• 대한전기학회:학술대회논문집
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• 대한전기학회 1988년도 전기.전자공학 학술대회 논문집
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• pp.753-755
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• 1988

In this paper, the effective ionization coefficients (${\alpha}-{\eta}$/Po) are measured by the steady state Townsend method in Townsend discharge domain. The effective ionization coefficients are measured in the range 75${\leqq}$E/Po${\leqq}$150(V/Torr. cm) in $SF_{6}$. The values of the effective ionization coefficients are easily and precisely determined by means of the linearization of current growth equation. The effective ionization coefficients of $SF_{6}$ were agreement with that of Bhalla and Craggs.

• Journal of Information Display
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• 제10권1호
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• pp.45-48
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• 2009

The ionization of a helium atom was investigated as a function of gas pressure, with the use of a tungsten tip. The tungsten tip, to which the external voltage was applied, was used to generate a constant electron current. The ionization current of helium gas was measured as a function of gas pressure. Effective ionization occurred in the pressure range of 0.5-20 torr when the distance between the field emission tip and the collector was 1 cm. The ionization current was linearly proportional to the voltage that was applied to the tungsten tip.

• 대한전자공학회논문지SD
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• 제41권9호
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• pp.1-9
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• 2004

III-V족 반도체 GaP GaAs 및 InP의 계단형 pn 접합에서의 항복전압을 위한 해석적 식을 유도하였다. 해석적 항복전압을 위해 각 물질에 대한 이온화계수 파라미터를 이용하여 유효 이온화계수를 추출하였고, 이의 이온화 적분을 통해 얻은 해석적 항복전압 결과는 수치적 결과 및 실험 결과와 10% 오차 범위 이내로 잘 일치하였다.

• 대한전자공학회논문지SD
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• 제41권1호
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• pp.9-14
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• 2004

본 논문에서는 Si의 유효 이온화 계수를 온도 함수로 추출하였고, 이 유효 이온화 계수를 이용하여 Si $p^+n$ 접합에서의 항복 전압을 위한 해석적 표현식을 온도 함수로 유도하였다. 100K 300K 및 500K일 경우, 해석적 항복 전압 결과는 $10^{14}cm^{-3}{\~} 10^{17}cm^{-3}$의 농도 범위에서 실험 결과 및 시뮬레이션 결과와 비교하여 오차 범위 $3\%$ 이내로 잘 일치하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권4호
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• pp.226-231
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• 1999

Temperature dependence of effective ionization coefficients in GaAs is formulated as a single polynomial function of temperature, which allows analytical expressions for breakdown voltage of GaAs $p^+n$ junctions as a function of temperature. At 300 K, extracted effective ionization coefficient of GaAs $p^+n$ junction especially agrees well with the published result of <111> oriented GaAs. The analytic results agree with the simulation as well as the experimental ones reported within 10% in error for the doping concentrations in the range of $10_{14}cm_{-3}~10_{17}cm_{-3}$ at 100 K, 300 K and 500 K.

• 한국전기전자재료학회논문지
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• 제18권4호
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• pp.375-380
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• 2005

CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.628-631
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• 2004

A tetrafluoromethane$(CF_4)$ is most useful gas in plasma dry etching, because it has a electron attachment cross-section. therefor it is important to calculate transport coefficients like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient. and critical E/N. The aim of this study is to get these transport coefficients for information of the insulation strength and efficiency of etching process. Electron transport coefficients in $CF_4+Ar$ gas mixture are simulated in range of E/N values from 1 to 250 [Td] at 300[K} and 1 [Torr] by using Boltzmann equation method. The results of this method can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas. and is presented in this paper for various mixture ratios of $CF_4+Ar$ gas mixture.

• 대한전자공학회논문지SD
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• 제39권1호
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• pp.12-17
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• 2002

본 논문에서는 전자와 정공의 이온화 계수로부터 4H-SiC를 위한 유효 이온화 계수를 cㆍE/sup m/의 형태로 추출하였고, 이 유효 이온화 계수를 이용하여 4H-SiC p/sup +/n 접합에서의 항복시 임계 전계와 항복 전압을 위한 해석적 표현식을 유도하였다. 해석적 항복 전압 및 항복 전계 결과는 10/sup 15/㎝/sup -3/∼10/sup 18/㎝/sup -3/의 농도 범위에서 실험 결과와 비교하여 오차 범위 10% 이내로 잘 일치하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.78-81
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• 2000

The closed-form analytic solutions for the breakdown voltage of 6H-SiC RTD(silicon carbide reachthrough diode) having metal$-n^--n^+$ Schottky structure or $p^+-n^--n^+$, are successfully derived by solving impact ionization integral using an effective ionization coefficient. For the lightly doped n- epitaxial layer, the breakdown voltage of SiC RTD are nearly constant with the increased doping concentration while the breakdown voltages decrease for the heavily doped epitaxial layer.

• 전자공학회논문지 IE
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• 제44권1호
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• pp.10-14
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• 2007

InP의 전자와 정공의 이온화계수로부터 추출한 유효이온화계수를 이용하여 InP 다이오드의 항복전압을 위한 해석적 표현식을 유도하였다. 해석적 항복전압 결과를 $N_D=6\times10^{14}cm^{-3}\sim3\times10^{17}cm^{-3}$의 도핑 농도에서 수치적 결과 및 실험 결과와 비교하였다. 각 농도에 따른 해석적 항복전압은 수치 해석적 결과와 매우 잘 일치하였고, 실험 결과와는 10% 이내의 오차로 잘 일치하였다.