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HIPIMS Arc-Free Reactive Deposition of Non-conductive Films Using the Applied Material ENDURA 200 mm Cluster Tool

  • Chistyakov, Roman
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.96-97
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    • 2012
  • In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

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Determination of Volatile Organic Compounds emitted from Municipal Solid Waste Landfill Site by Thermal Desorption-Cryofocusing-GC/FID/FPD (열탈착-저온농축-GC/FID/FPD에 의한 도시 생활폐기물 매립장에서 방출되는 휘발성 유기화합물의 측정에 관한 연구)

  • Kim, Man-Goo;Jung, Young-Rim;Seo, Young-Min;Nam, Sung-Hyun;Kwon, Young-Jin
    • Analytical Science and Technology
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    • v.14 no.3
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    • pp.274-285
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    • 2001
  • In this study, the thermal desorption-cryofocusing-gas chromatographic(TD-C-GC) method was developed for determination of volatile organic compounds(VOCs) in ambient air and was applied at the municipal solid waste landfill sites. On-column cryofocusing was possible only with a 100 ml dewars bottle in TD-C-GC method with a stainless steel column. However, high operating pressure was needed for purging VOCs from the absorbent trap, which was able to solve by pressure programming with a electric pressure controller. By using both pressure and temperature programming brought increasing of resolution power in on-column cryofocusing method, but the high pressure caused a leakage of sample tube with repeated use. A loop cryofocusing devise was also developed and compared with the direct on-column method. In loop cryofocusing method, VOCs were concentrated on a 0.8mm i.d. loop which is located between the injector and separation column by using liquid nitrogen. In order to purge VOCs from the absorbent trap, only 0.4 psi of pressure was need in the loop cryofocusing method. Dual detection system was applied for the analysis of VOCs; a FID was used for hydrocarbons and a FPD was used for sulfur-containing compounds. Qualitative analysis was done by on-column cryofocusing GC-MS system. Among the large number of VOCs, toluene was the most abundant. Hydrogen sulfide, dimethyl sulfide, carbon disulfide, dimethyl disulfide and methyl propyl disulfide were detected at landfill site by FPD.

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Chemical Suppression of Gravitropic Bending Response in Flower Stalks of Snapdragon (Antirrhinum majus L.) (몇가지 생리활성 저해제가 금어초 절화의 굴지성 반응에 미치는 효과)

  • Kim, Yong-Sam;Kim, Dong-Hern;Hwang, Young-Soo;Jung, Jin
    • Applied Biological Chemistry
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    • v.40 no.6
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    • pp.567-571
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    • 1997
  • Numbers of chemical agents which have been shown to inhibit either auxin signal transduction pathway or ethylene formation in plant cells were applied to cut flower stems of snapdragon (Antirrhinum majus L.) and their effects on the postharvest gravitropic response were studied. The chemical treatments were done by submerging either the stem base or the top part of cut flower, which involves the gravistimulus-sensitive region, for 1 h at $25^{\circ}C$. When the chemicals were supplied from the cut stem base, the gravitropic upward bending of flower stalks kept horizontally after the treatments with 20 mM CDTA or 10 mM $CoCl_2$ was comparable to that of the untreated control, but o-vanadate showed a certain degree of effectiveness for suppressing the bending response. In contrast, the direct application of those agents to the gravitropically sensitive region of cut flowers in the presence of 0.01% Triton X-100 resulted in a substantial reduction of the gravitropic response. In the case of 20 mM $CoCl_2$ treatment, almost total elimination of gravitropism without any significant deterioration of flower quality was observed. The results indicate the possibility of preparation of a protocol involving $CoCl_2$ and a proper surfactant for commercial use to suppress the gravitropic response of cut flowers during postharvest storage and transportation.

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Economic Impact Analysis on High-yield Groundwater Development R&D Project in Jeju (제주도 청정 대용량 지하수개발 연구사업의 경제적 효과분석)

  • Ahn, Eun-Young;Kim, Seong-Yong
    • Economic and Environmental Geology
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    • v.42 no.2
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    • pp.133-141
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    • 2009
  • For economic impact analysis on a R&D project of high-yield groundwater development in Jeju conducted by KIGAM from 2004 to 2007, benefit/cost ratio(BCR), net present value(NPV), and internal rate of return(IRR) were calculated by contingent valuation method(CVM), production function analysis, domestic water market analysis and technology factor analysis. Measurable direct impact parameters among the major outputs of this R&D project consisted the estimation 4 high-yield and high mineral groundwater reserve in Jeju. Annual use of the reserve by piped water and bottled water was estimated as 12.23 million ton and its monetary value was calculated as 293.4 million dollar in 2006 year value applied of 5.5% discount rate. Economic impact of this R&D project in NPV of year 2006, with applying a discount rate of 5.5%, was identified and estimated as 13.66 million dollar in NPV, 4.05 points in BCR, and 22.74% in IRR, respectively. Additional early launch benefit was 5.58 million dollar. Even increased of the 1% discount rate, NPV of this R&D project was also positive as 12.18 million dollar and BCR was 3.71.

MAKING AGRICULTURAL INSURANCE IN INDIA FARMER-FRIENDLY AND CLIMATE RESILIENT

  • Kumar, K. Nirmal Ravi
    • Agribusiness and Information Management
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    • v.11 no.1
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    • pp.27-39
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    • 2019
  • Agricultural risks are exacerbated by a variety of factors ranging from climatevariability and change, frequent natural disasters, uncertainties in yields and prices, weakrural infrastructure, imperfect markets and lack of financial services including limited spanand design of risk mitigation instruments such as credit and insurance. Indian agriculture has little more than half (53%) of its area still rainfed and this makes it highly sensitive to vagaries of climate causing unstable output. Besides adverse climatic factors, there are man-made disasters such as fire, sale of spurious seeds, adulteration of pesticides and fertilizers etc., and all these severely affect farmers through loss in production and farm income, and are beyond the control of farmers. Hence, crop insurance' is considered to be the promising tool to insulate the farmers from risks faced by them and to sustain them in the agri-business. This paper critically evaluates the performance of recent crop insurance scheme viz., Pradhan Mantri Fasal Bhima Yojana (PMFBY) and its comparative performance with earlier agricultural insurance schemes implemented in the country. It is heartening that, the comparative performance of PMFBY with earlier schemes revealed that, the Government has definitely taken a leap forward in covering more number of farmers and bringing more area under crop insurance with the execution of this new scheme and on this front, it deserves the appreciation in fulfilling the objective for bringing more number of farmers under insurance cover. The use of mobile based technology, reduced number of Crop Cutting Experiments (CCEs) and smart CCEs, digitization of land record and linking them to farmers' account for faster assessment/settlement of claims are some of the steps that contributed for effective implementation of this new crop insurance scheme. However, inadequate claim payments, errors in loss/yield assessment, delayed claim payment, no direct linkage between insurance companies and farmers are the major shortcomings of this scheme. This calls for revamping the crop insurance program in India from time to time in tune with the dynamic changes in climatic factors on one hand and to provide a safety-net for farmers to mitigate losses arising from climatic shocks on the other. The future research avenues include: insuring the revenue of the farmer (Price × Yield) as in USA and more and more tenant farmers should be brought under insurance by doling out discounts for group coverage of farmers like in Philippines where 20 per cent discount in premium is given for a group of 5-10 farmers, 30 per cent for a group of 10-20 and 40 per cent for a group of >20 farmers.

An Empirical Study of the Clinically Reportable Range in Clinical Chemistry (임상보고 가능범위의 실증적 연구)

  • Chang, Sang-Wu;Lee, Sang-Gon;Choi, Ho-Seong;Song, Eun-Young;Park, Yong-Won;Lee, In-Ae
    • Korean Journal of Clinical Laboratory Science
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    • v.39 no.1
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    • pp.31-36
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    • 2007
  • The purpose of the clinically reportable range (CRR) in clinical chemistry is to estimate linearity in working range. The reportable range includes all results that may be reliably reported, and embraces two types of ranges: the analytical measurement range (AMR) is the range of analyte values that a method can directly measure on the specimen without any dilution, concentration, or other pretreatment not part of the usual assay process. CAP and JCAHO require linearity on analyzers every six months. The clinically reportable range is the range of analyte values that a method can measure, allowing for specimen dilution, concentration, or other pretreatment used to extend the direct analytical measurement range. The AMR cannot exceed the manufacturer's limits. Establishing AMR is easily accomplished with Calibration Verification Assessment and experimental Linearity. For example: The manufacturer states that the limits of the AST on their instrument are 0-1100. The lowest level that could be verified is 2. The upper level is 1241. The verified AMR of the instrument is 2-1241. The lower limit of the range is 2, because that is the lowest level that could be verified by the laboratory. The laboratory could not use the manufacturer's lower limit of 2 because they have not proven that the instrument values below 2 are valid. The upper limit of the range is 1241, because although the lab has shown that the instrument is linear to 1241, the manufacturer does not make that claim. The laboratory needs to demonstrate the accuracy and precision of the analyzer, as well the validation of the patient AMR. Linearity requirements have been eliminated from the CLIA regulations and from the CAP inspection criteria, however, many inspectors continue to feel that linearity studies are a part of good lab practice and should be encouraged. If a lab chooses to continue linearity studies, these studies must fully comply with the calibration/calibration verification requirements of CLIA and/or CAP. The results of lower limit and upper limit of clinically reportable range were total protein (2.1 - 79.9), albumin (1.3 - 39), total bilirubin (0.2 - 106.2), alkaline phosphatase (13 - 6928.2), aspartate aminotransferase (24 - 7446), alanine aminotransferase (13 - 6724.2), gamma glutamyl transpeptidase (16.64 - 9904.2), creatine kinase (15.26 - 4723.8), lactate dehydrogenase (127.66 - 13231.8), creatinine (0.4 - 129.6), blood urea nitrogen (8.67 - 925.8), uric acid (1.6 - 151.2), total cholesterol (48.52 - 3162), triglycerides (36.91 - 3367.8), glucose (31 - 4218), amylase (21 - 6694.2), calcium (3.1 - 118.2), inorganic phosphorus (1.11 - 108), HDL (11.74 - 666), NA (58.3 - 1800), K (1.0 - 69.6), CL (38 - 1230).

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A Study of Internet Filtering for Public Information Resources (공공정보자원에서의 인터넷 필터링에 관한 연구)

  • Kim, You-Seung
    • Journal of the Korean Society for Library and Information Science
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    • v.41 no.2
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    • pp.111-133
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    • 2007
  • Illegal and harmful information on the Internet have been a great concern not only for regulatory authorities, but also all the public institutes, such as public libraries and schools, that provide Internet access service. In particular, for public libraries which play an important role in organizing, opening and providing information resources in the information society, providing Internet access service are indispensible. Therefore, any changes of Internet content regulatory system may have direct effects on services of public libraries. Due to unique characteristics of the Internet, content refutation on the Internet has made a best use of various regulatory methods, ranging from governmental regulation to self-refutation and technical regulatory methods. However, nation by nation. technical regulatory methods on the Internet have been developed in quite different ways. Applying them on public library has been strongly criticised for violating freedom of expression and rights of access to information. This article begins with a theoretical discussion about free speech rights and refutation on Internet. Then it examines filtering software which is one of the most popular technical regulatory methods based on both technical and socio-humanities' prospects and analyses several governments' regulatory approaches to Internet filtering. As a conclusion, issues concerning Internet filtering at public institutes are critically apprised.

A Simple Seismic Vulnerability Sorting Method for Electric Power Utility Tunnels (전력구의 간편 지진취약도 선별법)

  • Kang, Choonghyun;Huh, Jungwon;Park, Inn-Joon;Hwang, Kyeong Min;Jang, Jung Bum
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.22 no.5
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    • pp.110-118
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    • 2018
  • Due to recent earthquakes, there is a growing awareness that Korea is not a safe zone for earthquakes any more. Therefore, the review of various aspects of the seismic safety of the infrastructures are being carried out. Because of the characteristics of the underground structure buried in the ground, the electric power utility tunnels must be considered not only for the inertia and load capacity of the structure itself but also the characteristics of the surrounding soils. An extensive and accurate numerical analysis is inevitably required in order to consider the interaction with the ground, but it is difficult to apply the soil-structure interaction analyses, which generally requires high cost and extensive time, to all electric power utility tunnel structures. In this study, the major design variables including soil characteristics are considered as independent variables, and the seismic safety factor, which is the result of the numerical analysis, is considered as a dependent variable. Thus, a method is proposed to select vulnerable electric power utility tunnels with low seismic safety factor while excluding costly and time-consuming numerical analyses through the direct correlation analysis between independent and dependent variables. Equations of boundary limits were derived based on the distribution of the seismic safety factor and the cover depth and rebar amounts with high correlation relationship. Consequently, a very efficient and simple approach is proposed to select vulnerable electric power utility tunnels without intensive numerical analyses. Among the 108 electric power utility tunnels that were investigated in this paper, 30% were screened as fragile structures, and it is confirmed that the screening method is valid by checking the safety factors of the fragile structure. The approach is relatively very simple to use and easy to expand, and can be conveniently applied to additional data to be obtained in the future.

Estimation of Genetic Parameters of Body Weights in Hanwoo Steers(Korean Cattle), Bos Taurus Coreanae Using Random Regression Model (임의회귀모형을 이용한 한우 거세우 체중의 유전모수 추정)

  • Seo, Kang- Seok;Salces, Agapita J.;Yoon, Du- Hak;Lee, Hong- Gu;Kim, Sang- Hoon;Choi, Te- Jeong
    • Journal of Animal Science and Technology
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    • v.50 no.2
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    • pp.151-156
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    • 2008
  • The study aimed to estimate genetic parameters of body weights in Hanwoo steers using random regression model and compare it with single trait animal model. A total of 1,372 Hanwoo steers that belonged to progeny testing program of the Hanwoo Genetic Improvement conducted at the Livestock Improvement Main Center of the National Agricultural Cooperative Federation (LIMC-NACF) in Rep. of Korea were used. Results of the random regression model fitting quadratic function revealed heritability values from 0.17 to 0.30 for the whole testing days up to 800 days. The results of the animal model showed estimated heritability values ranged from 0.24 to 0.36. Estimates of permanent environmental correlations tended to increase with increasing test in days. Unlike in the direct genetic correlation that at early stage the estimate was slightly negative it was 0.30 then increased to approach unity at later stage of test. Comparing the results between random regression model and the animal model showed not much differences and both followed similar pattern and therefore the use of random regression model for the national genetic evaluation of Hanwoo could be implemented.

A New Organic Modifiers for Anti-Stiction (부착방지를 위한 새로운 표면 개질 물질)

  • Kim, Bong-Hwan;Chun, Kuk-Jin;Lee, Yoon-Sik
    • Journal of Sensor Science and Technology
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    • v.11 no.2
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    • pp.102-110
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    • 2002
  • The chemical and mechanical characteristics of a new surface modifier, dichlorodimethysilane (DDMS, $(CH_3)_3SiCl_2$), for stiction-free polysilicon surfaces are reported. The main strategy is to replace the conventional monoalkyltrichlorosilane(MTS, $RSiCl_3$) such as octadecyltrichlorosilane (ODTS) or 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS) with dialkyldichlorosilane (DDS, $R_2SiCl_2$) with twit short chains, especially DDMS. DDMS, with shorter chains in aprotic media, rapidly deposits on the chemically oxidized polysilicon surface at room temperature and successfully prevents long cantilevers of 3 mm in length from in-use as well as release stiction. DDMS-modified polysilicon surfaces exhibit satisfactory hydrophobicity, long term stability and thermal stability, which are comparable to those of FDTS. DDMS as an alternative to FDTS and ODTS provides a few valuable advantages; ease in handling and long-term storage in solution, low temperature-dependence and low cost. In addition to the new modifier molecule, the simplified process of direct release right after washing the modified surface with isooctane was proposed to cut the processing time.