• 한국정밀공학회지
• /
• 제22권5호
• /
• pp.175-180
• /
• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. In this research, fabrication of micro plasma electrode was carried out using FIB. The one of problems of FIB-sputtering is the redeposition of material including Ga+ ion source during sputtering process. Therefore the effect of the redeposition was verified by EDX. And the micro plasma electrode of copper was fabricated by FIB.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제10권1호
• /
• pp.66-77
• /
• 2010

Improvement in breakdown voltage ($BV_{ds}$) and speed of the device are the key issues among the researchers for enhancing the performance of HEMT. Increased speed of the device aspires for shortened gate length ($L_g$), but due to lithographic limitation, shortening $L_g$ below sub-micrometer requires the inclusion of various metal-insulator geometries like T-gate onto the conventional architecture. It has been observed that the speed of the device can be enhanced by minimizing the effect of upper gate electrode on device characteristics, whereas increase in the $BV_{ds}$ of the device can be achieved by considering the finite effect of the upper gate electrode. Further, improvement in $BV_{ds}$ can be obtained by applying field plates, especially at the drain side. The important parameters affecting $BV_{ds}$ and cut-off frequency ($f_T$) of the device are the length, thickness, position and shape of metal-insulator geometry. In this context, intensive simulation work with analytical analysis has been carried out to study the effect of variation in length, thickness and position of the insulator under the gate for various metal-insulator gate geometries like T-gate, $\Gamma$-gate, Step-gate etc., to anticipate superior device performance in conventional HEMT structure.

• Journal of the Optical Society of Korea
• /
• 제16권4호
• /
• pp.349-353
• /
• 2012

Uniform spreading of injection current in light-emitting diodes (LEDs) is one of the crucial requirements for better device performances. It is reported that non-uniform current spreading leads to low output power, high current crowding, heating, and reliability degradation of the LED device. This paper reports on the effects of different surface and electrode geometries in the LEDs. To increase the output power of LEDs and reduce the series resistance, a rectangular-type LED (RT-LED) with a centered island cathode has been fabricated and investigated by comparison with a conventional LED (CV-LED). The performances of RT-LEDs were prominently enhanced via uniform current spreading and low current crowding. Performances in terms of increased output power and lower forward voltage of simulated RT-LEDs are much superior to those of CV-LEDs. Based on these results, we investigated the correlation between device geometries and optical characteristics through the fabricated CV and RT-LEDs. The measured output power and forward voltage of the RT-LEDs at 100 mA are 64.7% higher and 8% smaller compared with those of the CV-LEDs.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.654-654
• /
• 2013

One of the most important yet unresolved problems in molecular electronics is the controversy over the number and nature of multiple conductance peaks in single-molecule junctions. Currently, there are three competing explanations of this observation: (1) manifestation of different molecule-electrode contact geometries, (2) formation of gauche defects within the molecular core, (3) involvement of different electrode surface orientations [1]. However, the exact origin of multiple conductance peaks is not yet fully understood, which indicates our incomplete understanding of the scientifically as well as techno-logically important organic-metal contacts. To theoretically resolve this problem, we previously applied a multiscale computational approach that combines force fields molecular dynamics (FF MD), density functional theory (DFT), and matrix Green's function (MGF) calculations [2] to a thermally fluctuating haxanedithiol (C6DT) molecule stretched between flat Au(111) electrodes, but could observe only a single conductance peak [3]. In this presentation, using DFT geometry optimizations and MGF calculations, we consider molecular junctions with more realistic molecule-metal contact conformations and Au(111) electrode surface directions. We also conduct DFT-based molecular dynamics for the highly stretched junction models to confirm our conclusion. We conclude that the S-Au coordination number should be the more dominant factor than the electrode surface orientation.

• 한국세라믹학회지
• /
• 제43권12호
• /
• pp.798-804
• /
• 2006

Co-planar type single chamber solid oxide fuel cell with patterned electrode on a surface of electrolyte has been fabricated by robo-dispensing method and microfluidic lithography. The cells were composed of NiO-GDC-Pd or NiO-SDC cermet anode, $(La_{0.7}Sr_{0.3})_{0.95}MnO_3$ cathode, and yttria stablized zirconia electrolyte. The cell performance at $900^{\circ}C$ was investigated as a function of electrode geometries, such as anode-to-cathode distance, numbers of electrode pairs. Relationship between OCV and I-V characteristics at the optimized operation condition was also studied by DC source meter under the mixed gas condition of methane, air, and nitrogen. An increase of anode-facing-cathode area leads to lower OCV due to intermixing between product gases of anode and cathode, which in turn decreases the oxygen partial pressure difference.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
• /
• pp.333-336
• /
• 2009

A series of microcavity plasma devices having various electrode geometries were investigated for the display and lighting applications. Addressable, self-assembled Al/$Al_2O_3$ electrodes were fabricated in a thin, flexible single sheet of Al foil. And, enhanced luminance and efficient microplasmas are achieved by precise control of the cross-sectional geometry and surface morphology of the cavities within the microplasma devices. New microdischarge system fabricated in various substrates will be introduced.

• 한국가시화정보학회:학술대회논문집
• /
• 한국가시화정보학회 2007년도 추계학술대회
• /
• pp.77-83
• /
• 2007

This paper presents numerical and experimental works for simultaneous pumping and mixing small liquid using asymmetric microelectrode arrays, based on AC electroosmotic flows. To this end, four arrangements of electrode pairs were considered with diagonal/herringbone shapes. Numerical simulations were made of three-dimensional geometries by using the linear theory. The results indicated that the helical flow motions induced by the electrode arrays play a significant role in the mixing enhancement. The pumping performance was influenced by the slip velocity at the center region of the channel compared to that near the side walls. To validate the numerical predictions, the microfluidic devices were made through MEMS. The flow rate was obtained by using micro PIV, increasing the applied frequency. The electrolyte was potassium chloride solution. The flow patterns above electrodes were visualized to see lateral flow for mixing. The experimental results showed good agreements with the numerical predictions.

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
• /
• pp.229-233
• /
• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments of the micro plasma electrode fabrications using FIB. The sputtering of FIB has one major problem that is redeposited by sputtered material including $Ga^+$ ion source. Therefore we have verified the effect of the reposition by EDX. And the optimal condition is suggested to machine the micro plasma electrode.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권5호
• /
• pp.220-229
• /
• 2004

We have examined a technique of one-dimensional (1D) fluid modeling for radio-frequency Ar capacitively coupled plasmas (CCP) between unequal-sized powered and grounded electrodes. In order to simulate a practical CCP reactor configuration with a grounded side wall by the 1D model, it has been assumed that the discharge space has a conic frustum shape; the grounded electrode is larger than the powered one and the discharge space expands with the distance from the powered electrode. In this paper, we focus on how much a 1D model can approximate a 2D model and evaluate their comparisons. The plasma density calculated by the 1D model has been compared with that by a two-dimensional (2D) fluid model, and a qualitative agreement between them has been obtained. In addition, 1D and 2D calculation results for another reactor configuration with equal-sized electrodes have also been presented together for comparison. In the discussion, four CCP models, which are 1D and 2D models with symmetric and asymmetric geometries, are compared with each other and the DC self-bias voltage has been focused on as a characteristic property that reflects the unequal electrode surface areas. Reactor configuration and experimental parameters, which the self-bias depends on, have been investigated to develop the ID modeling for reactor geometry with unequal-sized electrodes.

• 조명전기설비학회논문지
• /
• 제19권4호
• /
• pp.1-8
• /
• 2005

본 연구에서는 2차원적 유체 모델을 통하여 보다 실질적인 플라즈마를 이해하고자 하였으며, 기하학적인 방전전극 구조를 반영하도록 전극단에서 챔버 외벽의 거리를 변화시키면서 플라즈마의 특성을 정량적으로 비교 분석하고자 하였다. 방전 챔버의 구조로서, 전극의 반경과 방전 챔버의 높이는 일정하게 유지하면서 방전 챔버의 넓이를 변화시킴에 따라 형성되는 플라즈마의 특성을 분석하였다. 그 결과, 전극단과 챔버 외벽의 거리가 짧을수록 그 영역에서 전계가 강하게 형성되어, 외벽을 향하는 각 입자들의 움직임도 매우 활발하다는 것을 알 수 있었다. 또한, 전각단과 외벽과의 거리가 짧을수록 전극 면상에서 형성되는 입자들의 수밀도와 유속의 변화가 일정하게 형성되는 것을 알 수 있었다. 이러한 결과는 웨이퍼의 대구경화에 따른 플라즈마의 균일성을 고려할 경우에 매우 효과적일 것으로 고려되어 진다.