• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2074-2076
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• 2000

In this paper, RFICP equipment is designed and manufactured with the aid of high frequency discharge to produce uniform plasma with high density and large diameter. And $SF_6$ gas is used to investigate plasma characteristics. The electron density and temperature, potential dependence of $SF_6$ plasma in accordance with its operating pressure, gas flux and input power are measured by the method of Langmuir probe. The etching characteristics of the plasma is researched in accordance with operating pressure, gas flux, input power to apply to Silicon Wafer which is used in the field of semiconductor process. The proposed RFICP equipment, in this paper, has relatively excellent etching characteristics, and is thought to be element of oxidization-sheath etching facility in semiconductor manufacturing process.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.8 s.338
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• pp.43-52
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• 2005

An prescaler which uses PLL(Phase Locked Loop) must satisfy high speed operation and low power consumption. Thus the performance or TSPC(True Single Phase Clocked) D-flip flops which is applied at Prescaler is very important. Power consumption of conventional TSPC D-flip flops was increased with glitches from output and unnecessary discharge at internal node in precharge phase. We proposed a new D-flip flop which reduced two clock transistors for precharge and discharge Phase. With inserting a new PMOS transistor to the input stage, we could prevent from unnecessary discharge in precharge phase. Moreover, to remove the glitch problems at output, we inserted an PMOS transistor in output stage. The proposed flip flop showed stable operations as well as low power consumption. The maximum frequency of prescaler by applying the proposed D-flip flop was 2.92GHz and achieved power consumption of 10.61mw at 3.3V. In comparison with prescaler applying the conventional TSPC D-flip $flop^[6]$, we obtained the performance improvement of $45.4\%$ in the view of PDP(Power-Belay-Product).

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.2021_2022
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• 2009

Partial discharges(PD) is a important factor to evaluate the insulation state in high voltage electric machinery. However, measuring PD under the circumstances of power plant is occasionally impossible due to the relatively high magnitude of noise which is emanated from the operating machinery. In some case, the instrument measuring PD can not even perform a calibration that initializes tools and enhance the accuracy. This paper presents that we devised a noise reduction method and demonstrated the usefulness in acquiring reliable PD signals. We attached a series of filter and transformer at the input of power source of the instruments which refrains high noise signals from incoming to the instruments. We experimented the efficiency of noise reduction applying the device into the Dangjin Power Plant and Factory. As a result of testing with the filter and transformer, we can easily calibrate the PD signal compared to the case without the device. Additionally, we can detect the small PD signal which was unperceived with a normal device.

• The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.5 no.2
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• pp.37-48
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• 1991

This paper shows the characteristics of sparkover discharge in flowing air ranging from O(Reynolds number, Re) to $10.52{\times}10^4$(Re). Also, we investigated changes of discharge pattern for constant input power by adjustment of the Reynolds number. Flowing air duct of this investigation is a circular tube. The flow at the experimented positions' section is described as fully development laminar flow. The important results obtained from this study are as follows. The sparkover discharge path of flowing air can be analyzed by the theories of flow field for air. The sparkover voltage shows nearly the maximum value when the Reynolds number of flowing air ranges $3{\times}10^4$ to $4{\times}10^4$The maximum sparkover voltages of flowing air are about 6.3[kV] higher than those of static air. The discharge pattern can be controlled by adjustment of the Reynolds number.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.5
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• pp.44-51
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• 2008

UV lamp systems have been used for cleaning of display panels of TFT LCD or Plasma Display Panel (PDP). However, the needs for high efficient cleaning and low cost made high voltage plasma cleaning techniques to be developed and to be improved. Dielectric-Barrier Discharges (DBDs), also referred to as barrier discharges or silent discharges have been exclusively related to ozone generation for a long time. In this paper, a 6kW high voltage plasma power supply system was developed for LCD cleaning. The 3-phase input voltage is rectified and then inverter system is used to make a high frequency pulse train, which is rectified after passing through a high-power transformer. Finally, hi-directional high voltage pulse switching circuits are used to generate the high voltage plasma. Some experimental results showed the usefulness of atmospheric plasma for LCD panel cleaning.

• Proceedings of the KIPE Conference
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• 2000.07a
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• pp.364-367
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• 2000

This paper describes a Push-Pull type high fre-quency resonant inverter conposed of consolidation of boost converter circuit and resonant circuit. By using a boost converter circuit the proposed inverter can obtain a twice input voltage of reson ant circuit and reduce a secondary turn ratios. By using both boost-converter and switching device can be reduce by half. Also the ana-lysis of the proposed circuit was described by using normalized parameter and operating characteristics have been evaluated as to switching frequency and parameters. In the future this pro-posed inverter shows that it can be practically used as a power source system for the lighting equipment of discharge lamp induction heating applications.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.6
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• pp.292-296
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• 2002

A new sustain driving method for the AC PDP is presented. In this driving method, the voltage source is connected to a storage capacitor, this storage capacitor charges an intermediate capacitor through LC resonance, and the panel is charged from the intermediate capacitor indirectly. In this way, the current flowing into the AC PDP when the sustain discharge occurs is reduced because the current is indirectly supplied from a capacitor, a limited source of charge. Thus, the input power to the output luminance efficiency is improved. Since the voltage supplied to the storage capacitor is doubled through LC resonance, this method call drive an AC PDP with a voltage source of about half of the voltage necessary in the conventional driving methods. The experiments showed that this charge-controlled driving method could drive ail AC PDP with a voltage source of as low as 107V. Using a panel of the conventional structure, luminous efficiency of 1.28 lm/W was achieved.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.150-152
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Ne discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.167-170
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• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Argon, Ne discharge for pressure from 1 [mTorr] and input RF power 10 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.139.2-139.2
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• 2013

6" Multi-crystal Silicon wafer has etched suing a remote - type RF Dielectric barrier discharge (RF DBD) at atmospheric pressure. DBD source is composed of Al electrode and coated Al2O3 dielectric as function of Ar/NF3 gas combination and input power used 13.56 MHz power supply. Ar gas flow rate is changed from 2 to 10 Slm, and NF3 flow rate is changed from 0.2~1 slm. At the result, NF3 flow rate Si etching rate also increase whit the increasing of NF3 flow rate But at 2 slm etching rate was decrease. In this experience, Max etching rate is 2.3 ${\mu}m/min$ when the scan time is 45 sec.