Characteristics of Oxynitride MOS Capacitor Prepared in $N_2O$ Atmosphere of Furnace
(Furnace의 $N_2O$ 분위기에서 성장시킨 Oxynitride MOS 캐패시터 특성)
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- Journal of the Korean Ceramic Society
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- v.32 no.11
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- pp.1241-1245
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- 1995