property was poor at $CO_2$ vol% langer than 10%. Electroless plating of copper was best at $25^{\circ}C$ and 15 MPa. Role of added supercritical $CO_2$ is not to increase solubility but to disperse and maintain Cu-particles as the 1st particles.

Effects of Acid Treatment of Carbon on Electroless Copper Plating (피도금 탄소재의 산처리가 무전해 동도금에 미치는 영향)

  • Shin, Ari;Han, Jun Hyun
    • Journal of the Korean institute of surface engineering
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    • v.49 no.3
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    • pp.265-273
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    • 2016
  • The effects of surface modification by nitric acid on the pre-treatment of electroless copper plating were investigated. Copper was electroless-plated on the nitric acid treated graphite activated by a two-step pre-treatment process (sensitization + activation). The chemical state and relative quantities of the various surface species were determined by X-ray photoelectron spectroscopy (XPS) after nitric acid modification or pre-treatment. The acid treatment increased the surface roughness of the graphite due to deep and fine pores and introduced the oxygen-containing functional groups (-COOH and O-C=O) on the surface of graphite. In the pre-treatment step, the high roughness and many functional groups on the nitric acid treated graphite promoted the adsorption of Sn and Pd ions, leading to the uniform adsorption of catalyst ($Pd^0$) for Cu deposition. In the early stage of electroless plating, a lot of tiny copper particles were formed on the whole surface of acid treated graphite and then homogeneous copper film with low variation in thickness was formed after 30 min.