• 전자공학회논문지A
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• 제31A권5호
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• pp.113-120
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• 1994

Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.175-184
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• 2001

In this study, the improved throughput and stability in device fabrication could be obtained by applying CMP process to STi structue in 0.18 um semiconductor device. To employ the CMP process in STI structure, the Reverse Moat Process used to be added after STI Fill, as a result, the process became more complex and the defect were seriously increased than they had been,. Removal rate of each thin film in STI CMP was not uniform, so, the device must have been affected. That is, in case of excessive CMP, the damage on the active area was occurred, and in the case of insufficient CMP nitride remaining was happened on that area. Both of them deteriorated device characteristics. As a solution to these problems, the development of slurry having high removal rate and high oxide to nitride selectivity has been studied. The process using this slurry afford low defect levels, improved yield, and a simplified process flow. In this study, we evaluated the 'High Selectivity Slurry' to do a global planarization without reverse moat step, and also we evaluated EPD(Eend Point Detection) system with which 'in-situ end point detection' is possible.

• Earthquakes and Structures
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• 제10권6호
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• pp.1467-1486
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• 2016

This research focuses on seismic performance of a class of single pier skewed bridges with three different pier-deck connections; skew angles vary from $0^{\circ}$ to $60^{\circ}$. A well-documented four span continuous deck bridge has been modeled and verified. Seat-type connections with fixed and sliding bearings plus monolithic pier-deck connections are studied. Shear keys are considered either fully operational or ineffective. Seismic performances of the bridges and the structural components are investigated conducting bidirectional nonlinear time history analysis in OpenSees. Several global and intermediate engineering demand parameters (EDP) have been studied. On the basis of results, the values of demand parameters of skewed bridges, such as displacement and rotation of the deck plus plastic deformation and torsional demand of the piers, increase as the skew angle increases. In order to eliminate the deck collapse probability, the threshold skew angle is considered as $30^{\circ}$ in seat-type bridges. For bridges with skew angles greater than $30^{\circ}$, monolithic pier-deck connections should be applied. The functionality of shear keys is critical in preventing large displacements in the bearings. Pinned piers experience considerable ductility demand at the bottom.

• Ocean Systems Engineering
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• 제7권2호
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• pp.107-120
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• 2017

Spud-can is used for fixing jack-up rig on seabed. It needs to be inserted up to the required depth during the installation process to secure enough soil reaction and prevent overturning accidents. On the other hand, it should be extracted from seabed soils as fast as possible during the extraction process to minimize the corresponding operational cost. To achieve such goals, spud-can may be equipped with water-jetting system including monitoring and control. To develop such a smart spud-can, a reliable numerical simulation tool is essential and it has also to be validated against physical model tests. In this regard, authors developed a numerical simulation tool by using a commercial program ANSYS with extended Drucker-Prager (EDP) formula. Authors also conducted small-scale (1/100) physical model tests for verification and calibration purpose. By using the numerical model, a systematic parametric study is conducted both for sand and K(kaolin)-clay with varying important soil parameters and the best estimated soil properties of the physical test are deduced. Then, by using the selected soil properties, the numerical and experimental results for a sand/K-clay multi-layer case are cross-checked to show reasonably good agreement. The validated numerical model will be useful in the next-stage study which includes controllable water-jetting.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.90-93
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STI CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. To resolve these problems, the development of slurry for CMP with high removal rate and high selectivity between each thin films was studied then it can be prevent the reasons of many defects by reasons of many defects by simplification of process that directly apply CMP process to STI structure without the reverse moat pattern process.

• Earthquakes and Structures
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• 제8권1호
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• pp.57-76
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• 2015

The Performance-based Earthquake Engineering (PBEE) concept implies the definition of multiple target performance levels of damage which are expected to be achieved (or not exceeded), when the structure is subjected to earthquake ground motion of specified intensity. These levels are associates to different return period (RP) of earthquakes and structural behaviors quantified with adopted factors or indexes of control. In this work an 8-level PBEE study is carried out, finding different curves for control index or Engineering Demand Parameters (EDP) of levels that assess the structural behavior. The results and the curves for each index of control allow to deduce the structural behavior at an a priori unspecified RP. A general methodology is proposed that takes into account a possible optimization process in the PBEE field. Finally, an application to 8-level seismic performance assessment to structure in a Spanish seismic zone permits deducing that its behavior is deficient for high seismic levels (RP > 475 years). The application of the methodology to a low-to-moderate seismic zone case proves to be a good tool of structural seismic design, applying a more sophisticated although simple PBEE formulation.

• 한국정보처리학회:학술대회논문집
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• 한국정보처리학회 2013년도 추계학술발표대회
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• pp.180-183
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• 2013

근래의 프로세서는 하나의 다이 위에 여러 개의 코어를 배치한 멀티코어 형태를 띠고 있다. 최근에는 프로세서의 에너지 소비량을 줄이기 위해 비대칭 멀티코어를 활용하여 동일한 성능을 유지하며 소비전력을 낮추는 방법에 대한 연구가 활발히 진행되고 있다. 비대칭 멀티코어의 장점을 최대한 활용하기 위해서는 대칭형 멀티코어와는 달리 실행해야 할 프로세스와 상이한 코어간의 작동 특성을 고려해야 한다. 본 논문에서는 전력 소비 효율 향상을 위해 프로세스 스케줄링 알고리즘에 하이브리드 인공지능 기술인 Adaptive Neuro Fuzzy Inference System (ANFIS)를 적용하여 각 프로세스에 적합한 코어를 찾아 할당하는 방법을 제안한다. 시뮬레이션 결과 제안하는 프로세스 스케줄러는 리눅스의 CFS 대비 평균 35.4% 낮은 Energy Delay Product (EDP)를 보였으며 이를 통해 하이브리드 인공지능을 적용한 프로세스 스케줄링 알고리즘의 유효성을 입증하였다.

• Earthquakes and Structures
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• 제23권6호
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• pp.549-580
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• 2022

This paper assesses the influences of modeling assumptions and uncertainties on the performance of the non-linear finite element (FE) model updating procedure and model clustering method. The results of a shaking table test on a four-story steel moment-resisting frame are employed for both calibrations and clustering of the FE models. In the first part, simple to detailed non-linear FE models of the test frame is calibrated to minimize the difference between the various data features of the models and the structure. To investigate the effect of the specified data feature, four of which include the acceleration, displacement, hysteretic energy, and instantaneous features of responses, have been considered. In the last part of the work, a model-based clustering approach to group models of a four-story frame with similar behavior is introduced to detect abnormal ones. The approach is a composition of property derivation, outlier removal based on k-Nearest neighbors, and a K-means clustering approach using specified data features. The clustering results showed correlations among similar models. Moreover, it also helped to detect the best strategy for modeling different structural components.

• Earthquakes and Structures
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• 제26권2호
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• pp.117-130
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• 2024

Probabilistic model of seismic demand is the main tool used for seismic demand estimation, which is a fundamental component of the new performance-based design method. This model seeks to mathematically relate the seismic demand parameter and the ground motion intensity measure. This study is intended to use Bayesian analysis to evaluate the accuracy of the seismic demand estimation of Steel moment resisting frames (SMRFs) through a completely Bayesian method in statistical calculations. In this study, two types of intensity measures (earthquake intensity-related indices such as magnitude and distance and intensity indices related to ground motion and spectral response including peak ground acceleration (PGA) and spectral acceleration (SA)) have been used to form the models. In addition, an extensive database consisting of sixty accelerograms was used for time-series analysis, and the target structures included five SMRFs of three, six, nine, twelve and fifteen stories. The results of this study showed that for low-rise frames, first mode spectral acceleration index is sufficient to accurately estimate demand. However, for high-rise frames, two parameters should be used to increase the accuracy. In addition, adding the product of the square of earthquake magnitude multiplied by distance to the model can significantly increase the accuracy of seismic demand estimation.

• 정보처리학회논문지C
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• 제11C권5호
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• pp.677-682
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• 2004

본 논문에서 파장 분할 다중화(WDM) 방식을 이용한 광 네트워크상의 라우팅과 파장할당 알고리즘을 고찰해 보겠다. 선형 프로그래밍(Linear Programming)과 그래프 컬러링(Graph Coloring)의 조합으로 이루어진 기존의 RWA기법들은 복잡하며, 발견적 방법(Heuristic Method) 사용이 요구된다. 이와 같은 방법은 실행시간이 길며, 최악의 경우에는 실행이 불가능하여 결과를 얻지 못한다. RWA를 해결하기 위한 다른 방법은 최대 EDPs(Edge Disjoint Paths)를 얻기 위해 greedy algorithm을 적용하는 것이다. 이것은 실행시간이 짧지만 파장의 수를 최적으로 사용하지 못한다. 본 논문에서 최대의 EDPs를 얻기 위해서 최대 흐름 기법(Maximum Flow Technique)을 이용한 새로운 알고리즘을 제안한다. 그리고 제안한 알고리즘과 기존에 제시된 최대 EDPs 알고리즘을 비교해 보겠다.