• 한국진공학회지
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• 제17권4호
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• pp.292-301
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• 2008

반도체 및 디스플레이 공정과 같이 진공의 높은 청결도의 진공이 필수적으로 요구되어 지는 산업분야가 확대됨에 따라 건식진공펌프의 중요성은 급격히 증대되어 왔다. 다단루츠형 진공펌프와 함께 건식진공펌프 양대 축의 하나를 형성하는 스크류형 건식진공펌프는 공정부산물 발생이 많은 고 난이도 응용분야에서 그 장점을 발휘하여 왔다. 최근 들어 에너지 효율이 획기적으로 개선된 스크류형 건식진공펌프의 개발이 활발히 진행되고 있다. 이 총설논문에서는 스크류형 건식진공펌프의 전반적 기술사항들을 살펴보고 실제 반도체 공정에의 응용 및 스크류형 건식진공펌프의 향후 발전 방향에 대하여 살펴보았다.

• 한국수소및신에너지학회논문집
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• 제27권1호
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• pp.22-28
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• 2016

It is necessary to store and supply hydrogen isotopes for Tokamak operation. A storage and delivery system (SDS) is used for storing hydrogen isotopes as a metal hydride form. We designed and fabricated a depleted uranium (DU) bed to store hydrogen isotopes. The rapid storage of hydrogen isotopes is very important not only for safety reasons but also for the economic design and operation of the SDS. The delivery rate at the desorption temperatures without the operation of a dry pump was analyzed in comparison with that with the operation of the dry pump. The effect of the initial desorption temperatures on the dehydriding of the DU without the operation of the dry pump was measured. The effect of the initial desorption temperatures on the dehydriding of DU with the operation of the dry pump was also measured and analyzed. The primary pressure on the desorption temperatures without the operation of the dry pump was analyzed in comparison with that with the operation of the dry pump. The temperature gradient of the coil heater and the primary vessel was also analyzed. Our results will be used to develop pilot scale hydrogen isotope processes. It was confirmed that dehydriding of a medium-scale DU bed has enabled without the operation of the dry pump.

• 한국진공학회지
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• 제19권4호
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• pp.265-274
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• 2010

반도체소자 및 디스플레이 제조공정의 핵심 환경인 진공을 형성 유지하기 위한 건식진공펌프는 높은 성능과 신뢰성을 필요로 한다. 건식진공펌프의 개발을 위해서는 다양한 고려와 세밀한 기술적 검토가 필요하다. 본고에서는 반도체 및 디스플레이 제조 공정용 건식진공펌프 개발 과정을 단계별로 소개하고 향후 기술발전 방향에 대해 소개하고자 한다.

• Applied Science and Convergence Technology
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• 제24권1호
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• pp.9-15
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• 2015

The practical pumping speed of a dry pump is considerably lower than the intrinsic speed because of back-streaming through finite gaps of the rotor assembly. The maximum compression ratio and the ultimate pressure of the pump are also directly influenced by the back-streaming rate. Therefore, information on the gap conductance, which determines the back-streaming characteristics of the rotor assembly, is the most important key for estimating the pumping performance of a dry pump. In this paper, the feasibility of calculating analytically the pumping performance of a multi-stage Roots pump, one of the most popular types of dry pumps, by quantifying the gap conductance in a rational way, is discussed.

• 한국기계가공학회지
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• 제14권2호
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• pp.67-74
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• 2015

In this study, analysis and experiments were carried out on temperature distributions and thermal deformations in a dry vacuum pump with vertical screws for safe operation. When a vacuum pump is working, it is necessary to get rid of the heat generated by the friction of bearings and the compression of air to prevent the vacuum pump from being damaged by interference between two screws and housing through thermal deformation. Additional cooling was proposed by using oil flow through the inner channel of the rotating axis for lower temperature control of the vacuum pump. Analysis and experimental results were compared in terms of temperature distribution and thermal deformation of the vacuum pump, and two sets of results matched reasonably well. These results for a dry vacuum pump with vertical screws can be used in similar model development and can minimize errors in design and manufacture by providing reasonably accurate prediction in advance.

• 신재생에너지
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• 제5권4호
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• pp.60-65
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• 2009

The present study was conducted for a comparative evaluation of wet and dry floor heating systems using geothermal heat pump. We circulated hot water from geothermal heat pump which is $10{\sim}15^{\circ}C$ lower than that from boiler. In order to access indoor temperature ($25^{\circ}C$) it took 74 minutes for dry type and 247 minutes for wet type. Average floor temperature was $23.9^{\circ}C$ for wet type and $32.7^{\circ}C$ for dry type. Energy saving rate gradually increased by 66% after 138 minutes. As a result, in case of floor heating system using low temperature circulation water, dry type was more practicable for stable floor heating than wet type in terms of floor temperature and access time to indoor set temperature.

• 진공이야기
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• 제2권1호
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• pp.31-34
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• 2015

This article introduces fundamentals of self-diagnosis and predictive (or preventive) maintenance technologies for dry vacuum pumps. The state variables of dry pumps are addressed, such as the pump and motor body temperatures, consumption currents of main and booster pumps, mechanical vibration, and exhaust pressure, etc. The adaptive parametric models of the state variables of the dry pump are exploited to provide dramatic reduction of data size and computation time for self-diagnosis. Two indicators, the Hotelling's $T^2$ and the sum of squares residuals (Q), are illustrated to be quite effective and successful in diagnosing dry pumps used in the semiconductor processes.

• 한국유체기계학회 논문집
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• 제14권4호
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• pp.38-44
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• 2011

This paper deals with the detail rotordynamic analysis for BB5 eight stages pump as development of API 610 BB5 type pump. Dry-run analytical model, not considering operating fluid, and wet-run analytical model, considering operating fluid are established. In addition, plain circular and pressure dam bearings are chosen and it was discussed that each bearing has an effect on dynamic characteristics of pump rotor system. A rotordynamic analysis includes the critical speed map, Campbell diagram, stability, and unbalance response. As results, it was predicted that rated speed of the pump rotor passes through 1st critical speed in dry-run condition regardless of bearings, however, it was verified that, in wet-run condition, the rotor system doesn't have critical speeds even if more than twice rated speed. Hence the resonance problem caused by the critical speeds does not happen since actual operating is in wet-run condition including operating fluid. As a result of unbalance response analysis, the pump rotor has stable vibration response at rated speed, regardless of operating fluid and the proposed bearing types.

• 한국대기환경학회지
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• 제16권6호
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• pp.675-684
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• 2000

A novel dry and wet deposition collector, which can overcome the several problems such as water evaporation cartridge cracks and high costs founded in the previous collector systems, has been constructed. ENVI-18 SPE adsorption cartridge has been used to measure atmospheric deposition of polycylic aromatic hydrocarbons (PAHs). A surrogate surface, consisted of water and methanol, was filled in the dry deposition funnel to simulate dry deposition onto water surface. A water supply system in order to compensat evaporation of the surrogate surface was used and it was consisted of a piston pump, a tubing pump, a overflow tube and a chamber system. A novel water vaporizing system to supply water onto the wet SPE cartridge system with a constant flow rate was developed. The novel water vaporizing system, consisted of a vacuum pump, a water supply reserviour and tube and a mini space heater, could prevent the PAHs adsorption cartridge cracks occurred in the previous collector and effectively adsorb PAHs. The novel dry and wet deposition collector showed a good adsorption, desorption, and recovery rates of PAHs. By reducing the number of pumps used and employing polypyopylene (PP) instead of teflon as a material of collection funnel, the total construction costs were much reduced as compared with the previous dry and wet deposition collectors.

• 진공이야기
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• 제2권4호
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.