• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Journal of the Korean Society of Clothing and Textiles
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• v.43 no.2
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• pp.204-214
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• 2019

A CAD program has recently been introduced that can be directly developed into a three-dimensional human body shape and made into a pattern. It is possible to fabricate a bra that reflects the volume and surface area of the breast; however, it still needs to be verified. This study investigates the average size and shape of 20 big-breasted women and designs a brassiere pattern for women with large breasts using a 3D Flattening function of OptiTex PDS v15.6. In addition, the study verifies the reliability of the proposed method compared to a conventional brassiere pattern. The study results are as follows. First, the three dimensional measurement values were smaller than the direct measurement dimensions when the three dimension measurement dimensions of the subjects were compared with the direct measurement dimensions, the replica measurement dimensions and the three dimensional measurement dimensions. Second, the 3D flattening pattern reflects the actual shape, length, and area of the actual breast when comparing a brassiere pattern using a 3D shape and pattern reflecting the direct measurement.

• Nuclear Engineering and Technology
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• v.55 no.10
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• pp.3709-3715
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• 2023

It is an important work to measure the dimensions of underwater spent fuel assemblies in the nuclear power industry during the overhaul, to judging whether the spent fuel assemblies can continue to be used. In this paper, a three dimensional reconstruction method for underwater spent fuel assemblies of nuclear reactor based on linear structured light is proposed, and the topography and size measurement was carried out based on the reconstructed 3D model. Multiple linear structured light sensors are used to obtain contour size data, and the shape data of the whole spent fuel assembly can be collected by one-dimensional scanning motion. In this paper, we also presented a corrected model to correct the measurement error introduced by lead-glass and water is corrected. Then, we set up an underwater measurement system for spent fuel assembly based on this method. Finally, an underwater measurement experiment is carried out to verify the 3D reconstruction ability and measurement ability of the system, and the measurement error is less than ±0.05 mm.

• Fibers and Polymers
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• v.7 no.1
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• pp.57-61
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• 2006

A study has been made on the quantification and evaluation of fabric pilling using two-dimensional and three-dimensional hybrid imaging methods. Two-dimensional imaging method was good for some samples while three-dimensional measurement method for others, according to the properties of their base fabric. Various image processing techniques as well as three-dimensional data processing algorithms were applied for the extraction of pills from measured data and a series of shape parameters have been defined for the objective evaluation of fabric pilling. An evaluation criterion that is compatible with the conventional evaluation method has been proposed by applying the new evaluation method to the current photographic standards.

• Journal of the Korean Society of Clothing and Textiles
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• v.29 no.11
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• pp.1399-1409
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• 2005

The purpose of this study was to analyze the shape of gathered skirts using a three-dimensional measurement system. And in this experiment, I try to accumulate three-dimensional data of wearing model and to figure out analyzing method made by shape of clothes. The experimental design consists of two factorial designs. I set up three different kinds of fabrics, ratio of gathers. Therefore nine samples were made. The instrument and tools for three-dimensional measurement was whole body 3D scanner. Analysis program used in experiment is RapidForm 2004 PP1 and Pattern Design 2000. Data analysis utilizes SPSS WIN 10.0 Package. T-test to effect an inspection of evidence, there was difference about measurement times. One-way ANOVA to analysis effect of gather made by gathering conditions. The following results were obtained; 1. As a result of inspecting an error several times using a three-dimension measurement system, convinced data was obtained. 2. At front, distribution of gap amount was larger than back. And as ratio of gathers increased, distribution of gap amount showed regularly. 3. After analyzing horizontal sectional figure of skirts, as a height of skirt changed from waist to the bottom of skirts, the results showed as follows. While section width, section thickness, node width, node depth increased, node count decreased. 4. With the horizontal section levels of gather skirt, the silhouette on middle hip section was similar with the silhouette of body line. And as ratio of gathers around hip section increased, nodes showed regularly. At the bottom of skirts showed different nodes by different gathering condition.

• Journal of Institute of Control, Robotics and Systems
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• v.9 no.5
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• pp.368-373
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• 2003

This paper presents a cost-effective 3D foot scanner system that provides the 3-dimensional point cloud foot data to design the custom footwear. To measure the 3-dimensional point cloud data of the foot, a CCD camera, a Non-Gaussian laser line projector and optical triangulation method are employed. Furthermore, the integrated system employs a measurement base, a frame grabber, a CCD moving cart, a stepping motor and a computer. The measurement result is saved as 3D dxf format and it could be converted to 2D essential data fer a shoe design. The experimental results demonstrate that the proposed system have the decent resolution of 1mm which is enough for last and shoe design.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.396-399
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• 1995

In this study, Acquisition system is proposed to acquire 3 dimensional data of the free surface model using direct pulse control to machining center. Todo this, I/F to connect between manual operating handle and computer is made, and 3 dimensional shape measuring algorithm using Z-map is applied. The 3 dimensional shape data of the free surface model measured by laser displacement sensor and electric touch probe are achieved directly. Performance of the proposed system is evaluated through measurement of various shape model.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.284-287
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• 2000

We analyzed the 3-dimensional discharge characteristic in plasma display panel(PDP) cell using the 3-dimensional emission distribution of 828nm light measured by scanned point detecting method(SPDM). The emitted light distributions on the ITO electrode show the stronger light intensity near to the electrode gap than outside. Also, 828nm light is widely detected outside of the bus electrode. We consider that measurement using new SPDM is effective to analyze the discharge physics and propose the new panel structures.

• Applied Microscopy
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• v.42 no.3
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• pp.158-163
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• 2012

Detailed comparison of low-voltage scanning electron microscopy and electron holography techniques for two-dimensional (2D) dopant profiling was carried out with using the same multilayered p-n junction specimen. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various microscopic techniques.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.178-182
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• 2007

This study represents the efficient depth measurement for 3-dimensional microsystems using the disparity histogram from stereo images. Implementation of user-friendly Windows program written in C++ involves the various methods for the stereo-image processing in which the minimization of matching-pixel error upon the unique point for stereo images was carried out as a pre-processing method. Even though MPC among various methods was adopted in the present measurement, the resulting measurements seem to require optimizations of the windows sizes and corrections of post-manipulation for stereo images. The present work using Windows program is promising to measure the 3-dimensional depth of micro-system efficiently in implementing the 3-dimensional structure of micro-systems.