• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.168-168
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• 2008

Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.

• Journal of the Korean Wood Science and Technology
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• v.17 no.1
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• pp.3-11
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• 1989

This study was carried out to investigate the physical and mechanical properties. durability of adhesive bond and paint film for the basic data which were required to determine the suitability as a raw material for furniture the laminated veneer lumber (LVL) with pitch pine (Pinus rigida Mill). The results obtained were as follows; 1) The proper pressing time for making the LVL was over 45 second per milimeter of LVL thickness. 2) The bending strength of the LVL was lower than that of the solid wood but the compressive strength of the LVL was similar to that of the solid wood. The strength increased with the decrease of veneer thickness. 3) The impact bending absorbed energy of the LVL was 0 to 0.3 kg.m/$cm^2$ in the direction of parallel to the grain. The energy of the LVL was lower than that of the solid wood (0.68 kg.m/$cm^2$). 4) In warm water soaking and cold-dry tests, delamination of adhered layers surface crack, swelling, and color change were not found when the hot pressing time was over 45 second per milimeter of LVL thickness. As a result of soak under vacuum test shrinkage in the direction of parallel to the grain was about -1.0 percent and. was about 3.0 percent in the direction of the perpendicular to the grain. 6) The film cacks on the LVL's surface after the wet and cold-dry test were not found at all. 7) In the use of the LVL for interior decoration it was considered that the surface of the LVL be overlaid crossly with fancy veneers of birch and paulownia, etc. This cross overlayirg methods have resulted in few cracks on the fancy veneer.

• Tribology and Lubricants
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• v.22 no.5
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• pp.252-259
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• 2006

Air foil bearing supports the rotating journal using hydrodynamic force generated at thin air film. The bearing performances, stiffness, damping coefficient and load capacity, depend on the rotating speed and the performance of the elastic foundation, bump foil. The main focus of this study is to decide the dynamic performance of corrugated bump foil, structural stiffness and Coulomb damping caused by friction between bump foil and top foil/bump foil and housing. Structural stiffness is determined by the bump shape (bump height, pitch and bump thickness), dry-friction, and interacting force filed up to fixed end. So, the change of the characteristics was considered as the parameters change. The air foil bearing specification for analysis follows the general size; diameter 38.1 mm and length 38.1 mm (L/D=1.0). The results show that the stiffness at the fixed end is more than the stiffness at the free end, Coulomb damping is more at the fixed end due to the small displacement, and two dynamic characteristics are dependent on each other.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1135-1141
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• 2006

Air foil bearing supports the rotating journal using hydrodynamic force generated at thin air film. The bearing performance, stiffness, damping coefficient and load capacity, depends on the rotating speed and the performance of the elastic foundation, bump foil. The main focus of this study is to decide the dynamic performance of corrugated bump foil, structural stiffness and Coulomb damping caused by friction between bump foil and top foil/bump foil and housing. Structural stiffness is determined by the bump shape (bump height, pitch and bump thickness), dry-friction, and interacting force filed up to fixed end. So, the change of the characteristics was considered as the parameters change. The air foil bearing specification for analysis follows the general size; diameter 38.1 mm and length 38.1mm (L/D=1.0). The results show that the stiffness at the fixed end is more than the stiffness at the free end, Coulomb damping is more at the fixed end due to the small displacement, and two dynamic characteristics are dependent on each other.

• Advances in nano research
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• v.5 no.3
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• pp.193-201
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• 2017

ZnO, ZnO: Cu, Ga, and ZnO: Cu, Ga, Ag thin films were obtained by oxidization of ZnS and ZnS: Cu, Ga films deposited onto glass substrates by electron-beam evaporation from ZnS and ZnS: Cu, Ga targets and from ZnS: Cu, Ga film additionally doped with Ag by the closed space sublimation technique at atmospheric pressure. The film thickness was about $1{\mu}m$. The oxidation was carried out at $600-650^{\circ}C$ in air or in an atmosphere containing water vapor. Structural characteristics were investigated by X-ray diffraction (XRD) and atomic force microscopy (AFM). Photoluminescence (PL) spectra of the films were measured at 30-300 K using the excitation wavelengths of 337, 405 and 457.9 nm. As-deposited ZnS and ZnS: Cu, Ga films had cubic structure. The oxidation of the doped films in air or in water vapors led to complete ZnO phase transition. XRD and AFM studies showed that the grain sizes of oxidized films at wet annealing were larger than of the films after dry annealing. As-deposited doped and undoped ZnS thin films did not emit PL. Shape and intensity of the PL emission depended on doping and oxidation conditions. Emission intensity of the films annealed in water vapors was higher than of the films annealed in the air. PL of ZnO: Cu, Ga films excited by 337 nm wavelength exhibits UV (380 nm) and green emission (500 nm). PL spectra at 300 and 30 K excited by 457.9 and 405 nm wavelengths consisted of two bands - the green band at 500 nm and the red band at 650 nm. Location and intensities ratio depended on the preparation conditions.

• Journal of Bio-Environment Control
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• v.9 no.3
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• pp.161-165
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• 2000

Spectroradiometric light transmittance from 300 to 1,100nm in the greenhouse covered with the CEM BIO polyethylene film was greater than that in the greenhouse covered with polyethylene film (control). As a whole, solar radiation transmittance into greenhouse was a half level, due to shades caused by double layer covering, frame and equipment. Net radiation energy emitted throughout surface of the greenhouse covered with CEM BIO polyethylene film was 5,424.5W.m$^{-2}$ , which was lower by 2.9% as compared to that of the greenhouse covered with polyethylene film. Photosynthetically active radiation from 400 to 700nm of the greenhouse covered with CEM BIO polyethylene film was 3,861.2W.m$^{-2}$ , which was higher by 3.8% as compared to hat of the greenhouse covered with polyethylene film. Accumulated minimum air temperature from Oct. 7, 1997 to Oct. 16, 1997 of the greenhouse covered with CEM BIO polyethylene film was 100.5$^{\circ}C$, which was higher by 2.5$^{\circ}C$ as compared to that of the greenhouse covered with polyethylene film. As results, height, stem diameter, leaf count, leaf area, fresh weight and dry weight of green pepper plants and canopy production structure measured at 30 days after transplanting were enhanced. Mean fruit weight n the greenhouse covered with CEM BIO polyethylene film was 11.28 g and 1.25 g greater as compared to that in the greenhouse covered with polyethylene film, due to increased fruit diameter and flesh thickness. Percent marketable fruits produced in the greenhouse covered with CEM BIO polyethylene film were 96.1%, and was greater by 2.7% thant that of the greenhouse covered with polyethylnee film due to decreased infection, sterility, severe curve and twisted fruits. The green pepper yield of the greenhouse covered with CEM BIO polyethylene film from Nov. 19, 1997 to Feb. 3, 1998 was greater by 974 kg per hectare than that of the greenhouse covered with polyethylene film, but the total fruit had no difference.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.35 no.2
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• pp.117-121
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• 1990

A sweet corn hybrid, Golden Cross Bantam 70, was grown at 5 plant populations (5,000, 6,000, 7,000, 8,000, and 9,000 plants/10a) under the transparent P .E. film mulch to find the best yield evaluation method. Plant population did not affect early plant growth, culm length, ear height, and silking date. However, number of tillers at harvest decreased but leaf area index increased with increased plant population. Marketable ears were divided into two classes; the first grade of which husked ear weight over l50g (unhusked ear weight 230g) and the second grade of which husked ear weight between 100 and 150g (unhusked ear weight between 180 and 230g) according to the whole sale market price. Average length, thickness, and weight of marketable ears over 100g of husked ears decreased with increased plant population. The proportion of ears over 150g decreased with increased plant population. However, total number and weight of marketable ears and gross income per 10a calculated considering weight and number of ears increased with plant population. There were highly positive correlations between gross income and ear number or ear weight per unit area. At high plant populations the number of marketable ears was overestimated but ear weight underestimated compared with gross income. Dry matter yield of stover increased with increased plant population and ranged 755-944kg/10a with 20.7-24.5% dry matter content. Rice black-streaked dwarf virus infection rate was 10.6-14.9%, but it was not related to plant population.

• Food Science and Preservation
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• v.16 no.5
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• pp.699-704
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• 2009

Commercially produced 'baby leaves' of Brassica campestris var. narinosa (Chinese cabbage) were used in the present study. Baby leaf vegetables were sown on 128 cell plug trays and harvested 30 days after sowing. For mechanical stress experiments, seedlings were thinned to three per cell, selected for uniformity, and watered at the base. Trays were treated with mechanical stress by stroking back and forth 50 times, using a sheet of A4 paper folded to double thickness. Plants were treated between 12:00 and 14:00 daily for 15-20 days. Harvested baby leaf vegetables were packed in MAP salad bags made of P-plus film, $50{\mu}m$ polypropylene (PP) film, and polyethylene terephthalate (PET) boxes. Fresh weight was well-maintained under P-plus and PP film on storage at $8^{\circ}C$. However, loss of fresh weight occurred quickly in PET boxes, and vegetable quality deteriorated rapidly. Stressed leaves were smaller but thicker, with an increased dry weight ratio. We thus suggest that P-plus or PP film is most appropriate packing for marketing of baby leaf vegetables, which should be stored at $8^{\circ}C$. Our data on baby leaf vegetables also make a significant new contribution in that we demonstrate a positive effect of stress touching on baby leaf processability.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.345-346
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• 2013

InGaN material is being studied increasingly as a prospective material for solar cells. One of the merits for solar cell applications is that the band gap energy can be engineered from 0.7 eV for InN to 3.4 eV for GaN by varying of indium composition, which covers almost of solar spectrum from UV to IR. It is essential for better cell efficiency to improve not only the crystalline quality of the epitaxial layers but also fabrication of the solar cells. Fabrication includes transparent top electrodes and surface texturing which will improve the carrier extraction. Surface texturing is one of the most employed methods to enhance the extraction efficiency in LED fabrication and can be formed on a p-GaN surface, on an N-face of GaN, and even on an indium tin oxide (ITO) layer. Surface texturing method has also been adopted in InGaN-based solar cells and proved to enhance the efficiency. Since the texturing by direct etching of p-GaN, however, was known to induce the damage and result in degraded electrical properties, texturing has been studied widely on ITO layers. However, it is important to optimize the ITO thickness in Solar Cells applications since the reflectance is fluctuated by ITO thickness variation resulting in reduced light extraction at target wavelength. ITO texturing made by wet etching or dry etching was also revealed to increased series resistance in ITO film. In this work, we report a new way of texturing by deposition of thickness-optimized ITO films on ITO nano dots, which can further reduce the reflectance as well as electrical degradation originated from the ITO etching process.