• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• The Journal of Engineering Geology
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• v.29 no.1
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• pp.51-68
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• 2019

This study performs to evaluate adaptability of seashore filtering type seawater-intake which adapts dua1 filter well alternative for direct seawater-intake. This study varies filter condition of seashore free surface aquifer which is composed of sand layer then installs real size dual filter well and single filter well to evaluate water permeability and proper pumping amount according to filter condition. According to result of step aquifer test, it is analysed that 110.3% synergy effect of water permeability coefficient is happened compare to single filter since dual filter well has better improvement. dual filter has higher water permeability coefficient compare to same pumping amount, this means dual filter has more improved water permeability than single filter. According to analysis result of continuous aquifer test, it is evaluated that dual filter well (SD1200) has higher water permeability than single filter well (SS800) by analysis of water permeability coefficient using monitoring well and gauging well, it is also analysed dual filter has 110.7% synergy effect of water permeability coefficient. As a evaluation result of pumping amount according to analysis of water level dropping rate, it is analysed that dual filter well increased 122.8% pumping amount compare to single filter well when water level dropping is 2.0 m. As a result of calculating proper pumping amount using water level dropping rate, it is analysed that dual filter well shows 136.0% higher pumping amount compare to single filter well. It is evaluated that proper pumping amount has 122.8~160% improvement compare to single filter, pumping amount improvement rate is 139.6% compare to averaged single filter. In other words, about 40% water intake efficiency can be improved by just installation of dual filter compare to normal well. Proper pumping amount of dual filter well using inflection point is 2843.3 L/min and it is evaluated that daily seawater intake amount is about $4,100m^3/day$ (${\fallingdotseq}4094.3m^3/day$) in one hole of dual filter well. Since it is possible to intake plenty of water in one hole, higher adaptability is anticipated. In case of intaking seawater using dual filter well, no worries regarding damages on facilities caused by natural disaster such as severe weather or typhoon, improvement of pollution is anticipated due to seashore sand layer acts like filter. Therefore, It can be alternative of environmental issue for existing seawater intake technique, can save maintenance expenses related to installation fee or damages and has excellent adaptability in economic aspect. The result of this study will be utilized as a basic data of site demonstration test for adaptation of riverside filtered water of upcoming dual filter well and this study is also anticipated to present standard of well design and construction related to riverside filter and seashore filter technique.

• Journal of Practical Engineering Education
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• v.12 no.1
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• pp.145-162
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• 2020

The dual system in Korea already plays an important role in quantitative terms in the Korean lifelong vocational competency development system. However, since most of the existing dual system performance management plans in Korea focus on qualification-linked dual system, research on the effective performance management of the four-year university-driven dual system is very insufficient. This paper presents multiple measures for developing a performance management system suitable for the university-driven dual system to achieve qualitative improvement of the contract departments of the dual colleges or universities. As an approach to the end, a performance evaluation system is established by developing the evaluation items and indicators for the dual colloeges' contract departments. Next, it analyzes the needs of various stakeholder groups such as field teachers of the involved companies, students in apprenticeship and OJT professors of KOREATECH through FGI's and polls to diagnose the current operational performance, especially the causes of high drpout rates of the contract departments. From these results, the paper presents firstly the development of measuring methods for the developed performance indicators of the evaluation system and then a systemic performance management system which is based on 'input-transformation-outcome-feedback' structure. In addition, some measures for improving the high dropout rate and performance are presented from the viewpoints of each stakeholder.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.46 no.1
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• pp.68-75
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• 2009

In this paper, an efficient proposed CDR(Clock and Data Recovery Circuits) using 1/4-rate clock based on dual-interpolator is proposed. The CDR is aimed to overcome problems that using multi-phase clock to decrease the clock generator frequency causes side effects such as the increased power dissipation and hardware complexity, especially when the number of channels is high. To solve these problems, each recovery part generates needed additional clocks using only inverters, but not flip-flops while maintaining the number of clocks supplied from a clock generator the same as 1/2-rate clock method. Thus, the reduction of a clock generator frequency using 1/4-rate clocking helps relax the speed limitation and power dissipation when higher data rate transfer is demanded.

• ETRI Journal
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• v.5 no.2
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• pp.9-16
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• 1983

Analytically analyzed the dual circular polarizations, and its distortions and the mutual interferences between the orthogonally polarized waves. At the rear part of this paper, defined the separation rate for proposing the possibility which we can easily compensate the polarization distortions.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.156.2-156.2
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• 2015

반도체 소자의 크기가 나노사이즈로 줄어들기 때문에, 건식식각의 중요성이 강조되고 있다. dual plasma source를 사용함으로써 plasma 밀도, 이온충돌에너지, 이온플럭스를 조절 가능하다. Low frequency로 이온에너지를 조절하고, high frequency로 이온플럭스를 일반적으로 조절한다. 본 연구는 inductively coupled plasma (ICP)와 capacitively coupled plasma (CCP)를 사용하는 dual plasma source이다. ICP는 AE RPS로 2.4 MHz를 사용하고, CCP는 AE RFX-600으로 13.56 MHz이다. single L-probe는 Hiden ESPion이고, quadrupole mass spectrometer (QMS)는 INFICON CPM-300이다. chuck에 CCP가 인가되고, ICP는 SUS mesh를 거쳐서 영향을 미친다. Gas는 Ar, Ar+CF4 두 조건에서 비료를 하였다. Single L-probe를 이용하여 플라즈마를 측정한 결과 CCP만 인가하였을 때, Te 2.05 eV, Ne 4.07E+10 #/cm3, Ni 5.82E+10 #/cm3의 결과를 얻을 수 있었다. ICP를 방전하고 mesh를 통해서 chuck으로 입사하는 이온을 측정한 결과 mesh에 의해 이온이 중성화되어 거의 입사하지 않음을 확인할 수 있었다. 최종적으로 이온의 영향이 상쇄되고, 라디칼의 영향이 증가하여 높은 etch rate와 선택비를 가지며, 등방성 식각의 영향이 커질 것으로 사료된다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.6
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• pp.596-604
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• 2010

In order to investigate the operating conditions and major design parameters of a dual ramjet propulsion system, an theoretical analysis of ramjet and scramjet propulsion systems was performed. The performance characteristics of each engine are delivered by thermo-dynamical cycle analysis, considering loss effects in a real engine. The performance sensitivity analysis is conducted by investigating various performance parameters, such as an intake efficiency, combustor inlet Mach number, configuration of the combustor, fuel flow rate, and exhaust nozzle efficiency. Based on these analysis results, the processes of application to dual ramjet cycle engines are specified.

• Journal of Ocean Engineering and Technology
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• v.6 no.2
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• pp.85-93
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• 1992

The only hardness of 2nd phase of martensite in dual phase steel which was composed of the martensite and ferrite was changed. Fatigue test was conducted by cantilever type of self-made rotated bending fatigue testing machine. The corrosion fatigue fracture behaviors of dual phase steel were investigated in 3% NaCl solution at $N_f$ = $1.5\times$$10^5$ $N_f$=1.0 $\times$ $10^6$ cycles. The fatigue strength was increased with increasing the hardness of 2nd phase. The size and number of corrsion pits were influenced by the 2nd phase hardness and pits remain constant in size just after they were transited into cracks. The life of crack initiation was effected by stress level. The shape of relation of $\Delta$K and da/dn has smaller scattering in it in 3% NaCl solution than that in air. The higher the 2nd phase hardness is, the higher the corrosion fatigue life becomes. Corrosion fatigue fracture behavior was effected by mechanics in case of $N_f$=1.5$\times$10$^5$$N_f$=1.5$\times$10$^6$ cycles.

• Transactions of the Korean Society of Mechanical Engineers
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• v.9 no.6
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• pp.788-794
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• 1985

A study on the number density in a dual beam LDV is carried out with moving particles of various irregular arrangements. Ratious of the particle diameter to the particle to the fringe Spacing are D/.delta. = 0.3, 0.5, 1.0 and 1.5. In the case of the small number of moving particles(N<10), the visibility is influenced much by the difference of the phase of particles for one side fringe and the change in visibility is shown remarkable. In the case of the larger number of particles, the decreasing rate for visibility on the graph is smooth because the effect of the phase difference of particles is decreased by more unitorm distribution of particles over fringes. And the formula of the number density on the basis of probability is fairly compared with experimental values.

• Transactions of the Korean Society of Automotive Engineers
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• v.6 no.1
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• pp.90-98
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• 1998

A Dual Mass Flywheel(D.M.F.) system is an evolution to the reduction of torsional vibration and impact noise occurring in powertrain when a vehicle is either moving or idling. The D.M.F. system has two flywh-eels, which is different from the conventional clutch system. One section belongs to the mass moment of in-ertia of the engine-side. The other section increases the mass moment of inertia of the transmission-side. These two masses are connected via a spring/damping system. This reduces the speed at which the dreaded resonance occurs to below idle speed. Since 1984m D.M.F. system has been developed. However, the processes of development of D.M.F. system don't have any difference from the trial and error method of conventional clutch system. This paper present the method for systematical design of D.M.F. system with dimensionless design varia-bles of D.M.F. system, mass ratio between two flywheels, natural frequency rate of two flywheels, and visc-osity coefficient. And expermental results are used to prove these theoretical results.