• 제목/요약/키워드: Diffusion Device

검색결과 336건 처리시간 0.17초

Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic

  • Kim, Jong-Chae;Kim, Yeong-Cheol;Choy, Jun-Ho
    • 한국세라믹학회지
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    • 제38권9호
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    • pp.782-786
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    • 2001
  • Cobalt silicide has been employed to Embedded DRAM (Dynamic Random Access Memory) and Logic (EDL) as contact material to improve its speed. We have investigated the influences of Ti and TiN capping layers on cobalt-silicided Complementary Metal-Oxide-Semiconductor (CMOS) device characteristics. TiN capping layer is shown to be superior to Ti capping layer with respect to high thermal stability and the current driving capability of pMOSFETs. Secondary Ion Mass Spectrometry (SIMS) showed that the Ti capping layer could not prevent the out-diffusion of boron dopants. The resulting operating current of MOS devices with Ti capping layer was degraded by more than 10%, compared with those with TiN.

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Effect of Wavy Flow of Vertical Falling Film on the Absorption Performance

  • Kim, Jung-Kuk;Cho, Keum-Nam
    • International Journal of Air-Conditioning and Refrigeration
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    • 제13권3호
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    • pp.158-166
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    • 2005
  • The present study investigated experimentally and numerically the enhancement of absorption performance due to the waviness of falling film in the vertical absorber tube. The momentum, energy and mass diffusion equations were utilized to find out temperature and concentration profiles at both the interfaces of liquid solution and refrigerant vapor and the wall. Flow visualization was performed to find out the wetting characteristics of the falling film. The maximum heat transfer coefficient was obtained for the wavy flow using spring as an insert device through both numerical and experimental studies. Based on the numerical and experimental results, the maximum absorption rate was found for the wavy-flow using spring as the insert device. The differences between experimental and analytical results ranged from $5.0\;to\;25\%\;when\;Re_j>100$.

고신뢰성 페로브스카이트 태양전지용 무기물 기반 전하전달층 (Inorganic charge transport materials for high reliable perovskite solar cells)

  • 박소정;지수근;김진영
    • 세라미스트
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    • 제23권2호
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    • pp.145-165
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    • 2020
  • Halide perovskites are promising photovoltaic materials due to their excellent optoelectronic properties like high absorption coefficient, low exciton binding energy and long diffusion length, and single-junction solar cells consisting of them have shown a high certified efficiency of 25.2%. Despite of high efficiency, perovskite photovoltaics show poor stability under actual operational condition, which is the mostly critical obstacle for commercialization. Given that the stability of the perovskite devices is significantly affected by charge-transporting layers, the use of inorganic charge-transporting layers with better intrinsic stability than the organic counterparts must be beneficial to the enhanced device reliability. In this review article, we summarized a number of studies on the inorganic charge-transporting layers of the perovskite solar cells, especially focusing on their effects on the enhanced device reliability.

다공성 폴리우레탄으로 피막된 Reservoir형 약물 조절 방출 시스템 (Controlled Release of Drugs from Reservoir Type Devices Coated with Porous Polyurethane Membranes)

  • 김길수;이승진
    • Journal of Pharmaceutical Investigation
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    • 제23권4호
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    • pp.207-211
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    • 1993
  • Reservoir type devices were designed for long-term implantable drug delivery system. The reservoir type device was prepared with the polymethacrylic acid gel coated with polyurethane membrane. Release controlling agent (RCA) were employed to control drug release from devices via generation of micropores in the membranes. The polyurethane membrane functioned as a rate controlling barrier. The drug release pattern of hydrogel demonstrated zero order kinetics. The release rate of drugs could be regulated by varying hydrophobicity/hydrophilicity and content of the RCA, as well as the thickness of the polyurethane membrane. The release of drugs from this system was governed by pore mechanism via simple diffusion and osmotic pressure.

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부분 도핑을 이용한 청색 인광 OLEDs의 전기 및 광학적 특성 (Electrical and Optical Properties of Partially Doped Blue Phosphorescent OLEOs)

  • 서유석;문대규
    • 한국전기전자재료학회논문지
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    • 제22권6호
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    • pp.512-515
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    • 2009
  • We have fabricated blue phosphorescent organic light emitting diodes (PHOLEDs) using a 3,5'-N,N'-dicarbazole-benzene (mCP) host and iridium (III) bis[(4,6-difluorophenyl)-pyridinato-N,$C^{2'}$] picolinate (Flrpic) guest materials, The Flrpic was partially doped into the mCP host layer, for investigating recombination zone, current efficiency, and emission characteristics of the blue PHOLEDs. The recombination of electrons and holes takes place inside the mCP layer adjacent to the mCP/hole blocking layer interface. The best current efficiency was obtained in a device with an emission layer structure of mCP (10 nm)/mCP:Flrpic (20 nm, 10%). The high current efficiency in this device was attributed to the confinement of Ffrpic triplet excitons by the undoped mCP layer with high triplet energy, which blocks diffusion of Ffrpic excitons to the adjacent hole transport layer with a lower triplet energy.

낙구식 점도계를 이용한 점탄성 유체의 특성시간에 관한 실험적 연구 (An experimental study on the characteristic times of viscoelastic fluids by falling ball viscometer)

  • 전찬열;유상신
    • 대한기계학회논문집
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    • 제14권1호
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    • pp.241-250
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    • 1990
  • 본 연구에서는 낙구식 점도계를 이용하여 낮은 농도의 용액을 실험할 때 종말 속도측정의 어려움을 해결하기 위하여 레이저와 특수 타이머를 설치하였으며 정확한 특성시간을 결정하기 위하여 실린더 내부의 시험유체를 교란시키지 않고, 떨어뜨린 구 를 회수하는 장치를 제작하였다. 또한 주로 rheogoniometer에 의존하던 영 전단률 점성계수를 측정하기 위하여 속이 빈 알루미늄 구(hollow aluminium ball)의 밀도를 시험 유체와 거의 같은 정도까지 변화시켜가며 종말 속도를 측정하였으며 점탄성 유체 로써 Separan AP-273의 낮은 농도인 300에서 2000wppm까지의 저농도 용액에 대한 특성 시간을 여러모델에 의하여 실험적으로 결정하고 저농도 폴리머 용액에서 퇴화로 인한 점탄성유체의 특성 변화를 분석하였다.

트렌치 게이트 IGBT 에서의 공정 및 설계 파라미터에 따른 항복 전압 특성에 관한 연구 (A Study on the Breakdown Voltage Characteristics with Process and Design Parameters in Trench Gate IGBT)

  • 신호현;이한신;성만영
    • 한국전기전자재료학회논문지
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    • 제20권5호
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    • pp.403-409
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    • 2007
  • In this paper, effects of the trench angle($\theta$) on the breakdown voltage according to the process parameters of p-base region and doping concentrations of n-drift region in a Trench Gate IGBT (TIGBT) device were analyzed by computer simulation. Processes parameters used by variables are diffusion temperature, implant dose of p-base region and doping concentration of n-drift region, and aspects of breakdown voltage change with change of each parameter were examined. As diffusion temperature of the p-base region increases, depth of the p-base region increases and effect of the diffusion temperature on the breakdown voltage is very low in the case of small trench angle($45\;^{\circ}$) but that is increases 134.8 % in the case of high trench angle($90\;^{\circ}$). Moreover, as implant dose of the p-base region increases, doping concentration of the p-base region increases and effect of the implant dose on the breakdown voltage is very low in the case of small trench angle($45\;^{\circ}$) but that is increases 232.1 % in the case of high trench angle($90\;^{\circ}$). These phenomenons is why electric field concentrated in the trench is distributed to the p-base region as the diffusion temperature and implant dose of the p-base increase. However, effect of the doping concentration variation in the n-drift region on the breakdown voltage varies just 9.3 % as trench angle increases from $45\;^{\circ}$ to $90\;^{\circ}$. This is why magnitude of electric field concentrated in the trench changes, but direction of that doesn't change. In this paper, respective reasons were analyzed through the electric field concentration analysis by computer simulation.

Cu 금속 배선에 적용되는 질소와 탄소를 첨가한 W-C-N 확산방지막의 질소불순물 거동 연구 (Additional Impurity Roles of Nitrogen and Carbon for Ternary compound W-C-N Diffusion Barrier for Cu interconnect)

  • 김수인;이창우
    • 한국진공학회지
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    • 제16권5호
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    • pp.348-352
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    • 2007
  • 반도체 기술이 초고집적화 되어감에 따라 미세화공정에 의하여 소자의 크기가 급격히 줄어들고 있으며, 공정에서는 선폭이 크게 줄어드는 추세이다. 또한 박막을 다층으로 제조하여 소자의 집적도를 높이는 것이 중요한 이슈가 되고 있다. 이와 같은 수많은 제조 공정을 거치는 동안, Si 기판과 금속 박막사이에는 확산에 의한 많은 문제점들이 발생되고 있기 때문에, 이러한 금속과 Si 사이의 확산을 방지하는 것이 큰 이슈로 부각되어 왔다. 특히 Cu는 낮은 온도에서도 Si과 확산을 일으켜 Si 기판과 접합에서 확산에 의한 소자 failure 등이 문제로 발생하게 되며, 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이를 방지하기 위하여 본 논문에서는 질소와 탄소를 첨가한 3개의 화합물로 구성된 Tungsten-Carbon-Nitrogen (W-C-N) 확산방지막을 사용하였다. 실험은 물리적 기상 증착법(PVD)으로 질소비율을 변화하며 확산방지막을 증착하였고, 이를 여러 가지 온도에서 열처리하여 열적인 안정성에 대한 실험을 실시하였다. 결정구조를 확인하기 위하여 X-ray Diffraction 분석을 통하여 확산방지막의 특성을 연구하였다.

A Study on integrated water management system based on Web maps

  • Choi, Ho Sung;Jung, Jin Young;Park, Koo Rack
    • 한국컴퓨터정보학회논문지
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    • 제21권8호
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    • pp.57-64
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    • 2016
  • Initial prevention activities and rapid propagation conditions is the most important to prevent diffusion of water pollution. If water pollutants flow into streams river or main stresm located in environmental conservation area or water intake facilities, we must predict immediately arrival time and the diffusion concentration to the proactive. National Institute of Environmental Research developed water pollution incident response prediction system linking dam and movable weir. the system is mathematical model which is updated daily. Therefore it can quickly predict the arrival time and the diffusion concentration when there are accident of oil spills and hazardous chemicals. Also we equipped with mathematical model and toxicity model of EFDC(Environmental Fluid Dynamics Code) to calculate the arrival time and the diffusion concentration. However these systems offer the services of an offline manner than real-time control services. we have ensured the reliability of data collection and have developed a real-time water quality measurement data transmission device by using the data linkage utilizing a mode bus communication and a commercial SCADA system, in particular, we implemented to be able to do real-time water quality prediction through information infrastructure of the water quality integrated management business created by utilizing the construction of the real-time prediction system that utilizes the data collected, the Open map, the visual representation using charts API and development of integrated management system development based on web maps.

확산길이에 따른 수동식 유기용제 시료채취기의 시료채취성능에 관한 연구 (Sampling Efficiency of Organic Vapor Passive Samplers by Diffusive Length)

  • 이병규;장재길;정지연
    • 한국환경보건학회지
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    • 제35권6호
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    • pp.500-509
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    • 2009
  • Passive samplers have been used for many years for the sampling of organic vapors in work environment atmospheres. Currently, all passive samplers used in domestic occupational monitoring are foreign products. This study was performed to evaluate variable parameters for the development of passive organic samplers, which include the geometry of the device and diffusive length for the sampler design. Four prototype diffusive lengths; A-1(4.5 mm), A-2(7.0 mm), A-3(9.5 mm), A-4(12.0 mm) were tested for adsorption performances to a chemical mixture (benzene, toluene, trichloroethylene, and n-hexane) according to the US-OSHA's evaluation protocol. A dynamic vapor exposure chamber developed and verified by related research was used for this study. The results of study are as follows. The results in terms of sampling rate and recommended sampling time test indicate that the most suitable model was A-3 (9.5 mm diffusive lengths on both sides) for passive sampler design in time weighted average (TWA) assessment. Sampling rates of this A-3 model were 45.8, 41.5, 41.4, and 40.3 ml/min for benzene, toluene, trichloroethylene, and n-hexane, respectively. The A-3 models were tested on reverse diffusion and conditions of low humidity air (35% RH) and low concentrations (0.2 times of TLV). These conditions had no affect on the diffusion capacity of samplers. In conclusion, the most suitable design parameters of passive sampler are: 1) Geometry and structure - 25 mm diameter and 490 $mm^2$ cross sectional area of diffusion face with cylindrical form of two-sided opposite diffusion direction; 2) Diffusive length - 9.5 mm in both faces; 3) Amount of adsorbent - 300 mg of coconut shell charcoal; 4) Wind screen - using nylon net filters (11 ${\mu}m$ pore size).