• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.12
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• pp.1005-1008
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• 2009

In this study, adaptively coupled plasma (ACP) source was used for dry etching of $Al_2O_3$ thin film. During the etching process, the wafer surface temperature is an important parameter to influent the etching characteristics. Therefore, the experiments were carried out in ACP to measuring the etch rate, the selectivities of $Al_2O_3$ thin film to mask materials and the etch profile as functions of $Cl_2$/Ar gas ratio and substrate temperature. The highest etch rate of $Al_2O_3$ was 65.4 nm/min at 75% of $Cl_2/(Cl_2+Ar)$ gas mixing ratio. The etched profile was characterized using field effect scanning electron microscopy (FE-SEM). The chemical states of $Al_2O_3$ thin film surfaces were investigated with x-ray photoelectron spectroscopy (XPS).

• Tribology and Lubricants
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• v.38 no.6
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• pp.281-286
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• 2022

In this study, the effects of Elasto-hydrodynamic lubrication pressure on the critical shoulder height of raceway in an angular contact ball bearing were investigated. Both 3D contact analyses using an influence function and the EHL analysis were conducted for the contact geometry between the ball and raceways. The pressure distributions by 3D contact analysis and EHL analysis for an example bearing were compared. The effect of ellipse truncation on the minimum film thickness also investigated from EHL analysis. The critical shoulder height in the dry contact and the EHL state were compared for various applied loads. It is shown that when the ellipse truncation occurs, the pressure spike for the EHL conjunction is higher than that for the dry contact, and its location moves more inward of the contact center. The steep pressure gradients would increase the flow rate, so in order to maintain flow continuity a significant reduction in film thickness and an abrupt rise in pressure occurs in the edge of shoulder. Significant reduction of the minimum film thickness occurs near the edge of shoulder. The critical shoulder heights in the EHL state are calculated as higher values compared with in the dry contact. This results shows that the determination of critical shoulder height by the EHL analysis is more proper.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.6
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• pp.1080-1086
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• 2007

The aim of this paper is to establish the optimum fabrication condition of specimens, using the Vapor Deposition Polymerization Method(VDPM), which is one of modesto prepare functional organic thin films using a dry process, and to develop a thin film type humidity sensor which has good humidity sensitive characteristics. The inner part of the film became denser and roughness of the film surface eased as curing temperature increased so that thickness of the film could be made uniform. This also shows the appropriate curing temperature was $250^{\circ}C$. The basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Aluminum/Polyimide/Aluminum. The result of SEM and AFM measurement shows that the thickness of PI thin films decreased and the refraction increased as curing temperature increased, which indicates that a capacitance-type humidity sensor utilizing polyimide thin film is fabricated on a glass substrate. The characteristics of fabricated samples were measured under various conditions, and the samples had linear characteristics in the range of 20-80 %RH, independent of temperature change, and low hysteresis characteristic.

• International Journal of Fluid Machinery and Systems
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• v.9 no.1
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• pp.57-65
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• 2016

By high speed Liquid Droplet Impingement (LDI) on material, fluid systems are seriously damaged, therefore, it is important for the solution of the erosion problem of fluid systems to consider the effect of material in LDI. In this study, by using an in-house fluid/material two-way coupled method which considers reflection and transmission of pressure, stress and velocity on the fluid/material interface, high-speed LDI on wet/dry material surface is simulated. As a result, in the case of LDI on wet surface, maximum equivalent stress are less than those of dry surface due to damping effect of liquid film. Empirical formula of the damping effect function is formulated with the fluid factors of LDI, which are impingement velocity, droplet diameter and thickness of liquid film on material surface.

• Journal of the Korean institute of surface engineering
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• v.42 no.4
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• pp.169-172
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• 2009

We investigated the dry-etching mechanism of the TiN thin film using a $Cl_2$/Ar inductively coupled plasma system. To understand the effect of the $Cl_2$/Ar gas mixing ratio, we etched the TiN thin film by varying $Cl_2$/Ar gas mixing ratio. When the gas mixing ratio was 100% $Cl_2$, the highest etch rate was obtained. The chemical reaction on the surface was investigated with X-ray photoelectron spectroscopy (XPS). Scanning electron microscopy (SEM) was used to examine etched profiles of the TiN thin film.

• Journal of Korean Ophthalmic Optics Society
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• v.21 no.1
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• pp.11-21
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• 2016

Purpose: The aim of this study was to analyze the difference in tear film stability according to the wearing time when wearing clear and circle soft contact lens(circle lens) made of same material. Methods: The clear and circle contact lenses of hilafilcon B and nelfilcon A materials were respectively applied on the subjects classified as normal and dry eyes depending on their tear volume, and their tear film stability was investigated by measuring the non-invasive tear film break-up times, lens centration and the first appearing area of tear breakup after 30 mins and 6 hrs of lens wearing. Results: Non-invasive tear film breakup time significantly reduced with increase of the wearing time for normal and dry eyes when wearing clear and circle contact lenses. The starting ratio of tear film break-up was higher at the peripheral area of clear and circle lenses in all two different materials, and higher at the peripheral area of dry eyes than normal eyes. Starting ratio of tear film break-up was higher at the peripheral area of nelfilcon A lenses compared with hilafilcon B lenses, however, its change with the increase of wearing time showed a different aspect. The number of tear film break-up per unit area when wearing circle lenses of nelfilcon A increased at the central area with the wearing time while its number was higher at the peripheral area when wearing circle lenses of hilafilcon B. The centration of clear lenses made of two materials was closer to pupil compared to circle lenses with the increase of wearing time, however, a larger decentration was shown in dry eyes compared with normal eyes. Conclusions: The research revealed that an effect on tear film stability may be changed by clear lenses as well as circle lenses with coloring process according to the increase of wearing time, and the factors affecting on tear film stability may also vary depending on lens materials. Thus, the appropriate lenses should be selected by the consideration of lens material as well as coloring method/dyes according to the wearers' habit such as daily wearing time and wearing period when trying to wear clear and circle lenses.

• Journal of Practical Agriculture & Fisheries Research
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• v.23 no.1
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• pp.49-57
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• 2021

As the world marks the adoption of the landmark Paris Agreement on climate change, a promising movement for carbon neutrality is taking shape. This agreement would be needed to build a truly global coalition for carbon neutrality by 2050. Greenhouse gas(GHGs) emissions from agriculture come from livestock such as cows, agricultural soils and rice production has been reported by 10% in 2019. Rice cultivation would be reduced a GHGs and thus this research has conducted to minimize the emission of greenhouse gas with the mulching methodology using a biodegradable film in dry hill seeded rice and to conserve the environment through a cultural and ecological weed control instead of chemicals. We have developed the 5^th mulching dry hill seeder with the biodegradable film to determine the possibility of stable rice cultivation. There were so many difficulties and constraints in the field operations such as film mulching, hill seeding and effective weed control. The mulching dry hill seeder was so good performance in the 5^th trial but the biodegradable film tested was so faster in terms of biodegradation before the heading stage of the rice plant and thus there was not highly effective weed control which is ongoing research with a good performance since 2020.

• Korean Journal of Materials Research
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• v.14 no.1
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• pp.46-51
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• 2004

The annealing of a Cu(4.5at.% Mg)/$SiO_2$/Si structure in ambient $O_2$, at 10 mTorr, and $300-500^{\circ}C$, allows for the outdiffusion of the Mg to the Cu surface, forming a thin MgO (15 nm) layer on the surface. The surface MgO layer was patterned, and successfully served as a hard mask, for the subsequent dry etching of the underlying Mg-depleted Cu films using an $O_2$ plasma and hexafluoroacetylacetone [H(hfac)] chemistry. The resultant MgO/Cu structure, with a taper slope of about $30^{\circ}C$ shows the feasibility of the dry etching of Cu(Mg) alloy films using a surface MgO mask scheme. A dry-etched Cu(4.5at.% Mg) gate a-Si:H TFT has a field effect mobility of 0.86 $\textrm{cm}^2$/Vs, a subthreshold swing of 1.08 V/dec, and a threshold voltage of 5.7 V. A novel process for the dry etching of Cu(Mg) alloy films, which eliminates the use of a hard mask, such as Ti, and results in a reduction in the process steps is reported for the first time in this work.

• Journal of the Korean Society of Clothing and Textiles
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• v.12 no.2 s.27
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• pp.217-223
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• 1988

This study is to examine the cleaningproof by dry cleaning runs and parts(shoulder, belly, butt) of garment leathers tanned chrome. This study is composed of three methods of test; color difference test, surface view by scanning electron micrographs, mechanical properties measurement by KES-FB system. The results obtained were as follows: 1. In stiffening of parts of sample, the belly is the best degree in smoothness, fullness, softness. But that of the butt have been found to be the worst degree and to be thick. 2. In fading of parts, the shoulder is an extreme case, but the belly is the best among three parts. 3. In dry cleaning runs, the view after 3 runs has been found to be the best result. 4. The stiffening after dry cleaning 1 run have been low grade, for the sample absorb much solvent of dry cleaning. And, the fading and the decoloration are to be worse after 5 runs. Because the leather surface is affected by dry cleaning runs.

• Journal of Animal Reproduction and Biotechnology
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• v.36 no.1
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• pp.59-68
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• 2021

This study was performed to identify the effect of synovium graft on conjunctiva in rabbits after dry eye induction. Six New Zealand White rabbits were used as dry eye models. Both eyes were divided to two groups as control and synovium graft group. The synovium graft was performed in fourth week after dry eye modeling. Quantitative change of tears through Schirmer tear test (STT), qualitative change of tear film through tear film break up time (TFBUT), and damage of cornea through fluorescein staining were observed for 10 weeks at intervals of two weeks. Histological examination was performed to evaluate cornea and conjunctiva at tenth week. In both groups, STT and TFBUT were significantly decreased in 4 weeks after modeling compared to 0 weeks (p < 0.05) . After synovium graft, there were increases in STT value at 4 weeks and TFBUT at 4 and 6 weeks in graft group (p < 0.05). Corneal fluorescein staining showed no significant difference between the two groups. In histopathological examination, grafted synovium was detected as round to ovoid ingression folds, well attached to grafted regions with 0.11 ± 0.04 mm² (range, 0.05-0.16 mm²). These results indicated that the synovium graft on the conjunctiva had an effect on the qualitative and quantitative improvement of the tear film even though there was no histological change.