• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.407-412
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• 2005

For micro electrochemical machining (ECM), tool electrodes with various sizes and shapes are necessary. In this paper, tool electrodes were fabricated by micro electrical discharge machining (EDM). Electrode material is tungsten carbide which has high rigidity and good conductivity for micro electrochemical machining. Disk-type and sphere-type electrodes were fabricated to prevent taper shape of side walls or to produce spherical features. Various 3D micro structures were fabricated by electrochemical milling with developed electrodes.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.163-169
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• 2005

Micro hole is ode of basic elements for micro device or micro parts. Micro electrochemical machining (ECM) can be applied to the machining of micro holes less than 50 ${\mu}m$ in diameter, which it is not easy to apply other techniques to. For the machining of passivating metals such as stainless steel, machining conditions should be chosen carefully to prevent a passive layer. The machining conditions also affect the machining resolution, In this paper, machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.32-39
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• 2003

Pulse electrochemical machining process with high or low current density may produce a non-lustrous surface on workpiece surface. The usual polishing process to remove a black layer from the surface has been hand polish the part. But the milli-to-micro meter scale structure formed by the electrochemical machining process may be destroyed while polishing process. The application of ultra short voltage pulses based on the analysis of electrical double layer charging process allows high resolution electrochemical machining and polishing. This technique was based on the specific polarization resistance from the comparison of ideal and experimental potential variation during short voltage pulses.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.685-688
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• 2005

In the micro electrochemical machining (MECM) using ultra short pulses, the machining rate is closely related to the tool electrode area. The machining rate varies according to the machining depth or the immersion depth. When using insulated tool electrodes, those depths do not matter. In addition, micro structures with high machining depth can be fabricated because the machining characteristics do not vary with the machining depth. Another advantage of insulated electrodes is prevention of taper shape. Micro structures with high machining depth or high aspect ratio were fabricated using insulated tool electrodes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1202-1205
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• 2005

Micro hole is one of basic elements for micro device or micro parts. By micro ECM, micro holes less than $50\mu{m}$ in diameter can be machined easily. Machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel. For the micro machining with high resolution, the change of machining gap should be predicted. By using electrochemical principle equations, the change of machining gap was simulated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.245-249
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• 2002

Tungsten carbide microshaft is used as various micro-tools in MEMS because it has high hardness and good rigidity. In this study, experiments were performed to produce tungsten carbide microshaft using electrochemical machining. $H_2SO_4$solution was used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape and large MRR of workpiece were found. For one-step machining, the immersion depth over 1 mm was selected for avoidance of concentration of electric charge at the tip of the microshaft. The limit diameter with good straightness was shown and an empirical formula for WC-microshaft machining was suggested. By controlling the various machining parameters, a straight microshaft with 30 $\mu\textrm{m}$ diameter, over 1 mm length and under 0.5$^{\circ}$ taper angle was obtained.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.370-375
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• 2010

Tungsten carbide microshaft is used as micro punch, electrode of micro electro discharge machining, and micro tool because of its high hardness and rigidity. In this research, tungsten carbide microshaft was fabricated using electrochemical machining. $H_2SO_4$ solution was used as the electrolyte because it can dissolve tungsten carbide and cobalt simultaneously. Experimentally studied were the effects of electrolyte concentration, machining time, and machining voltage on material removal rate and the shape of the microshaft. To eliminate the effects of bubbles and metal corrosion layer on microshaft shape, the machining was performed below the electrolysis voltage. Three step electrochemical process was suggested to fabricate the straight tungsten carbide microshaft. As a result, a straight tungsten carbide microshaft of $30{\mu}m$ in diameter and $500{\mu}m$ in length was obtained through the proposed three step electrochemical process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1893-1896
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• 2003

This research aimed to fabricate a micro structure using micro electrochemical machining (${\mu}$-ECM). with a view to that the theory of ${\mu}$-ECM is established accurately in a different way of conventional electrochemical machining. In details, if the impedance is existed in the system, it is difficult to analyze the micro electrochemical reaction efficiently in polarization curve using a potentiodynamic test. Hence, this research investigates the relationships between impedance and electric current measuring with a potentiostatic test applying to a pair or electrode as a constant potential. And this paper examines the influence of temperature of electrolyte on polarization curve for the quantitative analysis of electrochemical reactions.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.105-112
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• 2007

Tungsten wire micro electrochemical machining (W-wire micro ECM) with ultra-short pulses enables precise micro machining of metal. In wire micro ECM, platinum wire has been used because it is electrochemically stable. However, the micro metal wire with low strength is easily deformed by hydrogen bubbles which are generated during the machining. The wire deformation decreases the machining accuracy. To reduce the influence of hydrogen bubbles, in this paper, the use of tungsten wire was investigated. To improve machining accuracy, suitable pulse conditions which affect generation of bubbles were also investigated. The tungsten wire micro ECM can be applied to the fabrication of various shapes. Using this method, various micro-parts and shapes were fabricated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.48-53
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• 1998

In this paper, the new electrochemical machining method is proposed for the micro unit fabrication by using the point electrode tools. The precision shape control capacity is improved by using the point electrode method. It was observed that an electric discharge phenomenon occurs during the electrochemical machining process by using the spraying and torrent type electrolyte supply method.