• Bulletin of the Korean Chemical Society
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• v.32 no.6
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• pp.2039-2044
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• 2011

A semi-continuous and automated method for quantifying atmospheric ammonia at the parts per billion level has been developed. The instrument consists of a high efficiency diffusion scrubber, an electrolytic on-line anion exchange device, and a conductivity detector. Water soluble gases in sampled air diffuse through the porous membrane and are absorbed in an absorbing solution. Interferences are eliminated by using an anion exchange devises. The electrical conductivity of the solution is measured without chromatographic separation. The collection efficiency was over 99%. Over the 0-200 ppbv concentration range, the calibration was linear with $r^2$ = 0.99. The lower limit of detection was 0.09 ppbv. A parallel analysis of Seoul air over several days using this method and a diffusion scrubber coupled to an ion chromatography system showed acceptable agreement, $r^2$ = 0.940 (n = 686). This method can be applied for ambient air monitoring of ammonia.

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.4
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• pp.307-313
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• 1995

An automatic method is developed for the determination of SOx in atmosphere. The method involves SOx sampling in diffusion scrubber followed by ion chromatographic analysis. Filtered air is withdrawn at 1.8.ell./min through a diffusion scrubber of which inner tube is made of PTFE(Gore-tex) membrane tubing. 1mM $H_{2}$ $O_{2}$ is used as absorbing solution so that SOx is oxidized to S $O_{4}$$^{2-}$. The scrubbered solution is automatically injected into ion chromatograhpy eith conductivity detection for sulphate determination. Replacement of commonly used polyproplene membrane with PTFE gives several merits such as easy preparation of diffusion scrubber, better collection efficiency. No measurable memory effect is experienced, and this isin contrast to previous work for ammonia. Detection limit of this method defined by three times standard deviation is 0.56ppbv. The precision is 0.4% RSD at SOx concentration of 7.3ppbv Results for Seoulatmosphere ate presented.

• Journal of Korean Society for Atmospheric Environment
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• v.12 no.5
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• pp.587-591
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• 1996

An intercomparison experiment was implemented to assess the uncertainties and precisions om atmospheric SO$_{2}$ measurement techiques including a pulsed fluorescence (P-F), a diffusion-scrubber /ion chromatography (D-I), and a mist-chamber/ion chromatography (M-I). Each of those three techniques was investigated by researchers at Seoul National University, Yonsei University, and Hankuk University of Foreign Studies, respectively. The concentrations of atmospheric SO$_{2}$ were determined concurrently using three independent measurement techniques at the Seoul National University campus, Korea during Nov.22 to Dec.2, 1995. While the results from the P-F and D-I techinques showed the very close agreements (within +-5%) throughout the experiment period, M-I technique showed systematically smaller values (up to 30%) than the other two techniques. Although sources of larger discrepancy between different techniques were mot identified, the lower SO$_{2}$ values of the M-I method may be related to the errors associated with sample collection effciency, mass flow rate measurements, and standardization of ion chromatography.

• Bulletin of the Korean Chemical Society
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• v.29 no.8
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• pp.1525-1532
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• 2008

An instrument was developed for the simultaneous determination of gas- and aerosol-phase nitrous acid (HONO). Gaseous HONO (HONO(g)) was sampled by a diffusion scrubber and particulate nitrite ($NO_2\;^-$(p)) was collected by a particle growth chamber. The collected samples were analyzed in time-sharing manner, based on the peroxynitrite-induced luminol chemiluminescence. The automated system was found to be sensitive with 13 pptv of detection limit, fast with 4 min. of sampling frequency, and simple and affordable to construct and operate. The system was optimized by adjusting the experimental parameters. The system was applied to the field measurement of gas- and particle-phase HONO during the springtime of 2004 in Gwangju, South Korea. HONO(g) concentrations varied diurnally from 200 pptv around 3 P.M. to 800 pptv at 5 A.M. The variation of $NO_2\;^-$(p) was not significant with the maximum of 240 pptv at 11 P.M. and the minimum of 170 pptv at 4 P.M., not displaying distinct characteristics.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2000.04a
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• pp.213-214
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• 2000

입자상 물질을 제거하기 위한 수단으로는 싸이클론, 필터, 전기집진기, 세정탑 등이 있다. 이중에 세정탑은 설치 및 운전이 편리한 반면, 미세 입자 제거 효율이 낮아 산업체에서 제한적으로 사용되고 있다. 이러한 결점, 즉 미세 입자의 제거 효율을 높이기 위해 다양한 형태의 세정탑이 연구되었으나(Laitinen et al., 1997; Fan et al., 1988), 대부분 실험적인 연구로서 세정탑에서 입자의 제거 기작이나 크기 분포 특성을 설명하지는 못한다. (중략)

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2000.11a
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• pp.324-325
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• 2000

대기 오염 성분에 대한 연구 뿐 만 아니라 반도체 가공 현장의 환경평가를 위한 미량 기체의 효과적인 포집 및 정량 방법이 요구되고 있다(Lue, S. J., 1999). 이들 오염원은 대부분 pub 이하의 농도로 존재하며 순간적으로 변화하므로 분석을 위해서는 연속적으로 여러 원소를 감시할 수 있는 장비가 효과적이다. 이러한 관점에서 스크러버 형태의 확산 포집기와 이온 크로마토그래피를 이용한 대기중 미량 기체의 연속 정량법이 가장 효과적이다. (중략)

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.273-273
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• 2002

대기 중 기체상 알데히드와 케톤류 등의 자동분석을 개발하고 이를 실제 대기 분석에 응용하였다. 본 분석장치는 분석 기체를 흡수 농축하는 확산 스크러버와 홉수액을 분석하는 고성능 액체크로마토 그래피로 구성되어 있다. 분석기체는 스크러버 속에서 기체와 반대방향으로 흐르는 DNPH 흡수액에 흡수되어 하이드라존을 형성하고 HPLC에서 분리 검출된다. 표준편차 3배로 정의한 본 방법의 검출한계는 수ppt로 매우 낮아 환경대기의 분석이 가능하다. (중략)

• Journal of the Korean Institute of Gas
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• v.28 no.2
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• pp.76-83
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• 2024

In the semiconductor manufacturing process, the Diffusion process generates various reactive by-products. These by-products are deposited inside the pipes of post-processing and exhaust treatment systems, posing a potential risk of substantial dust explosions. In this study, three methods material verification, selection of analysis samples, and risk analysis were employed to address the substances produced during the Diffusion process. Among the materials handled in the Diffusion process, ZrO₂, TEOD, and E-DEOS were identified as raw material capable of generating by-product dust. Test for Minimum Ignition Energy and dust explosion were conducted on the by-products collected from each processing facility. The results indicated that, in the case of MIE, none of the by-products ignited. However, the dust explosion test revealed that ZrO₂ exhibited a maximum pressure of 7.6 bar and K_st value of 73.3 bar·m/s, its explosive hazard. Consequently, to mitigate such risks in semiconductor processes, it is excessive buildup.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.2
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• pp.191-202
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• 2007

We developed an in-situ analyzer to understand the HONO levels in indoor environments. The in-situ measurement system utilizes a diffusion scrubber and luminol chemiluminescence to measure the HONO concentration with time resolution of 4-minute. Concentrations of NO, $NO_{2}$, and HONO were determined at an indoor air of an apartment for 9 days using the developed in-situ analyzer. Indoor HONO concentrations were highly elevated when a gas range was operated. Enhancements of the indoor NO, $NO_{2}$, and HONO concentrations during combustion indicate that the observed indoor HONO was formed by direct emission. In addition to the direct emission, the indoor HONO was partially generated from heterogeneous reactions of $NO_{2}$ on indoor surfaces, which was supported by strong relationships between peak NO, $NO_{2}$, and HONO concentrations, high HONO/$NO_{2}$ ratio and a weak correlation between NO and HONO concentrations. Additionally, three combustion experiments during the whole measurement period were performed to investigate the effects of unvented and vented gas burning on the HONO, NO, and $NO_{2}$ concentrations and their decay. The decay rate of the HONO concentration was significantly less than the NO and $NO_{2}$ decay rates for all the experiments, indicating that the lifetimes of trace nitrogen species in indoor environment varied in the order approximately HONO>$NO_{2}$>NO.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.5
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• pp.356-362
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• 2013

An attempt has been made to optimize elongated rotating arc plasma $NH_3$ scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce $NH_3$ as byproduct and efficient dry process for the decomposition of $NH_3$ is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the $NH_3$ decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of $NH_3$ decomposition.