• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.10
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• pp.763-766
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• 2010

By improving the conducting process of metal source/drain (S/D) in direct contact with the channel, schottky barrier metal-oxide-semiconductor field effect transistors (SB MOSFETs) reveal low extrinsic parasitic resistances, offer easy processing and allow for well-defined device geometries down to the smallest dimensions. In this work, we investigated the arrhenius plots of the SB MOSFETs with different S/D schottky barrier (SB) heights between simulated and experimental current-voltage characteristics. We fabricated SB MOSFETs using difference S/D metals such as Cr (${\Phi}_{Cr}$ ~4.5 eV) and Ni (${\Phi}_{Ni}$~5.2 eV), respectively. Schottky barrier height (${\Phi}_B$) of the fabricated devices were measured to be 0.25~0.31 eV (Cr-S/D device) and 0.16~0.18 eV (Ni-S/D device), respectively in the temperature range of 300 K and 475 K. The experimental results have been compared with 2-dimensional simulations, which allowed bandgap diagram analysis.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.5
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• pp.353-360
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• 2012

As semiconductor device technology continuously shrinks, low-open area etch process prevails in front-end etch process, such as contact etch as well as one cylindrical storage (OCS) etch. To eliminate over loaded wafer processing test, it is commonly performed to emply diced small coupons at stage of initiative process development. In nominal etch condition, etch responses of whole wafer test and coupon test may be regarded to provide similar results; however, optical emission spectroscopy (OES) which is frequently utilize to monitor etch chemistry inside the chamber cannot be regarded as the same, especially etch mask is not the same material with wafer chuck. In this experiment, we compared OES data acquired from two cases of etch experiments; one with coupon etch tests mounted on photoresist coated wafer and the other with coupons only on the chuck. We observed different behaviors of OES data from the two sets of experiment, and the analytical results showed that careful investigation should be taken place in OES study, especially in coupon size etch.

• Transactions on Electrical and Electronic Materials
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• v.14 no.3
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• pp.152-155
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• 2013

$TiO_2$ films were deposited on glass substrates with and without $O_2$ plasma etching by using the RF-magnetron sputtering method. We focused on the effect of surface structure on the photoinduced hydrophilic properties of $TiO_2$ films, fabricated on different surface conditions according to the presence or absence of the $O_2$ plasma treatment on glass substrates. The wettability and photoinduced hydrophilic properties of the $TiO_2$ films were investigated according to the changes in water contact angles under UV light irradiations with a very low intensity of 0.1 $mW/cm^2$. The photoinduced hydrophilic properties on the $TiO_2$ formed above the plasma treated glass were also superior to those on the $TiO_2$ formed above the bare glass. This enhanced $TiO_2$ film has been used practically for self cleaning and anti-fogging glasses.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.279-282
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• 2020

In this study, body pressure was quantitatively detected using built-in optical sensors, inside an air cushion seat. The proposed system visualizes the effect of the body pressure distribution on the air cushion seat. The built-in sensor is based on the time-of-flight (ToF) optical method, instead of the conventional electrical sensor. A ToF optical sensors is attached to the bottom surface of the air-filled cells in the air cushion. Therefore, ToF sensors are durable, as they do not come in physical contact with the body even after repeated use. A ToF sensor indirectly expresses the body pressure by measuring the change in the height of the air-filled cell, after being subjected to the weight of the body. An array of such sensors can measure the body pressure distribution when the user sits on the air cushion seat. We implemented a prototype of the air cushion seat equipped with 7 ToF optical sensors and investigated its characteristics. In this experiment, the ToF optical pressure sensor successfully identified the pressure distribution corresponding to a sitting position. The data were accessed through a mobile device.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.333-333
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• 2013

The poor conductivity of poly (3,4-ethylene dioxythiophene): poly (styrenesulfonate) (PEDOT:PSS) film hinders to use for a flexible electrode in solar cells. In this report we demonstrate that the conductivity of PEDOT:PSS film can be enhanced by modifying structures in a mixture of PEDOT: PSS aqueous solution and various organic solvents such as polar protic (2-propanol, methanol, ethanol, formic acid) and aprotic solvents (acetone and acetonitrile). To comparatively study the structural effects on the resulted electrical properties, the films are spin-coated on glasses and ITO. At the same time, a contact angle goniometer is used for clarifying a mechanism of wettability of PEDOT (hydrophobic) and PSS (hydrophilic) on the observed conductivity. The structures and electrical properties are investigated by FE-SEM (Field Emission Scanning Electron Microscopy), AFM (Atomic Force Microscopy), and 4-point probe, respectively.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.2
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• pp.91-93
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• 2011

This paper is presented for the performance of the Fluid Dynamic Bearing(FDB) by the groove design and the tooling condition. Recently, spindle motors which require smaller size, lower sound noise, lower vibration, and higher speed of the rotation have been placed in high value-added products including Digital Lightening Processors(DLP), Hard Disk Drives(HDD), and ODDs. The spindle motors using the sintered porous metal bearing have higher vibration and acoustic noise by dry contact and large tolerance of the bearing parts. The Fluid Dynamic Bearing (FDB) with grooves is appropriate for spindle motors adequate in regards to mechanical vibration and acoustic noise. The paper shows the performance comparisons of between sintered porous metal bearing and FDB, and each FDBs according to the tooling deviations of grooves by the Finite Element Analysis(FEA) of the mechanical field. This paper shows the methods to make the grooves, the groove's depth, and the prototype of the motor with the fluid dynamic bearing. The performance characteristics of the grooves with the FDB are verified by the experimental results.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.10
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• pp.1791-1795
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• 2007

Small ions generated at conductor corona sources remain in the atmosphere until they recombine with ions of opposite polarity, attach to aerosols, or make contact with an object. Ion current density is major factor to design conductor configuration of DC overhead transmission line. Several techniques have been used to measure the ion current of HVDC overhead transmission line. In this study, the ion current density was measured by a plate electrode made of a metal flat board at DC corona cage. The sensitivity of the plate electrode is $0.156uA/m^2/V$. To obtain an useful database on corona discharge, it is necessary to do corona test on several kinds of conductor bundles. Therefore, a number of experiments were conducted on several kinds of conductor bundles. To reliably analyze ion effects, corona cage test data were obtained over a long period of time under various weather conditions and expressed as a statistical distribution. Ion current density distribution in foul weather shows a significant increase in levels over the corresponding fair weather. Based on this results, we evaluated the environmental characteristic caused by ion flow of three candidated conductor bundles.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.8
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• pp.1164-1169
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• 2014

Recently, an interest in a hybrid system combining only the merits of the conventional wheel-rail system and Maglev propulsion system is growing as an alternative to high-speed maglev train. This hybrid-type system is based on wheel-rail method, but it enables to overcome the speed limitation by adhesion because it is operated by a non-contact method using a linear motor as a propulsion system and reduce the overall construction costs by its compatibility with the conventional railway systems. Therefore, the design and characteristic analysis of a coreless-type superconducting Linear Synchronous Motor (LSM) for 600km/h very high speed railway system are conducted in this paper. The designed coreless-type superconducting LSMs are the distributed winding model, the concentrated 1 layer winding model and the concentrated 2 layer winding model, respectively. In addition, the characteristic comparison studies on each LSM are conducted.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.10
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• pp.877-882
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• 2005

In order to fabricate a high breakdown SiC-SBD (Schottky barrier diode), we investigate an effect on metal guard ring (MGR) in breakdown characteristics of the SiC-SBD. The breakdown characteristics of MGR-type SiC-SBD is significantly dependent on both the guard ring metal and the alloying time of guard ring metal. The breakdown characteristics of MGR-type SiC-SBDs are essentially improved as the alloying time of guard ring metal is increased. The SiC-SBD without MGR shows less than 200 V breakdown voltage, while the SiC-SBD with Al MGR shows approximately 700 V breakdown voltage. The improvement in breakdown characteristics is attributed to the field edge termination effect by the MGR, which is similar to an implanted guard ring-type SiC-SBD. There are two breakdown origins in the MGR-type SiC-SBD. One is due to a crystal defects, such as micropipes and stacking faults, in the Epi-layers and the SiC substrate, and occurs at a lower electric field. The other is due to the destruction of guard ring metal, which occurs at a higher electric field. The demolition of guard ring metal is due to the electric field concentration at an edge of Schottky contact metal.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.2
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• pp.153-157
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• 2006

In this work, the effects of plasma treatment on surface properties of semiconductive silicone rubber were investigated in terms of X-ray photoelectron spectroscopy (XPS) and contact angles, The adhesion characteristics of semiconductive-insulating interface layer of silicone rubber were studied by measuring the T-peel strengths, The results of the chemical analysis showed that C-H bonds were broken due to plasma discharge and Silica-like bonds(SiOx, x=3${\~}$4) increased, It is thought that semiconductive silicone rubber surfaces treated with plasma discharge led to an increase in oxygen-containing functional groups, resulting in improving the degree of adhesion of the semiconductive-insulating interface layer of silicone rubber. However, the oxygen plama for 20 minute produces a damaged oxidized semiconductive silicone rubber layer, which acts as a weak layer producing a decrease in T-peel strength, These results are probably due to the modifications of surface functional groups or polar component of surface free energy of the semiconductive silicone rubber.