• 제목/요약/키워드: E-beam Process

검색결과 269건 처리시간 0.028초

Behaviour of steel-fibre-reinforced concrete beams under high-rate loading

  • Behinaein, Pegah;Cotsovos, Demetrios M.;Abbas, Ali A.
    • Computers and Concrete
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    • 제22권3호
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    • pp.337-353
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    • 2018
  • The present study focuses on examining the structural behaviour of steel-fibre-reinforced concrete (SFRC) beams under high rates of loading largely associated with impact problems. Fibres are added to the concrete mix to enhance ductility and energy absorption, which is important for impact-resistant design. A simple, yet practical non-linear finite-element analysis (NLFEA) model was used in the present study. Experimental static and impact tests were also carried out on beams spanning 1.3 meter with weights dropped from heights of 1.5 m and 2.5 m, respectively. The numerical model realistically describes the fully-brittle tensile behaviour of plain concrete as well as the contribution of steel fibres to the post-cracking response (the latter was allowed for by conveniently adjusting the constitutive relations for plain concrete, mainly in uniaxial tension). Suitable material relations (describing compression, tension and shear) were selected for SFRC and incorporated into ABAQUS software Brittle Cracking concrete model. A more complex model (i.e., the Damaged Plasticity concrete model in ABAQUS) was also considered and it was found that the seemingly simple (but fundamental) Brittle Cracking model yielded reliable results. Published data obtained from drop-weight experimental tests on RC and SFRC beams indicates that there is an increase in the maximum load recorded (compared to the corresponding static one) and a reduction in the portion of the beam span reacting to the impact load. However, there is considerable scatter and the specimens were often tested to complete destruction and thus yielding post-failure characteristics of little design value and making it difficult to pinpoint the actual load-carrying capacity and identify the associated true ultimate limit state (ULS). To address this, dynamic NLFEA was employed and the impact load applied was reduced gradually and applied in pulses to pinpoint the actual failure point. Different case studies were considered covering impact loading responses at both the material and structural levels as well as comparisons between RC and SFRC specimens. Steel fibres were found to increase the load-carrying capacity and deformability by offering better control over the cracking process concrete undergoes and allowing the impact energy to be absorbed more effectively compared to conventional RC members. This is useful for impact-resistant design of SFRC beams.

저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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블록 공중합체 박막을 이용한 실리콘 나노점의 형성 (Fabrication of Si Nano Dots by Using Diblock Copolymer Thin Film)

  • 강길범;김성일;김영환;박민철;김용태;이창우
    • 마이크로전자및패키징학회지
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    • 제14권2호
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    • pp.17-21
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    • 2007
  • 밀도가 높고 주기적으로 배열된 실리콘 나노점이 실리콘 기판위에 형성 되었다. 실리콘 나노점을 형성하기 위해 사용된 나노패턴의 지름은 $15{\sim}40$ 나노미터(nm)이고 깊이는 40 nm 이었으며 기공과 기공 사이의 거리는 $40{\sim}80\;nm$ 이었다. 나노미터 크기의 패턴을 형성시키기 위해서 자기조립물질을 사용했으며 폴리스티렌(PS) 바탕에 벌집형태로 평행하게 배열된 실린더 모양의 폴리메틸메타아크릴레이트(PMMA)의 구조를 형성하였다. 폴리메틸메타아크릴레이트를 아세트산으로 제거하여 폴리스티렌만 남아있는 나노크기의 마스크를 만들었다. 형성된 나노패턴에 전자빔 기상증착장치를 사용하여 금 박막을 $100\;{\AA}$ 증착하고 리프트오프(lift-off) 방식으로 금 나노점을 만들었다. 형성된 금 나노점을 불소기반의 화학반응성 식각법을 이용하여 식각하고 황산으로 제거하였다. 형성된 실리콘 나노점의 지름은 $30{\sim}70\;nm$였고 높이는 $10{\sim}20\;nm$ 였다.

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W-Band MMIC를 위한 T-형태 게이트 구조를 갖는 MHMET 소자 특성 (Characteristics of MHEMT Devices Having T-Shaped Gate Structure for W-Band MMIC)

  • 이종민;민병규;장성재;장우진;윤형섭;정현욱;김성일;강동민;김완식;정주용;김종필;서미희;김소수
    • 한국전기전자재료학회논문지
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    • 제33권2호
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    • pp.99-104
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    • 2020
  • In this study, we fabricated a metamorphic high-electron-mobility transistor (mHEMT) device with a T-type gate structure for the implementation of W-band monolithic microwave integrated circuits (MMICs) and investigated its characteristics. To fabricate the mHEMT device, a recess process for etching of its Schottky layer was applied before gate metal deposition, and an e-beam lithography using a triple photoresist film for the T-gate structure was employed. We measured DC and RF characteristics of the fabricated device to verify the characteristics that can be used in W-band MMIC design. The mHEMT device exhibited DC characteristics such as a drain current density of 747 mA/mm, maximum transconductance of 1.354 S/mm, and pinch-off voltage of -0.42 V. Concerning the frequency characteristics, the device showed a cutoff frequency of 215 GHz and maximum oscillation frequency of 260 GHz, which provide sufficient performance for W-band MMIC design and fabrication. In addition, active and passive modeling was performed and its accuracy was evaluated by comparing the measured results. The developed mHEMT and device models could be used for the fabrication of W-band MMICs.

RIE 식각시 발생하는 비등방도 변화에 따른 머리빗형 액튜에이터의 동작 특성 분석 (Operation Characteristic Analysis of a Comb Actuator due to a Anisotropy Variation in RIE Etching)

  • 김봉수;박호준;박정호
    • 센서학회지
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    • 제8권5호
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    • pp.368-376
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    • 1999
  • 본 논문에서는 머리빗형 액튜에이터의 제작 공정 중에서 RIE 식각 공정시 발생하는 식각의 비등방도의 변화에 의해서 머리빗형 액튜에이터의 스프링 상수, 공진 주파수, 정전 구동력 과리고 진동자 변위 등에서 발생하는 동작 특성이 설계 값으로부터 변화되는 것을 예측하였다. 이를 위해 $6\;{\mu}m$ 두께의 폴리실리콘에 대한 RIE 식각 실험을 수행하여 RF power, $Cl_2$ 유량 그리고 챔버내 압력에 따른 비등방도를 측정하였다. 실험 결과에서 RF Power, $Cl_2$ 유량, 그리고 챔버내 압력이 증가할수록 비등방도 감소하였다. 이러한 비등방도 감소에 따른 머리빗형 구조물의 동작 특성을 세 가지 다른 지지빔의 경우에 대해 예측하였는데 세 가지는 fixed-fixed, crab-leg, 그리고 double crab-leg 구조이다. 비등방도가 감소함에 따라 즉, 지지빔의 단면이 직사각형이 아니고 사다리꼴이 되면서, 머리빗형 액튜에이더의 스프링 상수, 공진 주파수, 그리고 정전 구동력은 감소하였지만 질량체의 변위는 증가하였다. 그리고 세 가지 구조물 중에서 double crab-leg 지지빔을 갖는 머리빗형 액튜에이터의 특성이 비등방도에 의해 가장 큰 영향을 받는 것으로 나타났다.

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Synthesis of barium-doped PVC/Bi2WO6 composites for X-ray radiation shielding

  • Gholamzadeh, Leila;Sharghi, Hamed;Aminian, Mohsen Khajeh
    • Nuclear Engineering and Technology
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    • 제54권1호
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    • pp.318-325
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    • 2022
  • In this study, composites containing undoped and barium-doped Bi2WO6:Ba2+were investigated for their shielding against diagnostic X-ray. At first, Bi2WO6 and barium-doped Bi2WO6 were synthesized with different weight percentages of barium oxide through a hydrothermal process. The as-synthesized nanostructures were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS) and Raman spectroscopy (RS). After that, some shields were generated with undoped and barium-doped Bi2WO6:Ba2+ nanostructure particles incorporated into polyvinyl chloride (PVC) polymer with different thicknesses and 15% weight of the nanostructure. Finally, the prepared samples were exposed to an X-ray tube at 40, 80, and 120 kV voltages, 10 mAs and, 44.5 cm SID (i.e. the distance from the X-ray beam source to the specimen). Linear and mass attenuation coefficients were also calculated for different samples. The results indicated that, among the samples, the one with 7.5 mmol barium-doped Bi2WO6 had the most attenuation at the voltage of 40kV, and the attenuation coefficients would increase with an increase in the amount of barium. The samples with 15 and 17.5 mmol barium-doped Bi2WO6 had higher attenuation than the others at 80 and 120 kV. Moreover, the half-value layer (HVL), tenth-value layer (TVL) and 0.25 mm lead equivalent thickness were calculated for all the samples. The lowest HVL value was for the sample with 7.5 mmol barium-doped Bi2WO6. As the result clearly show, an increment in the barium-doping content leads to a decrease in both HVL and TVL. In every three voltages, 0.25 mm lead equivalent thickness of the barium-doped composites (7.5 mmol and 15 mmol) had less than the other composites. The lowest value of 0.25 mm lead equivalent thickness was 7.5 barium-doped in 40 kV voltage and 15 mmol barium-doped in 80 kV and 120 kV voltages. These results were obtained only for 15% weight of the nanostructure.

GEANT4를 이용한 정위적 사이버나이프 선량분포의 계산과 측정에 관한 연구 (Monte Carlo Study Using GEANT4 of Cyberknife Stereotactic Radiosurgery System)

  • 이충일;신재원;신헌주;정재용;김연래;민정환;홍승우;정수미;정원균;서태석
    • 한국의학물리학회지:의학물리
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    • 제21권2호
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    • pp.192-200
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    • 2010
  • 사이버나이프 치료에서 사용하는 소조사면은 전자평형의 부재와 급격한 선량 경사도(Steep dose gradients), 그리고 광자와 전자들의 스펙트럼 변화 요인으로 인하여 소조사면 광자선 선량 측정은 일반적인 치료의 측정보다 좀더 어렵고 복잡하다. 본 연구에서는 다이오드 검출기를 이용한 측정값과 GEANT4를 이용한 계산값을 비교하고 정확한 선량 전달을 위한 측정 선량의 검증 도구의 한 종류로 GEANT4의 유용성을 입증하고자 한다. 사이버나이프 몬테카를로 모델을 개발하는데 있어 두 단계로 진행하였다. 첫 번째 단계는 선형가속기 헤드(treatment head) 시뮬레이션과 이를 통한 광자 에너지 스펙트럼의 계산이었고, 두 번째 단계는 5, 10, 20, 30, 50, 60 mm의 여섯 개 원형 조사면에 대한 물팬텀속에서의 깊이선량율의 계산이었다. 그리고 출력인수(Relative output factors)에 대한 계산은 5 mm부터 60 mm까지 총 12가지 조사면에 대해 수행되었으며 그 결과를 다이오드 검출기를 이용한 측정값과 비교하였다. 가로선량분포(Profiles)의 경우 5, 10, 20, 30, 50, 60 mm의 6가지 조사면에 대해 계산이 이루어졌고 깊이는 1.5, 10, 20 cm의 세 가지 깊이에 대해 수행되었다. 깊이선량율의 계산값을 측정값과 비교한 결과 평균 2% 미만의 오차를 보여 임상에서 허용 가능한 결과를 얻었다. 조사면 출력인자의 경우에 조사면 직경 7.5 mm 이상에서 3% 이내의 오차를 보였으나 직경 5 mm 조사면에서는 6.9%로 높은 오차를 보였다. 가로선량분포에서 20 mm 이상의 조사면에서는 2% 미만의 오차를 보였고 그 이하의 조사면에서는 3.5% 미만의 오차를 보였다. 본 연구에서는 소조사면 사이버나이프 측정을 위한 선량분포 계산을 GEANT4 코드를 사용하여 다이오드 측정 결과와 비교하였다. 다이오드와의 측정 비교 결과 5 mm 조사면을 제외한 나머지 조사면들에 대해 오차 0.2~0.6% 내의 만족할만한 결과를 얻었다. 향후 소조사면에서 정확성을 가지는 Gafchromic 필름 등 다른 측정기와 비교를 통하여 그 정확성이 평가된다면 이 GEANT4의 선량분포 계산 방법은 소조사면을 이용하는 사이버나이프 방사선치료에서 정확한 선량 전달을 위한 측정 선량의 검증 도구의 한 종류로 사용할 수 있을 것으로 예상한다.

디지털 이미지 처리와 강형식 기반의 무요소법을 융합한 시험법의 모서리 점과 이미지 해상도의 영향 분석 (Analysis of the Effect of Corner Points and Image Resolution in a Mechanical Test Combining Digital Image Processing and Mesh-free Method)

  • 박준원;정연석;윤영철
    • 한국전산구조공학회논문집
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    • 제37권1호
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    • pp.67-76
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    • 2024
  • 본 논문에서는 역학적 변수들을 측정하는 방안으로 디지털 이미지 프로세싱과 강형식 기반의 MLS 차분법을 융합한 DIP-MLS 시험법을 소개하고 추적점의 위치와 이미지 해상도에 대한 영향을 분석하였다. 이 방법은 디지털 이미지 프로세싱을 통해 시료에 부착된 표적의 변위 값을 측정하고 이를 절점만 사용하는 MLS 차분법 모델의 절점 변위로 분배하여 대상 물체의 응력, 변형률과 같은 역학적 변수를 계산한다. 디지털 이미지 프로세싱을 통해서 표적의 무게중심 점의 변위를 측정하기 위한 효과적인 방안을 제시하였다. 이미지 기반의 표적 변위를 이용한 MLS 차분법의 역학적 변수의 계산은 정확한 시험체의 변위 이력을 취득하고 정형성이 부족한 추적 점들의 변위를 이용해 mesh나 grid의 제약 없이 임의의 위치에서 역학적 변수를 쉽게 계산할 수 있다. 개발된 시험법은 고무 보의 3점 휨 실험을 대상으로 센서의 계측 결과와 DIP-MLS 시험법의 결과를 비교하고, 추가적으로 MLS 차분법만으로 시뮬레이션한 수치해석 결과와도 비교하여 검증하였다. 이를 통해 개발된 기법이 대변형 이전까지의 단계에서 실제 시험을 정확히 모사하고 수치해석 결과와도 잘 일치하는 것을 확인하였다. 또한, 모서리 점을 추가한 46개의 추적점을 DIP-MLS 시험법에 적용하고 표적의 내부 점만을 이용한 경우와 비교하여 경계 점의 영향을 분석하였고 이 시험법을 위한 최적의 이미지 해상도를 제시하였다. 이를 통해 직접 실험이나 기존의 요소망 기반 시뮬레이션의 부족한 점을 효율적으로 보완하는 한편, 실험-시뮬레이션 과정의 디지털화가 상당한 수준까지 가능하다는 것을 보여주었다.

고려(高麗) 금동탑(金銅塔)을 통해 본 법주사(法主寺) 팔상전(捌相殿)의 구조형식계통(構造形式系統) (The Structural Lineage of Palsangjeon in Pubjoo Temple Analyzed through Gilt-bronze Pagoda in the Koryo Period)

  • 김경표
    • 건축역사연구
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    • 제14권1호
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    • pp.89-105
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    • 2005
  • The central aim of this thesis is to see if the structure of Palsangjeon(捌相殿) in Pubjoo Temple(法住寺), a five sto wooden pagoda in Chosen(朝鮮) Dynasty, was handed down from the ancient and middle ages. This study was performed through an analysis of Gilt-Bronze Pagoda built in Koryo(高麗) period. In other words, it is aimed at analyzing which lineage the structure of Palsangjeonbelongs to as a wooden pagoda. In analyzing the structure of Palsangjeon, I attempted to find out its source from the remains of Koryo period prior to the Chosen Dynasty. Examples are the Gilt-Bronze Pagoda, built during the Koryo period. I have also examined its relationship with other existing wooden pagodas and remains. The analysis of Palsangjeon, a five story wooden pagoda in Chosen Dynasty, focuses on the following: First, I explored the possibilities of whether the structure of Palsangjeon was newly invented in Chosen Dynasty, or if it had been derived from the wooden pagodas in the Koryo period. Secondly, I tried to find out if the stable vertical planes, with a great successive diminution ratio, were derived from the middle age, i.e. Koryo period. The results of the study of Palsangjeon through Gilt-Bronze Pagoda analysis are as follows: 1. The structure of Gilt-Bronze Pagoda, a wooden pagoda from the Koryo period, is roughly classified into the accumulation type, using pipe pillars, and the one story type using whole pillars. In the accumulation type, stories are connected in either a flat format or an intervening format. The Gilt-Bronze Pagoda is mainly composed of pipe pillars, with some whole pillars. However, the central pillar was omitted in the building structure. Generally, the upper and lower stories are connected by pipe pillars in a crutch format. All the pillars, whether they are pipe pillars or whole pillars, used Naiten(內轉) technology. The Eave supporter has the Haang type(下昻) and the Muhaang type(無下昻). In most cases, high balustrades are furnished, but few tables of high balustrades have been found. The slanting roof formats have been handed down from Paekche(百濟), Silla(新羅), or Koryo(高麗). However, the structure of the octagon is assumed to be derived from Koguryo(高句麗). The structure of the Gilt-Bronze Pagoda from the Koryo period is mainly composed of accumulated flat squares, with some spire types. intervening format, the structure of Palsangjeon used whole pillars in a half story format in which upper level side pillars are installed on the lower level tie beam. From the Bronze Pagoda from the Koryo period, we can assume that the half story format of wooden pagodas that has stable vertical planes with a great successive diminution ratio was created during the mid-Koryo period at the latest and had been idly developed by the time of the Chosen Dynasty. 3. The whole pillars in Palsangjeon are also found in Gilt-Bronze Pagodas from the Koryo period. Hence, all of the pillars in Palsangjeon seem to have been handed down from the ancient construction technology. They were also used in the construction of wooden pagodas from the Koryo period. Therefore, it is assumed that Palsangjeon was constructed using the construction technology of the Chosen Dynasty that had been developed from the wooden pagoda construction technology of the Koryo period. The stable vertical planes with a great successive diminution ratio in Palsangjeon are derived from ancient Korean wooden pagodas, which have developed into indigenous Korean wooden pagodas with fairly stable vertical planes and a great design, in the half story format of Koryo and Chosen Dynasty. Therefore, it is assumed that the structure of Palsangjeon has a systematic relationship with traditional Korean wooden pagodas and is one of the indigenous Korean wooden pagoda structures. 4. In China, the intervening format has been mainly used between stories in multi-story architecture since the ancient days. At the same time, the flat format as also used in ancient and middle ages. However, the flat format was replaced by whole pillars during the Ming(明) and Manchu(淸) Dynasties, in favor of simple and compact construction. The half-story format, in which upper level side pillars are installed on tie beams, has been found in some cases, but it doesn't seem to have been the primary construction technology. Few traces of the half-story format have been found in multi-story architecture in Japan, and it has not been used as a general construction format. By contrast, the half-story format, which seems to have been derived from the Koryo period, was used as a general construction format in multi-story architecture of the Chosen Dynasty. The construction technology of multi-story architecture is related to that of multi-story wooden pagodas, but they have different production technologies. It seems that the structure of Palsangjeon did not just adopt the construction technology of multi-story architecture in the Chosen Dynasty, but it was developed from wooden pagodas in the Koryo period, including the Gilt-Bronze Pagoda. 5. Since the ancient days, most Chinese and Japanese wooden pagodas have adopted an accumulation type of structure using pipe pillars, with accumulated pointed towers. On the other hand, though most Korean wooden pagodas have also adopted an accumulation type of structure from the ancientdays, one story type using whole pillars was created in the Koryo and Chosen Dynasties. The wooden pagoda structure of Palsangjeon, with stable vertical planes in a half story format, is a unique Korean construction technology, different from the construction technologies of Chinese and Japanese wooden pagodas. This thesis clearly determined the structural characteristics of Palsangjeon. However, various remains have yet to be analyzed in depth, to establish an accurate construction technology system. In the beginning of this thesis, I had difficulty in precisely interpreting the internal structure of the Gilt-Bronze Pagoda from its appearance. However, in the process of study, the more serious problem was that there are few remains or ruins of multi-story architecture in ancient and the middle ages of Korea. Therefore, it is urgent to discover various remains in the future. This thesis succeeded in determining the structural characteristics of Palsangjeon. However, it fell short of clarifying the structural lineage of the stable vertical planes, although they show indigenous Korean architectural taste, representing the unique national emotion, and the construction format of multi-story wooden pagodas in Korea. I hope this is clarified in the future research.

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