• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.13 no.3
• /
• pp.214-219
• /
• 2000

In this paper the structural dielectric and piezoelectric properties of Pb［(M $g_{1}$2// $W_{1}$2/)$_{x}$-(N $i_{1}$3//N $b_{2}$3/)$_{0.15-x-(Zr_{0.5})}$ $Ti_{0.5}$)$_{0.85}$］ $O_3$ (x=0.0~0.10) ceramic were investigated with the substitution of Pb(M $g_{1}$2// $W_{1}$2/) $O_3$. According to the substitution of Pb(M $g_{1}$2//W/1/2/) $O_3$ curie temperatures were slightly decrease due to the decrease of the tetrag-onality of crystal structure and coercive fields were decreased. Up to the substitution of Pb(M $g_{1}$2// $W_{1}$2/) $O_3$ 3mol%,remnant polarization dielectric constant piezoelectric constant were increased. Dielectric constant and electro-mechanical coupling factor( $k_{p}$, $k_{31}$ ) were appeared the highest value of 2230, 0.64, and 0.38 and piezoelectric constant( $d_{33}$ , $d_{31}$ ) was the largest value of 418, 202($\times$10$^{-12}$ /C/N), respectively, when the substitution amount of Pb(M $g_{1}$2// $W_{1}$2/N) respectively, when the substitution amount of Pb(M $g_{1}$2// $W_{1}$2/) $O_3$ was 3mol%.s 3mol%.%.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2000.02a
• /
• pp.90-90
• /
• 2000

이온빔을 이용한 리소그래피의 경우 미크론 이하의 미세구조를 형성할 수 있는 유용한 수단으로서 방사광 X-선과 함께 주목을 받고 있으며, 이와 같은 미세구조 제작은 MEMS (Micro Electro-Mechanical System) 개발에 있어서 매우 중요하다. 그러나 이온빔을 이용한 리소그래피에 대한 연구가 많이 이루어져 있지 않은 상태이다. MeV급 양정사 빔을 이용한 리소그래피의 가능성을 확인하기 위하여 기본적인 실험을 수행하였으며, 최적 이온빔 조사 조건 및 최적 현상 조건을 도출하였다. Resist로는 PMMA를 사용하였으며, 1.8 MeV 양성자 빔을 사용하여 50$\mu\textrm{m}$ 깊이의 구조물을 만들었다. 1.8MeV 양성자 빔의 조사선량이 7x1013ions/cm2 이상이 되면 PMMA 내부에 기포가 형성되므로 적정 조사선량을 4x1013 ions/cm2으로 결정하였다. 또한 선량을 4x1013ions/cm2 으로 고정하고 선량률을 변화시켜주면 선량률이 8x1011ions/cm2S 일 때부터 시료에 기포나 터짐 현상 등의 문제가 발생하였으며 5x1010~~1x1010ions/cm2s 의 선량률이 조사시간, 결함측면에서 가장 적합한 영역임을 알 수 있었다. 현상제로는 20% morpholine, 5% etanolamine 60% diethylenglykol-monobutylether, 15% 증류수를 혼합하여 사용하였다. 현상 온도를 30~5$0^{\circ}C$로 변화시켜서 현상을 한 결과, 4$0^{\circ}C$에서 현상 소요시간은 1시간 이내이며 SEM으로 관찰된 표면의 상태도 제일 양호한 결과를 보였다. 82 mesh 밀도, 선굵기 60$\mu\textrm{m}$, 크기 20x20 mm인 백금 망을 마스크로 사용하여 실제 3차원 미세구조를 제작하여 보았다. 그림 1에서 제작된 구조물의 SEM 사진을 보여주었으며, 식각된 면의 조도가 매우 뛰어나며 모서리의 직각성도 우수함을 확인할 수 있다. 이와 같이 도출된 시험 조건을 기초로 하여 리소그래피 후에 전기 도금을 이용한 금속 몰드 제작 및 이온빔 리소그래피 장점을 최대한 살릴수 있는 미세구조 제작에 대한 연구를 계속 추진할 계획이다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.216.1-216.1
• /
• 2013

PZT 박막은 강유전 특성과 압전소자 특성을 나타내는 물질로 DRAM (dynamic random acess memory)과 FRAM (ferroelectric RAM) 등의 기억소자용 capacitor와 MEMS (micro electro mechanical system) 소자의 압전 물질로 사용하기 위한 연구가 진행중에 있다. 하지만 이러한 연구에서는 PZT 박막의 전기적 특성 향상을 주목적으로 연구가 진행되어 왔다. 특히, 박막 공정중 발생하는 plasma에 의한 PZT의 전기적 특성 변화가 박막 표면의 물리적 변화에 기인할 것으로 추정하고 있지만 이에 대한 구체적인 연구는 미비하다. 이 연구에서는 plasma에 의한 PZT 박막 표면의 물리적 특성 변화를 연구하기 위하여 PZT 박막을 sol-gel을 이용하여 Si 기판위에 약 100 nm의 두께로 증착하였으며, 이후 최대 300 W의 Ar plasma로 plasma power을 증가시켜 각각 10분간 plasma처리를 실시하였다. PZT 박막 표면의 nano-mechanics 특성을 분석하기 위하여 Nano-indenter와 Kelvin Probe Force Microscopy (KPFM)을 사용하여 surface hardness, surface morphology를 확인하였고 특히, surface potential 분석을 통하여 PZT 박막 표면의 plasma에 의한 박막 극 표면의 전기적 특성 변화를 연구하였다. 이 연구로 plasma에 의한 PZT 박막은 표면으로부터 최대 43 nm 깊이에서의 hardness는 최대 5.1 GPa에서 최소 4.3 GPa의 분포로 plasma power 변화에 의한 특성은 측정 불가능하였다. 이는 plasma에 의한 영향이 시료 극 표면에 국한되어 나타나기 때문으로 추정되며 이를 보완하기 위하여 surface potential을 분석하였다. 결과에 의하면 plasma power가 0 W에서 300 W로 증가함에 따라 potential이 30 mV에서 -20 mV로 감소하였으나 potential의 분산은 100 W에서 최대인 17 mV로 측정되었으며, 이때 RMS roughness역시 가장 높은 20.145 nm로 측정되었다. 특히, 100 W에서 potential에서는 물결 모양과 같은 일정한 패턴의 potential 무늬가 확인되었다.

• Smart Structures and Systems
• /
• v.6 no.5_6
• /
• pp.641-659
• /
• 2010

Structural Health Monitoring (SHM) gradually becomes a technique for ensuring the health and safety of civil infrastructures and is also an important approach for the research of the damage accumulation and disaster evolving characteristics of civil infrastructures. It is attracting prodigious research interests and the active development interests of scientists and engineers because a great number of civil infrastructures are planned and built every year in mainland China. In a SHM system the sheer number of accompanying wires, fiber optic cables, and other physical transmission medium is usually prohibitive, particularly for such structures as offshore platforms and long-span structures. Fortunately, with recent advances in technologies in sensing, wireless communication, and micro electro mechanical systems (MEMS), wireless sensor technique has been developing rapidly and is being used gradually in the SHM of civil engineering structures. In this paper, some recent advances in the research, development, and implementation of wireless sensors for the SHM of civil infrastructures in mainland China, especially in Dalian University of Technology (DUT) and Harbin Institute of Technology (HIT), are introduced. Firstly, a kind of wireless digital acceleration sensors for structural global monitoring is designed and validated in an offshore structure model. Secondly, wireless inclination sensor systems based on Frequency-hopping techniques are developed and applied successfully to swing monitoring of large-scale hook structures. Thirdly, wireless acquisition systems integrating with different sensing materials, such as Polyvinylidene Fluoride(PVDF), strain gauge, piezoresistive stress/strain sensors fabricated by using the nickel powder-filled cement-based composite, are proposed for structural local monitoring, and validating the characteristics of the above materials. Finally, solutions to the key problem of finite energy for wireless sensors networks are discussed, with future works also being introduced, for example, the wireless sensor networks powered by corrosion signal for corrosion monitoring and rapid diagnosis for large structures.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.45 no.1
• /
• pp.36-45
• /
• 2017

Abstract It is necessary to verify the properties of an inertial measurement unit in the flight environment before applying to military applications. In this paper, we presented a new approach to verify an inertial measurement unit(IMU) in regard to the performance and the robustness in flight environments for the high-dynamics vehicle systems. We proposed two methods for verification of an IMU. We confirmed normal operation of an IMU and properties in flight environment by using direct comparison method. And we proposed real time multi-navigation system to complement the first method. The proposed method made it possible to compare navigation result at the same time. Therefore, it is easy to analyze the performance of an inertial navigation system and robustness during the vehicle flight. To verify the proposed method, we carried out a flight test as well as an experimental test of flight vibration on the ground. As a result of the experiment, we confirmed flight environment properties of an IMU. Therefore, we shows that the proposed method can serve the reliability improvement of IMU.

• Korean Journal of Materials Research
• /
• v.15 no.6
• /
• pp.413-418
• /
• 2005

Perovskite $Pb(Ni_{1/3}Nb_{2/3})O_3-Pb(Zr,Ti)O_3[PNN-PZT]$ ceramics were synthesized by conventional ceramic processing technique. In order to modify piezoelectric properties for sensor application in this system, NiO addition was considered to provide $Ni^{+2}$ as an acceptor, which was known to occupy with B site in the structure. The effect of NiO addition up to $8\;mol\%$ on the following piezoelectric properties as well as sintering properties was investigated. When NiO added more than $1\;mol\%$, average grain size was decreased and second phase was found to form. Moreover, the second phase caused decrease in relative dielectric constant $(\varepsilon_{33}T/\varepsilon0)$, electro-mechanical coupling factor $(k_p)$, and piezoelectric charge constant $(d_{33})$, while increasing mechanical quality factor $(Q_m)$. When $1\;mol\%$ NiO was added, density, dielectric properties and piezoelectric properties were abruptly increased.

• Journal of Korean Society of Industrial and Systems Engineering
• /
• v.38 no.3
• /
• pp.127-135
• /
• 2015

Universal design is defined as the design process of products and environments usable by all people to the greatest extent possible, without the need for adaptation or specialized design. The benefits of universal design have been promoted primarily through illustrative 'success stories' of public, residential and occupational environments and products. While case examples may be informative, they may unfortunately be limited in terms of generality to other designs or tasks. Therefore, design methods and criteria that can be applied systematically in a range of situations to encourage universal design are needed. In addition, the seven principles of universal design are intended to guide the design process. The principles provide a framework that allows a systematic evaluation of new or existing designs and assists in educating both designers and consumers about the characteristics of more usable products and environments. However, exactly how these principles are incorporated into the design process has beenleft up to the designer. Since the introduction of universal design, designers have become familiar with the principles of universal design, and they have developed many products based on universal design. However, the principles of universal design are qualitative, which means designers cannot quantitatively evaluate their designs. Some have worked to develop more systematic ways to evaluate products and environments by providing design guidelines for each of the principles. However, recommendations have not yet been made regarding how to integrate performance measures of universal design into the product design process before the product is mass produced. Furthermore, there are sets of requirements regarding each user group that has different age and ability. Consequently, there is an urgent need for design methods, based on a better understanding of age and ability related factors, which will lead to a universally designed product or environment. The authors have proposed the PSD (Preference Set-Based Design) method that can generate a ranged set of feasible solutions (i.e., robust and flexible solution set) instead of single point solution that satisfies changing sets of design targets. The objective of this paper is to develop a general method for systematically supporting the universal design process. This paper proposes the applicability of PSD method to universal design. Here, the proposed method is successfully illustrated with a universal design problem.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.21 no.7
• /
• pp.831-841
• /
• 2010

The conventional vertical probe has the thin and long signal path that makes transfer characteristic of probe worse because of the S-shaped structure. So we propose the new vertical probe structure that has branch springs in the S-shaped probe. It makes closed loop when the probe mechanically connects to the electrode on a wafer. We fabricated the proposed vertical probe and measured the transfer characteristic and mechanical properties. Compared to the conventional S-shaped vertical probe, the proposed probe has the overdrive that is 1.2 times larger and the contact force that is 2.5 times larger. And we got the improved transfer characteristic by 1.4 dB in $0{\sim}10$ GHz. Also we developed the simulation model of the probe card by using full-wave simulator and the simulation result is correlated with measurement one. As a result of this simulation model, the cantilever probe and PCB have the worst transfer characteristic in the probe card.

• Applied Chemistry for Engineering
• /
• v.22 no.1
• /
• pp.104-108
• /
• 2011

In the non-conductive adhesives (NCAs) for adhesion of micro electro mechanical system (MEMS), there are some problems such as delamination and cracking resulting from the large differences of coefficients of thermal expansion (CTE) between NCAs and substrates. So, the addition of inorganic particles such as silica and nano clay to the CTEs composit have been applied to reduce the CTEs of the adhesives. Additions of the flexibilizers such as siloxanes have also been performed to improve the flexibility of epoxy composite. Amino modified siloxane (AMSs) were used to improve compatibility between epoxy and siloxane. In this study, glass transition temperatures (Tg) and moduli of those composites were measured to confirm the effects of AMS with two different equivalents on thermal/mechanical properties of AMS/epoxy composites. Tg of KF-8010/epoxy composites decreased from 148 to $122^{\circ}C$ and those of X-22-161A/epoxy composites decreased from 148 to $121^{\circ}C$. Moduli of KF-8010/epoxy composites decreased from 2648 to 2143 MPa by adding KF-8010 and moduli of X-22-161A/epoxy composites decreased from 2648 to 2014 MPa. In short, using long Si-O chain AMS leads to a greater decrease in moduli. However, haven't showed significant differences in Tg's.

• Journal of Advanced Navigation Technology
• /
• v.21 no.3
• /
• pp.251-257
• /
• 2017

Recently, hybrid positioning system combining GPS, vision sensor, and inertial sensor has drawn many attentions to estimate accurate vehicle positions. Since accurate multi-sensor fusion requires efficient time synchronization, this paper proposes an efficient method to obtain time synchronized measurements of vision sensor, inertial sensor, and OBD device based on GPS time information. In the proposed method, the time and position information is obtained by the GPS receiver, the attitude information is obtained by the inertial sensor, and the speed information is obtained by the OBD device. The obtained time, position, speed, and attitude information is converted to the color information. The color information is inserted to several corner pixels of the corresponding image frame. An experiment was performed with real measurements to evaluate the feasibility of the proposed method.