• Title/Summary/Keyword: Electrical Contact

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Stability of Co/Ni Silicide in Metal Contact Dry Etch (Co/Ni 복합실리사이드의 메탈 콘택 건식식각 안정성 연구)

  • Song Ohsung;Beom Sungjin;Kim Dugjoong
    • Korean Journal of Materials Research
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    • v.14 no.8
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    • pp.573-578
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    • 2004
  • Newly developed silicide materials for ULSI should have the appropriate electrical property of low resistant as well as process compatibility in conventional CMOS process. We prepared $NiCoSi_x$ silicides from 15 nm-Co/15 nm-Ni/Si structure and performed contact dry etch process to confirm the dry etch stability and compatibility of $NiCoSi_x$ layers. We dry etched the photoresist/SiO/silicide/silicon patterns with $CF_4\;and\;CHF_3$ gases with varying powers from 100 to 200 W, and pressures from 45 to 65 mTorr, respectively. Polysilicon and silicon active layers without silicide were etched $0\sim316{\AA}$ during over etch time of 3min, while silicon layers with proposed $NiCoSi_x$ silicide were not etched and showed stable surfaces. Our result implies that new $NiCoSi_x$ silicides may replace the conventional silicides due to contact etch process compatibility.

Electrical and structure properties of W ohmic contacts to InGaN (W/InGaN Ohmic 접촉의 전기적 구조적 특성연구)

  • Han-Ki Kim;Tae-Yeon Seong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 1999.11a
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    • pp.76-76
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    • 1999
  • Low resistance ohmic contacts to the Si-doped InGaN(~$\times$10$^{19}$ ㎤) were obtained using the W metallization schemes. Specific contact resistance decreased with increasing annealing temperature. The lowest resistance is obtained after a nitrogen ambient annealing at 95$0^{\circ}C$ for 90s, which results in a specific contact resistance of 2.75$\times$10$^{-8}$$\textrm{cm}^2$. Interfacial reactions and surface are analyzed using x-ray diffraction, transmission electron microscopy (TEM) and scanning electron microscopy (SEM). The X-ray diffraction results show that the reactions between the W film and the InGaN produce a $\beta$-W$_2$N phase at the interface. TEM results also show that the $\beta$-W$_2$N has a rough interface, which increase contact area. It shows that the morphology of the contacts is stable up to a temperature as high as 95$0^{\circ}C$. Possible mechanisms are proposed to describe the annealing temperature dependence of the specific contact resistance.

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An optical sensor of a probing system for inspection of PCBs (인쇄회로기판 검사용 프로브시스템의 광학센서)

  • 심재홍;조형석;김성권
    • 제어로봇시스템학회:학술대회논문집
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    • 1997.10a
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    • pp.1742-1745
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    • 1997
  • We have developed a highly responsible probing system for inspection of electrical properties of assemble PCB$_{s}$ (printed circuit boards). However, as the duration of the impact occurring between a probe and a solder joint on PCB is very short, it is very difficult to control the harmful peak impact force and the slip motion of the probe to sufficient level only by its vorce feedback control with high gains. To overcome these disadvantages of the prototype, it needs ot obtain some information of the solder joint in advance before the contact. In addition, to guarantee the reliability of the probing task, the probing system is required to measure several points around the probale target point at high speed. There fore, to meet such requirements, we propose a new noncontaet sensor capable of detecting simultaneously position and normal vectors of the multiple points around the probable target point in real time. By using this information, we can prepare a control strategy for stable contact motion on impact. In this paper, we described measuring priniciple, design, and development of the sensor. The effectiveness of the proposed sensor is verified through a series of experiments.s.

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A Contact-less Power Supply using LLC resonant converter for Photovoltaic Power Generation System (태양광 발전 시스템을 위한 LLC 직렬공진컨버터 적용 무접점 전원장치)

  • Lee, H.K.;Lee, G.S.;Kang, S.I.;Kong, Y.S.;Kim, E.S.;Kim, Y.H.
    • Proceedings of the KIEE Conference
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    • 2006.04b
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    • pp.347-350
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    • 2006
  • The high efficiency full-bridge LLC resonant converter using a contact-less transformer is proposed for the photovoltaic power generation system. For the series resonance with a series capacitor, the LLC resonant converter utilizes the leakage inductance and magnetizing inductance of a contact-less transformer. Unlike the conventional series resonant converter operated to the continuous resonant current at above resonance frequency, the proposed converter operates to the discontinuous resonant current at the narrow frequency control range below resonance frequency. Due to the discontinuous mode resonant current, the proposed converter can be achieved the zero voltage switching (ZVS) in the primary switches and the zero current switching (ZCS) in the secondary rectification diodes without any auxiliary circuit. In this paper, the experimental results of the proposed full-bridge LLC resonant converter using a contact-less transfonner are verified on the simulation based on the theoretical analysis and the 150W experimental prototype.

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Improvement of Short Circuit Performance in 460[V]/400[A]/85[kA] Molded Case Circuit Breakers (460[V]/400[A]/85[kA] 배선용 차단기의 그리드 및 아크런너 변형을 통한 차단성능 향상)

  • Lee, Seung-Su;Jung, Eui-Hwan;Yoon, Jae-Hun;Kang, Seong-Hwa;Lim, Kee-Joe
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1451_1452
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    • 2009
  • Owing to the increasing number of intelligent homes(or called Smart home), the corresponding cost is much higher. Low voltage circuit breakers are widely used in the intelligent homes to interrupt fault current rapidly and to assure the reliability of the power supply. The distribution of magnetic field induced by arc current in the contact system of molded case circuit breaker depends on the shape, arrangement, and kinds of material of grids. This paper is focused on understanding the interrupting capability, more specifically of the grid and the arc runner, based on the shape of the contact system in the current MCCB. The magnetic driving force was calculated by using the flux densities induced by the arc current, which are obtained by three-dimensional finite element method. There is a need to assure that the optimum design required to analyze the electromagnetic forces of the contact system generated by current and the flux density be present. This is paper present our computational analysis on contact system in MCCB.

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Developing the Non-contact Detection Sensor for sensing Fiber Selvage (원단 변사 감지를 위한 비접촉식 원단 변사 검출 센서 개발)

  • Lee, Dae-Hee;Lee, Jae-Yong
    • Journal of IKEEE
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    • v.20 no.4
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    • pp.454-458
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    • 2016
  • Generally, fix the end of the fabric to pin with the fabric tenter process. At this time, the pin fixing part of the fiber fabric bulges and deforms. The deformation of the textile causes deterioration of the quality of the textile product. Detection of fiber fabric selvage portion is always required in the processing of the fabric. This research is a non-contact sensor for sensing fiber selvage. In this study, Developed a non-contact fabric selvage detecting sensor for use in automatic selvage cutting system. For the production of the fabric selvage detecting sensor prototype it was produced by placing thirty two sensor 2.5 mm interval. The selvage sensor system experimentally confirmed that actual selvage detection is possible.

A Study on the Improvement of PIMD in the Mobile Communication Base Station Antenna (이동 통신 기지국 안테나의 PIMD 향상에 관한 연구)

  • Seo, Chang-Jae;Cheon, Chang-Yul;Chung, Young-Seek
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.21 no.11
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    • pp.1201-1207
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    • 2010
  • As the mobile services have been increased, the PIMD(Passive Inter-Modulation Distortion) as well as the active-IMD of the CDMA system should be considered for the design of base station antenna systems, because they have an interference of the neighboring base stations. In this paper, in order to reduce the nonlinearity of current caused by the local point contact, we have investigated an influence of the combination of nuts, contact torque(kgf.cm), and the contact area on the PIMD. We propose the improvement techniques of PIMD by investigating the effects of the distance of nuts, the contact area, and the type of nuts.

Improving the Dynamic Characteristics of the Pantograph Using the Sensitivity Analysis (동적 민감도 해석을 이용한 판토그래프의 동특성 개선)

  • Kim, Jin-Woo;Park, Tong-Jin;Wang, Young-Yong;Han, Chang-Soo
    • Proceedings of the KSME Conference
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    • 2001.11a
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    • pp.679-685
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    • 2001
  • In this paper, the dynamic response of the pantograph system that supplies electrical power to a high-speed rail vehicle were investigated. The analysis of the catenary based on the Finite Element Method (FEM) is executed to develop a pantograph fits well in high-speed focused on the dynamic characteristic analysis of the pantograph system. By simulation of the pantograph-catenary system, the static deflection of the catenary, the stiffness variation in contact lines, the dynamic response of the catenary undergoing constant moving load and the contact force analysis were executed. In order to consider the design variables that effects on the dynamic characteristic of the pantograph system performed the dynamic sensitivity analysis. From the pantograph-catenary analysis, the design parameters of a pantograph could be improved. From the results of the sensitivity analysis, a pantograph with improved parameters is suitable for a high-speed rail vehicle from the design-parameter analysis.

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A Study on Causes and Measures Against Occurrence of Circulating Current in catenary (전차선로 순환전류 발생원인과 대책에 관한 연구)

  • Han, Hag-Su;Min, Kyung-Yun
    • Proceedings of the KSR Conference
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    • 2007.05a
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    • pp.816-823
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    • 2007
  • Electric car tract plays the role of supply high electric power to the electric car from the substation by using Pantograph of the electric car. It is always exposed to the external atmosphere, which results in quite substantial fluctuations in current and voltage during operation of electric car. This generates possibility of occurrence of accident at all times. Since range of wiring metallic globe installed on the catenary cannot achieve complete electrical contact, accidents are occurring due to circulating current caused by arc caused by incomplete contact due to occurrence of hairline fracture of Pantograph due to pressure or vibration of wiring. Furthermore, rapid increase in the operational current due to increase in the operational frequency of the electric car is causing erosion and short circuit of the metallic globe at the contact points. This study on arc is generated as current transmitted out of the substation courses through power line or wiring metallic globe other than the main circuit as the current is being collected at the electric car through feeder and feeder divergence device. Accordingly, since heat generated by the arc becomes the cause for generation of circulating current due to melting of metal or softening of metal due to increase in temperature accompanying increase in contact resistance, this research shall describe causes and measures against occurrence of circulation current.

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Effect of Contact Stiffness on Lateral Force Calibration of Atomic Force Microscopy Cantilever (원자 현미경 탐침의 수평방향 힘 교정에 미치는 접촉 강성의 영향)

  • Tran, Da Khoa;Jeon, Ki-Joon;Chung, Koo-Hyun
    • Tribology and Lubricants
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    • v.28 no.6
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    • pp.289-296
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    • 2012
  • Atomic force microscopy (AFM) has been used for imaging surfaces and measuring surface forces at the nano-scale. Force calibration is important for the quantitative measurement of forces at the nano-scale using AFM. Normal force calibration is relatively straightforward, whereas the lateral force calibration is more complicated since the lateral stiffness of the cantilever is often comparable to the contact stiffness. In this work, the lateral force calibrations of the rectangular cantilever were performed using torsional Sader's method, thermal noise method, and wedge calibration method. The lateral optical lever sensitivity for the thermal noise method was determined from the friction loop under various normal forces as well. Experimental results showed that the discrepancies among the results of the different methods were as large as 30% due to the effect of the contact stiffness on the lateral force calibration of the cantilever used in this work. After correction for the effect of contact stiffness, all the calibration results agreed with each other, within experimental uncertainties.