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An Economic Factor Analysis of Air Pollutants Emission Using Index Decomposition Methods (대기오염 배출량 변화의 경제적 요인 분해)

  • Park, Dae Moon;Kim, Ki Heung
    • Environmental and Resource Economics Review
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    • v.14 no.1
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    • pp.167-199
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    • 2005
  • The following policy implications can be drawn from this study: 1) The Air Pollution Emission Amount Report published by the Ministry of Environment since 1991 classifies industries into 4 sectors, i. e., heating, manufacturing, transportation and power generation. Currently, the usability of report is very low and extra efforts should be given to refine the current statistics and to improve the industrial classification. 2) Big pollution industries are as follows - s7, s17 and s20. The current air pollution control policy for these sectors compared to other sectors are found to be inefficient. This finding should be noted in the implementation of future air pollution policy. 3) s10 and s17 are found to be a big polluting industrial sector and its pollution reduction effect is also significant. 4) The effect of emission coefficient (${\Delta}f$) has the biggest impact on the reduction of emission amount change and the effect of economic growth coefficient (${\Delta}y$) has the biggest impact on the increase of emission volume. The effect of production technology factor (${\Delta}D$) and the effect of the change of the final demand structure (${\Delta}u$) are insignificant in terms of the change of emission volume. 5) Further studies on emission estimation techniques on each industry sector and the economic analysis are required to promote effective enforcement of the total volume control system of air pollutants, the differential management of pollution causing industrial sectors and the integration of environment and economy. 6) Korea's economic growth in 1990 is not pollution-driven in terms of the Barry Commoner's hypothesis, even though the overall industrial structure and the demand structure are not environmentally friendly. It indicates that environmental policies for the improvement of air quality depend mainly on the government initiatives and systematic national level consideration of industrial structures and the development of green technologies are not fully incorporated.

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Improvement in Antagonistic Ablility of Antagonistic Bacterium Bacillus sp. SH14 by Transfer of the Urease Gene. (Urease gene의 전이에 의한 길항세균 Bacillus sp. SH14의 길항능력 증가)

  • 최종규;김상달
    • Microbiology and Biotechnology Letters
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    • v.26 no.2
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    • pp.122-129
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    • 1998
  • It were reported that antifungal mechanism of Enterobacter cloacae is a volatile ammonia that produced by the strain in soil, and the production of ammonia is related to the bacterial urease activity. A powerful bacterium SH14 against soil-borne pathogen Fusarium solani, which cause root rot of many important crops, was selected from a ginseng pathogen suppressive soil. The strain SH14 was identified as Bacillus subtilis by cultural, biochemical, morphological method, and $API^{circledR}$ test. From several in vitro tests, the antifungal substance that is produced from B. subtilis SH14 was revealed as heat-stable and low-molecular weight antibiotic substance. In order to construct the multifunctional biocontrol agent, the urease gene of Bacillus pasteurii which can produce pathogenes-suppressive ammonia transferred into antifungal bacterium. First, a partial BamH I digestion fragment of plasmid pBU11 containing the alkalophilic B. pasteurii l1859 urease gene was inserted into the BamH I site of pEB203 and expressed in Escherichia coli JM109. The recombinant plasmid was designated as pGU366. The plasmid pGU366 containing urease gene was introduced into the B. subtilis SH14 with PEG-induced protoplast transformation (PIP) method. The urease gene was very stably expressed in the transformant of B. subtilis SH14. Also, the optimal conditions for transformation were established and the highest transformation frequency was obtained by treatment of lysozyme for 90 min, and then addition of 1.5 ${mu}g$/ml DNA and 40% PEG4000. From the in vitro antifungal test against F. solani, antifungal activity of B. subtilis SH14(pGu366) containing urease gene was much higher than that of the host strain. Genetical development of B. subtilis SH14 by transfer of urease gene can be responsible for enhanced biocontrol efficacy with its antibiotic action.

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Association between Medial Temporal Atrophy, White Matter Hyperintensities, Neurocognitive Functions and Activities of Daily Living in Patients with Alzheimer's Disease and Mild Cognitive Impairment (알츠하이머병 및 경도인지장애 환자에서 내측두엽 위축, 대뇌백질병변, 신경인지기능과 일상생활 수행능력과의 연관성)

  • An, Min hyuk;Kim, Hyun;Lee, Kang Joon
    • Korean Journal of Psychosomatic Medicine
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    • v.29 no.1
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    • pp.67-76
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    • 2021
  • Objectives : The aim of this study was to compare activities of daily living (ADLs) according to degenerative changes in brain [i.e., medial temporal lobe atrophy (MTA), white matter hyperintensities] and to examine the association between neurocognitive functions and ADLs in Korean patients with dementia due to Alzheimer's disease (AD) and mild cognitive impairment (MCI). Methods : Participants were 111 elderly subjects diagnosed with AD or MCI in this cross-sectional study. MTA in brain MRI was rated with standardized visual rating scales (Scheltens scale) and the subjects were divided into two groups according to Scheltens scale. ADLs was evaluated with the Korean version of Blessed Dementia Scale-Activity of daily living (BDS-ADL). Neurocognitive function was evaluated with the Korean version of the Consortium to Establish a Registry for Alzheimer's Disease assessment packet (CERAD-K). Independent t-test was performed to compare ADLs with the degree of MTA. Pearson correlation and hierarchical multiple regression analyses were performed to analyze the relationship between ADLs and neurocognitive functions. Results : The group with high severity of the MTA showed significantly higher BDS-ADL scores (p<0.05). The BDS-ADL score showed the strongest correlation with the word list recognition test among sub-items of the CERAD-K test (r=-0.568). Findings from the hierarchical multiple regression analysis revealed that the scores of MMSE-K and word list recognition test were factors that predict ADLs (F=44.611, p<0.001). Conclusions : ADLs of AD and MCI patients had significant association with MTA. Our study, which identifies factors correlated with ADLs can provide useful information in clinical settings. Further evaluation is needed to confirm the association between certain brain structures and ADLs.

Studies on the bionomics of Oriental moth, Cnidocampa flavescens WALKER, damaging to the persimmon tree in the southern part of Korea (감나무에 기생하는 Cnidocampa flavescens WALKER의 생태에 관한 연구)

  • Chung S. T.;Lee E. S.
    • Korean journal of applied entomology
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    • v.4
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    • pp.39-46
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    • 1965
  • The author studied on the bionomics of Oriental moth. Cnidocampa flavescens WALKER, damaging to the persimmon tree n the southern part of Korea from 1964 to 1965. The results can be summarized as follows; 1. Emergence peak period of Oriental moth was mid-June in Taegu district and eggs are deposited on the opposite side of persimmon tree leaf. Specially most of eggs are deposited on the terminal part of opposite side and peak period s also mid-June. 2. Hatched Percentage of eggs was $84.4\%$ in 1964 while $96.1\%$ in 1965 at the rearing room. Mean egg Period was $5.984\pm0.162$ in 1964 while $6.262\pm0.094$ days in 1965. Thus during two years, the egg period was about 6 days. 3. In the growth ratio of Oriental moth fed on various host plants persimmon tree, Acer negund, Hazel-wood and Platanus, the best growth ratio was shown on the leaf of Hazel-wood from 1st till 3rd instar, but, on the contrary, persimmon tree was the best from 4th till the last instar. The growth ratio of head width was also the same tendency as the body length above mentioned. Individuals fed on the leaf of platanus were dead after 20 days. 4. Oriental moth has one generation a year and molts 6 times. The first molting occurred in 5 hours after hatched, and the other moltings were done at f days intervals. After 3 days since the last molting, larvae made the non for over-winter in it. 5. As the bristles on the process of larval body are different from each position and instar, judgement of instars are possible by the counting of bristles on the body according to the Table 8. Specially the bristle of L. 2., D. 2, 3 ,8. 10. and L. 1, 3, 4, 5, 6, 7, are perfectly different from each instar. From these bristles, instars can be recognized easily. 6. Pupation of larvae in the over-wintered cocoon on the stem of persimmon tree was done in mid-May and continued will early June when emergence will take place. 7. Mean number of eggs in the ovary was $1325.5\pm2.7182$

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Studies on the quantitative changes of thiamin during Takju brewing (탁주 양조중 Thiamin의 소장에 관한 연구)

  • Kim, Chan-Jo;Choi, Woo-Young
    • Applied Biological Chemistry
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    • v.13 no.1
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    • pp.105-109
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    • 1970
  • Thiamin in the various materials which used for Takja braving was determined and its quantitative changes in the Takju mashes which were mashed with polished rice and wheat flour respectively using Nuruk only for the enzyme source, and with wheat flour and corn powder respectively using Nuruk and Koji, were checked at 24 hours intervals during the whole brewing period. The results obtained were as follows. a) The thiamin contents in 100 grams of each materials were: Polished rice 107.8${\gamma}$ Wheat Pour 185.0${\gamma}$ Corn powder 410.2${\gamma}$ Nuruk 347.4${\gamma}$ Koji of wheat flour 170.1${\gamma}$ Koji of corn powder 257.3${\gamma}$ b) About 40 to 50 percent of thiamin in the polished rice, wheat flour and, corn powder were losed by steaming at 10 wounds for 50 minutes. c) The quantitative changes of thiamin in the Takju meshes showed a similar tendency. Thiamin contents were decreased markedly during 2 days after mashing but thereafter, almost unchanged till the mashes were ripened. Its decreasing rates in tile two plots uses Nuruk and Koji wereless thaw those in the two plots used Nuruk only. d) Approximately 6${\gamma}$ of thiamin was determined in 100 ml. of the ripened mash of the rice plot and 7.5${\gamma}$ in tire whet flour plot in the case of using Nuruk only. 12.4${\gamma}$ of thiamin was determined in 100 ml. of the ripened mash of the wheat flour plot and 15.4${\gamma}$in the corn powder plot in the case of using Nuruk and Koji. e) It was assumed that 2.4 to 3.5${\gamma}$ of thiamin were contained in 100 ml. of finished Takju of the two plots used Nuruk only and 5 to 7${\gamma}$ in the two plots used Nuruk and Koji. f) About 43.7${\gamma}$ of thiamin were determined in 100 grams of Takju cake of the rice plot and 56.1${\gamma}$ in the wheat flour plat used Nuruk only, and 81.4${\gamma}$ in the corn powder plot and 57.7${\gamma}$ in the wheat flour plot used Nuruk and Koji.

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A Case Study on High and Low Performance Areas for Family Planning (가족계획 우수.부진지역 사례연구)

  • 홍성열;김태일
    • Korea journal of population studies
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    • v.4 no.1
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    • pp.105-130
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    • 1981
  • This study was conducted to compare the characteristics of high performane areas for family planning with that of low performance areas and to find factors which strongly affected contraceptive practice behavior. For the study, eight areas were selected from 274 rural family planning canvassing areas of Korean Population Policy and Program Evaluation Study, which was an action study operated in all areas of Cheju Island from July 1, 1976 until December 31,1979. As a first step of the action study, Cheju Island was devided up 318 family planning canvasser areas Each area was consisted of 200 households in rural district and 300 households in urhan one Duriog the period of project, each canvassing area had been managed by a female family planning canvasser, selected by director of health center considering several individual conditions needed for family planning activities Basic activities of canvassers were to counsell all the eligihie couples in own charged area about family planning methods and also to distribute contraceptives such as condoms and oral pills. In case couples desire to accept sterilization including vasectomy and tubal-ligation, the canvassers played a linking role connecting potential client with family planning field workers. Canvassng areas shows significant differentce in performance for family planning, nevertheless they are supposed to have almost the same conditions regarding family planning distribution channel. Because the purpose of the Cheju project was to eliminate all the problems that existed in governmental distribution system, that is to remove geographic, economic, cognitive and administrative barriers Accumulated performances of family planning methods accepted by residents in each area were calculated by eligible women aged 14-49. And then canvassing areas were ranked according to performance score. Consequently, 4 areas in extremely high and low family planning performance areas were selected respectively. Major results were obtained by comparing characteristics of high performance area with that of low performance areas, which are as follows: 1. The mean number of living children was about the same both in high and low performance areas for family planning. But respondents' mean age (38.5) in high performance areas was higher than that (37.0) in low performance areas 2. Respondents' perception in the expectant educational level of others' children in high performance areas was higher than that in low performance areas, although respondents educational level, monthly expenditure and ratio of children in high school and above was not different. 3. Ratio of ownerships of TV and newspaper in high performance areas was highen than that in low performance areas 4. The duration of canvasser' charge in high performance areas was longer than that of low performance areas, showing the fact that canvassers didn't move cut in high performance areas 5. In high performance areas, canvassers' houses were relatively located in the center part of the village. And so villagers resided in near distances from the anvasser's house 6. 4H clubs' activities in high performance areas were more active than those in low performance areas Therefore it was assumed that cohesiveness of community in high performance areas were stronger than that in low areas. 7. Canvassers' family planning practice rate was higher than that in low performance areas, and also canvassers' human relationship was more sociable than that of canvassers in low performance areas. 8. Fourteen variables which showed relatively high significance level in $X^2$ and F test were selected as independent variables for stepwise regression analysis. According to the results of regression analysis. five of 14 variables-distributors education level ($R^2$=.4439), duration of distributor's charge ($R^2$=.6166), 4H club activities ($R^2$=.6697), canvasser's contraceptive practice ($R^2$=.7377) and location of distributions house ($R^2$=.8010) explained 80.1 percent of total variance.

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Response of Measles-specific Antibody in Children with Measles During Measles Epidemic in Seongnam, 1993 (1993년도 성남지역에서 유행한 홍역 환아에서의 홍역 특이 항체 반응)

  • Kim, Ji Youn;Park, Yoon Hyung;Kim, Soon Ki;Choi, Yun Hwa;Lee, Hoan Jong;Son, Byong Kwan
    • Pediatric Infection and Vaccine
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    • v.4 no.1
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    • pp.126-132
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    • 1997
  • Measles outbreak in the world was decreased since measles vaccine had been introduced. Although vaccination rate is high, measles was not eradicated and measles reappeared among vaccinated children. We measured measles-specific antibody from the vaccinated and unvaccinated groups who had experienced apparent measles in the Seongnam city in 1993. The results were as follows. 1) The data included total 126 children (M:F=1 : 1). Age distribution of measles outbreak revealed 6 children in 5yr, 11 in 6yr, 20 in 7yr, 39 in 8yr, 22 in 9yr, 11 in 10yr, 11 in 11yr, and 6 in 12yr. 2) MMR vaccination rate was 78.6%(99/126) in the children who had experienced measles. Positive rate of measles-specific IgM Ab was 80.8% (80/99) among the vaccinated group and among 9E.6.% (25/27) the unvaccinated. 3) Positive rate of measles-specific IgG Ab was 90.9% (90/99) among MMR-vaccinated group, and 85.2% (23/27) in unvaccinated group. In conclusion, measles-specific IgM antibody have been detected more than 1 month in most patients. The relatively high proportion of measles-specific IgM positivity may mean primary vaccine failure. To booster the antibody titers and to prevent measles epidemic in school-aged children, revaccination of measles should be considered.

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Bioequivalence of SCD Zaltoprofen Tablet to Soleton® Tablet (Zaltoprofen 80 mg) (솔레톤 정(잘토프로펜 80 mg)에 대한 삼천당잘토프로펜 정의 생물학적동등성)

  • Kang, Hyun-Ah;Park, Sun-Ae;Kim, Dong-Ho;Kim, Hwan-Ho;Yun, Hwa;Kim, Kyng-Ran;Yoo, Hee-Doo;Park, Eun-Ja;Cho, Hye-Young;Lee, Yong-Bok
    • Journal of Pharmaceutical Investigation
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    • v.36 no.3
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    • pp.209-215
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    • 2006
  • Zaltoprofen, (2-(10,11-dihydro-10-oxodibenzo[b,f]thiepin-2-yl)propionic acid) is an NSAID with powerful anti-inflammatory effects as well as an analgesic action on inflammatory pain. The purpose of the present study was to evaluate the bioequivalence of two zaltoprofen tablets, $Soleton^{\circledR}$ (CJ Corp.) and SCD Zaltoprofen (Samchundang Pharmaceutical Co., Ltd.), according to the guidelines of the Korea Food and Drug Administration (KFDA). The release of zaltoprofen from the two zatoprofen formulations in vitro was tested using KP Vlll Apparatus ll method with various dissolution media. Twenty six healthy male subjects, $23.2{\pm}2.26$ years in age and$64.7{\pm}8.08$ kg in body weight, were divided into two groups and a randomized $2{\times}2$ cross-over study was employed. After a single tablet containing 80 mg as zaltoprofen was orally administered, blood samples were taken at predetermined time intervals and the concentrations of zaltoprofen in serum were determined using HPLC with UV detector. The dissolution profiles of two formulations were similar in all tested dissolution media. The pharmacokinetic parameters such as $AUC_t$, $C_{max}$ and $T_{max}$ were calculated, and ANOVA test was utilized for the statistical analysis of the parameters using logarithmically transformed $AUC_t$, $C_{max}$ and untransformed $T_{max}$. The results showed that the differences between two formulations based on the reference drug, $Soleton^{\circledR}$ were 6.33, 5.91 and 17.7% for $AUC_t$, $C_{max}$ and untransformed $T_{max}$, respectively. There were no sequence effects between two formulations in these parameters. The 90% confidence intervals using logarithmically transformed data were within the acceptance range of log 0.8 to log 1.25 (e.g.,log $1.01{\sim}1og\;1.11$ and log $0.928{\sim}1og\;1.18$ for $AUC_t$ and $C_{max}$, respectively). Thus, the criteria of the KFDA bioequivalence guideline were satisfied, indicating SCD Zaltoprofen tablet was bioequivalent to $Soleton^{\circledR}$ tablet.

A Preliminary Study on Setting Philosophy and Curriculum Development in Nursing Education (간호교육 철학정립 및 교육과정 개발을 위한 기초조사)

  • 정연강;김윤회;양광희;한경자;한상임
    • Journal of Korean Academy of Nursing
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    • v.18 no.2
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    • pp.162-188
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    • 1988
  • The purpose of this study is to guide the direction of the Korean nursing education to analysize ⑴ the philosophy and objectives ⑵ curriculum, and ⑶ educational environment. This analysis is based on the data from 50 nursing schools (14 4-year colleges and 35 3-year colleges) The survey was conducted from Dec. 1986 through Jan. 1987 by mail. 1) Educational philosophy and objectives 10 4-year colleges and 8 3-year college program have curricular philosoph. Most popular curricular philosophies are human beings, health, nursing, nursology, nursing education, nurses role in the present and in the future. 10 nursing schools mentioned that human being is the subject to interact with : environment physically, mentally and socially. 2 schools mentioned that health is the state of functioning well physically, mentally and socially. 13 schools mentioned that the nursing is the dynamic act to maintain and to promote the highest possible level of health. 4 schools mentioned that the nursology is an applied science. 4 schools mentioned that nursing education is the process to induce the behavioural changes based on the individual ability. There is different opinion about the nurses' role between 4-year college and 3-year college. In the responses from 4-year colleges they focus on the leadership in effective changes, self-regulating and self-determining responsibilities, applying the new technology, continuing education, and participation in research to further nursing knowledge. In the responses from 3-year colleges, they focus on the education in college, primary health care nursing, direct care provider and public health education. Among 50 respondents 40 schools have educational goals which can be divided into two categories. One is to establish the moral and the other is to develop the professionalism. 2) Curriculm The analsis of curriculum is only based on the data from the 4-year colleges because the most of 3-year colleges follow the curriculum guideline set by the Ministry of Education. a) Comparison of the credits in cultural subject and in nursing major. The average required credit for graduation is 154.6 and the median credit is the range of 140-149. The average credit of cultural subjects is 43.4. In detail, the average number of credit of required course and elective courses are 24.1 and 19.3 respectively. The average credit for major subject is 111.2. In detail, the average credit for required courses and electives course are 100.9 and 10.4 respectively. In 5 colleges, students are offered even on elective course b) Comparison of the credit by class. The average earned credits are as follows : 41.1 in freshman, 400 in sophormore 38.3 in junior and 32.4 in senior. Cultural subjects are studied in early phases. c) Comparison of the compulsory and elective cultural subject by institute. The range of credit is 7-43 in compulsory cultural subjects and there are lot of differences among institutions. While all respondents require liberal arts as compulsary subjects, few respondents lists social science, natural science and behavioral science as required subjects. Social science-related subjects are frequently chosen as cultural subjects d) Distribution of creditsin cultural subjects by institute. The liberal art subjects are taught in 20 institute. English and physical education courses are taught in all instituions. The social science subjects are taught in 15 colleges and the basic Psycology and the Basic sociology are the most popular subjects. The natural science subjects are taught in 7 colleges and Biology and Chemistry are the most popular subjects among them. e) Distribution of credits in major basic courses by institute. Most of the institutes select Anatomy, Microbiology, Physiology, biochemistry and Pathology as basic major courses. f) Comparison of the required and elective courses for nursing major by institutions. Subjects and credit ranges in major are varing by institute. More than half of the respondents select the following subjects as required major subjects. (1) Adults Health Nursing and Practice (19.5 credits) (2) Mother and Child Care and Practice (8.9 credits) (3) Community Health Care and Practice (8.5 credits) (4) Psychiatric Nursing Care and Practice (8.1 credits) (5) Nursing Management and Practice (3.9 credits) (6) Fundamental of Nursing, Nursing Research and Health Assessment and Practice. Three institutions select Introduction to nursing, Rehabilitation Nursing, School Nursing, Public Health Nursing, Nursing English, Communication, Human Development as electives in nursing major. 3) Educational environment a) Nursing institution There are forty-three 3-year colleges and seventeen 4-year colleges and 81.4% of which are private b) Number of students and faculty 19.2% of the students are in 4-year colleges and 80.8% of the students are in 3-year colleges. In 4-year colleges, the number of nursing faculty members is in the other of assistant professor, instructor and professor. In 3-year colleges, the orderiis lecturer, associate professor, full time instructor and assistant professor. In 4-year colleges, 18.8 students are allocated per nursing faculty and in 3-year colleges, 33.1 students are allocated per nursing faculty. c) Clinical practices 66.7% of the 4-year colleges practice over 1201 hours in clinic and 28.5% of 3-year colleges practice over 1201 hours in clinic. In 4-year colleges, 11.5 students are allocated per nursing faculty and in 3-year colleges,17 students are allocated per nursing faculty The survey shows no difference in the procedure between 4-year colleges and 3-year colleges but 3-year colleges choose the more variety practicing site such as special hospital and community health clinic. d) Audiovisual facilities The survey shows a lot of difference in audiovisual facilities among institution and 3-year colleges are less equipped than 4-year colleges.

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휨 구조의 압전 마이크로-켄틸레버를 이용한 진동 에너지 수확 소자

  • Na, Ye-Eun;Park, Hyeon-Su;Park, Jong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.476-476
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    • 2014
  • 서론: 저 전력 소모를 필요로 하는 무선 센서 네트워크 관련 기술의 급격한 발달과 함께 자체 전력 수급을 위한 진동 에너지 수확 기술에 대한 연구가 활발히 이루어지고 있다. 다양한 구조와 소재를 압전 외팔보에 적용하여 제안하고 있다. 그 중에서도 진동 기반의 에너지 수확 소자는 주변 환경에서 쉽게 진동을 얻을 수 있고, 높은 에너지 밀도와 제작 방법이 간단하다는 장점을 가지고 있어 많은 분야에 응용 및 적용 가능하다. 기존 연구에서는 2차원적으로 진동 에너지 수확을 위한 휜 구조의 압전 외팔보를 제안 하였다. 휜 구조를 갖는 압전 외팔보는 각각의 짧은 두 개의 평평한 외팔보가 일렬로 연결된 것으로 볼 수 있다. 하나의 짧고 평평한 외팔보는 진동이 가해지면 접선 방향으로 응력이 생겨 최대 휨 모멘텀을 갖게 된다. 그러므로 휜 구조를 갖는 외팔보는 진동이 인가됨에 따라 길이 방향과 수직 방향으로 진동한다. 하지만, 이 구조는 수평 방향으로 가해지는 진동에 대한 에너지를 수확하기에는 한계점을 가진다. 즉, 3축 방향에서 임의의 방향에서 진동 에너지를 수확하기는 어렵다. 본 연구에서는 3축 방향에서 에너지를 효율적으로 수확할 수 있도록 헤어-셀 구조의 압전 외팔보 에너지 수확소자를 제안한다. 제안된 소자는 길이 방향과 수직 방향뿐만 아니라 수평 방향으로도 진동하여 임의의 방향에서 진동 에너지를 수확할 수 있다. 구성 및 공정: 제안하는 소자는 3축 방향에서 임의의 진동을 수확하기 위해서 길이를 길게 늘이고 길이 방향을 따라 휘어지는 구조의 헤어-셀 구조로 제작하였다. 외팔보의 구조는 외팔보의 폭 대비 길이의 비가 충분히 클 때, 추가적인 자유도를 얻을 수 있다. 그러므로 헤어-셀 구조의 에너지 수확 소자는 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향을 통해서 3차원적으로 임의의 주변 진동 에너지를 수확하여 전기적인 에너지로 생성시킬 수 있다. 제작된 소자는 높은 종횡비를 갖는 무게 추($500{\times}15{\times}22{\mu}m3$)와 길이 방향으로 길게 휜 압전 외팔보($1000{\times}15{\times}1.7{\mu}m3$)로 구성되어있다. 공정 과정은 다음과 같다. 먼저, 실리콘 웨이퍼 위에 탄성층을 형성하기 위해 LPCVD SiNx를 $0.8{\mu}m$와 LTO $0.2{\mu}m$를 증착 후, 각각 $0.03{\mu}m$$0.12{\mu}m$의 두께를 갖는 Ti와 Pt을 하부 전극으로 스퍼터링한다. 그리고 Pb(Zr0.52Ti0.48)O3 박막을 $0.35{\mu}m$ 두께로 졸겔법을 이용하여 증착하고 상부 Pt층을 두께 $0.1{\mu}m$로 순차적으로 스퍼터링하여 형성한다. 상/하부 전극은 ICP(Inductively Coupled Plasma)를 이용해 건식 식각으로 패턴을 형성한다. PZT 층과 무게 추 사이의 보호막을 씌우기 위해 $0.2{\mu}m$의 Si3N4 박막이 PECVD 공정법으로 증착되고, RIE로 패턴을 형성된다. Ti/Au ($0.03/0.35{\mu}m$)이 E-beam으로 증착되고 lift-off를 통해서 패턴을 형성함으로써 전극 본딩을 위한 패드를 만든다. 초반에 형성한 실리콘 웨이퍼 위의 SiNx/LTO 층은 RIE로 외팔보 구조를 형성한다. 이후에 진행될 도금 공정을 위해서 희생층으로는 감광액이 사용되고, 씨드층으로는 Ti/Cu ($0.03/0.15{\mu}m$) 박막이 스퍼터링 된다. 도금 형성층을 위해 감광액을 패턴화하고, Ni0.8Fe0.2 ($22{\mu}m$)층으로 도금함으로써 외팔보 끝에 무게 추를 만든다. 마지막으로, 압전 외팔보 소자는 XeF2 식각법을 통해 제작된다. 제작된 소자는 소자의 여러 층 사이의 고유한 응력 차에 의해 휨 변형이 생긴다. 실험 방법 및 측정 결과: 제작된 소자의 성능을 확인하기 위하여 일정한 가속도 50 m/s2로 3축 방향에 따라 입력 주파수를 변화시키면서 출력 전압을 측정하였다. 먼저, 소자의 기본적인 공진 주파수를 얻기 위하여 수직 방향으로 진동을 인가하여 주파수를 변화시켰다. 그 때에 공진 주파수는 116 Hz를 가지며, 최대 출력 전압은 15 mV로 측정되었다. 3축 방향에서 진동 에너지 수확이 가능하다는 것을 확인하기 위하여 제작된 소자를 길이 방향과 수평 방향으로 가진기에 장착한 후, 기본 공진 주파수에서의 출력 전압을 측정하였다. 진동이 길이방향으로 가해졌을 때에는 33 mV, 수평방향으로 진동이 인가되는 경우에는 10 mV의 최대 출력 전압을 갖는다. 제안하는 소자가 수 mV의 적은 전압은 출력해내더라도 소자는 진동이 인가되는 각도에 영향 받지 않고, 3축 방향에서 진동 에너지를 수확하여 전기에너지로 얻을 수 있다. 결론: 제안된 소자는 3축 방향에서 진동 에너지를 수확할 수 있는 에너지 수확 소자를 제안하였다. 외팔보의 구조를 헤어-셀 구조로 길고 휘어지게 제작함으로써 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향에서 출력 전압을 얻을 수 있다. 미소 전력원으로 실용적인 사용을 위해서 무게추가 더 무거워지고, PZT 박막이 더 두꺼워진다면 소자의 성능이 향상되어 높은 출력 전압을 얻을 수 있을 것이라 기대한다.

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