A Study on the New Isolation Technology to Improve the Bird's Beak and the Device Characteristics (Bird's Beak 및 소자특성 개선을 위한 새로운 Isolation 기술에 대한 연구)
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- Journal of the Korean Institute of Telematics and Electronics A
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- v.31A no.12
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- pp.106-114
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- 1994