• 제목/요약/키워드: Direct writing method

검색결과 46건 처리시간 0.024초

Interconnecting Nanomaterials for Flexible Substrate and Direct Writing Process

  • 좌용호
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.58.1-58.1
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    • 2012
  • Direct write technologies provide flexible and economic means to manufacture low-cost large-area electronics. In this regard inkjet printing has frequently been used for the fabrication of electronic devices. Full advantage of this method, which is capable of reliable direct patterning with line and space dimensions in the 10 to 100 um regime, is only made with all-solution based processing. Among these printable electronic materials, silver and copper nanoparticles have been used as interconnecting materials. Specially, solutions of organic-encapsulated silver and copper nanoparticles may be printed and subsequently annealed to form low-resistance conductor patterns. In this talk, we describe novel processes for forming silver nanoplates and copper ion complex which have unique properties, and discuss the optimization of the printing/annealing processes to demonstrate plastic-compatible low-resistance conductors. By optimizing both the interconnecting materials and the surface treatments of substrate, it is possible to produce particles that anneal at low-temperatures (< $200^{\circ}C$) to form continuous films having low resistivity and appropriate work function for formation of rectifying contacts.

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폴리머 코팅층 레이저 직접묘화법을 이용한 미세패턴증착 (Deposition of Micropattern using The Laser Direct Writing Method with a polymer coating layer)

  • 이봉구
    • 한국산학기술학회논문지
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    • 제15권12호
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    • pp.6980-6985
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    • 2014
  • 레이저 직접묘화방법을 이용하여 절연기판($SiO_2$)위에 미세전도성패턴을 제조하였다. 레이저 유도증착공정은 레이저빔이 금속박막에 조사되면 레이저 빔의 빛 에너지가 금속박막에 흡수되어 열에너지로 바뀌면서 열전도에 의한 열분해반응으로 기판위에 증착이 일어난다. 본 논문에서는 금속박막위에 폴리머 코팅을 하여 레이저 직접묘화공정을 적용하여 미세패턴과 3차원 마이크로 구조물 제조에 관한 연구를 수행하였다. 평균 증착율은 전반적으로 레이저출력이 높을 수록 선형적으로 증가하고, 빔 스캔 속도가 감소할수록 증착율은 증가한다는 것을 확인하였다. Polymer 코팅층을 이용하여 미세전극을 증착하여 비저항값을 측정하여, 코팅층을 사용한 경우의 전기전도도가 코팅을 하지 않은 경우보다 약 3배정도 향상되는 것을 확인할 수 있었다.

전자선 직접묘사에서 Through-put이 향상된 단위 矩形묘사방법 (Unit-Rectangle Exposure Method for Advanced Through-put in Electron-Beam Direct Writing Lithography)

  • 박선우;김철주
    • 대한전자공학회논문지
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    • 제26권2호
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    • pp.112-117
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    • 1989
  • 본 논문은 패턴의 모양에 따라서 패턴 데이타 포멥변환시 분할되는 각종 矩形패턴을 크기에 구애됨이 없이 전자선 직접묘사 시간이 일정한 矩形단위로 전자선 직접묘사하는 방법을 제안하였다. 본 실험에서는 SEM을 사용하였으며 矩形의 크기에 따라 일정시간에 요구되는 전자선 전류를 변화시키기 위하여 집속렌즈의 공급전류를 BITMAP-IV CAD 시스템으로 제어하였다. 본방법에서는 패턴 데이타 포맵변환시 밀집된 패턴에 대한 resizing과정이 불필요하며 묘사시간에 근거한 through-put은 unit scan방식에 비하여 172배가 향상되었다.

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레이저 직접 묘화법에 의한 알루미나 기판위의 미세 전도성 패턴 제작 (The fabrication of micro- size conductor lines on alumina patterned by laser ablation)

  • 김혜원;이제훈;신동식;강성군
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1889-1892
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    • 2003
  • The fabrication of micro-size patterning on alumina substrate is generated by laser direct writing, which has high precision and selectivity of various laser beam energies. The depth and width of patterns is affected by laser parameter such as laser power, scan rate. Through the chemical and mechanical polishing Pd seeds was effectively got rid of alumina substrate for selectivity electroless Ni plating. Thermal treatment is good method for changing electrical property of conductor line, because the treatment can control of the grain size.

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일회용 마스크에 장착을 위한 레이저 기반 그래핀 습도센서 제작에 관한 연구 (A Study on the Fabrication of Laser-Induced Graphene Humidity Sensor for Mounting on a Disposable Mask)

  • 이준욱;신윤지;양혜정;신보성
    • 한국산업융합학회 논문집
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    • 제23권4_2호
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    • pp.693-699
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    • 2020
  • 355nm UV pulse laser is irradiated on the surface of polyimide (PI) by LDW (Laser Direct Writing) method to produce a high sensitivity flexible humidity sensor using a simple one-step process. The LDW method continuously investigates 2-D CAD data using a galvano scanner and an F-lens. This method is non-contact, so it minimizes physical strain on the PI. Laser-induced graphene (LIG) produced by lasers has a high surface area due to its high flexibility and numerous pores and oxidizers compared to conductors. For this reason, it is highly useful as a flexible humidity sensor. The humidity sensor produced in this study was attached to the inside of a mask filter, which has become a hot topic recently, and its applicability was confirmed.The measurement of humidity measured the sensitivity, reactivity, stability and recovery behavior of the sensor by measuring changes in capacitance and resistance.

ShEx Schema Generator for RDF Graphs Created by Direct Mapping

  • Choi, Ji-Woong
    • 한국컴퓨터정보학회논문지
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    • 제23권10호
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    • pp.33-43
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    • 2018
  • In this paper, we propose a method to automatically generate the description of an RDF graph structure. The description is expressed in Shape Expression Language (ShEx), which is developed by W3C and provides the syntax for describing the structure of RDF data. The RDF graphs to which this method can be applied are limited to those generated by the direct mapping, which is an algorithm for transforming relational data into RDF by W3C. A relational database consists of its schema including integrity constraints and its instance data. While the instance data can have been published in RDF by some standard methods such as the direct mapping, the translation of the schema has been missing so far. Unlike the users on relational databases, the ones on RDF datasets were forced to write repeated vague SPARQL queries over the datasets to acquire the exact results. This is because the schema for RDF data has not been provided to the users. The ShEx documents generated by our method can be referred as the schema on writing SPARQL queries. They also can validate data on RDF graph update operations with ShEx validators. In other words, they can work as the integrity constraints in relational databases.

확산방식에 의한 Ti:LiNbO_3$ 광도파로의 제작 및 특성측정 (Fabrication and Characterization of Ti:LiNbO_3$ Optical Waveguides)

  • 손영성;강원구;갑상영;권영세
    • 대한전자공학회논문지
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    • 제25권3호
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    • pp.343-351
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    • 1988
  • Planar optical waveguides are fabricated on a Y-cut LiNbO3 single crystal substrate by Ti indiffusion method. From data measured by the bright M-line spectroscopy, refractive index profiles are reconstructed by WKB approximation method. Then, single strip, X-crossing strip, and Y-brinch strip optical waveguides are fabricated on X-cut LiNbO3 single crystal substrate, with waveguide patterns made by the laser beam direct writing method. And their near-field intensity profiles are observed after coupling the light to the waveguide edges.

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LIFT 방법에 의한 전도성 미세 패터닝 공정 연구 (Micro patterning of conductor line by laser induced forward transfer(LIFT))

  • 이제훈;한유희
    • 한국레이저가공학회지
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    • 제2권3호
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    • pp.52-61
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    • 1999
  • The laser induced forward transfer(LIFT) technique employs a pulsed laser to transfer parts of a thin metal film from an optically transparent target onto an arbitrary substrate in close proximity to the metal film on the target. In this work, a two-step method, the combination of LIFT process, in which a Au film deposited on the $Al_2$O$_3$ substrate by Nd:YAG laser and subsequent Au electroless metal plating on the by LIFT process generated Au seed, was presented. The influence of laser parameters, wavelength, laser power, film thickness and overlap ratio of pulse tracks, on the shapes of deposit and conductor line after electroless plating is experimentally studied. As a results, the threshold power densities for ablation, deposition and metallization were determined and comparison of threshold value between the wave length 1064nm and the second harmonic generated 532nm. In odor to determine a possible application in the electronic industry, a smallest conduct spot size, line width and isolated line space were generated.

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