• Title/Summary/Keyword: Dry Film

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Method of Solving Oxidation Problem in Copper Pillar Bump Packaging Technology of High Density IC (고집적 소자용 구리기둥범프 패키징에서 산화문제를 해결하기 위한 방법에 대한 연구)

  • Jung, One-Chul;Hong, Sang-Jeen;Soh, Dae-Wha;Hwang, Jae-Ryong;Cho, Il-Hwan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.12
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    • pp.919-923
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    • 2010
  • Copper pillar tin bump (CPTB) was developed for high density chip interconnect technology. Copper pillar tin bumps that have $100{\mu}m$ pitch were introduced with fabrication process using a KM -1250 dry film photoresist (DFR), copper electroplating method and Sn electro-less plating method. Mechanical shear strength measurements were introduced to characterize the bonding process as a function of thermo-compression. Shear strength has maximum value with $330^{\circ}C$ and 500 N thenno-compression process. Through the simulation work, it was proved that when the copper pillar tin bump decreased in its size, it was largely affected by the copper oxidation.

Sliding Wear Behavior of Plasma Sprayed Zirconia Coatingagainst Silicon Carbide Ceramic Ball

  • Le Thuong Hien;Chae Young-Hun;Kim Seock Sam;Kim Bupmin;Yoon Sang-bo
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.66-74
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    • 2004
  • The sliding wear behavior of $ZrO_2-22wt\%MgO\;(MZ)\;and\;ZrO_2-8wt\%Y_2O_3\;(YZ)$ deposited on a casting aluminum alloy with bond layer (NiCrCoAlY) by plasma spray against an SiC ball was investigated under dry test conditions at room temperature. At all load conditions, the wear mechanisms of the MZ and the YZ coatings were almost the same. The wear mechanisms involved the forming of a smooth film by material transferred on the sliding surface and pullout. The wear rate of the MZ coating was less than that of the YZ coating. With an increase normal load the wear rate of the studied coatings increased. The SEM was used to examine the sliding surfaces and elucidate likely wear mechanisms. The EDX analysis of the worn surface indicated that material transfer was occurred from the SiC ball to the disk. It was suggested that the material transfer played an important role in the wear performance.

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Chemiresistive Sensor Based on One-Dimensional WO3 Nanostructures as Non-Invasive Disease Monitors

  • Moon, Hi Gyu;Han, Soo Deok;Kim, Chulki;Park, Hyung-Ho;Yoon, Seok-Jin
    • Journal of Sensor Science and Technology
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    • v.23 no.5
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    • pp.291-294
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    • 2014
  • In this study, a chemiresistive sensor based on one-dimensional $WO_3$ nanostructures is presented for application in non-invasive medical diagnostics. $WO_3$ nanostructures were used as an active gas sensing layer and were deposited onto a $SiO_2/Si$substrate using Pt interdigitated electrodes (IDEs). The IDE spacing was $5{\mu}m$ and deposition was performed using RF sputter with glancing angle deposition mode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nanostructure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at $400^{\circ}C$. Such a remarkable faster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are less expensive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being used as a personalized medical diagnostics tool in the near future.

Experimental Study on the Friction and Wear Characteristics of Contact Sealing Unit for a Water Turbine (수차용 봉수장치의 마찰.마모특성에 관한 실험적 연구)

  • Kim, Chung-Kyun;Sihn, Ihn-Cheol;Lim, Kwang-Hyeon
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.515-518
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    • 2006
  • This paper presents the friction and wear characteristics of contact type sealing unit for a water turbine of a small hydro-power generation, which Is to stop a leakage of a circulating water from a outside of an impeller to an inside of a rolling bearing. The surface wear strongly affect to the seal life of a mechanical face seal. In this study, the hardness of a stainless steel in which is a heat-treated is 892.8 in Vickers hardness and the hardness of silicone carbide of SiC is 714.1 in Vickers hardness. The surface hardness of a heat-treated stainless steel is 25% high compared with that of a ceramic material of SiC. The contact modes of rubbing surfaces aye a dry friction a water film friction and a mixed friction that is contaminated by a dust, silt and moistures, etc. These two factors of a contact rubbing modes and a material property are very important parameters on the tribological performance such as a friction and wear between a seal ring and a seal seat. The experimental result shows that the surface hardness of a seal material is very important on the friction coefficient and a wear volume. Thus, the results recommend higher hardness of a seal material, which may reduce a friction loss and increase a wear life of primary seal components

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Red Pepper Drying with Solar Energy in Greenhouse (온실을 이용한 홍고추의 건조)

  • Yoon, Yong-Cheol;Suh, Won-Myung;Kang, Jong-Guk;Shino, Kazuo
    • Proceedings of the Korean Society of Agricultural Engineers Conference
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    • 2001.10a
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    • pp.256-260
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    • 2001
  • This study was initially performed to investigate current red-pepper drying methods commonly being adopted on red-pepper cultivation farm area. Based on the informations obtained from the field survey, an experiment of red-pepper drying was carried out to verify the actual drying potential of plastic covered solar house similar to the conventional pipe frame greenhouses covered with one or two layer of plastic film. Some results obtained from field survey and drying experiment for red-pepper are summarized as follows; 1. Various patterns of red-pepper drying process were found; 1) complete natural drying with red-pepper exposed in outdoor air, 2) hot air drying by dry chamber only, 3) combination drying by hot air dryer together with plastic covered passive solar house, 4) drying with plastic covered solar house unit. 2. The average air temperatures of outdoor and solar house during drying experiment period were $26.9-30.8\;and\;28.6-33.8^{\circ}C$, respectively, and the maximum air temperatures of those two were $34.2-36.4\;and\;39.8\;-52.3^{\circ}C$, respectively. Horizontal solar intensity during experiment period was $18.49-23.96\;MJ/m^{2}$, and relative humidity of outdoor and experimental solar house were 56 - 66% and 64 - 70%, respectively. 3. The weight of red-pepper during drying experiment period was decreased almost linearly from initial moisture content of 85% to final moisture content of 14%.

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Electrical Characterization of PZT and Electrodes after Dry Etching in Inductively Coupled plasma (유도결합 플라즈마를 이용한 PZT/전극의 식각 후 전기적 특성)

  • Kim, Kyung-Tae;Kang, Myoung-Gu;Park, Young;Song, Jun-Tae;Lee, Cheol-In;Jang, Eui-Goo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.275-278
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    • 2001
  • Ferroelectric PZT thin films were fabricated on the RuO$_2$/Pt, Pt bottom electrode with a PZT(53/47) metal alkoxide solutions. All PZT thin films showed a uniform grain structure without the presence of rosette structure. The PZT thin films were etched as a function of Cl$_2$/Ar and additive CF$_4$ into Cl$_2$(80%)/Ar(20%). The etch rates of PZT thin films were 1970 ${\AA}$/min at 30 % additive CF$_4$ into Cl$_2$(80%)/Ar(20%). The remanent polarization and leakage current density in PZT thin film on the RuO$_2$/Pt were 64.2 ${\mu}$C/cm$^2$, 1.4${\times}$10$\^$-6/ respectively.

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Electrical Properties and Preparation of 6FDA/4-4'DDE Polyimide Thin Films by Vapor Deposition Polymerization Method (진공증착중합법을 이용한 6FDA/4-4'DDE 폴리이미드 박막의 제조와 전기적 특성)

  • Hwang, S.Y.;Lee, B.J.;Kim, H.G.;Kim, Y.B.;Park, K.S.;Lim, H.C.;Kang, D.H.;Park, K.H.;Lee, D.C.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1487-1489
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    • 1998
  • In this paper, thin films of PI were fabricated VDPM of dry processes which are easy to control the film's thickness and hard to pollute due to volatile solvents. From FT-lR, PAA thin films fabricated by VDP were changed to PI thin films by thermal curing. From SEM, AFM and Ellipsometer experimental, as the higher curing temperatures the films thickness decreases and reflectance increases. Therefore, Pl could be fabricated stable by increasing curing temperature. The relative permitivity and dissipation loss factor were 3.7 and 0.008. Also, the resistivity was about $1.05{\times}10^{15}{\Omega}cm$ at $30^{\circ}C$.

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The Dry Etching Properties of ZnO Thin Film in Cl2/BCl3/Ar Plasma

  • Woo, Jong-Chang;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.3
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    • pp.116-119
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    • 2010
  • The etching characteristics of zinc oxide (ZnO) were investigated, including the etch rate and the selectivity of ZnO in a $Cl_2/BCl_3$/Ar plasma. It was found that the ZnO etch rate, the RF power, and the gas pressure showed non-monotonic behaviors with an increasing Cl2 fraction in the $Cl_2/BCl_3$/Ar plasma, a gas mixture of $Cl_2$(3 sccm)/$BCl_3$(16 sccm)/Ar (4 sccm) resulted in a maximum ZnO etch rate of 53 nm/min and a maximum etch selectivity of 0.89 for ZnO/$SiO_2$. We used atomic force microscopy to determine the roughness of the surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the plasmas. Due to the relatively low volatility of the by-products formed during etching with $Cl_2/BCl_3$/Ar plasma, ion bombardment and physical sputtering were required to obtain the high ZnO etch rate. The chemical states of the etched surfaces were investigated using X-ray photoelectron spectroscopy (XPS). This data suggested that the ZnO etch mechanism was due to ion enhanced chemical etching.

A study on forming a spacer for wafer-level CIS(CMOS Image Sensor) assembly (CMOS 이미지 센서의 웨이퍼 레벨 어셈블리를 위한 스페이스 형성에 관한 연구)

  • Kim, Il-Hwan;Na, Kyoung-Hwan;Kim, Hyeon-Cheol;Chun, Kuk-Jin
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.2
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    • pp.13-20
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    • 2008
  • This paper describes the methods of spacer-fabrication for wafer-level CIS(CMOS Image Sensor) assembly. We propose three methods using SU-8, PDMS and Si-interposer for the spacer-fabrication. For SU-8 spacer, novel wafer rotating system is developed and for PDMS(poly-dimethyl siloxane) spacer, new fabrication-method is used to bond with alignment of glass/PDMS/glass structure. And for Si-interposer, DFR(Dry Film Resist) is used as adhesive layer. The spacer using Si-interposer has the strongest bonding strength and the strength is 32.3MPa with shear.

The Silver Cycle and Fluxes in the Ocean

  • Ju, Se-Jong
    • Journal of the korean society of oceanography
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    • v.32 no.3
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    • pp.156-161
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    • 1997
  • The biogeochemical cycle of silver has rarely been reviewed, even though the silver ion (Ag$^{\times}$) is extremly toxic to some organisms. Its concentration is still rising sharply because of increased anthropogenic activity, specifically the discharge from the film industry (mainly, silver thiosulfate: Ag (S$_2$O$_3$)${^3-}_2$). Recently, a number of researchers have quantified the major fluxes and reservoirs of silver in the open ocean, bays, and estuaries. A review of the available information for Ag cycling in the open ocean shows that the riverine input (from human activity and weathering processes: 7${\times}$10$^6$ kg/yr and 5${\times}$10$^6$ kg/yr, respectively) is the dominant source of Ag to estuarine and coastal regions. Most of the silver (90% of riverine input silver) is removed in coastal sediments by the physical-chemical character of silver due to its high partitioning with particulate matter. On the other hand, in the open ocean the atmospheric input (wet and dry deposition: 1.48${\times}$10$^6$ kg/yr and 1.94${\times}$ 10$^5$ kg/yr, respectively) becomes more important as a source of silver than riverine input. The residence time of silver calculated from available data is 1250 yrs in the deep ocean below 500 m, but only 3 yrs in the surface ocean.

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