• 센서학회지
• /
• 제16권1호
• /
• pp.62-67
• /
• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• 한국전기전자재료학회논문지
• /
• 제21권7호
• /
• pp.669-673
• /
• 2008

ITO thin film was deposited on PC substrate in Facing Targets Sputtering (FTS) system with various sputtering conditions. After it is applied to external bending force, we investigated how change the surface and electrical property of as-deposited ITO thin film. As the L(face-plate distance) of substrate decreases, it found that the maximum crack density is increasing at the center position and decreasing crack density as goes to the edge. So to apply same curvature (r) and bending force to PC substrate with ITO thin film, we fixed the L that is equal to curvature radius (2r). Before bending test, ITO thin films that deposited in the input current of 0.4 A and thickness of 200 nm already had biaxial tensile failure because of each different CTE (Coefficient of Thermal Expansion) and Others had been shown no bending or crack. After bending test, all samples had been shown cracks at about 200 times and as increasing the crack density, resistivity increased.

• 한국생산제조학회지
• /
• 제20권4호
• /
• pp.382-385
• /
• 2011

There is an immense need to obtain nanometric surface finish on optical glass owing to the advantage of improved performance of the components. But owing to brittleness and hardness, optical glass is one of the materials that is difficult to ultra-precision turning. According to the hypothesis of ductile mode machining, regardless of their hardness and brittleness, will undergo a transition from brittle to ductile machining region below a critical undeformed chip thickness. Below this threshold, it is suggested that the energy required for plastic formation. Thus, plastic deformation is the predominant mechanism of material removal in machining these materials in this mode. An experimental study is conducted diamond cutting for machining BK7 glass. The investigation presents the feasibility of achieving nanometric surface and the understanding the mechanism of cutting glass, proving the cutting edge radius effect.

• 한국압력기기공학회 논문집
• /
• 제14권1호
• /
• pp.24-31
• /
• 2018

The mechanical design procedure is studied for the PCHE(printed circuit heat exchanger) with electrochemical etched flow channels. The effective heat transfer plates of PCHE are assembled by diffusion bonding to make a module. PCHE is widely used for industrial applications due to its compactness, cost efficiency, and serviceability at high pressure and/or temperature conditions. The limitations and technical barriers of PCHE are investigated for application to nuclear components. Rules for design and fabrication of PCHE are specified in ASME Section VIII but not in ASME Section III of nuclear components. Therefore, the calculation procedure of key dimensions of PCHE is defined based on ASME section VIII. The effective heat transfer region of PCHE is defined by several key dimensions such as the flow channel radius, edge width, wall thickness, and ridge width. The mechanical design procedure of key dimensions was incorporated into a program for easy use in the PCHE design. The effect of assumptions used in the key dimension calculation on stress values is numerically investigated. A comparative analysis is done by comparing finite element analysis results for the semi-circular flow channels with the formula based sizing calculation assuming rectangular cross sections.

• 한국추진공학회지
• /
• 제8권2호
• /
• pp.62-72
• /
• 2004

본 연구에서는 우선 전산 결과의 신뢰성을 검증하기 위하여 동일 조건의 실험결과와 비교하였다. 그 결과를 살펴보면 전산결과와 실험결과가 대체적으로 잘 일치하였다. 다음으로 압력면 및 흡입면의 원호반경, 피치 코드비등의 설계인자에 따른 유동해석을 실시하였다. 익렬내의 유동 및 성능 특성은 익렬 앞전 및 노즐 끝단에서 발생하는 충격파와 익렬 내부에서 발생하는 박리에 의해 주로 좌우되었다. 그리고 노즐 끝단에서 발생하는 충격파와 박리는 익렬 내부 유로 면적에 의해서 좌우되었으며, 익렬 앞전에서 발생하는 충격파는 노즐이 차지하고 있는 익렬 개수에 의해 영향을 받았다.

• 한국기계가공학회지
• /
• 제4권2호
• /
• pp.31-36
• /
• 2005

Machining technique for optical crystals with single point diamond turning tool is reported in this paper. The main factors influencing the machined surface quality are studied and regularities of machining process are drawn. Optical crystals have been known to more and more important applications in the field of modern optics. Ge is more brittle material of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimum machining conditions for ductile cutting of Ge and apply the SPDTM technique to the manufacturing of ultra precision optical components of Ge. As a result, the surface roughness is the best when cutting speed is 180m/min, feed rate is 2mm/min, depth of cut is $0.5{\mu}m$ and nose radius of tool is 0.8mm.

• International Journal of Fluid Machinery and Systems
• /
• 제1권1호
• /
• pp.10-23
• /
• 2008

The development of pre-set wavelength G$\ddot{o}$rtler vortices are studied in the boundary-layer flows on concave surfaces of 1.0 and 2.0 m radius of curvature. The wavelengths of the vortices were pre-set by thin wires of 0.2 mm diameter placed 10 mm upstream and perpendicular to the concave surface leading edge. Velocity contours were obtained from velocity measurements using a single hot-wire anemometer probe. The most amplified or dominant wavelength is found to be 15 mm for free-stream velocity of 2.1 m/s and 3.0 m/s on the concave surface of R = 1 m and 2 m, respectively. The velocity contours in the cross-sectional planes at several streamwise locations show the growth and breakdown of the vortices. Three different regions can be identified based on the growth rate of the vortices. The occurrence of a secondary instability mode is also shown in the form of mushroom-like structures as a consequence of the non-linear growth of the G$\ddot{o}$rtler vortices. By pre-setting the vortex wavelength to be much larger and much smaller than the most amplified one, the splitting and merging of G$\ddot{o}$rtler vortices can be respectively observed.

• 천문학논총
• /
• 제7권1호
• /
• pp.231-253
• /
• 1992

A model for the distribution of stars in the disk and the spheroid of our Galaxy is reexamined from an edge-on view of the Galaxy obtained by selecting infrared sources from the IRAS Point Source Catalog. The sources are counted as a function of galactic latitude. longitude and $12{\mu}m$ apparent magnitude. The source counts are reasonably separated into the disk component and the spheroid component contributions and each of the contributions is further interpreted as a convolution of a spatial density distribution and a luminosity function based on the least-square fit method. The spatial density of the disk component has an exponential radial scale length of $h_R{\sim}2.6\;kpc$ and the vertical distribution follows a canonical $sech^2$ law with a scale height $h_z{\sim}240\;pc$. The distribution of the spheroid component can be represented by an oblate spheriod with an axis ratio $k{\sim}0.61$ and a de Vaucouleurs' $r^{1/4}$ law with an effective radius of $R_e{\sim}120\;pc$. The steep density gradient of the spheroid component is consistent with that of late M giants in the central bulge. The luminosity functions of the disk and the spheroid component stars resemble respectively those of the K luminosity function of disk M giants (Garwood and Jones 1986) and the bolometric luminosity function of M giants in bulge fields (Frogel et al, 1990).

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1996년도 춘계학술대회 논문집
• /
• pp.119-124
• /
• 1996

End milling operation is very important in machining precision components. Deterioration of surface roughness and surface geometry will cause more process for surface finishing. According to the feed rate and the cutting edge geometry, the cusp which is geometrically uncut surface is determined. To reduce the cost for dinishing operation after end milling, the cusp must be remaianed in small size as possible. Due to the cylindrical type of the end mill, tool deflection is one of the main problems in surface generation. The cutting resistance and the rigidity of the end mill will determine the size of tool deflection. One more important factor which deteriorate surface quality comes from the error in manufacturing end mills. Run-out of end mill which is the difference of the radius of each cutting edges will produce the difference of the cusp size in every rotation of end mill. These three major factors to the surface quality will be analized and the result will be compared with experimental ressult.

• 한국기계가공학회지
• /
• 제7권2호
• /
• pp.23-30
• /
• 2008

As a basic machining process, turning is a widely used machining process in which a single-point cutting tool removes material from the surface of a rotating material. A common method of evaluating machining performance is to measure the surface roughness. In a turning operation, it is important to select cutting conditions for achieving high cutting performance. As a rule, cutting conditions can be classified into feed rate, depth of cut and insert radius. While cutting process even though cutting conditions are optimized, the average roughness can be deterioration due to wear of the cutting tool edge. In this study, the aim is to maintain the average roughness even though the cutting condition is irregularly changing within the predictable range due to the working environment. First, the surface roughness model influenced by cutting conditions is constructed based on the experimental results in a turning operation, Second, applying the sliding mode control theory to the turning operation model which is composed of the surface roughness model and the motor transfer function, the surface roughness is closed to the desired value. Finally, the effectiveness of this approach is demonstrated through the computer simulation.