• Journal of the Korean Society for Precision Engineering
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• v.31 no.8
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• pp.683-688
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• 2014

This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{\times}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.

• The Journal of the Korea institute of electronic communication sciences
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• v.10 no.8
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• pp.861-866
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• 2015

This study was aimed to detect area of Submaine Groundwater Discharged(: SGD) around Jeju island using by remote sensing. Sea Surface Temperature(SST) was identified using IR camera on Unmaned Aerial Vehicle(UAV) at Gimnyeong port in study area. Then SGD location was detected by comparing range of SGD temperature. Generally, range of SGD temperature is distributed 15 to 17 like underground water. The result, SGD location was detected by SST distribution of Gimnyeong port recorded by IR camera in the southwest of study area.

• The Journal of Engineering Geology
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• v.19 no.1
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• pp.63-70
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• 2009

The optical fiber cable acting as a sensor was embedded in the underground research tunnel and portal area in order to monitor their stability and the spatial temperature variation. This system includes two types of sensing function to monitor the distributed strain and temperature along the line, where sensor cable is installed, not a point sensing. According to the results of one year monitoring around the KURT, there is no significant displacement or movement at the tunnel wall and portal slope. However, it would be able to aware of some phenomena as an advance notice at the tunnel wall which indicates the fracturing in rockmass and shotcrete fragmentation before rock falls accidently as well as movement of earth slope. The measurement resolution for rock mass displacement is 1 mm per 1 m and it covers 30 km length with every 1m interval in minimum. In temperature, the cable measures the range of $-160{\sim}600^{\circ}C$ with $0.01^{\circ}C$ resolution according to the cable types. This means that it would be applicable to monitoring system for the safe operation of various kinds of facilities having static and/or dynamic characteristics, such as chemical plant, pipeline, rail, huge building, long and slim structures, bridge, subway and marine vessel. etc.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1837-1839
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• 1998

This paper proposes the strain-insensitive temperature sensing in quasi-distributed sensor system using different thermal expension coefficient materials. This system has the high sensitivity and hasn't the necessity of reference signal. We can monitor the condition of the power cable with this system.

• Korean Journal of Remote Sensing
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• v.30 no.6
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• pp.797-807
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• 2014

The Sea Surface Temperature (SST) is one of the most important oceanic environmental factors in determining the change of marine environments and ecological activities. Satellite thermal infrared images can be effective for understanding the global trend of sea surface temperature due to large scale. However, their low spatial resolution caused some limitations in some areas where complicated and refined coastal shapes due to many islands are present as in the Korean Peninsula. The coastal ocean is also very important because human activities interact with the environmental change of coastal area and most aqua farming is distributed in the coastal ocean. Thus, low-cost airborne thermal infrared remote sensing with high resolution capability is considered for verifying its possibility to extract SST and to monitor the changes of coastal environment. In this study, an airborne thermal infrared system was implemented using a low-cost and ground-based thermal infrared camera (FLIR), and more than 8 airborne acquisitions were carried out in the western coast of the Korean Peninsula during the periods between May 23, 2012 and December 7, 2013. The acquired thermal infrared images were radiometrically calibrated using an atmospheric radiative transfer model with a support from a temperature-humidity sensor, and geometrically calibrated using GPS and IMU sensors. In particular, the airborne sea surface temperature acquired in June 25, 2013 was compared and verified with satellite SST as well as ship-borne thermal infrared and in-situ SST data. As a result, the airborne thermal infrared sensor extracted SST with an accuracy of $1^{\circ}C$.

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.451-457
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• 2014

We developed a high-performance methane gas sensor based on a $SnO_2$ hollow hemisphere array structure of nano-thickness. The sensor structures were fabricated by sputter deposition of Sn metal over an array of polystyrene spheres distributed on a planar substrate, followed by an oxidation process to oxidize the Sn to $SnO_2$ while removing the polystyrene template cores. The surface morphology and structural properties were examined by scanning electron microscopy. An optimization of the structure for methane sensing was also carried out. The effects of oxidation temperature, film thickness, gold doping, and morphology were examined. An impressive response of ~220% was observed for a 200 ppm concentration of $CH_4$ gas at an operating temperature of $400^{\circ}C$ for a sample fabricated by 30 sec sputtering of Sn, and oxidation at $800^{\circ}C$ for 2 hr in air. This high response was enabled by the open structure of the hemisphere array thin films.

• Journal of Integrative Natural Science
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• v.2 no.4
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• pp.275-279
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• 2009

Recently, number of studies for porous silicon (PSi) have been investigated by many researchers. Multistructured porous silicon such as a distributed Bragg reflector (DBR) PSi, has been a topic of interest, because of its unique optical properties. DBR PSi were prepared by using an electrochemical etch of $P{^+}{^+}$-type silicon wafer with resistivity between 0.1 and $10m{\Omega}cm$. The electrochemical etch with square wave current density results in two different refractive indices in the porous layer. In this work, DBR porous silicon chips for a simple and portable organic vapor-sensing device have fabricated. The optical characteristics of DBR PSi have been investigated. DBR porous silicon have been characterized by FT-IR and Ocean optics 2000 spectrometer. The device used DBR PSi chip has been demonstrated as an excellent gas sensor, showing a great senstivity to organic vapor at room temperature.

• Journal of the Korean Society of Visualization
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• v.9 no.2
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• pp.34-39
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• 2011

This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.10a
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• pp.946-949
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• 2007

A wireless sensor network (WSN) is a wireless network consisting of spatially distributed autonomous devices using sensors to cooperatively monitor physical or environmental conditions, such as temperature, sound, vibration, pressure, motion at different locations. Environmental monitoring represent a class of sensor network applications with enormous potential benefits for scientific communities and society. In this paper we design and implement a novel platform for sensor networks to be used for monitoring of temperature, humidity, and light sensors.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.49 no.2
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• pp.62-67
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• 2000

The uniformity of temperature on a wafer is one of the most important parameters to control the RTP (Rapid Thermal Process) with proper input signals. Since it is impossible to achieve the uniformity of temperature without exact estimation of temperature at all points on the wafer, the difficulty of understanding internal dynamics and structural complexities of the RTP is a primary obstacle to accurately measure the distributed temperatures on the wafer. Furthermore, it is also hard to accomplish desirable estimation because only few pyrometers have been commonly available in the general equipments. In the paper, a thermal model based on the chamber geometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through certain simulation and experiments. The work can be usefully contributed to building a run-by-run or a real-time controls of the RTP.