• Korean Journal of Materials Research
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• v.2 no.3
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• pp.228-238
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• 1992

An investigation on the step-coverage of PECVD and $O_3$ ThCVD oxides was undertaken to implement into the void-free inter metal dielectric planarization using multi-chamber system for the submicron double level metallization. At various initial aspect ratios the instantaneous aspect ratios were measured through modelling and experiment by depositing the oxides up to $0.9{\mu}m$ in thickness in order to monitor the onset of void formation. The modelling was found to be in a good agreement with the observed instantaneous aspect ratio of TEOS-based PECVD oxide whose re-entrant angle was less than $5^{\circ}$. It is demonstrated that either keeping the instantaneous aspect ratio of PECVD oxide as a first layer less than a factor of 0.8 or employing Ar sputter etch to create sloped oxide edge ensures the void-free planarization after$O_3$ ThCVD oxide deposition whose step-coverage is superior to PECVD oxide. It has been observed that $O_3$ ThCVD oxide etchback scheme has shown higher yield of via contact chain than non etchback process, with resistance per via contact of $0.1~0.3{\Omega}/{\mu}m^2$.

• Resources Recycling
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• v.26 no.6
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• pp.3-9
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• 2017

In this study, plasma arc remelting behaviors according to arc current, arc voltage, and types of plasma gas were investigated using Kroll processed Ti sponges as anode. In the discharge pressure range of vacuum pump ($200{\sim}300kgf/cm^2$), the arc voltage did not vary greatly with the increase of discharge pressure at a given arc length. This means that the pressure in the vacuum chamber during operation hardly changes and the atmospheric pressure maintains. Under various conditions of arc currents (700~900A), the arc voltage slightly increased with arc current. The effects of anode materials and operational variables on the arc length-arc voltage relationship were compared with the results in previous studies. When the atmospheric gas changed from argon to helium, double effect of improvement on the output of the steady state was observed. The increase of output in the plasma arc device was accompanied by an increase in the melting rate of the Ti sponge and the quality of the ingot surface was also improved. The plasma arc remelting of the new scrap titanium and the old scrap zirconium alloy could result in the fabrication of an ingot with high surface quality.

• Horticultural Science & Technology
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• v.19 no.1
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• pp.71-77
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• 2001

Experiments were conducted to evaluate quality and vase life of cut rose 'Rote Rose' cultivated in soil or hydroponically in rockwool. Rose flower stems harvested in commercial greenhouses in Kimhae on May 27 and June 14, 1998 were transported for about two hours to a laboratory and recut in water to an uniform stem length of 45cm. The rose flowers harvested on the same day were displayed at a density of $10cm{\times}10cm$ and were subjected to the same environmental conditions in a growth chamber. The stems were put in four different preservative solutions, 0.5% Chrysal RVB, BS (2% sucrose+200ppm 8HQS+0.3% Chrysal RVB), Sonk1 (BS+0.1mM ethionine), and double distilled $H_2O$. Flower stems harvested on May 27 were displayed at $18{\pm}1^{\circ}C$, RH 60-70%, and light intensity of 220lux provided by fluorescent lamps for $16h{\cdot}d^{-1}$. Flower stems harvested on June 14 were displayed at $25{\pm}1^{\circ}C$, RH 70-80%, and light intensity of 220lux provided by fluorescent lamps for $16h{\cdot}d^{-1}$. Fresh weight and flower diameter were affected by cultivation method, and were greater in hydroponically-grown roses than in soil-grown roses. Among the preservative solutions, BS and Sonk1 were superior to Chrysal RVB in terms of prolonging vase life. Vase life extension in Chrysal RVB, BS and Sonk1 over the control was about one day in both display temperatures. At $18^{\circ}C$ vase life was maintained for three to four additional days as compared to that at $25^{\circ}C$.

• The Journal of Korean Society for Radiation Therapy
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• v.28 no.2
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• pp.87-99
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• 2016

Purpose : This study will evaluate the clinical utility by applying clinical schematic that uses monoenergy or dual energy as according to the location of tumors to the stereotactic radiotherapy to compare the change in actual dose given to the real tumor and the dose that locates adjacent to the tumor. Materials and Methods : CT images from a total of 10 patients were obtained and the clinical planning were planned based on the volumetric modulated arc therapy on monoenergy and dual energy. To analyze the change factor in the tumor, Comformity Index(CI) and Homogeneity Index(HI) and maximum dose quantity were each calculated and comparing the dose distribution on normal tissues, $V_{10}$ and $V_5$, first ~ fourth ribs closest to the tumor ($1^{st}{\sim}4^{th}$ Rib), Spinal Cord, Esophagus and Trachea were selected. Also, in order to confirm the accuracy on which the planned dose distribution is really measured, the 2-dimensional ion chamber array was used to measure the dose distribution. Results : As of the tumor factor, CI and HI showed a number close to 1 when the two energies were used. As of the maximum dose, the front chest wall showed 2% and the dorsal tumor showed equivalent value. As of normal tissue, the front chest wall tumors were reduced by 4%, 5% when both energies were used in the adjacent rib and as of trachea, reduced by 11%, 17%. As of the dose in the lung, as of $V_{10}$, it reduced by 1.5%, $V_5$ by 1%. As of the rear chest wall, when both energies were used, the ribs adjacent to the tumors showed 6%, 1%, 4%, 12% reduction, and in the lung dose distribution, $V_{10}$ reduced by 3%, and $V_5$ reduced by 3.1%. The dose measurement in all energies were in accordance to the results of Gamma Index 3mm/3%. Conclusion : It is considered that rather than using monoenergy, utilizing double energy in the clinical setting can be more effectively applied to the superficial tumors.