• Title/Summary/Keyword: Dry pump

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Ion Beam Assisted Deposition System의 제작 및 자동화

  • 손영호
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.27-27
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    • 1998
  • 진공기술의 응용과 진공환경의 이용은 더 이상 논하지 않더라도 산업 전반에 그 충요성이 점점 더 커가고 있다. 이러한 여건에도 불구하고 진공율 이용하는 system 개밟의 국산화는 수 입하는 system으$\mid$ 수에 비하여 절대적으로 부족하며, 또한 개발하는 system의 자동화는 거의 이 루어지지 않고 있으며, 자동화된 진공판련 system은 거의 대부분 수입에 의흔하고 있다. 실험 실 규모에서부터 System올 하나하나 개밭하고, 이톨 자동화하는 노력과 일이 진행됨다면 산업 응용에 있어서도 자연스럽게 자동화된 system으$\mid$ 개발이 이루어 질 것이다 .. system 자동화는 상 품수명의 단축과 이에 따른 다품종 소량을 요구하는 시장수요에 대응하고, 인력절감과 고풀짙 화로 생산성 향상의 요구에 대응하기 위하여 필요하다. 본 연 구에 서 는 e-beam evaporator로 evaporation하면 서 ion beam으로 assist하여 thin film율 제 작하는 IBAD vacuum system율 싫 계 및 제 작하고[1,2], PLC[3,떼톨 이 용하여 system 자동화톨 하였다 .. thin film 제작 process는 먼저 기본 진공상태로 만뚫고 난 뒤, e-beam evaporator로 e evaporation하면서 ion beam source로 assist하여 substrate 011 thin film율 제조한다 226;. thin film올 제 조하면서 thickness monitor로 sample의 thickness rate톨 control 하고, sample의 균얼성과 밀착 성을 고려하여 substrate톨 rotation 및 heating 할 수 있도록 싫계, 제작하였다. 양질의 박막올 제조하기 위해서 진공환경이 좋은 상태로 제공되어야 한다. 이톨 위하여 oil free operation 0 I 가 능한 dry pump와 turbo molecular pump로 고진공 배기 하였다. 진공도의 흑점은 thermal effect 툴 고려하여 cold cathode ion gauge률 사용하였고, intro chamber와 main chamber 사이에는 g gate valve톨 설치하여 벌도로 운용되도록 하였다. 이러한 process를 박막의 두께, 진공도, 시 간, 온도, 공정 동의 조건올 기훈으로 자동화한 것이다. 또한 정전과 단수에 대한 interlock 기능 도 고려하였다.하였다.

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Design of Micro Water Supply System Using Solar Energy

  • Sharma, Ekisha;Khatiwada, Nawa Raj;Ghimire, Anish
    • Journal of Appropriate Technology
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    • v.5 no.1
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    • pp.8-17
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    • 2019
  • Solar pumps, for water lift systems, is becoming popular in rural areas for supplying drinking water in dry seasons when its need is elevated. The development in technology has also made solar pumps readily available and cheap which has increased its demands. So, for scattered settlements having a limited budget for operation and maintenance costs, solar pump is preferred over grid connected electrical pumping systems. This primary objective of the study was to design a solar photovoltaic pumping drinking water supply system for a small health post which is about 45 km east from Kathmandu, the capital city of Nepal. The study also compared and verified the final design with the system's existing design prepared by a development agency. The water source for this study was a confined aquifer 115m below the surface. The water demand was calculated to be 11m3 per day. A 1500 kPa submersible pump attached to a motor was selected and installed. Along with that twelve solar panels, reservoir, transmission main and distribution main was designed. The outcomes conclude solar photovoltaic pumping water supply systems to be cost-effective with an estimated cost of only USD 0.84 million per MLD. Solar pumps require low maintenance and operation costs and its repairs can quickly be done by the local people. The study also shows that solar technology produces no sound, needs no fuel making it environmentally friendly.

Study on Calibration Methods of Discharge Coefficient of Sonic Nozzles using Constant Volume Flow Meter

  • Jeong, Wan-Seop;Sin, Jin-Hyeon;Gang, Sang-Baek;Park, Gyeong-Am;Im, Jong-Yeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.17-17
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    • 2010
  • This paper address technical issues in calibrating discharge coefficients of sonic nozzles used to measure the volume flow rate of low vacuum dry pumps. The first challenging issue comes from the technical limit that their calibration results available from the flow measurement standard laboratories do not fully cover the low vacuum measurement range although the use of sonic nozzles for precision measurement of gas flow has been well established in NMIs. The second is to make an ultra low flow sonic nozzlesufficient to measure the throughput range of 0.01 mbar-l/s. Those small-sized sonic nozzles do not only achieve the noble stability and repeatability of gas flow but also minimize effects of the fluctuation of down stream pressures for the measurement of the volume flow rate of vacuum pumps. These distinctive properties of sonic nozzles are exploited to measure the pumping speed of low vacuum dry pumps widely used in the vacuum-related academic and industrial sectors. Sonic nozzles have been standard devices for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two small-sized sonic nozzles of diameter 0.03 mm and 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter (CVFM) readily set up in the Vacuum center of KRISS was used to calibrate the discharge coefficients of the machined nozzles. The calibration results were shown to determine them within the 3% measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process. Both calibrated sonic nozzles are demonstrated to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of low vacuum dry pumps in the semiconductor and flat display processes.

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Performance Improvement Technology on a Continuous Heating Heat Pump at Frost Condition (착상조건에서 연속난방이 가능한 히트펌프 성능 향상 기술)

  • Jeon, Chang-Duk
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.2
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    • pp.573-577
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    • 2013
  • Heat pumps come into wide use because high energy efficiency can be obtained and diverse heat sources like geothermal heat, waste heat and air are available. It is necessary for an air source heat pump to defrost in order to remove frost on the surfaces of an outdoor heat exchanger. It is impossible for continuous heating if reverse cycle operation is used as defrosting method, furthermore it causes the degradation of COP. In this study an fin-tube heat exchanger with three rows was used as an outdoor coil. One row among three rows of the heat exchanger was used like a condenser in order to remove frost on it, the others were used as evaporator to accomplish continuous heating. Each row was switched in order from a condenser to an evaporator in specified time interval. Tests were carried out during minimum 180 minutes at the defrost-heating test condition(dry bulb temperature $2^{\circ}C$, wet bulb temperature $1^{\circ}C$) described in KS C 9306. Time-averaged COP was about 20% higher than that of conventional defrosting method.

Characterizations of a Cold Trap System for the Process Stabilization of Al2O3 by ALD Equipment (ALD 장비의 Al2O3 공정 안정화를 위한 저온 트랩 장치의 특성 평가)

  • Yong Hyeok Seo;Won Woo Lee;In Hwan Kim;Ji Eun Han;Yeon Ju Lee;Che Hoo Cho;Yongmin Jeon;Eou-Sik Cho;Sang Jik Kwon
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.92-96
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    • 2024
  • The application of the technology for forming Al2O3 thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al2O3 thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

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A Study on Tribological Characteristics of Powder Sintered Fe-base Alloy (SMF9060) (Fe계 합금 분말 소결품(SMF9060)의 마모 특성 연구)

  • Kim, Sang Youn;Kim, Dae Wook;Park, Yeong Min;Shin, Dong Chul;Kim, Tae Gyu
    • Journal of the Korean Society for Heat Treatment
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    • v.27 no.2
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    • pp.65-71
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    • 2014
  • SMF9060 material is a Fe-based powder sintered alloy that is used for several automobile components such as Synchronize Hub, oil pump and transmission. These components are required excellent wear resistance and durability. In this study, we have performed a dry wear test at the ambient air and Ar gas conditions in the room temperature, and a lubricant wear test at the room temperature and engine oil temperature of $100^{\circ}C$. The amount of wear volume and coefficient friction are measured by a Profilometer and a Ball on disk type wear tester. The wear volume in Ar gas condition was a little higher than that in the ambient air condition. However the wear volume in the lubricant wear condition was much lower than in the dry wear condition. XRD analysis of the debris in Ar gas condition showed that the oxide film was not formed.

Drastic change in rice cropping in pursat province, Cambodia

  • Ling, Ye Rong;Saito, Daiki;Homma, Koki;Kobayashi, Satoru;Yagura, Kenjiro;Hor, Sanara;Kim, Soben
    • Proceedings of the Korean Society of Crop Science Conference
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    • 2017.06a
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    • pp.47-47
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    • 2017
  • Rice cropping in Cambodia was commonly classified into 4 types: rainfed rice, irrigated rice, floating rice and recession rice. The cropping type has been selected by farmers depended on water condition in each locations. However, recent technological and social change enforce famers to adapt new management of rice cropping. This study aimed to clarify the change in rice cropping and problems for future. Interviews to farmers has been conducted several times in Pursat province, which is one of the major rice production provinces in Cambodia. The last interview was conducted in March 2017, and focused on change in rice cropping for 10 years. Statistical data was obtained from Provincial Ministry of Agriculture in Pursat. The satellite data (LAI products derived from MODIS) was used to quantify change in cropping pattern. The statistical data shows increase in production and yield of rice, dry season rice and so on.

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Research for a cases of overseas constructions and domestic tentative execution about high vacuum dewatering and consolidation/dehydration by Super Well point method (슈퍼웰포인트공법에 의한 고진공배수 압밀탈수에 대한 시공사례)

  • Shin, Chang-Beom;Kim, Dae-Hwal;Takahashi, Shigeyoshi;Lee, Kwang-Yeol
    • Proceedings of the Korean Geotechical Society Conference
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    • 2008.10a
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    • pp.581-590
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    • 2008
  • A SWP method is a revolutionary dewatering method. The conventional dewatering method, deep-well method, had ever occurred a civil appeal caused by the well depletion in compliance with the reduction of the groundwater level over a wider area considerably by the deep-well pumping from homogeneous sand-layer ground for a dry-work, while pump groung excavation working in Sendai city, Japan 10 years ago. it'd developed with the problematic proposal to find the new method which can lower the groundwater level only within the sheet pile without any reduction of groundwater outside of the sheet pile and until currently steady improvement came. It's been confirmed with plenty of executional results that there was almost no decreasing of water-level from surroundings, over so many construction-sites including vertical shafts which completely does not enter into non-water permeable layer and pumping ground etc. The SWP method in this time has been introducing initially and carried into a the execution tentatively at a construction-site and made a various result get through the execution.

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Application of Regression Tree Model for the Estimation of Groundwater Use at the Agricultural (Dry-field Farming and Rice Farming) Purpose Wells (농업용(전작 및 답작용) 지하수 이용량 추정을 위한 회귀나무 모형의 적용)

  • Kim, yoo-Bum;Hwang, Chan-Ik
    • The Journal of Engineering Geology
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    • v.29 no.4
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    • pp.417-425
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    • 2019
  • Agricultural groundwater use accounts for 51.8% of total groundwater use, so accurate estimation of groundwater use is important for efficient groundwater management. The purpose of this study is to develop a method for estimating the groundwater use of agricultural (rice farming and dry-field farming) wells using regression tree model based on the measured data of 370 wells. Three input variables of the model were evaluated as being significant: well depth, pipe diameter, and pump capacity, and the importance of each variable was 75% for well depth, 17% for pipe diameter, and 8% for pumping capacity. The daily usage of agricultural (rice farming and dry-field farming) wells by the regression tree model was estimated to be very similar to the actual usage, compared to the previous estimation method proposed by the Ministry of Construction and Transportation. In the future, it is expected that the reliability of the usage statistics will be improved if additional observed data is secured and this classification method is modified.

Performance Evaluation of Rough Rice Low Temperature Drying Using Heat Pump (열펌프를 이용한 벼의 저온건조성능평가)

  • Kim, Hoon;Han, Jae-Woong
    • Food Engineering Progress
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    • v.13 no.4
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    • pp.308-313
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    • 2009
  • This study was conducted to design and fabricate a heat pump that can produce some weather conditions similar to those of the dry season of the rough rice in Korea, and to investigate basic performances of the apparatus. During the drying test, the amount of energy consumption and drying characteristics were measured at four different temperature levels ranging between 20$^{\circ}C$ and 50${^{\circ}C}$. In the psychrometric chart, the freezing capacity and refrigerant circulation ratio of the heat pump were 173 kJ/kg and 49.6 kg/hr, respectively. Therefore, coefficient of performance was 5.5, which was superior to that of refrigerant R-22 (4.0) in standard refrigeration cycle. In addition, the time to reach target drying temperature (30${^{\circ}C}$) and relative humidity (40%) were 6 minutes and 7 minutes, respectively. Temperature differences between the drying temperature and the rice were 1.5${^{\circ}C}$ and 8.5${^{\circ}C}$ at the drying temperatures of 21.9${^{\circ}C}$ and 48.7${^{\circ}C}$, respectively. This result demonstrated that the increased temperature of the rice in the drying section decreased sufficiently in the tempering section. At the drying temperatures of 21.9, 30.7 38.8, and 48.7${^{\circ}C}$, drying rates were 0.29, 0.61, 0.85, and 1.26%/hr, respectively, which were similar to those of commercial dryer. In addition, the amounts of energy consumption were 325, 667, 692, and 776 kJ/kg, respectively. These results showed that this dryer saved up to 86% of energy consumption compared with the commercial dryer, which uses 4,000-5,000 kJ/kg of fossil fuel.